LINEAR MOTION AND ALIGNMENT

LINAR MOTION AN ALIGNMNT Section Introduction to Linear Shift Mechanisms 094 Linear Shift Mechanism Actuation Options 096 Standard Linear Shift Mechanism (LSM ) 098 Long Travel Linear Shift Mechanism (LSML ) 100 ompact Linear Shift Mechanism (LSM ) 102 Linear Shift Mechanism with Tilt (LSMT ) 104 Linear Shift Mechanism with Lateral Offset (LSMX ) 106 Production-proven LSMs 1 Port Aligners 110 92 93

Linear Motion and Alignment Linear Shift Mechanisms (LSMs) provide linear motion along This design ensures smooth and precise motion along the Z the port axis (Z). Typical applications include the positioning of axis. The range has a high load capability ensured through its beamline filters, adjustment of sputter sources and deposition rigid construction. Ball screw driven versions are available for stages through to production style applications. fast acting, high duty cycle, high load, production applications. UV esign has the largest range of LSMs in the world, ranging The bellows are manufactured from 316L stainless steel as from F35 to F150 flanges, up to 1m stroke, tilt & X alignment standard and offer a minimum design life of 10,000 cycles. versions with manual, pneumatic and motorisation options, all ustomised units are available offering a design life of up to 3 10,000 cycle lifetime guarantee (3 million cycle option) available with a range of position encoders. Bakeable to 250, million cycles. emountable bellows assembly In addition to the standard range of LSMs we offer customised Reliable and rigid construction the range is supplied on F flanges and provides true UV performance. LSMs which are application-specific for use on synchrotrons, The bellows-sealed LSMs provide smooth, precise motion via a and in critical production applications. LSM KY AVANTAGS 2x flange parallelism of conventional designs 2x load-carrying capability of conventional designs Smooth kinematic motion Bakeable to 250 kinematically-designed external leadscrew driven mechanism, complete with anti-rotation and anti-deflection systems. Standard LSM Long Travel LSM ompact LSM LSM with Tilt LSM with X motion Production LSMs Port Aligners Up to 350mm Page 98 94 Up to 1000mm Page 100 Linear Motion and Alignment Up to 150mm Up to 150mm /- 2 tilt Page 102 Page 104 Up to 150mm /- 5mm lateral (x) motion Page 106 Should your requirements fall outside our standard specifications then please contact us at: Production-proven LSMs /-5mm linear motion /-3 angle adjustment Page 1 Page 110 xample of long travel LSM 44 (0)1323 811188 sales@uhvdesign.com 95

LSM Actuation options The LSM range is available with a variety of manual, pneumatic and motorised actuation methods. Manual actuation Position Readout/Feedback ode Item escription ode Item escription Manual A manual handwheel provides the most basic method of actuation. S ngraved shaft LSMs can be fitted with a shaft engraved with a scale with 1mm increments for visual positioning. G Manual with geared-handwheel Pneumatic actuation ode Item escription Large bore LSMs are fitted with a 5:1 geared handwheel to provide sufficient mechanical advantage to overcome the additional thrust due to vacuum. P Pneumatic Pneumatic actuators provide a simple solution to automated operation. Standard design is for 2 position actuation. 3 position versions available upon request. Manual handwheel LA igital linear scale igital scale displays are fitted to LSMs via a kinematic mount ensuring precise and repeatable location, which is critical for accurate repositioning after bakeout. The scale features large, easy to read characters that can be switched between metric and imperial units. The readout has a resolution of 10 microns (0.01mm). Users can set the Origin at any position of its stroke, from which it will provide a plus/minus scale in the units selected. The Origin is retained in its memory until reset by the user, even when switched off. A second temporary Zero facility is offered to enable one-off measurements to take place, which resets to the Origin setting when turned off. ngraved shaft Motorised actuation ode Item escription Pneumatic actuation N Magnetic encoder ontactless high-speed linear magnetic encoder with 10 micron resolution. S motorised A 12 or 24V motor provides the motion and is mounted to the side of the LSM. Special in-line versions are available upon request. igital linear scale SS Stepper motor driven A stepper motor provides the motion and is mounted to the side of the LSM. Special in-line versions are available upon request. UP Wiring upgrade When purchasing an LSM for use with a UV esign controller (please see section 13), an additional integration upgrade is available. The upgrade includes a bakeable socket connector, mounted to the frame, to which the limit switches are pre-wired. In the case of stepper motor-driven products, an extra home switch is also provided. The motor lead terminates with a connector compatible with UV esign's controllers. Motorised LSM Synchrotron Specification UV esign supplies LSMs to synchrotron facilities around the world for a range of applications including the positioning and manipulation of beam line diagnostics and mirrors. Synchrotron specific LSMs are tolerant of low level radiation, comply with low electrical noise requirements and are supplied with wiring protocols, motors and controllers to match the facility's specifications. ontact us to request our Synchrotron brochure or to discuss your requirements. xample of customised LSM for beam halo cleaning at the SPIRAL 2 synchrotron. 96 Linear Motion and Alignment Should your requirements fall outside our standard specifications then please contact us at: 44 (0)1323 811188 sales@uhvdesign.com 97

