Gas Purification Systems: Z Series Provides a continuous supply of pure XCDA (extreme clean dry air) purge gas EGPS8 shown Aeronex Gas Purification Systems provide a continuous supply of pure gas at the lowest cost-of-ownership. Aeronex Gas Purification Systems are dual-bed, selfregenerating systems. They are available in both standalone systems and panel-mounted subsystems. All stand-alone gas purification systems; the EGPS4, EGPS8, and EGPS12 models; include a user-friendly touch screen PC and standard safety features. All systems may be configured to order with multiple options such as a moisture indicator, manual or automatic bypass valves. The panel-mounted subsystems (PGPS4 models) are offered specifically to OEMs and are designed to be integrated into a process tool. Aeronex Gas Purification systems utilize Aeronex ambient temperature purification technology, have a lowpressure drop, and offer a low cost-of-ownership. Contaminants are removed to sub-ppb (part-per-billion) and ppt (part-per-trillion) levels; the level of purity required to enable your process. Method of Purification Contaminants are removed from the process gas to subppb levels. They are removed through chemisorption, physisorption, oxidation and oxidative addition. System Overview & Features Aeronex Gas Purification Systems use two purifier beds in order to maintain a continuous flow of pure gas. One purifier bed is on-line while the other is in regeneration or is ready for use. The proprietary regeneration process is performed by flowing hot gas through the purifier, which weakens the bonds holding the contaminants before carrying them away. The result is renewed purification capacity. After the bed returns to ambient temperature, the bed is placed in a stand-by mode and is ready to go back online. Power failure will not damage the purifier system. Aeronex Gas Purification Systems address the challenge of resource conservation and help meet industry environmental goals because of the lower energy costs afforded by the use of ambient temperature purification technology and in-situ regeneration, which eliminates hazardous waste. Start-up service is provided, making it easy to add an Aeronex Gas Purification System to your process. An on-site Mykrolis service technician ensures the smooth deployment of your new gas purification equipment and provides on-site training. The systems are designed to easily allow for field maintenance and upgrades. Industry Standards Aeronex Gas Purification Systems conform to CE and SEMI S2 requirements. P r o d u c t S p e c i f i c a t i o n
Aeronex Gas Purification Systems: Z Series - Product Features Applications The Z Series removes gaseous contaminants such as SO 2, SO x, NO x, H 2 S, H 2 O, CO 2, siloxanes, ammonia, amines, acid gases, alcohols, and non-methane hydrocarbons to sub-ppb levels in CDA (air) gas. System Process & Instrumentation Diagram P&ID for Models: PGPS4Z EGPS4Z EGPS8Z EGPS12Z The Z Series is beneficial in the following applications: Photolithography FOUP cleaning and purging Stocker cleaning and purging Other applications that require XCDA purge gas Available Models PGPS4Z - Panel-mounted model for OEM use. For applications requiring a flow rate up to 120 slm. EGPS4Z -Enclosed model for use with applications requiring a flow rate up to 120 slm. EGPS8Z-Enclosed model for use with applications requiring a flow rate up to 300 slm. EGPS12Z-Enclosed model for use with applications requiring a flow rate up to 1000 slm. Safety Features Safety Features Description PGPS4 EGPS4 EGPS8 EGPS12 N/A Circuit Breaker Over Temperature Rise Condition EMO Button Remote EMO Remote Alarm Visual Alarm Provides additional electrical protection to the system and includes a lockout/tag-out. Monitored via thermocouple. Heaters sized to prevent runaway conditions. As a secondary precautionary device, a high-temperate hardware interlock is included on the EGPS4. When activated, power is removed from the cabinet. The system shuts down. The front panel and controller remain powered. Provides input for remote EMO activation and an output for remote signal of EMO condition. In the event of a minor alarm in the system not requiring an EMO shutdown, the system will send a signal to an external sensing device which alerts the facility of the alarm. In the event of an alarm, a detailed description of the alarm will be displayed in red on systems that include a touch screen. In the event of an alarm on a system with LEDs, a red LED indicator will activate. N/A Audible Alarm Alarm conditions result in an audible alarm. N/A Isolated Electrical Enclosure Electronics are physically isolated from the main purifier cabinet in an attached electrical enclosure in situations where high voltage lines are near potentially flammable gas. N/A 2
