VRG Series. Versatile Robust H and T Drive Gantry. core motors (ACM series) or ironless motors (AUM series)

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VRG Series Versatile Robust H and Drive Gantry Direct drive, zero backlash linear motor Versatile gantry with drive or H drive configuration, with options of various iron core motors (ACM series) or ironless motors (AUM series) type measurement using direct linear positioning encoder of resolution 0.5μm, 1μm or the versatile sin/cos encoder; or H type measurement using dual encoders on the bottom axes for better positional accuracy and repeatability High motor constant offers high peak and continuous force which provides fast motion timing Stable and consistent motion performance with short settling time to achieve higher throughput. 129

Motor Parameter Model Drive ype1 Axis op Bottom Model Motor ACM1-L50 ACM3-S1 Performance Parameters Unit Continuous Force, coil @100 C N 182 293 Peak Force N 831.4 878 Motor Constant N/SqRt(W) 25.6 29.4 Continuous Power W 50.3 99.1 Peak Power W 1050.6 891.6 Magnetic Period mm 20 42 Max Coil emperature C 130 130 Continuous Current Arms 4.2 4.8 Peak Current Arms 19.2 14.4 Force Constant N/Arms 43.3 61.0 Back EMF Constant Vpeak/m/s 35.4 49.8 Inductance mh 10.4 38.0 Phase Resistance @25 C Ohms 2.85 4.30 Magnetic Attraction N 1619 1.45 Dimension Drawing VRG510 Figure 1: VRG510 GANRY 130

Granite Bottom and Side Mounting Hole Model Drive type Axis Effective Stroke Moving Mass otal Mass Sensor Hard Stopper (mm) (Kg) (Kg) (mm) (mm) VRG510 op 510 4.6 29 514 530 Bottom 510 34.8 103 514 530 Note that granite mass is approx. 778Kg. Performance Parameter Specification Parameter Unit VHG510 2 Straightness ±3µm/25mm, NE±10µm for FS 2 Flatness µm ±3µm/25mm, NE±10µm for FS Repeatability (0.5µm resolution) ±4 Repeatability (1µm resolution) ±5 Repeatability (Analogue) counts ±5 X-Y Orthogonality arc-sec 10 131

Part Numbering (Rapid Delivery Series) VRG op Axis Bottom Axis Stroke Drive 1 Sensor Motor Model 4 Motor Model 5 ype Measurement ype 3 Encoder Resolution (μm) B1- ACM1-L50 510 B2S- ACM3-S-S1 H 1- ACM1-L50 J 0.5 K H 1 B2P- ACM3-P-S1 Rail Clearance Height 6 (mm) Default - 165 180-180 200-200 1. In -drive gantry, there is only 1 motor at the bottom axis whereas H-drive gantry has 2 motors at the bottom axis for better performance. 2. All measurement taken when the stage is mounted on a 5 micron flat granite base and with 8kg load. 3. For -measurement, there is only 1 linear encoder at the bottom axis. For H-measurement, there are 2 encoders at the bottom axis for better performance. 4. he preferred motors for the top axis are in the table above. For other motors e.g. AUM series, pls contact us for more details. 5. he preferred motors for the bottom axis are in the table above. For other motors e.g. AUM series, pls contact us for more details. 6. Clearance height is the distance measured from granite top to the bottom of the top axis carriage. Pls refer to Figure 1 and 2. he minimum clearance is 165mm by default. 7. For applications that have specific straightness and flatness requirements, please contact us for more details. Example: VRG510--1-B2S-J--1.0--180 132

Motor Parameter Model Drive ype1 Axis op Bottom Model Motor ACM1-L50 ACM1-L50 Performance Parameters Unit Continuous Force, coil @100 C N 182 182 Peak Force N 831.4 831.4 Motor Constant N/SqRt(W) 25.6 25.6 Continuous Power W 50.3 50.3 Peak Power W 1050.6 1050.6 Magnetic Period mm 20 20 Max Coil emperature C 130 130 Continuous Current Arms 4.2 4.2 Peak Current Arms 19.2 19.2 Force Constant N/Arms 43.3 43.3 Back EMF Constant Vpeak/m/s 35.4 35.4 Inductance mh 10.4 10.4 Phase Resistance @25 C Ohms 2.85 2.85 Magnetic Attraction N 1619 1619 Dimension Drawing VRG620 Figure 2: VRG620 GANRY 133

Granite Bottom and Side Mounting Hole Model Drive type Axis Effective Stroke Moving Mass otal Mass Sensor Hard Stopper VRG620 (mm) (Kg) (Kg) (mm) (mm) op 620 4.85 32 624 630 Bottom 620 38.3 122 624 630 Note that granite mass is approx. 778Kg. Performance Parameter Specification Parameter Unit VHG620 2 Straightness ±3µm/25mm, NE±12.5µm for FS 2 Flatness µm ±3µm/25mm, NE±12.5µm for FS Repeatability (0.5µm resolution) ±4 Repeatability (1µm resolution) ±5 Repeatability (Analogue) counts ±5 X-Y Orthogonality arc-sec 10 134

Part Numbering (Rapid Delivery Series) op Axis Bottom Axis Stroke Drive 1 Sensor Motor Model 4 Motor Model 5 ype Measurement ype 3 Encoder Resolution (μm) Rail Clearance Height 6 (mm) VRG 620 1- ACM1-L50 H B1- ACM1-L50 B2S- ACM3-S-S1 B2P- ACM3-P-S1 J K H 0.5 1 Default - 165 180-180 200-200 1. In -drive gantry, there is only 1 motor at the bottom axis whereas H-drive gantry has 2 motors at the bottom axis for better performance. 2. All measurement taken when the stage is mounted on a 5 micron flat granite base and with 8kg load. 3. For -measurement, there is only 1 linear encoder at the bottom axis. For H-measurement, there are 2 encoders at the bottom axis for better performance. 4. he preferred motors for the top axis are in the table above. For other motors e.g. AUM series, pls contact us for more details. 5. he preferred motors for the bottom axis are in the table above. For other motors e.g. AUM series, pls contact us for more details. 6. Clearance height is the distance measured from granite top to the bottom of the top axis carriage. Pls refer to Figure 1 and 2. he minimum clearance is 165mm by default. 7. For applications that have specific straightness and flatness requirements, please contact us for more details. Example: VRG620--1-B2S-J--1.0--180 135