Standard Linear Shift Mechanism Rotary Source LSM Shutters LSM KY AVANTAGS xample LSM imensions For the complete range of 2 drawings & 3 models contact us or visit Production-proven linear motion along the port axis (Z) for sample positioning and production applications. omprehensive series offering true UV performance with a vast range of flange sizes, strokes, actuation and encoder options. 2x flange parallelism compared with conventional designs 2x load-carrying capability compared with conventional units Smooth kinematic motion 10,000 cycle lifetime guarantee emountable bellows assembly BOR F XTN = A RTRAT = B Bakeable to 250 G The LSM is the most comprehensive series in the range, offering the largest number of flange, stroke and actuation options. All flanges within the series are supplied with tapped bolt holes as standard. Special variants with clear holes on the mounting flange can be provided for most sizes, these are labelled LSM in the partcodes and specification tables. Actuation methods Motorised LSMs are fitted with bakeable limit and home switches, pre-wired to a single bakeable connector mounted on the frame ('UP' option must be selected). LSMs are compatible with UV esign s SA and Stepper motor controller range, details of which can be found in Section 13. LSM38 A B F G LSM38-50 123.7 81.7 212.6 154.7 75 38 163 39 LSM38-100 187.0 87.00 275.8 154.7 75 38 163 39 LSM64 A B F G The series can be actuated via a manual handwheel, pneumatic cylinder, motor or stepper motor. ach LSM can also be fitted with a digital linear scale, offering visual position indication with 10 micron resolution. LSM64-50 161 111 249 203 122.5 65 212.2 64 LSM64-100 211 111 299 203 122.5 65 212.2 64 imension drawings for the complete range can be downloaded from LSM Part ode Generator MOL LSM LSM Flange information Bolt holes lear Bore Flange code Flange size Travelling flange Mounting flange (mm) 38 F38 70mm (2.75") O F M6 Tapped M6 Tapped* 38 64 F64 114mm (4.5") O F Tapped Tapped* 65 100 F100 152mm (6") O F 102 150 F150 203mm (8") O F Tapped lear holes 149 * lear bolt holes on mounting flange available (LSM option). Maximum Bakeout 250 Flange SIze (select one) LSM F38 38 25mm 25 Stroke Actuation Options (select one) (select one) F64 64 50mm 50 Manual Motorisation Linear Scale Wiring*3 Manual handwheel Side-mounted stepper motor SS ngraved shaft igital Scale S LA Upgrade with switches for connection to controller 75mm *1 75 Side-mounted 24V motor S Linear encoder *2 N LSM F38* 38 100mm 100 Side-mounted motor with controller & pre-wired switches F64* 64 150mm 150 Pneumatic In-line-mounted pneumatic actuator F100 100 200mm 200 In-line-mounted pneumatic actuator with reed switches F150 150 250mm 250 * Non-standard option 300mm 300 350mm *1 350 For details of 'plug & play' motor controllers please see section 13 SA P PS * 2 for SS actuation option only xample onfigured Part Number: LSM38-200-SS-LA UP * 3 for SS & S options only = LSM, F38 flange 38, 200mm stroke 200, side-mounted stepper motor SS, and digital linear scale LA * 1 F38 flange only 98 Linear Motion and Alignment Should your requirements fall outside our standard specifications then please contact us at: 44 (0)1323 811188 sales@uhvdesign.com 99

