Vacuum pump system type

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type VS*P Vacuum component C O N T E N T S Series variation 166 20 mm width universal type (/M) 168 10.5 mm width universal type (/M) 184 31.5 mm width discrete type (VSQP) 214 11 mm pitch manifold dedicated type (VSZPM) 226 M M 165

Series variation Vacuum changeover unit Series variation : Provided as standard : Option Piping method Components Nozzle diameter ø (1/10mm) M M Model type Vacuum changeover unit Series /M Series 20 mm width universal type unit Enable to control air flow and pressure for vacuum break. The vacuum break time can be shortened with the vacuum break circuit relief function. Self hold type is standard for vacuum solenoid valve. /M Series 10.5 mm width universal type unit Compact and slim vacuum unit. Either direct fixing or DIN rail installation is possible. High cycles are possible with 3-way vacuum valves (optional). VSQP Series 31.5 mm width dedicated unit Large vacuum units are optimum to control high flow. Normal open and normal close are used as standards for vacuum solenoid valve. VSZPM Series 11 mm pitch manifold dedicated unit Model no. M M VSQP Discrete Manifold Individual wiring Reduced wiring Vacuum control valve Valve for break Vacuum switch Vacuum filter Silencer Check valve 05 07 10 12 15 20 Vacuum valve effective area 3.5mm 2 (ø4), 5mm 2 (ø6) