gan power Energy-efficient power electronics with Gallium Nitride transistors Leti, technology research institute Contact:

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gan power Energy-efficient power electronics with Gallium Nitride transistors, technology research institute Contact: leti.contact@cea.fr

A market in growth GaN devices for next-era power-electronics applications $ 600.0M $ 500.0M $ 400.0M $ 300.0M $ 200.0M $ 00.0M $ 0.0M Accelerated Scenario Nominal Scenario 204 205 206 207 208 209 2020 GaN devices market size (m$) Source: Yole, GaN and SiC devices for power electronics applications The GaN devices market for powerelectronics applications will explode in 206, reaching US$303 million in 2020, according to Yole Développement ( GaN and SiC devices for power electronics applications - July 205). But growth could accelerate in 207. In this case, the market s size will reach.8x that of the nominal scenario by 2020. is a technology research institute at CEA Tech. It has been involved in GaN/Si technology development since 2007, starting with the development of the material a key in GaN-on-silicon device performance and cost. A large range of applications CEA develops epitaxial GaN on 200mm silicon wafers and achieved state-of-the art electrical performance in 205. is already involved with many industrial end users to develop new integrated systems with GaN inside. These mainly are for EV, in which GaN/Si devices are well adapted for DC-DC converters to improve power density for a more compact converter, increasing the final system efficiency. Power source 3 phase AC AC line Power 5,3B$ 2,8B$ The current GaN devices market is mainly dominated by devices <200V. 600V devices are expected to take off and keep growing. While SiC is used for high-voltage applications, GaN is mainly used for low voltage. The 600-900V range will be the battlefield. 48V DC Power 2,2B$ 00V 600V 200V Voltage GaN MARKET SEGMENTATION

Why GaN? Thanks to its perfomance, GaN WILL IMPROVE CONVERTER POWER DENSITY AT LOW COST For its performance GaN devices offer five key characteristics: high dielectric strength high operating temperature high current density high speed switching low on-resistance The special features of GaN such as high voltage potential, ease of miniaturization and high-speed switching, enable GaN to achieve high breakdown voltage and low conduction resistance. The high breakdown voltage is achieved because GaN has a wide band gap property. The low conduction resistance is achieved due to the high 2D electron gas mobility and density. Advantage in power supply circuits V.µm - High Breakdown strength Advantage in power supply circuits High electron mobility more current capability Performance 0.8 0,.6 0.4 0.2 0 Infineon 400 Silicon MOS 300 cm² V - s - Advantage in power supply circuits High operating temperature [ C] 600 500 GaN 400 300 SiC 200 Si 00 200 2000 500 00 000 Infineon 500 Silicon IGBT,5 5 2 0 5 2,5 20 3 25 Wolfspeed Semiconductor type 3,5 [ev] [06 cm/s] SiC MOS Advantage in power supply High band gap = smaller size Advantage in RF circuits High field saturation speed and low parsitic capacity GaN MOS Si MOS Transistor Gate Source Source Large onresistance Drain Vertical Large area electron For system break innovation Liten/Ines GaN Gate Source Drain Small on-resistance electron Lateral Small area For more efficient power converter Easier monolithic integration capability More clever device with new integrated functions: temperature sensor, pre-driver, short circuit protection... Bidirectional switch High capabilities component Very low Ron.S Very high speed commutation switching Bidirectional monolithic component adapted to 4-quadrant power conversion Smaller, more integrated and more efficient. Smaller device with more integrated function Best performance vs. silicon (equivalent as SiC) Technology performance *performance = /FOM normalized Best performance vs. silicon, cheaper than silicon and SiC solution GaN transistors enable the compact design of LED

what next? from discrete... to IC Why? LETI S VALUE PROPOSITION IS A COMPLETE CHAIN from design to system integration and optimization of converter 208 2022 2025 Function shift Co-integration shift High frequency shift GaN/Si bidirectional switch 3D packaging and 3D WLP Simple monolithic integrated functions Multicell and interleaved / Multilevel converter topologies Passive HF capability (inductance & capacity integration) Monolithic integrated functions Intelligent 3D packaging integration High-temperature isolated driver with embedded power supply & digital driver 200V device capability with Ron.S < mohms.cm 2 Integrated passive HF capability GaN Integrated Circuits (integrated driver + power in one package: SoC with RF) High temperature capability W-kW market component packaging characterization & industrial tests system integration 200mm CMOS compatible GaN/Si technology 200mm GaN/Si epitaxy with low leakage at 600V 600V N.ON and N.OFF devices Bidirectional GaN/Si Device Multi approaches GaN technologies: Low gate leakage device architecture Low Ron capability for 600V (Ron.S < mohms.cm 2 ) High positive threshold voltage for N.OFF devices MOS HEMT devices 2 technology approach: Optimized module for high current capability (KW segment): Low inductance integrated power module Integrated driver (SIP) Capacity integration near active transistors Disruptive 3D packaging integration for more performance at high frequency (W segment): Pillar and bump connection technology Silicon active interposer TSV technology 3D wafer level packaging with copper leadframe Fan out wafer level packaging Specific electrical characterization: Current collapse (Ron_dyn) & Vt shift analysis Dynamic test: clamping inductive switching, gate charge Full static device characterization Technological reliability test and failure analysis: Gate oxide integrity, TDDB at high voltage, HTRB, C(V) Emission microscopy, DLTS, full physical characterization on a dedicated platform Innovation for a more compact, efficient and low-cost converter: New high-frequency system design architecture to reduce passive size (resonant topology, matrix converter ) Better thermal management New high-temperature isolated driver with embedded power supply capability Monolithic commuted cell integration (capacity + half bridge)

Japan Office - 0/207 - Photo credits: V.Guilly, P.Avavian; fotolia: Arjuna Kodisinghe, kasto,franck Boston USA Office head Office ABOUT LETI is a technology research institute at CEA Tech and a recognized global leader in miniaturization technologies enabling smart, energy-efficient and secure solutions. Committed to innovation, its teams create differentiating solutions for s industrial partners. By pioneering new technologies, enables innovative applicative solutions that ensure competitiveness in a wide range of markets. tackles critical, current global issues such as the future of industry, clean and safe energies, health and wellness, safety & security s multidisciplinary teams deliver solid micro and nano technologies expertise, leveraging world-class pre-industrialization facilities. For 50 years, the institute has been building long-term relationships with its industrial partners providing tailor-made solutions and a clear intellectual property policy., technology research institute Commissariat à l énergie atomique et aux énergies alternatives Minatec Campus 7 rue des Martyrs 38054 Grenoble Cedex 9 France www.leti.fr