Long Travel Linear Shift Mechanism Rotary Source LSML Shutters xample LSML imensions BOR F XTN = A RTRAT = B The LSML provides strokes of up to 1000mm (39") with high precision motion maintained throughout the stroke. The LSML is also chosen for shorter strokes where ultimate stability is required. LSML KY AVANTAGS Up to 1m stroke Smooth kinematic motion Reliable and rigid construction Plug and play production solutions True UV performance Bakeable to 250 G emountable bellows I Actuation methods For the complete range of 2 drawings & 3 models contact us or visit The LSML series of long travel Linear Shift Mechanisms, incorporates an upgraded structure with rear spine and large bore shafts and supports. The rigid structure maintains precise motion and unrivalled stability with strokes up to 1m. igh duty cycle production LSMLs are available providing reliable, smooth and rigid motion with long operational life. Production ready LSMLs can be supplied with pre-wired switches and connectors for 'plug & play' operation. The series can be actuated via a manual handwheel, motor or stepper motor. Motorised LSMLs are fitted with bakeable limit and home switches, pre-wired to a single, bakeable connector mounted on the frame. LSMLs are compatible with UV esign s SA and Stepper motor controller range. ach LSML can be supplied with a digital linear scale, offering visual position indication with 10 micron resolution. LSML38 A B F G I LSML38-200 330.3 130.3 415.3 160 75 38 163 39 103 LSML38-800 1107.5 307.5 1205 160 75 38 163 39 103 LSML64 A B F G I LSML64-200 325 125 4.2 204 161.4 65 219 64 161.4 LSML64-800 1073 273 1163 204 123 65 219 64 161.4 imension drawings for the complete range can be downloaded from LSML Part ode Generator MOL LSML Flange ode Flange information Bolt holes lear Flange Size Travelling flange Mounting flange Bore (mm) Maximum Bakeout 38 F38 70mm (2.75") O F M6 Tapped lear holes 38 250 64 F64 114mm (4.5") O F Tapped lear holes 65 250 Flange SIze (select one) LSML F38 38 200mm 200 Stroke Actuation Options (select one) (select one) F64 64 300mm 300 Manual Motorisation Linear Scale Manual handwheel ngraved scale S Side-mounted stepper motor SS igital Scale LA 400mm *1 400 Side-mounted 24V motor S Linear encoder *2 N 500mm *1 500 Side-mounted controller with motor & pre-wired switches 600mm *1 600 800mm *1 800 1000mm *1 1000 *2 * 1 Use of bellows suport tube recommended * 2 F64 flange only For details of 'plug & play' motor controllers please see section 13 SA * 2 for SS actuation option only xample onfigured Part Number: LSML64-800- = LSML, F64 flange 64, 800mm stroke 800, and manual actuation 100 Linear Motion and Alignment Should your requirements fall outside our standard specifications then please contact us at: 44 (0)1323 811188 sales@uhvdesign.com 101

ompact Linear Shift Mechanism Rotary Source LSM Shutters A compact solution to linear motion along the port axis (Z). The LSM series provides the shortest available flange-to-flange dimension, without compromising on performance or reliability. LSM KY AVANTAGS ompact design Smooth kinematic motion Reliable and rigid construction True UV performance Bakeable to 250 xample LSM imensions BOR F For the complete range of 2 drawings & 3 models contact us or visit XTN = A RTRAT = B emountable bellows assembly G The LSM compact series offers the shortest flange-to-flange dimension in the range. As such, the series is offered with limited flange and stroke options. Actuation methods The series can be actuated via a manual handwheel, pneumatic cylinder, motor or Stepper motor. ach LSM can be supplied with a digital linear scale, offering visual position indication with 10 micron resolution. Flange information Bolt holes lear Bore Maximum MOL Flange code Flange size Travelling flange Base flange (mm) Bakeout LSM 38 F38 (2.75" O) M6 Tapped M6 Tapped 38 250 LSM38 A B F G LSM38-25 63 38 173 142 75 38 147.5 39 LSM38-50 92 42 202 142 75 38 147.5 39 LSM38-75 125 50 235 142 75 38 147.5 39 LSM38-100 163 63 273 142 75 38 147.5 39 imension drawings for the complete range can be downloaded from LSM Part ode Generator Flange SIze Stroke Actuation Options (select one) (select one) LSM F38 38 25mm 25 50mm 50 Manual Motorisation Linear Scale Wiring* Manual handwheel Side-mounted stepper motor SS ngraved shaft igital Scale S LA Upgrade with switches for connection to controller 75mm 75 Side-mounted 24V motor S * for SS & S options only UP 100mm 100 Pneumatic In-line-mounted pneumatic actuator 150mm 150 In-line-mounted pneumatic actuator with reed switches For details of 'plug & play' motor controllers please see section 13 P PS xample onfigured Part Number: LSM38-100-P = LSM, F38 flange 38, 100mm stroke 100 with pneumatic actuation P 102 Linear Motion and Alignment Should your requirements fall outside our standard specifications then please contact us at: 44 (0)1323 811188 sales@uhvdesign.com 103

Linear Shift Mechanism With Tilt LSMT Smooth kinematic linear motion along the port axis (Z) with the additional facility to tilt the travelling flange so it serves as an integrated port aligner. This makes the LSMT ideal for applications where precise alignment with a fixed point is essential. LSMT KY AVANTAGS Up to 150mm stroke /- 2 tilt for final alignment Adjustment via 4 threaded support shafts Smooth kinematic motion Bakeable to 250º emountable bellows assembly xample LSMT imensions BOR For the complete range of 2 drawings & 3 models contact us or visit F XTN = A RTRAT = B G The LSMT is based on the standard LSM series with the additional facility to tilt the moving flange by /- 2 for final alignment, acting as an integrated port aligner. Typically used on beamlines to align diagnositcs or for ion/sputter source alignment. Adjustment is actuated via four threaded support shafts. All flanges in the series are supplied with tapped bolt holes on the base flange as standard. Actuation methods The series can be actuated with a manual handwheel, pneumatic cylinder, motor or stepper motor. MOL LSMT Flange code Flange information Flange size Bolt holes Travelling flange tilt /-2 AXIS TILT lear Bore (mm) Maximum Bakeout 38 F38 70mm (2.75") O F M6 Tapped /-2 38 250 64 F64 114mm (4.5") O F Tapped /-2 65 250 LSMT38 A B F G LSMT38-50 142 92 213 155 75 38 165 39 LSMT38-100 199.5 99.5 268 155 75 38 165 39 LSMT38 A B F G LSMT64-50 180.5 130.5 307 203 122.5 65 213 64 LSMT64-100 230.5 130.5 307 203 122.5 65 213 64 LSMT Part ode Generator Flange SIze Stroke Actuation Options (select one) (select one) LSMT F38 38 25mm 25 F64 64 50mm 50 Manual Motorisation Linear Scale Wiring* Manual handwheel ngraved shaft S Upgrade with switches for connection to controller Side-mounted stepper motor SS igital Scale LA 75mm 75 Side-mounted 24V motor S 100mm 100 Pneumatic In-line-mounted pneumatic actuator 150mm 150 In-line-mounted pneumatic actuator with reed switches For details of 'plug & play' motor controllers please see section 13 P PS * for SS & S options only xample onfigured Part Number: LSMT38-100-P = LSMT, F38 flange 38, 100mm stroke 100 with pneumatic actuation P UP 104 Linear Motion and Alignment Should your requirements fall outside our standard specifications then please contact us at: 44 (0)1323 811188 sales@uhvdesign.com 105

Linear Shift Mechanism With X Travel Rotary Source LSMX Shutters Thumb wheel provides /-5mm lateral (X axis) movement Linear motion along the port axis (Z) with the additional facility to adjust the travelling flange laterally (X axis) to facilitate alignment. The travelling flange angle remains constant throughout actuation. LSMX KY AVANTAGS /- 5mm lateral (X axis) motion Smooth kinematic alignment Reliable and rigid construction True UV performance Bakeable to 250 xample LSMX imensions BOR F For the complete range of 2 drawings & 3 models contact us or visit XTN = A RTRAT = B emountable bellows assembly G The LSMX is based on the standard LSM series. Where the LSMX version differs is that, in addition to the Z motion, the user has the option to adjust the X motion of the moving flange by up to /-5mm via a manual thumb wheel. The thumb wheel can be moved to the opposite side if required. Thumb wheel for /-5mm adjustment LSMT38 A B F G This is useful if the user needs the flexibility to make lateral alignment adjustments to the linear shift without altering the travelling flange angle. A typical application would be the alignment of a sample holder with a sample transfer arm within the system. LSMX38-50 159.6 109.6 222 155 105 38 189 39 LSMX38-100 235.4 135.4 300 155 105 38 189 39 LSMX Part ode Generator /-5mm X-travel Flange information Travelling flange lear Bore Maximum MOL Bolt holes Flange code Flange size offset (X motion) (mm) Bakeout 38 F38 70mm (2.75") O F M6 Tapped /-5mm 38 250 LSMX 64 F64 114mm (4.5") O F Tapped /-5mm 65 250 Flange SIze (select one) LSMX F38 38 50mm 50 Stroke Actuation Options (select one) (select one) F64 64 100mm 100 Manual Motorisation Linear Scale Wiring*2 Manual handwheel Side-mounted stepper motor SS ngraved shaft igital Scale S LA Upgrade with switches for connection to controller 150mm 150 Side-mounted 24V motor S Linear encoder *1 N Pneumatic Side-mounted controller with motor & pre-wired switches In-line-mounted pneumatic actuator In-line-mounted pneumatic actuator with reed switches For details of 'plug & play' motor controllers please see section 13 SA P PS * 1 for SS actuation option only * 2 for SS & S options only xample onfigured Part Number: LSMX38-150-SS-N = LSMX, F38 flange 38, 150mm stroke 150 with sidemounted stepper motor SS and linear encoder N UP 106 Linear Motion and Alignment Should your requirements fall outside our standard specifications then please contact us at: 44 (0)1323 811188 sales@uhvdesign.com 107

