Digital and Proportional Miniature Solenoid Valves

Digital and Proportional Miniature Solenoid Valves Pneutronics Division 1

X-VALVE X-Valve 8mm Digital Solenoid Valve X-Valve is a two-position, three-way universal digital valve, just 8mm in width. The X-Valve s unitized body incorporates its functional features in a single glass-reinforced, PBT (Polybutylene Terephthalate) molded body. Features Provides compact size; only 8mm in width. Meets a range of pressure requirements including 6, 30, 50 & 100 psi. Offers optional capabilities to meet a 0.016 sccm leakage specification (0.2 sccm for 50 & 100 psi) for over 25 million cycles. Ensures high reliability with its single piece body design. Allows for direct tubing connection or a radial seal for manifold assemblies through its universal barb design. Physical Properties Valve Type: 3-Way, 2 Position NO, NC & Distributor (50 psi, NC or NO only) (100 psi, NC only) Media: Non-Reactive Gases and Select Liquids Operating Environment: 0 to 50 C 15 to 50 C for 100 psi Storage Temperature: -40 to 70 C Length: 24 mm (.92 in) Width: 7.9 mm (.31 in) Height: 9 mm (.35 in) Spacing: 8 mm (centerline) Porting: Universal barbs for 1/16" I.D. tubing (1/32" Wall Max.); Manifold mount with X-seal Weight: 0.16 oz (4.5 grams) Internal Volume: 0.074 cm 3 (.0045 in 3 ) Electrical Power: 0.5 Watt (low pressure model) 1.0 Watt (high pressure model) Voltage: 3, 5, 12, 24 VDC Not all voltage options are available in all models. See Ordering Info. Electrical Connections: PC Pins, 4 mm centers (all models) Wetted Materials PBT (Polybutylene Terephthalate); 430 Series Stainless Steel; 302 Series Stainless Steel (passivated); FKM (Fluoroelastomer); EPDM (Ethylene Propylene Diene Monomer); and Silicone Consult factory for details. Performance Characteristics Leak Rate: <0.016 sccm (6 psi Silicone) <0.16 sccm (6 psi EPDM & FKM) <0.2 sccm (50 & 100 psi only) Response: <20 msec cycling Pressure: 0 to 6 psig 0 to 30 psig 0 to 50 psig 0 to 100 psig Minimum Flow: 4 lpm @ 6 psi 6 lpm @ 30 psi 5 lpm @ 50 psi 9 lpm @ 100 psi Orifice Sizes/Equivalent Cv: 0.020"/0.005 Cv (100 psid) 0.030"/0.007 Cv (50 psid) 0.030"/0.010 Cv (30 psid) 0.045"/ 0.018 Cv (6 psid) X-Valve is a registered trademark of.

X-VALVE Flow CAD Drawing.479 [12.17] Sample Part ID X 1 05 1 F _ 0 Description Series Model Voltage Electrical Elastomer _ Optional Accessories Connection No: Pressure/Orifice/Coil Wattage/Type 03: 3 VDC S: Standard Pins F: FKM S: Screws (2) 1: 6 psi/0.045"/0.5 Watt/Universal 05: 5 VDCc L: Long Pin E: EPDM G: Gasket Options 2: 30 psi/0.030"/1 Watt/Universal (6psi only) (6psi only) B: Screw & Gasket 3: 50 psi/0.030"/1 Watt/NC 12: 12 VDC S: Silicone (6psi only) 0: No Accessories 4: 50 psi/0.030"/1 Watt/NO 5: 100 psi/0.020"/1 Watt/NC 24: 24 VDC Accessory field not printed on valve NOTE: Please consult for other considerations. For more detailed information, visit us on the Web. For more information, call us toll-free at 1-800-525-2857 Rev 1.5

X-SYSTEM X-System Inline Assembly/Diverter Assembly X-System offers molded modular pneumatic manifold technology designed to support the 8 mm X-Valve products. The X-System is a durable thermoelastomer assembly incorporating several innovative design features and provides significant advantages over traditional aluminum materials. It is available in both inline and diverter assembly configurations. Features No screws or seals required for valve mounting. Lightweight and low cost. Ideal for "rapid prototyping" (eliminates the need for machining a manifold). Mixed 2-Way and 3-Way assemblies possible (consult factory). "Mixed" pneumatic logic in diverter assembly; multiple operating pressures include vacuum, hybrid, and partitioned manifold options. Shorter OEM design cycles and faster delivery times. Physical Properties Media: Air & Inert Gases Leakage: 0.016 sccm external Operating Temperature: 0 to 50 C Valve Mounting Centerline: 8 mm (0.31 in) Electrical Connection Centerline: 4 mm (0.16 in) Storage Temperature: -40 to 70 C Pressure: 0 to 30 psig Size (stock profile): 25.4 mm x 13.5 mm (1.0 in x 0.53 in) Service Life (cycles of valve assembly and disassembly): 3 minimum Flow SLPM: Unrestricted X-Valve flow Dimensions Inline Assembly Special Notes See X-Valve (page 2) for valve description. Parker can assemble a manifold to meet your pneumatic specifications. Standard manifold is offered through ten positions; consult factory for application requiring more than ten positions. X-Valve is a registered trademark and X-System is a trademark of. 4

X-SYSTEM Diverter Assembly Sample Part ID 912 _ 000 6 02 _ 1 01 Description Series _ End Caps Number of Valves on Left of Diverter Options Inline Assembly X-System _ Configuration X-Valve Selection 6: No 01-10 1: 2-Way NC (common supply to NC Port1, Port 3 plugged) 01-18 7: Yes Consult factory for 2: 2-Way NC (common supply to common Port 2, Port 3 plugged) Insert the last two digits larger assemblies of the valve 912 p/n in 3: 2-Way NO (common supply to common Port 2, Port 3 plugged) this location 4: 2-Way NO (common supply to NO Port 3, Port 1 plugged) 5: 3-Way NC (common supply to NC Port 1) (See Doc.#: 912-000001-XXX 6: 3-Way NO (common supply to NO Port 3) Contact factory for 7: Distributor (common supply to common port 2) information) 8: 3-Way NC (common supply to NC Port 1, common exhaust)* * Not available with end caps Sample Part ID 912 _ 6 6 01 01 _ 6 01 Description Series _ End Caps Number of Valves on Left of Diverter X-System Total number of valves not to exceed 10 X-Valve Selection Diverter Module Selection _ Number of Valves on Right of Diverter 6: No 0-9 01-18 01: Diverter Block 1 0-9 01-18 7: Yes Insert the last two digits 02: Diverter Block 2 Total number of valves Options of the valve 912 p/n in not to exceed 10 03: Diverter Block 3 (Consult factory for this location (Consult factory for additional requirements) 04: Diverter Block 4 05: Diverter Block 5 additional requirements) Diverter Assembly (Contact factory for information) 06: Diverter Block 6 07: Diverter Block 7 08: Diverter Block 8 X-Valve Selection Insert the last two digits of the valve 912 p/n in this location (See Doc.#: 912-000001-XXX Contact factory for information) NOTE: Please consult for other considerations. For more detailed information, visit us on the Web, or call and refer to Drawing #s: 890-003100-001 (inline); 890-003112-001 (diverter) and Spec. #790-002176-001. For more information, call us toll-free at 1-800-525-2857 5

TEN-X Ten-X 10mm Solenoid Valve Ten-X is a 10mm solenoid valve with a two-position, two-way Normally Open (NO) design. Ten-X delivers repeatable "energized" and "de-energized" response times, low power, and flow capability to meet the specific performance requirements of Non-Invasive Blood Pressure (NIBP) devices. Features Delivers fast and repeatable "open" and "drop-out" response times (<5 msec includes first shot "open" times) critical to step deflation algorithms over the entire environmental temperature range and continuous duty operation of the valve. Highest flow of any 10mm solenoid valve with a Cv of.032 and flow of 8 slpm @ 6 psig. Meets the demands for bleed and dump processes, ensuring comfortable and safe operation. Single piece body design reduces total size and part count. Fewer parts increase reliability and reduce both the number of potential leak points and the overall "stack-up" tolerances. Universal barb design allows for maximum installation flexibility using either a direct tubing connection or a radial seal for manifold assemblies. Physical Properties Valve Type: 2-Way, 2 Position, NO (NIBP) Media: Non-Reactive Gases Operating Environment: 0 to 50 C Operating Coil Temp: Max 85 C Storage Temperature: -40 to 70 C Length: 32 mm (1.25 in) Width: 9.9 mm (0.390 in) Height: 12 mm (0.475 in) Spacing: 10 mm (centerline) Porting: Barb fitting for 0.078" I.D. Polyurethane tubing Manifold mount with Ten-X seal Weight: 0.39 oz (11 grams) Internal Volume: 0.131 cm 3 (0.0080 in 3 ) Electrical Power: 0.5 Watt (2-Way, NO Model) Voltage: 5, 12, 24 VDC Electrical Connections: PC Pins, 6 mm centers (all models) Wetted Materials LCP (Liquid Crystal Polymer); 430 Series Stainless Steel; 302 Series Stainless Steel/ Nickel-Plated Silicone Elastomer Performance Characteristics Leak Rate: <0.016 sccm (bubble tight) Response: <5 msec on time Pressure: 0 to 6 psig Minimum Flow: 8 lpm @ 6 psi Orifice Sizes/Equivalent Cv: 0.060"/0.032 Cv Ten-X is a registered trademark of. 6