Aeronex Gas Purification Systems: Z Series - Product Specifications Performance Specifications Model PGPS4 EGPS4 EGPS8 EGPS12 Gases Purified CDA (Air) Media Type Inorganic Contaminants Removed Volatile Acids, Volatile Bases, Refractory Compounds, Condensable Organics, Non-Condensable Organics, Moisture Outlet Purity < 1 part-per-billion (ppb)* Operating Pressure Range 60-250 psig (515-1825 kpa) 60-150 psig (515-1136 kpa) Pressure Drop <10 psi @ 120 psig inlet and max rated flow <17 psi @ 120 psig inlet and max rated flow Max Flow Rate 120 slm 300 slm 1000 slm Gas Operating Temperature -40 C to 60 C (-40 F to +150 F) Outlet Filtration 0.003 micron @ 99.9999999% efficiency Leak Rating 1 X 10-9 atm cc/sec *Outlet purity is significantly lower for some contaminants. Test data available upon request. Facility Specifications* Process Gas Input Process Gas Output Ventilation Power Requirements Specifications PGPS4 EGPS4 EGPS8 EGPS12 1/4 Face Seal 1/4 Tube Stub 1/2" Tube Stub 3/4" Tube Stub 1/4 Face Seal 1/4 Tube Stub 1/2" Tube Stub 3/4" Tube Stub N/A 4 Duct Exhaust Flow N/A 50 cfm Standard Terminal Power Requirements 200-240 VAC Power Consumption 50 Watts at idle and process mode; 275 Watts during regen 50 Watts at idle and process mode; 800 Watts during regen Regeneration Max Regen 3 Days (May be configured per customer inlet gas purity) Frequency Regen Duration 48 hours Regen Gas Output Pressure Atmospheric 1/4" Tube Stub Instrument Air Gas & Pressure CDA or N 2 @ 80-100 psig (653-791kPa ) 1/4 Compression Fitting Physical Requirements Mounting Wall Floor Shipping Weight 70 lbs (32 kg) 85 lbs (39 kg) 250 lbs (113 kg) 450 lbs (205 kg) Operating 15-40 C Indoor (60-104 F Indoor) Conditions Humidity 10-90% RH non-condensing *It is the customer s responsibility to ensure that the equipment is installed according to local building code requirements. 3
Aeronex Gas Purification Systems: Z Series - Model PGPS4 Model Dimensions & s 4 5 6 7 5 6 7 28.00 [711 mm] 1 2 3 15.00 [381 mm] FRONT VIEW 11.00 [279 mm] SIDE VIEW TOP VIEW SYSTEM CONNECTIONS 1 Communications Port For user interface via PC 2 LED Indicators For Main Power, Bed Online, Bed Regen, Heaters, and Alarms 3 Start Used to begin system operations and to clear alarms 4 A/C Terminal Block Power connection 5 Gas Exhaust/Regen Vent Exhausts regen gas 6 Process Gas Input Inlet gas (not purified) 7 Process Gas Output Outlet gas (purified) PANEL INFORMATION This equipment is not enclosed, therefore, it is the user s responsibility to ensure that it is installed in compliance with local safety requirements for gas equipment. The PGPS4 is designed using SEMI S2 guidelines (for gas equipment enclosures), however, because it is a subsystem, it must be certified with the final product in which it is used. 4
Aeronex Gas Purification Systems: Z Series - Model EGPS4 Model Dimensions & s 3.00 [76 mm] 5 13.46 [342 mm] 1 2 3 4 6 7 8 9 10 11* 12 32.00 [813 mm] 13 18.00 [457 mm] 12.00 [305 mm] FRONT VIEW SIDE VIEW TOP VIEW SYSTEM CONNECTIONS 1 Audible Alarm Audible warning informs of alarm condition 2 Start Used to begin system operations and to clear alarms 3 EMO When activated, power is removed from the cabinet. The system shuts down. Front panel and controller remain powered. 4 Touch Screen For system status and interface 5 Circuit Breaker Provides additional electrical protection to the system and in some models also acts as an ON/OFF switch for the system. 6 Remote Alarm Interface Allows for remote alarm input and output with female 15 pin DB connector 7 Regen Gas Vent Exhausts Regen Gas 8 Exhaust Vent Allows ventilation 9 Process Gas Input Inlet gas (not purified) 10 Process Gas Output Outlet gas (purified) 11* Reference Atmospheric reference for the internal enclosure flow sensor. * N/A for Z Series 12 Instrument Air Supplies gas to the air operated control valves 13 A/C Power Input Power connection ENCLOSURE INFORMATION The ventilated enclosure is designed for indoor applications only. The enclosure has mounting locations on the back surface. The front panel is removable. 5
