Miniature Proportional Valve Thermally Compensated Proportional Valve. Physical Properties

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VSO Miniature Proportional Valve Thermally Compensated Proportional Valve Typical Applications Gas Chromatography Mass Spectrometry Ventilators O 2 Concentrators/Conservers Anaesthesia Delivery & Monitors Pressure & Control Mass Control The VSO miniature proportional valve provides enhanced flow control for applications where precise control flow control is required up to 56 slpm. The VSO miniature proportional valve provides precise flow control of gas in proportion to input current. The valve can be controlled with either DC current or pulse width modulation along with closed loop feedback to deliver optimal system performance. Together with its ability to provide precise control over varying temperatures and media types, the VSO miniature proportional valve is ideally suited for manufacturers of medical and analytical equipment. Features Enables precise flow control for improved instrument accuracy Thermally compensated to maintain precise flow over a wide range of media Computer automated calibration and serialization for performance traceability Cleaned for Oxygen and Analytical Service use Proven performance tested to million life cycles RoHS compliant Physical Properties Valve Type: 2-Way Normally Closed Media: Air, argon, helium, hydrogen, methane, nitrogen, oxygen, & others Operating Environment: 32 to 131 F ( to 55 C) Storage Temperature: -4 to 158 F (-4 to 7 C) Length: 1.79 in (45.3 mm) Width:.63 in (15.9 mm) Height:.67 in (17. mm) Porting: 1/8 (3 mm) barbs or -32 female; manifold mount (available with screens) Weight: 2.2 oz (63 g) Physical Properties Internal Volume:.31 in 3 (.58 cm 3 ) Filtration: (Suggested and Available) Models 1 & 2: 17 micron Models 3, 4, 5, & 6: 4 micron Direction: Inlet Port Port 2 Outlet Port Port 1 Electrical Power: 2. Watts maximum Voltage: See Table 2 Electrical Termination: 18 (45.7 cm) Wire Leads, PC Mount, Quick Disconnect Spade Wetted Materials Series 11 Body: 36 HO 2 Brass Series 25 Body: Nickel-Plated Brass Stem Base: 43 FR Stainless Steel and Brass 36 HT All Others: FKM; FFKM; 43 FR Stainless Steel; 3 Series Stainless Steel Performance Characteristics Leak Rate: The leakage shall not exceed the following values: Internal.2 SCCM of He with a differential pressure of 1 psid, 25 psid and 15 psid External.16 SCCM of He at 15 psi Pressure: to 5 psi (3.45 bar) to 75 psi (5.17 bar) to psi (6.89 bar) to 15 psi (.34 bar) See Table 1 Vacuum: -27 in Hg (-686 mm Hg) Orifice Sizes:. in (.25 mm). in (.51 mm).3 in (.76 mm).4 in (1.2 mm).5 in (1.27 mm).65 in (1.65 mm) Hysteresis: 7% of full scale current (Typical) 15% of full scale current (Max) VSO is a registered trademark of Parker Hannifin Corporation.

Flo ow Typical Air with VDC Coil @ 25psid (1.7 bar) All Models 25 15." (.25 mm) orifice." (.51 mm) orifice.3" (.76 mm) orifice.4" (1.2 mm) orifice.5" (1.27 mm) orifice.65" (1.65 mm) orifice 5 3 4 5 6 7 8 9 Current (ma) VSO Pressure vs Curves Models 1-6 Rate (slp pm) 7 6 5 4 3 2 4 6 8." (.25 mm) orifice." (.51 mm) orifice.3" (.76 mm) orifice.4" (1.2 mm) orifice.5" (1.27 mm) orifice.65" (1.65 mm) orifice 4 6 8 1 14 16 Table 1: Pressure and Capabilities Orifice Diameter Maximum Operating Inlet Pressure Maximum Operating Pressure Differential. in (.25 mm) 15 psig (.34 bar) 15 psid (.34 bar). in (.51 mm) 15 psig (.34 bar) 15 psid (.34 bar).3 in (.76 mm) 15 psig (.34 bar) 15 psid (.34 bar).4 in (1.2 mm) 15 psig (.34 bar) 75 psid (5.17 bar).5 in (1.27 mm) 15 psig (.34 bar) psid (6.89 bar).65 in (1.65 mm) 15 psig (.34 bar) 5 psid (3.45 bar)

VSO Sizing Charts Model 1 -. (.25 mm) Orifice 6 1 2 3 4 5 6 7 8 9 7 5 4 3 2 1 4 6 8 1 14 16. 7.5 5. 2.5. Model 2 -. (.51 mm) Orifice 1 2 3 4 5 6 7 8 9 4 6 8 1 14 16 Model 3 -.3 (.76 mm) Orifice 3 25 15 5 1 2 3 4 5 6 7 8 9 4 6 8 1 14 16. 1. 2. 3 3. 4 4. 5 5.. 17.5 15. 12.5. 75 7.5 5. 25 2.5. Model 4 -.4 (1.2 mm) Orifice 3 4 5 6 7 8 Rate (s Model 5 -.5 (1.27 mm) Orifice 7 5 slpm)6 4 3 1 2 3 4 5 6 3 4 5 6 7 8 9. 5.5 1. 15 1.5 2. 25 2.5 3 3. 5 4 3 Model 6 -.65 (1.65 mm) Orifice 5 15 25 3 35 4 45 5

VSO Series 11 Manifold Mount Pneumatic Interface VSO Series 11 Barbed VSO Series 25-32 Threaded VSO Series 11 Manifold Mount and Barbed Body Basic Valve Dimensions VSO Series 25-32 Threaded Body Basic Valve Dimensions