TEN-X Flow Dimensions Pressure Decay Sample Part ID 914 _ 1 1 1 05 1 _ 000 Description Series _ Elastomer Type Model Voltage Electrical Connection 1: Silicon 1: 2-Way NO No: Pressure/Orifice/Coil Wattage 05: 5 VDC 1: Short Pin (NIBP Only) 1: 0-6 psi/0.060"/0.5 Watt 12: 12 VDC 2: Long Pin Options 24: 24 VDC _ Optional Accessories 000: No Accessories Accessories may be ordered separately at no extra charge: Screw:191-000112-010 Gasket: 195-000211-001 NOTE: Please consult for other considerations. For more detailed information, visit us on the Web, or call and refer to Performance Spec. #790-002213-001 and Drawing #890-003150-001. For more information, call us toll-free at 1-800-525-2857 7

SERIES 11, 25, & 26 Series 11, 25, 26 PC Mount Digital Solenoid Valve Series 11, 25, and 26 PC Mountable Solenoid Valves convert a digital electrical signal into a digital pneumatic output. The patented miniature design is preferred by medical and analytical OEMs worldwide and allows valves to be soldered directly onto a printed circuit board, providing both electrical termination and mechanical attachment. These valves power small cylinders directly or can be used to pilot larger valves that require high flow. Features Offer a discrete valve design with a 200 million life cycle rating. Available in manifold mounting. Provide a range of electrical coil options, including PC mountable, spade lugs, or wire leads. Powerful enough for a range of uses that require high flow. Physical Properties Valve Type: 2-Way or 3-Way, 2 Position (NO, NC, & Distributor) Media: Gases and select liquids Operating Environment: 0 to 70 C Storage Temperature: -40 to 70 C Length: 1.73 in (43.94 mm) Width: 0.625 in (15.88 mm) Height: 0.67 in (17.02 mm) Porting: 10-32 tapped ports, 1/16, 5/64, or 1/8 Stem Barbs Weight: 2.1 oz. (60 grams) Internal Volume: 0.026 in 3 (without fittings) Filtration: 40 micron (recommended) Lubrication: None required Electrical Power: 0.5, 1.0, or 2.0 Watts Voltage: 5, 12, 24 VDC + 10% Wetted Materials Body: 360 HO2 Brass; 302 Series Stainless Steel (passivated) Stem Base: 385 HO2 Brass; 303 Series Stainless Steel (passivated) All Others: FKM; EPDM; 430 FR Series Stainless Steel (passivated); 302 Series Stainless Steel Flow Performance Characteristics Leak Rate: <0.016 sccm (bubble tight) Response: <30 msec cycling (2 Watts) Pressure: 0 to 100 psig (0.030" orifice) 0 to 70 psig (0.050" orifice) Vacuum: 0-27 in Hg Orifice Sizes/Equivalent Cv: 0.030"/0.017 Cv 0.050"/0.035 Cv 8

SERIES 11, 25, & 26 Dimensions Sample Part ID 11 10 3 BV 12 P 7 7 Description Series Model Number Type Material Voltage Coil Type Pneumatic Connection Body Pneumatic Connection Stem 11 No: Pressure/Orifice/Coil Wattage 1: 2-Way NC XX: Body/Plunger & Seal 5: 5 VDC P: PC Mount, 4 PC Pins 0: No Barbs 0: Type 1/None 10: 0-100 psi/0.030"/2 Watts 2: 2-Way NO BV: Brass/FKM 12: 12 VDC 6: 1/16" Barbs Options 12: 0-70 psi/0.050"/2 Watts 3: 3-Way NC or SV: Stainless Steel/FKM 24: 24 VDC 7: 5/64" Barbs 13: 0-50 psi/0.030"/1 Watt Distributor BE: Brass/EPDM 8: 1/8" Barbs 15: 0-25 psi/0.050"/1 Watt 16: 0-25 psi/0.030"/0.5 Watt 18: 0-10 psi/0.050"/0.5 Watt 4: 3-Way NO Selection of stainless steel body may extend lead time F: Wire Leads, 18" No Term 6: 1/16" Barbs* 7: 5/64" Barbs 8: 1/8" Barbs * 1/16" Barbs not available for 0.050" orifice valves NOTE: Series 25 and Series 26 valves are no longer standard product. Consult factory for qualified opportunities. Please consult for other considerations. For more detailed information, visit us on the Web, or call and refer to Performance Spec. #790-002075-001 and Drawing #890-003016-001. For more information, call us toll-free at 1-800-525-2857 9

V2 V 2 Valve Value Squared Digital Solenoid Valve The V 2 valve offers a unique plastic body, which provides an economical solution without compromising on quality or reliability. Parker offers the versatile V 2 in either a manifold mount design or with molded barbed fittings. This PC and manifold mountable solenoid valve converts a digital electrical signal into a digital pneumatic output. Features Cost-effective, unique Polybutylene Terephthalate (PBT) body. Manifold mount design or molded barbed fittings to fit a range of needs. Physical Properties Valve Type: 2-Way or 3-Way, 2 Position (NO, NC, & Distributor) Media: Non-Corrosive Gases Operating Environment: 0 to 70 C Storage Temperature: -40 to 70 C Length: 1.73 in (43.94 mm) Width: 0.625 in (15.88 mm) Height: 0.67 in (17.02 mm) Porting: Barb fittings for 1/8" I.D. tubing or manifold mount Weight: 1.2 oz (34.29 grams) Internal Volume: 0.016 cm 3 (nominal) Filtration: 40 micron (recommended) Lubrication: None required Electrical Power: 0.5, 1.0, or 2.0 Watts Voltage: 5, 12, 24 VDC + 10% Wetted Materials Body: PBT Stem Base: 360 HO2 Brass All Others: FKM; 430 FR Series Stainless Steel (passivated); 302 Series Stainless Steel; Loctite 290 Flow Performance Characteristics Leak Rate: <0.2 sccm Response: <30 msec cycling (2 Watts) Pressure: 0 to 100 psig (0.030" orifice) 0 to 30 psig (0.050" orifice) Vacuum: 0-27 in Hg Orifice Sizes/Equivalent Cv: 0.030"/0.017 Cv 0.050"/0.035 Cv Loctite is a registered trademark of Henkel Consumer Adhesives, Inc. 10

V2 Dimensions Sample Part ID V2 14 3 PV 12 P 8 8 Description Series Model Number Type Material Voltage Coil Type Body Styles Topseat Barbs No: Pressure/Orifice/Coil Wattage 1: 2-Way NC XX: Body/Plunger & Seal 5: 5 VDC P: PC Mount, 4 PC Pins 0: Manifold 0: None (Type 1) 10: 0-100 psi/0.030"/2 Watts 3: 3-Way NC or PV: Plastic/FKM 12: 12 VDC F: Wire Leads, 18" 8: 1/8" Barbs 8: 1/8" Barbs Options 13: 0-50 psi/0.030"/1 Watt Distributor 24: 24 VDC 14: 0-30 psi/0.050"/2 Watts 4: 3-Way NO 17: 0-15 psi/0.050"/1 Watt 20: 0-6 psi/0.050"/0.5 Watt NOTE: Please consult for other considerations. For more detailed information, visit us on the Web, or call and refer to Performance Spec. #790-002156-001 and Drawing #890-003080-001. For more information, call us toll-free at 1-800-525-2857 11