Production-Proven Linear Shift Mechanisms Linear Shift Mechanisms for production environments In addition to the main ranges of Linear Shift Mechanisms (LSMs), variants designed specifically to work in demanding high duty cycle production environments are available. Application specific design With the world's largest range of LSMs at their disposal, UV esign's in-house design team can customise any of the standard designs to specifically match production requirements. ustomised designs can accommodate the required flange size, stroke, bore size, duty cycle and space envelope. In addition, any required sensors, motors and encoders can be incorporated and pre-wired for plug and play operation. All production LSMs benefit from: Ultra-stiff construction for minimal deflection igh cantilevered load capacity Ball screw drive mechanism with recirculating linear slides Bellows with greater than 3 million cycles guaranteed Manufactured and assembled for use in ultra clean applications UV esign's in-house manufacturing facility enables us to cost-effectively and rapidly produce highly toleranced, high quality components. omponents are cleaned prior to assembly in an ISO 7 lass 10,000 clean room. 1 Linear Motion and Alignment Should your requirements fall outside our standard specifications then please contact us at: 44 (0)1323 811188 sales@uhvdesign.com 109

Rotary Source Shutters Port Aligner Range xample imensions For the complete range of 2 drawings & 3 models contact us or visit PA KY AVANTAGS nables the distance and angular relationship between two flanges to be adjusted, where a fixed»any-orientation» mounting /- 5mm axial adjustment P = G F FLANG SIZ BOR F 5.0 LINAR AN 3 ANGULAR AJUSTMNT flange supports three equi-spaced threaded shafts, /- 3 angular tilt and in parallel, a travelling flange has adjustable floating mounts. A typical application would be the final alignment of sample transfer arms. igh quality flexible 316L bellows accommodates motion, whilst maintaining ultra-high vacuum Bakeable to 250 The Port Aligner range enables the distance and angular relationship between two flanges to be adjusted. The range consists of five series, which can be supplied with either tapped or clear bolt holes on the flanges. ach range provides /-5 mm axial length adjustment, with /- 3 angular tilt. The fixed flange supports three equi-spaced threaded shafts. Alignment of the travelling flange is achieved by adjusting the floating mounts attached to each threaded shaft. The port aligner can be mounted in any-orientation and is bakeable to 250. 3-OFF AJUSTMNT POSTS TRA '' QUI- SPA ON 'G' P MI POINT = A 5.0 B ssentially, this is a simple device that once adjusted, provides a stable platform. The design consists of two approximately parallel flanges, one of which remains fixed, whilst the position of the second may be adjusted with respect to the first. A high quality, flexible, 316L edge-welded bellows, spans the flanges to accommodate the required motion while ensuring an all-metal vacuum enclosure. Port Aligner A B F G PA35 59 73.4 106 20 38 88 PA64 75 93 166 26 M12 65 140 PA100 90 1 206 26 M12 102 180 PA150 100 125 279.4 45 M16 127 238.4 PART NUMBR PA35- PA35-T PA64- PA64-T PA100- PA100-T PA150- PA150-T PA200- PA200-T PA200 100 125 329.4 44 M16 127 290 Flange size F38 70mm (2.75") O F F64 114mm (4.5") O F F100 152mm (6") O F F150 203mm (8") O F F200 254mm (10") O F PA Part ode Generator Flange bolt hole type Axial length adjustment lear M6 Tapped M6 lear Tapped lear Tapped /- 5mm lear Tapped lear Tapped Flange SIze (select one) ole Type (select one) PA F38 38 lear holes on flanges F64 64 Tapped holes on flanges T xample onfigured Part Number: PA64- = PA, F64 flange 64, clear holes on flanges Tilt /- 3º F100 100 Bellows clear bore Bakeout temperature 38mm 65mm 102mm 127mm 250º 127-200mm (made to order) F150 150 F200 200 110 Linear Motion and Alignment Should your requirements fall outside our standard specifications then please contact us at: 44 (0)1323 811188 sales@uhvdesign.com 111