Coil Type: Wire Leads COIL TYPE: WIRE LEADS 2X #26 AWG. BLACK WIRES 18 1/2" ± 1/2" [469.9 ± 12.7] LG..625 [15.88].35 [7.75] 1.53 [38.9] APPROX. Electrical Interface Coil Type: 4 PC Pin* COIL TYPE: 4 PC PIN.18 [.46] SQ. PIN.195 [4.95].39 [9.9].25 ±.15 [6.35 ±.38].88 [22.4] Coil COIL Type: TYPE: QUICK Quick CONNECT Connect SPADE Spade.1 [2.79].195 [4.95].39 [9.9].43 [.9].18 [.46] UNITS IN. [mm.] *PCB Pin Layout (Coil Type 4 PC Pin) VSO PC PIN INTERFACE (.43 [.92]) BODY MOUNTING HOLE 2X Ø.125 [Ø3.18] (OPTIONAL).88 [22.35] PCB.39 [9.91] (.38 [.97]) PCB SOLDERING HOLE 4X Ø.52 [Ø1.32] THRU PAD Ø.125 [Ø3.18] COIL CONNECTIONS

Table 2: Electrical Requirements Minimum Available Voltage (VDC) Nominal Coil Resistance @ ᵒC (Ohms) Input Current for Full (ma) 5.5 11 34 8. 23 212 11.5 47 152 13.5 68 125. 136 91 29. 274 66 41. 547 47 56. 94 32 VSO Installation and Use Typical Valve Set-up VSO Valve Pressure setup shown above. Vacuum setup is also available. Valve Electrical Control Basic Control: The VSO valve can be controlled by either voltage or current; however, it is highly recommended that current control be employed to ensure the most repeatable valve flow performance. PWM Control: For PWM control, the signal applied to the valve should have a frequency between 5-12kHz. Optimum frequency will be application dependent.

Suggested VSO Current Driver Schematic This simple current driver circuit draws only 1 ma at the input control (-5VDC) and provides control for any VSO valve configuration regardless of valve voltage or resistance. Table 3 (below) describes the recommended R1 and R2 resistor values based upon the full shut-off current. Table 3: Selectable Resistor Values for a Low Current (1 ma) LM358-Based Current Driver Minimum Available Voltage (VDC) Nominal Coil Resistance @ Valve Drive Voltage (VDC) ᵒC (Ohms) Input Current for Full (ma) R1 (Ohms) R2 (Ohms) 5.5 7.5 11 34 5 33 8.. 23 212 499 221 11.5 13.5 47 152 5 16 13.5 15.5 68 125 44 113. 22. 136 91 44 82 29. 31. 274 66 499 66.5 Manifold & O-Ring Dimensions & Design Not shipped with valves. I.D. = Ø.114 ±.5 [Ø2.9 ±.13] W =.7 ±.3 [1.78 ±.8] O.D. = Ø.254 [Ø6.45] REFERENCE I.D. "W"

Accessories O-Ring (Manifold Seal) Dimensions Screw 4-4 x 5/8 Pan Head, Phillips 19-724-2 (2 required for each valve) 191-115- (2 required for each valve) I.D. = Ø.114 ±.5 [Ø2.9 ±.13] W =.7 ±.3 [1.78 ±.8] O.D. = Ø.254 [Ø6.45] REFERENCE I.D. "W" Ordering Information Sample Part ID VSONC 1 S 11 V A F 8 Description Standard Model Number: Maximum Operating Pressure / Orifice Size Series Body Series Elastomer/ Body Material Coil Voltage/Coil Resistance/Coil Current* Electrical Interface Pneumatic Interface Options 1: 15 psi /." (.25 mm) 11: Series 11 V: FKM / Brass A: 5.5 VDC / 11 Ohm /.34 Amp F: Wire Leads, 18" (45.7 cm) : Manifold Mount 2: 15 psi /." (.51 mm) 25: Series 25 C: FFKM / Brass B: 8 VDC / 23 Ohm /.212 Amp P: PC Board Mount, 4 Pin 1: Manifold Mount w/screens 3: 15 psi /.3" (.76 mm) I: FFKM / Stainless Steel C: 11.5 VDC / 47 Ohm /.152 Amp Q: Quick Connect, Spade 5: -32 Threaded Female (Series 25) 4: 75 psi /.4" (1.2 mm) H: FKM / Stainless Steel D: 13.5 VDC / 68 Ohm /.125 Amp 8: 1/8" (3 mm) Barbs 5: psi /.5" (1.27 mm) E: VDC / 136 Ohm /.91 Amp 6: 5 psi /.65" (1.65 mm) F: 29 VDC / 274 Ohm /.66 Amp * Maximium voltage for continuous full flow, ambient temperture 55 C Accessories 19-724-2: O-ring, FKM,.114" ID x.7" Thick* * Not supplied with the valve. Used as a seal between the valve body and manifold. 191-115-: Screw 4-4 x 5/8" Pan Head ** **Not supplied with the valve. Used to mount the valve to a manifold. ORDER ON-LINE NOTE: In order to provide the best possible solution for your application, please provide the following requirements when contacting Applications Engineering: Media, Inlet & Outlet Pressures Minimum Required Rate System Supply Voltage Media & Ambient Temperature Range Please click on the Order On-line button (or go to www.parker.com/precisionfluidics/vso) to configure your. For more detailed information, visit us on the Web, or call and refer to VSO Series 11 Performance Spec. #79-2115-1 and Drawings #89-322-1 and #89-322-3. VSO Series 25 Performance Spec. #79-2115-1 and Drawing # 89-323-1. For more information call +1 63 595 15 or email ppfinfo@parker.com Visit www.parker.com/precisionfluidics PPF-MPV-2/US September 12