SRS SRS Valve Manifold Mountable Plastic Solenoid Valve The 10mm SRS Series Plastic Solenoid Valve converts a digital electrical signal into a digital pneumatic output. The SRS Valve is constructed of engineering thermoplastics and non-corrosive metals to exceed the specifications demanded by critical applications in the life sciences. Features Design incorporates thermoplastics and non-corrosive metals. Offers high-density manifold mounting with convenient manifold to PC board interface. Weighs only 0.23 ounces; perfect where low weight is critical to overall system. Physical Properties Valve Type: 3-Way, 2 Position (NO, NC, & Distributor) Media: Gases and select liquids Operating Environment: 0 to 55 C Storage Temperature: -40 to 70 C Length: 1.5 in (38.1 mm) Width: 0.394 in (10 mm) Height: 0.61 in (15.49 mm) Porting: Manifold mount; Gasket and screws supplied Weight:.23 oz (6.57 grams) Internal Volume: 0.0267 cm 3 Filtration: 40 micron (recommended) Lubrication: None required Electrical Power: 0.5, 1.0, or 2.0 Watts Voltage: 5, 12, 24 VDC + 10% Wetted Materials Crystalline Plastics: PBT; LNP Thermocomp Elastomers: FKM Non-Corrosive Metals: 302 Series Stainless Steel; 430 FR Series Stainless Steel; CMI-B Core Iron; Electroless Nickel Plating Flow Performance Characteristics Leak Rate: <0.016 sccm (bubble tight) Response: <30 msec cycling (2 Watts) Pressure: 0 to 85 psig (0.020" orifice) 0 to 50 psig (0.030" orifice) 0 to 20 psig (0.045" orifice) Vacuum: 0-27 in Hg Orifice Sizes/Equivalent Cv: 0.020"/0.0075 Cv 0.030"/0.017 Cv 0.045"/0.027 Cv Thermocomp is a registered trademark of General Electric Company. 12

SRS Dimensions Sample Part ID SRS 10 2 P V 12 M Description Series Model Number Type Material Seal Material Voltage Electrical Connection No: Pressure/Orifice/Coil Wattage 1: 3-Way NC P: Engineering Plastic V: FKM 5: 5 VDC F: 0.025" Square Pins, Front 10: 0-35 psi/0.020"/0.5 Watt 2: 3-Way NO 12: 12 VDC M: 0.025" Square Pins, Options 11: 0-85 psi/0.020"/1 Watt 3: Distributor 24: 24 VDC Manifold Interface 13: 0-20 psi/0.030"/0.5 Watt 14: 0-50 psi/0.030"/1 Watt 16: 0-10 psi/0.045"/0.5 Watt 17: 0-20 psi/0.045"1 Watt L: Insulated Wire Leads, 18", Front NOTE: Please consult for other considerations. For more detailed information, visit us on the Web, or call and refer to Performance Spec. #790-002090-001 and Drawing #890-003061-001. For more information, call us toll-free at 1-800-525-2857 13 Rev 1.5

MD PRO MD PRO Non-Thermally Compensated Proportional Valve The MD PRO is a miniature solenoid-operated proportional valve that provides application-specific OEM solutions. Features Offers automated calibration. Provides repeatability across its operating range. Offers a superior combination of value and performance. Rated for 10 million life cycles. Physical Properties Valve Type: 2-Way Normally Closed Media: Air, argon, helium, hydrogen, methane, nitrogen, oxygen, & others Operating Environment: 0 to 60 C Storage Temperature: -40 to 70 C Length: 1.785 in (45.34 mm) Width: 0.625 in (16.51 mm) Height: 0.67 in (17.02 mm) Porting: 1/8 barbs; manifold mount with 43 micron screen Weight: 2.2 oz (62.86 grams) Internal Volume: 0.031 in 3 (.508 sccm) Filtration: 43 micron Lubrication: None required Oxygen Clean: Available Electrical Power: 2.0 Watts maximum Voltage: See Coil Selection under Flow Performance Characteristics Leak Rate: <0.22 sccm of air (bubble tight) Response: <30 msec cycling Pressure: 0 to 100 psig (See Ordering Info.) Vacuum: 0-27 in Hg Orifice Sizes: (See Ordering Info.) 0.040" (1.02 mm) 0.050" (1.27 mm) 0.065" (1.65 mm) 14

MD PRO Dimensions Sample Part ID MDPRO 4 V A F 8 S Description Series Model Number Elastomer Coil Selection Electrical Interface Pneumatic Interface Cleaning #: Max. Operating Pressure/Orifice Size V: FKM X: Max Voltage/Resistance/Current* F: Wire Leads, 18" 1: Manifold Mount with S: Standard A: 5.5 VDC/11 ohms/0.304 amps P: PC Board Mount Screen* Cleaning Options 4: 75 psid/0.040" B: 8 VDC/23 ohms/0.212 amps 8: 1/8" Barbs 5: 100 psid/0.050" 6: 50 psid/0.065" C: 11.5 VDC/47 ohms/0.152 amps D: 13.5 VDC/68 ohms/0.125 amps E: 20 VDC/136 ohms/0.091 amps F: 29 VDC/274 ohms/0.066 amps * 43 Micron Screen (Port 2) O: Oxygen Service* *Selection of this option affects the valve price; contact factory for details * Max Voltage for continuous full flow, ambient temperature 55 C Coil Resistance for Room Temp Input Current for Full Flow NOTE: Please consult for other considerations. For more detailed information, visit us on the Web, or call and refer to Performance Spec. #790-002206-001 and Drawing #890-003022-001. For more information, call us toll-free at 1-800-525-2857 15

HF PRO HF PRO High Flow Standard Performance Proportional Valve The High Flow MDPro controls the flow of gas proportionally to input current. The valve may be driven with DC current or Pulse Width Modulation. HF Pro achieves optimal system performance when it uses closed loop feedback. Features Capable of 60 lpm flow and pressures up to 50 psig Face seal manifold mount or 5mm barbed body options Proven performance to 35 million life cycles Non-thermally compensated proportional valve Physical Properties Valve Type: 2-Way Normally Closed Media: Air, argon, helium, hydrogen, methane, nitrogen, oxygen, & others Operating Environment: 0 to 50 C Storage Temperature: -40 to 70 C Length: 1.785 in (45.34 mm) Width: 0.625 in (16.51 mm) Height: 0.67 in (17.02 mm) Porting: Manifold Mount; Barbed body [5 mm (0.195 ) ID Tube] Weight: 2.2 oz (62.86 grams) Internal Volume: 0.031 in 3 (.508 sccm) Filtration: 43 micron Lubrication: None required Oxygen Clean Electrical Power: 2.25 Watt nominal at 68 F (20 C) 3 Watt max Voltage: See Coil Selection under Flow Flow Rate (slpm) 60 50 40 30 20 10 10 psi 20 psi 30 psi 40 psi 50 psi HF Pro Typical Flow Performance Characteristics Leak Rate: 0.5 SCCM Max. N2 at 1 and 10 psid* Response: <30 msec cycling Pressure: 0 to 50 psig Vacuum: 0-27 in Hg Effective Orifice Size: 0.070" (1.8mm) * Low differential pressure represents the worst case condition due to the reverse flow (pressure-assist) nature of the valve. Media: Nitrogen Coil: 68 Ohm 0 0.000 0.025 0.050 0.075 0.100 0.125 0.150 0.175 Current (Amps) Pneutronics Division www.parker.com/pneutronics

HF PRO Dimensions Barbed Body Option Manifold Mount Option Sample Part ID HFPRO 7 V A F 8 O Description Series Model Number Elastomer Coil Selection Electrical Interface Pneumatic Interface Cleaning Options #: Max. Operating Pressure/Orifice Size V: FKM X: Max Voltage/Resistance/Current* F: Wire Leads, 18" 1: Manifold Mount O: Oxygen Service 7: 50 psid A: 5.5 VDC/11 ohms/0.304 amps 8: Barbed Body D: 13.5 VDC/68 ohms/0.125 amps F: 29 VDC/274 ohms/0.066 amps * Max Voltage for continuous full flow, ambient temperature 55 C Coil Resistance for Room Temp Input Current for Full Flow NOTE: Please consult Parker Pneutronics for other considerations. For more detailed information, visit us on the Web, or call and refer to Performance Spec. #790-002243-001 and Drawing #890-003191-001 (Manifold) or #890-003192-001 (Barbed). For more information, call us at 1-603-595-1500 Pneutronics Division www.parker.com/pneutronics