Aeronex Gas Purification Systems: Z Series - Model EGPS8 Model Dimensions & s 16.38 [416 mm] 1 2 3 4 58.92 [1497 mm] 5 6 7 8 9 10* 11 12 22.50 [572 mm] FRONT VIEW 14.92 [379 mm] SIDE VIEW TOP VIEW SYSTEM CONNECTIONS 1 Touch Screen For system status and interface 2 Audible Alarm Audible warning informs of alarm condition 3 Start Used to begin system operations and to clear alarms 4 EMO When activated, power is removed from the cabinet. The system shuts down. Front panel and controller remain powered. 5 Remote Alarm Interface Allows for remote alarm input and output with female 15 pin DB connector 6 Instrument Air Supplies gas to the air operated control valves 7 Exhaust Vent Allows ventilation 8 Process Gas Input Inlet gas (not purified) 9 Circuit Breaker Provides additional electrical protection to the system and in some models also acts as an ON/OFF switch for the system. 10* Reference Atmospheric reference for the internal enclosure flow sensor. *N/A for Z Series 11 Process Gas Output Outlet gas (purified) 12 A/C Power Input Power connection ENCLOSURE INFORMATION The ventilated enclosure is designed for indoor applications only. The enclosure has bolt down locations on the bottom surface. The front panel is removable. 6
Aeronex Gas Purification Systems: Z Series - Model EGPS12 Model Dimensions & s 4.03 [102 mm] 1 2 3 4 72.08 [1831 mm] 5 6 7* 8 9 10* 11 12* 13 14 24.50 [622 mm] FRONT VIEW 17.88 [454 mm] SIDE VIEW TOP VIEW SYSTEM CONNECTIONS 1 Touch Screen For system status and interface 8 Exhaust Vent Allows ventilation 2 Audible Alarm Audible warning informs of alarm condition 9 Process Gas Output Outlet gas (purified) 3 Start Used to begin system operations and to clear alarms 10* Gas Monitor Located Below Cover. * N/A for Z Series 4 EMO When activated, power is removed from the cabinet. The system shuts down. Front panel and controller remain powered. 11 Instrument Air Supplies gas to the air operated control valves 5 Remote Alarm Interface Allows for remote alarm input and output with female 15 pin DB connector 12* Reference Atmospheric reference for the internal enclosure flow sensor. *N/A for Z Series 6 Process Gas Input Inlet gas (not purified) 13 Circuit Breaker Provides additional electrical protection to the system and in some models also acts as an ON/ OFF switch for the system. 7* Fire Sensor Located Below Cover - *N/A for Z Series 14 A/C Power Input Power connection ENCLOSURE INFORMATION The ventilated enclosure is designed for indoor applications only. The enclosure has bolt down locations on the bottom surface. The front panel is removable. 7
* Consult factory for more information. Z Series - Options & Ordering Information PGPS4 EGPS4 EGPS8 EGPS12 Panel-mounted model for OEM use. For applications requiring a flow rate up to 120 slm. Options Options Letter PGPS4 EGPS4 EGPS8 EGPS12 Designator Automatic Bypass Manifold A Manual Bypass Manifold M Moisture Indicator T Japanese Kit J N/A High Flow * N/A N/A N/A Available Part Numbers For use with applications requiring a flow rate up to 120 slm. For use with applications requiring a flow rate up to 300 slm. For use with applications requiring a flow rate up to 1000 slm. PGPS4Z EGPS4Z EGPS8Z EGPS12Z PGPS4ZA EGPS4ZA EGPS8ZA EGPS12ZA PGPS4ZAT EGPS4ZAT EGPS8ZAT EGPS12ZAT PGPS4ZM EGPS4ZATJ EGPS8ZATJ EGPS12ZATJ PGPS4ZMT EGPS4ZAJ EGPS8ZAJ EGPS12ZAJ PGPS4ZT EGPS4ZM EGPS8ZM EGPS12ZM EGPS4ZMT EGPS8ZMT EGPS12ZMT EGPS4ZMTJ EGPS8ZMTJ EGPS12ZMTJ EGPS4ZMJ EGPS8ZMJ EGPS12ZMJ EGPS4ZT EGPS8ZT EGPS12ZT EGPS4ZTJ EGPS8ZTJ EGPS12ZTJ EGPS4ZJ EGPS8ZJ EGPS12ZJ Model Gas Series Options EGPS8 Z MJ Please contact your Mykrolis applications specialist for assistance in ordering your Aeronex Gas Purification System. All specifications are subject to change. Please verify prior to order. US Patent 6,361,696 8 Consult our applications specialists with any questions. Aeronex, Mykrolis, and XCDA are registered trademarks of Mykrolis Corporation. The Mykrolis logo is a trademark of Mykrolis Corporation. Legal/Trademarks: www.mykrolis.com/corporate.nsf/docs/legal Worldwide Offices: www.mykrolis.com/corporate.nsf/docs/worldwide U.S: Europe: Billerica, MA 978-436-6500 France 33 4 7635 73 00 Allen, TX 972-359-4000 Germany 49 816 595 110 San Diego, CA 858-452-0124 Asia: Japan: Singapore 65 6745 2422 Tokyo 81 3 5442 9718 Korea 82 31 738 5300 Kyushu 81 92 471 8133 People's Republic of China 86 21 5080 5600 Osaka 81 6 6390 0594 Taiwan 886 3 571 0178 Lit. No. PF1117ENUS Rev. B 06 January 2005 Printed in the U.S.A. 2004-2005 Mykrolis Corporation. All rights reserved. Mykrolis logo 2001. Mykron Mykron Microelectronics Co., Ltd. 上海资方微电子有限公司 Suite 318, B Office Tower, Poly Plaza No.14, Dong Zhi Men Street (South), Dong Cheng District Beijin g, 100027, China Tel. ( 86)10-6551 0500 Fax (86)10-6551 0501