VSO VSO Normally Closed Proportional Solenoid Valve The VSO, Voltage Sensitive Orifice, is a miniature solenoid valve that controls the flow of gas in proportion to input current. You can drive the valve with either DC current or pulse width modulation and use closed loop feedback to deliver optimal system performance. Medical and analytical OEMs worldwide choose VSO as their preferred miniature proportional valve. Features Offers operating pressure up to 150 psig and a range of orifice sizes. Satisfies a 0.2 sccm leakage specification of He for 100 million life cycles and offers high repeatability. Provides computer-automated calibrations and full calibration traceability. Uses either DC current or pulse width modulation with closed loop feedback to deliver optimal system performance. Maintains ideal flow through thermal compensation. Physical Properties Valve Type: 2-Way Normally Closed Media: Air, argon, helium, hydrogen, methane, nitrogen, oxygen, & others Operating Environment: 0 to 55 C Storage Temperature: -40 to 70 C Length: 1.785 in (45.34 mm) Width: 0.625 in (16.51 mm) Height: 0.67 in (17.02 mm) Porting: Barbs or 10-32 female; manifold mount with screens Weight: 2.2 oz (62.86 grams) Internal Volume: 0.031 in 3 (.508 sccm) Filtration: Types 1 & 2: 17 micron Types 3, 4, 5, & 6: 40 micron Lubrication: None required Oxygen Clean: Available Electrical Power: 2.0 Watts maximum Voltage: See Coil Selection under Ordering Information Oxygen and analytically clean: Standard Flow Performance Characteristics Leak Rate: <0.2 sccm of helium (bubble tight) Response: <30 msec cycling (2 Watts) Pressure: 0 to 150 psig Vacuum: 0-27 in Hg Orifice Sizes: (See Ordering Info.) 0.010" (0.245 mm) 0.020" (0.510 mm) 0.030" (0.762 mm) 0.050" (1.270 mm) 0.065" (1.651 mm) VSO is a registered trademark of. 16

VSO Dimensions Sample Part ID VSONC 1 S 11 V A F 8 Description Standard Model Number Series Body Series Elastomer Coil Selection Electrical Interface Pneumatic Interface (Series 11 only except with Option 5) Options #: Max. Operating Pressure/Orifice 1: 150 psid/0.010" 2: 150 psid/0.020" 3: 150 psid/0.030" 4: 75 psid/0.040" 5: 100 psid/0.050" 6: 50 psid/0.065" 11: Series 11 25: Series 25 (available in nickel-plated brass only) V: FKM/Brass C: FFKM*/Brass I: FKM/Stainless Steel H: FFKM*/Stainless Steel *Selection of this option affects the valve price; consult factory for details X: Max Voltage/Resistance/Current* A: 5.5 VDC/11 ohms/0.304 amps B: 8 VDC/23 ohms/0.212 amps C: 11.5 VDC/47 ohms/0.152 amps D: 13.5 VDC/68 ohms/0.125 amps E: 20 VDC/136 ohms/0.091 amps F: 29 VDC/274 ohms/0.066 amps F: Wire Leads, 18" 0: Manifold Mount P: PC Board Mount, 4 PC Pins 1: Manifold Mount with Screens* (this option will affect price) 5: 10-32 Threaded Female (Series 25) 8: 1/8" Barbs * Max Voltage for continuous full flow, ambient temperature 55 C Coil Resistance for Room Temp Input Current for Full Flow NOTE: Please consult for other considerations. For more detailed information, visit us on the Web, or call and refer to Performance Spec. #790-002115-001 and Drawing #890-003022-001. For more information, call us toll-free at 1-800-525-2857 17

VSO LOW FLOW VSO Low Flow Normally Closed Proportional Solenoid Valve The VSO LF (Low Flow) offers the same benefits as the VSO valve with enhanced flow control for applications where control is critical or flow is required below 600 sccm. This miniature solenoid-operated valve automates the flow of gas in proportion to the input current. Features Uses either DC current or pulse width modulation; closed loop feedback delivers optimal system performance. Offers computer automated calibrations and full calibration traceability. Rated for 10 million life cycles. Maintains ideal flow through thermal compensation. Highly repeatable. Physical Properties Valve Type: 2-Way Normally Closed Media: Air, argon, helium, hydrogen, methane, nitrogen, oxygen, & others Operating Environment: 0 to 55 C Storage Temperature: -40 to 70 C Length: 1.785 in (45.34 mm) Width: 0.625 in (16.51 mm) Height: 0.67 in (17.02 mm) Porting: Manifold mount with 17 micron screens Weight: 2.2 oz (62.86 grams) Internal Volume: 0.031 in 3 (.508 sccm) Filtration: 17 micron Lubrication: None required Oxygen Clean: Available Electrical Power: 2.0 Watts maximum Voltage: See Coil Selection under Ordering Information Oxygen and analytically clean: Standard Flow Performance Characteristics Leak Rate: <0.2 sccm of helium (bubble tight) Response: <15 msec cycling Orifice Sizes: (See Ordering Info.) 0.003" (0.076 mm) VSO is a registered trademark of. 18

VSO LOW FLOW Dimensions Sample Part ID 910 _ 000200 _ 001 Description Series _ Model Number _ Coil Selection VSO, Low Flow, 0.003" orifice size X: Max Voltage/Resistance/Current* 001: 6.5 VDC/47 ohms/0.152 amps Options 002: 8 VDC/68 ohms/0.115 amps 003: 12 VDC/136 ohms/0.080 amps 004: 18 VDC/274 ohms/0.060 amps * Max Voltage for continuous full flow, ambient Temp 55 C, Coil Resistance for Room Temp, Input Current for Full Flow NOTE: Please consult for other considerations. For more detailed information, visit us on the Web, or call and refer to Performance Spec. #790-002160-002 and Drawing #890-003022-022. For more information, call us toll-free at 1-800-525-2857 19

LONE WOLF Lone Wolf Normally Open Proportional Valve With its patented technology, the Lone Wolf valve has the highest performance characteristics of any Normally Open proportional valve available on the market. This VSO valve offers silent operation, provides repeatable high-speed performance, and ensures maximum accuracy. Features Achieves rapid, stable performance. Enhances system control and patient comfort. Maintains ideal flow through Normally Open valve with thermal compensation. Extremely reliable. Physical Properties Valve Type: 2-Way Normally Open Media: Air, nitrogen, oxygen, & others Operating Environment: 0 to 50 C Storage Temperature: -40 to 70 C Length: 1.785 in (45.34 mm) Width: 0.625 in (16.51 mm) Height: 0.67 in (17.02 mm) Porting: Manifold mount with 43 micron screens, 1/8" Barbs, 5/64" Barbs Weight: 2.2 oz (62.86 grams) Internal Volume: 0.031 in 3 (.508 sccm) Filtration: 40 micron Lubrication: None required Electrical Power/Orifice Sizes: 0.5 Watt/0.024" 1.0 Watt/0.030" 2.0 Watts/0.036" Voltage: 3 to 60 VDC Electrical Terminal: PC Mount, Spade Lugs, 18 Wire Leads Flow Performance Characteristics Leak Rate: Internal: 0.2 sccm (bubble tight) External: 0.016 sccm Response: <30 msec cycling (2 Watts) Pressure: 25 psig maximum (10 psid) Vacuum: 0-20 in Hg VSO is a registered trademark of. 20

LONE WOLF Dimensions Sample Part ID LW 1 B V A F 8 Description Series Model Number Material Elastomer Coil Resistance Electrical Interface Pneumatic Interface No: Pressure/Orifice*/Coil Wattage Options 1: 0-10 psi/0.024"/0.5 Watt C: 47 ohms 2: 0-20 psi/0.030"/1 Watt D: 68 ohms 3: 0-25 psi/0.036"/2 Watt B: Brass V: FKM A: 11 ohms F: Wire Leads, 18"-19" 0: Manifold Mount B: 23 ohms P: PC Board Mount, 4 PC Pins F: 274 ohms 1: Manifold Mount with Screens* (this option will affect price) 8: 1/8" Barbs *Median Effective Orifice NOTE: Please consult for other considerations. For more detailed information, visit us on the Web, or call and refer to Performance Spec. #790-002131-001 and Drawing #890-003079-001. For more information, call us toll-free at 1-800-525-2857 21

EPC VSO-EP Electronic Pressure Control VSO-EP Electronic Pressure Control Unit The VSO-EP Electronic Pressure Control Unit converts a variable electrical control signal into a variable pneumatic output. Used to control critical pressure, the VSO-EP replaces manual regulators, needle valves, flow controllers, and bleed orifices, providing integral closed loop proportional control. This product uses Pneutronics patented VSO proportional valve and offers significant improvements over dual valve controllers. VSO-EP is used for carrier gas flow control, microfluidic flow control, vacuum pump control, and for aspirate / dispense applications. Features Offers silent operation. Ensures high accuracy and unparalleled resolution. Tested for long life. Offers internal closed loop control and external pressure sensor capability*. OEM application-specific configurations available. *Accessories Required Physical Properties Valve Technology: Thermally compensated proportional valve Media: Non-corrosive gases Operating Environment: 0 to 55 C Storage Temperature: -40 to 55 C Length: 2.25 in (57.15 mm) Width: 2.25 in (57.15 mm) Height: 1.25 in (31.75 mm) Porting: 10-32 female ports Electrical Power: 24 VDC + 10% Input Control Signal: 0-5 VDC standard 4-20 ma available Monitor Output Voltage: 0-5 volts Current Requirement: <150 ma Electrical Connector: RJ-45 Performance Characteristics Pressure Ranges: 0-15 psig 0-30 psig 0-50 psig 0-100 psig Pressure Accuracy: + 0.2% FS typical + 1.5% FS max Response: <15 msec (Response time to target pressure is output volume dependent) Linearity: < +1.0% FS Maximum Supply Pressure: 150% of pressure transducer rating VSO is a registered trademark and VSO EP is a trademark of.

EPC VSO-EP Drawing Electronic Pressure Control Configurations Custom configurations are available. Contact factory for details. Sample Part ID VSO-EP SC 0-5 0-100 CAT 5e Plug-in (RJ-45) Connector (included) Description Series Configuration Electrical Input Pneumatic Range Options SC: Standard Pressure Controller AC: Head Pressure Controller 0-5: 0-5 VDC 0-2, 5, 7, 15, 30, 50, 70, 100 (psi) NOTE: Please consult for other considerations. For more detailed information, visit us on the Web, or call and refer to Performance Spec. #790-002202-001 and Drawing #890-003146-001. Signal Main Power, 24 VDC Input Control Signal, 0-5 VDC Monitor Signal Output, 0-5 VDC System Ground RJ-45 Pin # Color 1 White w/ Orange 2 Solid Orange 3 White w/ Green 4 Solid Blue For more information, call us toll-free at 1-800-525-2857 Rev 1.5

EPC VSO-EV Electronic Pressure Control VSO-EV Vacuum Control Module The VSO-EV is a pressure controller specifically configured and optimized for vacuum pressure control. The VSO-EV converts a variable electrical control signal into a closed-loop, tightly regulated pneumatic output. Often used for aspirating liquid samples in gas-over-liquid flow control, as well as for pipetting and dispensing nano-liter volumes, the VSO-EV offers users a choice of either an external transducer or an internal sensor to close the control loop around critical system parameters. This EPC is well suited for high precision automated laboratory instruments, meeting the most stringent separation and detection requirements. Features Low weight and low power consumption Ensures high accuracy and unparalleled resolution. Tested for long life. Offers internal closed loop control and external pressure sensor capability*. OEM application-specific configurations available. *Accessories Required Physical Properties Valve Technology: Thermally compensated proportional valve Media: Non-corrosive gases Operating Environment: 0 to 55 C Storage Temperature: -40 to 55 C Length: 2.25 in (57.15 mm) Width: 2.25 in (57.15 mm) Height: 1.25 in (31.75 mm) Porting: 10-32 female ports Electrical Power: 24 VDC + 10% Input Control Signal: 0-5 VDC standard 4-20 ma available Monitor Output Voltage: 0-5 volts Current Requirement: <150 ma Electrical Connector: RJ-45 Performance Characteristics Vacuum Ranges: 0-345 mbar Custom units available Pressure Accuracy: + 0.2% FS typical + 1.5% FS max Response: <15 msec (Response time to target pressure is output volume dependent) Linearity: < +1.0% FS Maximum Supply Pressure: 150% of pressure transducer rating VSO is a registered trademark and VSO EV is a trademark of.

EPC VSO-EV Drawing Electronic Pressure Control Configurations Custom configurations are available. Contact factory for details. Sample Part ID VSO-EV EV 0-5 0-VAC Description Series Configuration Electrical Input Pneumatic Range CAT 5e Plug-in (RJ-45) Connector (included) Signal RJ-45 Pin # Color Options EV: Vacuum Controller 0-5: 0-5 VDC 0-VAC: 0-VAC* * 0 to -345 mbar for vacuum; Consult factory for custom options Main Power, 24 VDC Input Control Signal, 0-5 VDC 1 White w/ Orange 2 Solid Orange Monitor Signal Output, 0-5 VDC 3 White w/ Green NOTE: Please consult for other considerations. For more detailed information, visit us on the Web, or call and refer to Performance Spec. #790-002202-001 and Drawing #890-003146-001. System Ground 4 Solid Blue For more information, call us toll-free at 1-800-525-2857 Rev 1.5

EPC OEM-EP Electronic Pressure Control OEM-EP Miniature Pressure Control Module Measuring just 26mm x 27mm x 60mm, the OEM-EP (Electronic Pressure Control Unit) is the smallest electronic pressure controller available on the market, configured specifically for the analytical instrumentation and life science OEM markets. The OEM-EP can be configured to control pressure or flow and can replace manual regulators, flow controllers, and needle valves, providing integral closed loop proportional control for sensitive instrumentation applications. This product uses Parker's patented VSO proportional valve, as well as the proven circuitry of its successful larger products. Typical applications include: Carrier gas flow control Gas over liquid flow control Microfluidic flow control Liquid dispensing Hydro-dynamic focusing Features Silent operation Long life High accuracy Low power consumption Set and Forget closed loop control Physical Properties Valve Technology: Thermally compensated proportional valve Media: Non-corrosive gases Operating Environment: 0 to 55 C Storage Temperature: -40 to 55 C Length: 1.02 in (26 mm) Width: 1.06 in (27 mm) Height: 2.36 in (60 mm) Porting: 10-32 female ports Electrical Main Power: 24 VDC + 10% Input Control Signal: 0-5 VDC standard Monitor Output Voltage: 0-5 volts Current Requirement: <150 ma Electrical Connector: 6 pin miniature interface cable included Performance Characteristics Pressure Ranges: 0-15 psig 0-30 psig 0-50 psig 0-100 psig Pressure Accuracy: + 0.2% FS typical + 1.5% FS max Response: <15 msec (Response time to target pressure is output volume dependent) Linearity: < +1.0% FS Maximum Supply Pressure: 150% of pressure transducer rating

EPC OEM-EP Drawing Electronic Pressure Control Configurations Custom configurations are available. Contact factory for details. Sample Part ID OEM-EP SC 0-5 0-100 Description Series Configuration Electrical Input Pneumatic Range Options SC: Standard Pressure Configuration 0-5: 0-5 VDC 0-2, 5, 7, 15, 30, 50, AC: Head Pressure Controller 70, 100 (psi) NOTE: Please consult for other considerations. For more detailed information, visit us on the Web. For more information, call us toll-free at 1-800-525-2857 Rev 1.5

EPC VSO-GC Electronic Pressure Control VSO-GC Gas Chromatography Flow Control Module The VSO-GC, Electronic Pressure Control (EPC) Unit, converts a variable electrical control signal into a variable pneumatic output. By providing integral closed loop control, it replaces manual regulators, costly multiple function control valves, and needle valves. This product uses Parker Hannifin's patented VSO TM proportional valve and offers application-specific integrated pneumatic pressure control for Gas Chromatography (GC) applications. Typical applications include: Column Head Pressure Control Split Flow Control Carrier Gas Flow Control Features Silent operation Long life High accuracy Unparalleled resolution GC-specific proportional valve Internal closed loop control Pressure signal output Physical Properties Valve Technology: Thermally compensated proportional valve Media: Non-corrosive gases Operating Environment: 0 to 55 C Storage Temperature: -40 to 55 C Length: 2.25 in (57.15 mm) Width: 2.25 in (57.15 mm) Height: 1.25 in (31.75 mm) Porting: 10-32 female ports Electrical Power: 24 VDC + 10% Input Control Signal: 0-5 VDC standard 4-20 ma available Monitor Output Voltage: 0-5 volts Current Requirement: <150 ma Electrical Connector: RJ-45 Performance Characteristics Pressure Ranges: 0-15 psig 0-30 psig 0-50 psig 0-100 psig Pressure Accuracy: + 0.2% FS typical + 1.5% FS max Response: <15 msec (Response time to target pressure is output volume dependent) Linearity: < +1.0% FS Maximum Supply Pressure: 150% of pressure transducer rating

EPC VSO-GC Drawing Electronic Pressure Control Configurations VSO-GC Block Diagram Representation Schematic diagram of VSO-GC Sample Part ID VSO-GC AC 0-5 0-100* CAT 5e Plug-in (RJ-45) Connector (included) Description Series Configuration Electrical Input Pneumatic Range Signal RJ-45 Pin # Color Options SF: Split Flow Controller 0-5: 0-5 VDC 0-2, 5, 7, 15, 30, 50, AC: Head Pressure Controller 70, 100 (psi) NOTE: Split Flow Controller accommodates varying inlet pressures. * Not required for SF Main Power, 24 VDC Input Control Signal, 0-5 VDC Monitor Signal Output, 0-5 VDC 1 White w/ Orange 2 Solid Orange 3 White w/ Green NOTE: Please consult for other considerations. For more detailed information, visit us on the Web. System Ground 4 Solid Blue NOTE: Valve sizes are optimized for use in Gas Chromatography applications. Customs performance readily available; consult factory for options. CAT 5e cable included. For more information, call us toll-free at 1-800-525-2857 Rev 1.5

EPC VSO-HP Electronic Pressure Control VSO-HP High Performance Pressure Controller Used in analytical and OEM instrument applications, the VSO-HP delivers integral closed loop proportional control with the highest level of accuracy and stability. This miniature controller, measuring only 39 x 42 x 71mm, works ideally in High Performance Liquid Chromatography (HPLC) applications, eliminating time-consuming temperature and pressure adjustments through its superior design and performance. The VSO-HP ensures stable flow levels with features such as monitor voltage feedback and an LED display for pressure regulation. It also offers rapid depressurization, which results in a fast response time and has an optional external sensor for expertly controlling pressure in required applications. The VSO-HP can be configured to control pressure or flow, replacing manual regulators, flow controllers, and needle valves. This product uses Parker's patented VSO proportional valve and offers precise motion control with Parker pneumatic cylinders, such as the Series SRX. Typical applications include: Carrier gas flow control Gas over liquid flow control Hydro-dynamic focusing Microfluidic flow control Liquid dispensing Features Stable pressure control with minimal thermal drift Rapid depressurization High accuracy; high repeatability Low power consumption Optional 5 VDC supply output Configurable for pressure control or flow control External pressure sensor capability Silent operation; long life Physical Properties Valve Technology: Thermally compensated proportional valve; digital dump valve Media: Non-corrosive gases Operating Environment: 0 to 55 C Storage Temperature: -40 to 55 C Length: 1.52 in (39 mm) Width: 1.66 in (42 mm) Height: 2.79 in (71 mm) Porting: 10-32 female ports Electrical Main Power: 24 VDC + 10% Input Control Signal: 0-5 VDC standard Monitor Output Voltage: 0-5 volts Current Requirement: <250 ma Electrical Connector: 6 pin miniature interface cable included Performance Characteristics Pressure Ranges: 0-15 psig 0-30 psig 0-50 psig 0-100 psig Pressure Accuracy: + 0.2% FS typical + 1.0% FS max Response: <15 msec (Response time to target pressure is output volume dependent) Linearity: < +1.0% FS Maximum Supply Pressure: 150% of pressure transducer rating VSO is a registered trademark of.

EPC VSO-HP Drawing Electronic Pressure Control Configurations Application atm VSO Valve S-11 Valve Bleed Orifice Pressure Sensor 0-5 VDC pressure monitor output Custom configurations are available. Contact factory for details. Sample Part ID VSO-HP SC 0-5 0-100 Description Series Configuration Electrical Input Pneumatic Range Options SC: Standard Pressure Controller 0-5: 0-5 VDC 0-2, 5, 7, 15, 30, 50, AC: Head Pressure Controller 70, 100 (psi) NOTE: Please consult for other considerations. For more detailed information, visit us on the Web. For more information, call us toll-free at 1-800-525-2857 Rev 1.5

PND PND Series Pneutronics New Dump Valve The PND Series is a miniature, low cost, application-specific, two-way Normally Open exhaust or "dump" valve. Perfect for safety-oriented applications that require pressure relief to atmosphere upon power loss. Features Normally Open exhaust valve in a small package size. Works well in miniature applications such as in Non-Invasive Blood Pressure (NIBP) devices. Provides small size and low cost. Offers low holding voltage. Physical Properties Electrical Performance Characteristics Valve Type: 2-Way Normally Open Media: Non-corrosive gases Operating Environment: 0 to 45 C Storage Temperature: -25 to 70 C Length: 1.01 in (25.6 mm) Width: 0.394 in (10 mm) Height: 0.472 in (12 mm) Porting: 1 port, 0.118" (3 mm) O.D.; suitable for 0.078 I.D.; Urethane tubing Weight:.27 oz (7.71 grams) Internal Volume: 0.026 cm 3 Filtration: None required Lubrication: None required Power: 0.5 Watt or less Voltage: 3, 6, 12 VDC Wetted Materials Elastomer: Silicon; Nickel-Plated Steel Frame: SPCC (Treatment: MFZn2-c) All Other: Polybutylene Terephthalate (PBT); 304 Series Stainless Steel Leak Rate: 0.016 sccm (bubble tight) Response: <100 msec cycling Pressure: 0 to 6 psig holding Vacuum: 0-27 in Hg Orifice Sizes/Equivalent Cv: 0.030"/0.017 Cv 0.050"/0.035 Cv Larger sizes available in 15 mm frame Sample Part ID PND _ 05 A _ 12 Description Series _ Watts (Rated Orifice Size _ Voltage Power at 20 C) Options 05: 0.5 Watt D: 0.030" 03: 3 VDC A: 0.050" 06: 6 VDC Note: With Orifice Size at 0.050", the frame width and height increases 0.118" (3mm) 12: 12 VDC NOTE: Please consult for other considerations. For more detailed information, visit us on the Web, or call and refer to Performance Spec. #790-002198-001 and Drawing #s: PND-05A-DWG and PND-05D-DWG. 24

PND Dimensions For more information, call us toll-free at 1-800-525-2857 25

B SERIES B Series General Purpose 2-Way Direct Acting Valves The small stainless steel B Series valves convert electrical signal to control media flow. Available as Normally Closed (B2) and Normally Open (B11), these bubble tight valves are 100% tested and will perform consistently for up to 20 million cycles. Features Multipoised; available in a range of mounting positions. Rated pressures up to 400 psi allow maximum control over gases and liquids. Available with 1/8" NPT ports for process connection and 18" lead wires for electrical connection. Physical Properties Valve Type: Normally Open Normally Closed Pipe Size: 1/8" NPT Orifice Diameters: Normally Open 1/32", 3/64", 3/32" Normally Closed 1/32", 3/64", 1/16", 1/8" Valve Diameter: 1 in (25.4 mm) Height: 2.69 in (68.33mm) Weight: 4.8 oz (137.14 grams) Maximum Ambient Temperature 105 F Universal Mounting Bracket: B19006 Filtration: 40 micron recommended Lubrication: None required, but will increase life Compatible Fluids: Lubricated air, non-lubricated air, inert gases, water, hydraulic fluids, petroleum products, and additional fluids compatible with materials of construction Electrical Power Consumption: 7 Watts Voltage: DC: 12, 24 AC: 24/60, 120/60, 240/60 Other voltages available upon request Coil Type: Class A Configurations Standard Material Options Body: Series 303 Stainless Steel Seals: NBR (Nitrile), FKM Sleeve: Series 304 Stainless Steel Plunger: 430F FR Stainless Steel Stop: 430 FR Stainless Steel Springs: Stainless Steel (18-8) Shading Ring: Copper (AC only) Orifice: Series 303 Stainless Steel Performance Characteristics Operating Speed: Up to 600 cycles per minute Vacuum: Up to 5 micron 26

B SERIES Dimensions NOTE: Universal Mounting Bracket B19006, shown above, is a separately ordered item. Sample Part ID B2 DA 1400 Description Series Coil Enclosure Max. Operating Pressure Options B2: 2-Way, Normally Closed, NBR Seals B11: 2-Way, Normally Open, FKM Seals B2 DA: Grommet B11 DK: Grommet B2 1400: 400 psi (AC/DC) 1250: 250 psi (AC/DC) 1175: 175 psi (AC/DC) 1052: 50 psi (AC) 1026: 25 psi (DC) B11 1400: 400 psi (AC/DC) 1200: 200 psi (AC/DC) 1040: 40 psi (AC/DC) *When ordering, please state voltage. Example: B2DA1250, 24 VDC NOTE: Please consult for other considerations. For more information, call us toll-free at 1-800-525-2857 27

B SERIES B Series General Purpose 3-Way Solenoid Valve The three-way B Series valves are available in several configurations, including Normally Closed and Normally Closed-Exhaust to Atmosphere (B13 and B13A), Multipurpose (B14), Normally Open (B15), and Directional Control (B16). Features Stainless steel body with high flow capacity. Available with 1/8" NPT ports. Can be used as two-way Normally Open or Normally Closed by plugging one port. Multipurpose valves accept inlet pressure or vacuum at any port. Multipoised; available in a range of mounting positions. Physical Properties Valve Type: Normally Open, Normally Closed, Normally Closed - Exhaust to Atmosphere, Directional Control, Multipurpose Pipe Size: 1/8" NPT Orifice Diameters: 1/32", 3/64", 1/16", 3/32" Valve Diameter: 1 in (25.4 mm) Height: 2.26 in (57.4 mm) Weight: 4.8 oz (137.14 grams) Maximum Ambient Temperature 105 F Universal Mounting Bracket: B19006 Filtration: 40 micron recommended Lubrication: None required, but will increase life Compatible Fluids: Lubricated air, non-lubricated air, inert gases, water, hydraulic fluids, petroleum products, and additional fluids compatible with materials of construction Electrical Power Consumption: 7 Watts Voltage: DC: 12, 24 AC: 24/60, 120/60, 240/60 Other voltages available upon request Coil Type: Class B Configurations Standard Material Options Body: Series 303 Stainless Steel Seals: NBR, FKM Sleeve: Series 304 Stainless Steel Plunger: 430F FR Stainless Steel Stop: 430 FR Stainless Steel Springs: Stainless Steel (18-8) Shading Ring: Copper (AC only) Orifice: Series 303 Stainless Steel Performance Characteristics Operating Speed: Up to 600 cycles per minute Vacuum: Up to 5 micron 28

B SERIES Dimensions Sample Part ID B13 DK 1175 Description Series Coil Enclosure Max. Operating Pressure Options B13: 3-Way, Normally Closed (NC) B13A: 3-Way, NC, exhaust to DK: Grommet B13 & B13A 1200: 200 psi (AC/DC) atmosphere 1150: 150 psi (AC/DC) B14: 3-Way, Multipurpose 1100: 100 psi (AC/DC) B15: 3-Way, Normally Open 1040: 40 psi (AC/DC) B16: 3-Way, Directional Control B14 1150: 150 psi (AC/DC) 1100: 100 psi (AC/DC) 1075: 75 psi (AC) 1030: 30 psi (DC) B15 1200: 200 psi (AC/DC) 1150: 150 psi (AC/DC) 1125: 125 psi (AC/DC) 1040: 40 psi (AC/DC) B16 1250: 250 psi (AC/DC) 1200: 200 psi (AC/DC) 1175: 175 psi (AC/DC) 1050: 50 psi (AC/DC) *When ordering, please state voltage. Example: B13DK1175, 120/60 NOTE: Please consult Parker Life Sciences for other considerations. For more information, call us toll-free at 1-800-525-2857 29

C SERIES C Series General Purpose 2-Way Direct Acting Valves The two-way Normally Closed C Series valves offer a soft synthetic plunger insert with a precision-machined seat, which provides a tight seal with long insert life. These valves are 100% tested and will perform consistently up to 20 million cycles. Features Includes only two moving parts: the stainless steel spring and the plunger. Range of compatible media includes petroleum products and Freon. Up to 275 psi of operating pressure. Measures 2 5/16" in height and 12 oz in weight. Valves are UL/CSA approved for all AC voltages with 1/2" conduit enclosure. Multipoised; available in a range of mounting positions. Physical Properties Valve Type: 2-Way Normally Closed Pipe Size: 1/8" NPT dry seal Orifice Diameters: 1/16", 7/64", 1/8", 5/32" Valve Diameter: 1.19 in (30.23 mm) Height: 2.31 in (58.67 mm) Weight: 12 oz with Conduit (342.86 grams) 11 oz with Grommet (314.29 grams) Maximum Ambient Temperature 105 F Universal Mounting Bracket: MECHB5 Filtration: 40 micron recommended Lubrication: None required, but will increase life Compatible Fluids: Lubricated air, non-lubricated air, inert gases, water, hydraulic fluids, petroleum products, Freon, and additional fluids compatible with materials of construction Water over 180 F, Freon, and some petroleum products may require seal material modifications. Electrical Power Consumption: 8 Watts Voltage: DC: 12, 24 AC: 24/60, 120/60, 240/60 Other voltages available upon request Coil Enclosures: Grommet; 1/2 NPT Conduit Standard Material Options Body: Brass (Stainless Steel available) Seals: NBR (FKM, and EPDM available upon request) Sleeve: Series 304 Stainless Steel Plunger: 430F FR Stainless Steel Stop: 430 FR Stainless Steel Springs: Stainless Steel (18-8) Shading Ring: Copper (AC only) Configurations Performance Characteristics Operating Speed: Up to 600 cycles per minute Response Time: AC: 4-8 msec to open or close DC: 10-15 msec to open or close Vacuum: Down to 5 microns (0.005 Torr, 2 x 10-4 in Hg) Maximum Operating Pressure Differential Up to 275 psi Freon is a registered trademark of E.I. du Pont de Nemours and Company. 30

C SERIES Dimensions NOTE: Universal Mounting Bracket MECHB5, shown left, is a separately ordered item. Sample Part ID C2 DA 1277 Description Series Coil Enclosure Max. Operating Pressure C2: 2-Way, Normally Closed DA: Grommet 1277: 275 psi (AC) DB: 1/2" Conduit 1251: 250 psi (DC) Options 1132: 130 psi (AC) 1081: 81 psi (DC) 1092: 90 psi (AC) 1051: 50 psi (DC) 1062: 60 psi (AC) 1031: 30 psi (DC) *When ordering, please state voltage. Example: C2DA1277, 12 vdc NOTE: Please consult for other considerations. For more information, call us toll-free at 1-800-525-2857 31

C SERIES C Series General Purpose 3-Way Direct Acting Valve The three-way C Series valves, including C3 & C3A (Normally Closed and Normally Closed-Exhaust to Atmosphere), C4 (Multipurpose) and C5 (Normally Open) convert electrical signal to controlled media flow. These brass valves are available with 1/8" NPT ports for media connection and 18" lead wires for electrical connection. Features Accommodates up to 175 psi of system pressure depending on flow requirements. Tested to perform consistently for up to 20 million cycles. Valves are UL/CSA approved for all AC voltages with 1/2" conduit enclosure. Multipoised; available in a range of mounting positions. Physical Properties Valve Type: Normally Open, Normally Closed, Normally Closed - Exhaust to Atmosphere, Multipurpose Pipe Size: Body Ports 1/8" NPT Adapter 1/8" PTF Orifice Diameters: 1/16", 7/64", 1/8", 5/32" Valve Diameter: 1.19 in (30.23 mm) Height: 3.30 in (83.82 mm) Filtration: 40 micron recommended Lubrication: None required, but will increase life Compatible Fluids: Lubricated air, non-lubricated air, inert gases, water, hydraulic fluids, petroleum products, and additional fluids compatible with materials of construction Electrical Power Consumption: 7.5 Watts Voltage: DC: 12, 24 AC: 24/60, 120/60, 240/60 Other voltages available upon request Performance Characteristics Operating Speed: Up to 600 cycles per minute Vacuum: Down to 5 microns Maximum Operating Pressure Differential Up to 175 psi Configurations Standard Material Options Body: Brass Sleeve: Series 300 Stainless Steel Plunger: 430F FR Stainless Steel Seals: NBR and FKM 32

C SERIES Dimensions Sample Part ID C3 DK 1175 Description Series Coil Enclosure Max. Operating Pressure Options C3: 3-Way, Normally Closed (NC) C3A: 3-Way, NC, exhaust to DK: Grommet DM: 1/2" NPT Conduit C3 & C3A 1175: 175 psi (AC/DC) atmosphere 1125: 125 psi (AC/DC) C4: 3-Way, Multipurpose 1075: 75 psi (AC/DC) C5: 3-Way, Normally Open 1050: 50 psi (AC/DC) C4 1150: 150 psi (AC/DC) 1075: 75 psi (AC/DC) 1050: 50 psi (AC) 1031: 30 psi (DC) C5 1175: 175 psi (AC/DC) 1100: 100 psi (AC/DC) 1060: 60 psi (AC/DC) *When ordering, please state voltage. Example: C3DK1175, 12 vdc NOTE: Please consult for other considerations. For more information, call us toll-free at 1-800-525-2857 33

3000 SERIES 3000 Series 2-Way & 3-Way Direct Acting Valves The 3000 Series two-way and three-way valves convert electrical signal to control media flow. Available as Normally Open (Series 3121) or Normally Closed (Series 3129), these small stainless steel or brass bubble tight valves will perform consistently for up to 20 million cycles. Features 2-Way: Rated for 800 psi for gases and liquids. 3-Way: Rated for 200 psi for gases and liquids. Available with 1/8" NPT ports or manifold mount for process connection and either lead wires or tabs for electrical connection. UL and CSA component recognition. Multipoised; available in a range of mounting positions. Physical Properties Valve Type: 2-Way: Normally Open, Normally Closed 3-Way: Normally Open, Normally Closed, Multipurpose, Directional Control Orifice Diameters: Normally Open 1/32", 3/64", 1/16", 5/64", 3/32" Normally Closed 1/32", 3/64", 1/16", 5/64", 3/32", 1/8", 5/32" Valve Diameter: 1.02 in (25.91 mm) Height: 2.08 in (52.83) Weight: 8 oz (228.57 grams) Maximum Ambient Temperature 68 F for continuous duty cycle Mounting: Standard: Two 8-32 tapped holes in bottom of valve Optional: Universal mounting bracket B19006 is available Process Connections: 1/8" NPT Manifold mount: cavity, screw-in Filtration: 40 micron Lubrication: None required, but will increase life Compatible Fluids: Air, Inert Gas, Water, Oil Electrical Power Consumption: 6 Watts 7.5 Watts for 24/60 3 Watts Voltage: DC: 12, 24 AC: 24/60-24/50, 110/50-120/60, 220/50-240/60 3-Way Connections: 12" leads; 1/4"tab 3-Way Coil Enclosure Options: 1/2" Conduit; Grommet; Yoke; Integrated with tab connection; Integrated with 12" leads 3-Way Configurations Standard Material Options Body: Brass or Series 303 Stainless Steel Seals: NBR, FKM, EPDM Sleeve: Series 300 Stainless Steel Plunger: 430F FR Stainless Steel Manifold Body: Aluminum Flux Plate: Plated Steel Housing: Plated Steel Integrated Coil Encapsulant: Nylon Performance Characteristics Operating Speed: Up to 600 cycles per minute Continuous Duty Response Time: 8-16 msec to open or close Vacuum: Down to 5 microns depending on application 34

3000 SERIES 2-Way Configurations Dimensions Sample Part ID 3 1 2 1 B B N1 A Description Series Operations Type Flow Pattern Family Body Material Process Connection Orifice (Pipe Size) 3000 1: Direct Acting, 2: 2-Way 1: Normally Closed B B: Brass (1/8 NPT only) A6: Male Straight Thread A: 1/32" 6 Watt 3: 3-Way 3: Multipurpose J: Operator (No Body) (5/16"- 24 UNF) E: 3/64" Options 9: Direct Acting, 8: Directional S: 303 Stainless Steel A7: Male Straight Thread G: 1/16" 3 Watt (1/8 NPT only) (3/4"-32 UNF) 9: Normally Open, J: 5/64" Ported Sleeve N1: Female National Pipe 1/8 L: 3/32" N: 1/8" Q: 5/32" Series 3000 Part ID Continued (20 characters total) _ E 00 NO M1S1 P0 _ Seal Material Mechanical Option Housing Coil Voltage NOTE: Please consult Parker Life Sciences for other considerations. E: EPDM N: NBR V: FKM 00: None N0: No Housing M1S1: Integrated Molded, P0: 24/50-60 Hz AC (Integrated Coil 1/4" Tab, 6W, Class B AD: 1/8" NPT P3: 110/50 Hz, Only) Sleeve Adapter 120/60 Hz AC (3-Way Only) C#: Aluminum, Female 1/8" NPT, 2, 3, or 4 Station Cavity Manifold Block HT: Helium Leak Tested N0: Cleaned for Oxygen Service RR: Grommet (Taped Coil Only) YY: Yoke (Taped Coil Only) M3J5: Integrated Molded, 12" Leads, 6W, Class B M6J5: Integrated Molded, 12" Leads, 3W, Class B T1J1: Taped 12" Leads, 6W, Class B T3J1: Taped 12" Leads, 3W, Class B NOTE: For all 6W coils, actual wattage for 24/60 Voltage is 7.5 Q3: 220/50 Hz, 240/60 Hz AC C1: 12 VDC C2: 24 VDC For more information, call us toll-free at 1-800-525-2857 35

BP SERIES BP Series Proportional 2-Way Valves The BP Series valve is an analog proportional device that digitally modulates the current supplied to the coil. The mechanism that opens and closes the BP valve's flow orifice moves in a linear manner in response to the varying coil current and is easily controlled by a user input signal. Features Offers longer valve life and consumes less power than similar proportional valves. Eliminates pressure or flow spikes by using linear flow control. Provides faster response time. Offers simplified control systems. Versatile: multipoised valves allow mounting in any position. Electrical Performance Characteristics Physical Properties Valve Type: 2-Way, Normally Closed proportional Orifice Diameters: 1/32", 3/64", 1/16", 5/64", 3/32" Media: All gases compatible with valve materials Operating Environment: Ambient: 14 to 122 F (-10 to 55 C) Media: 0 to 180 F (-18 to 82 C) Length: 3.31 in (84 mm) Width: 1.38 in (35 mm) Height: 1.79 in (45.5 mm) Porting: 1/8" NPT Power: 7 Watts maximum Voltage: 12-24 VDC Enclosure: General Purpose, NEMA 1 Coil Type: Class A Standard Material Options Body: Stainless Steel Seals: NBR, FKM Sleeve: Stainless Steel Plunger: Stainless Steel Stop: Stainless Steel Springs: Stainless Steel Orifice: Stainless Steel Flow BP Proportional Valve Flow Curve Response: Complete cycle, Off-Full, Open-Off: 40 msec cycling at zero pressure 100 msec cycling at max pressure Hysteresis: 10% of full flow (in open loop applications) Valve Repeatability: 5% when operating within Linear Control Range Valve Orientation: Multipoised: can be mounted in any position Linear (Y) Control Range Zero Offset Point (point where flow begins) typically between 30-40% of control signal, depending on actual system pressure % Control Signal (X) 36

BP SERIES Dimensions Sample Part ID Description Series Orifice Size Cv Max. Operating Pressure BP2EV0001 Flow Ranges Control Input Signal OR External Control BP Flow at Maximum psi Flow at 10 psi 0-2V 0-5V 0-10V 4-20mA 1/32 0.02 200 psi 0-50,000 sccm 0-8,000 sccm BP2EV0001 BP2EV0012 BP2EV0013 BP2EV0029 BP2DA1201 3/64 0.045 100 psi 0-65,000 sccm 0-17,000 sccm BP2EV0002 BP2EV0010 BP2EV0011 BP2EV0024 BP2DA1101 Options 1/16 0.08 60 psi 0-75,000 sccm 0-30,000 sccm BP2EV0003 BP2EV0005 BP2EV0009 BP2EV0020 BP2DA1061 5/64 0.12 40 psi 0-80,000 sccm 0-45,000 sccm BP2EV0004 BP2EV0006 BP2EV0008 BP2EV0014 BP2DA1041 3/32 0.16 25 psi Consult Factory BP2DA1026 NOTE: External control valves do not include electronics in valve number (only the coil is provided). Please consult for other considerations. For more information, call us toll-free at 1-800-525-2857 37

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MANIFOLDS 4 Position V 2 Pneumatic Manifold Low cost solution 23 Station/Multiple Valve Pneumatic Manifold Circuit board with mass electrical termination Multiple layer manifold Integrated volume chambers 7 Position X-Valve Pneumatic Manifold 6 Position VSO Proportional Valve Pneumatic Manifold Assembly Integrated pressure/ vacuum sensors Mixed pneumatic logic design Ultem manifold pressure/vacuum sensors Quick connect fittings Circuit board with mass electrical termination 8 Position SRS Model Pneumatic Manifold 10 Position SRS Model Pneumatic Manifold Integrated circuit board mounting Mass electrical termination Circuit board with transducers Pressed in barbed fittings FOR OTHER MANIFOLD TECHNOLOGY OPTIONS, PLEASE CONTACT PARKER LIFE SCIENCES TODAY! Ultem is a registered trademark of General Electric Company. For more information, call us toll-free at 1-800-525-2857 39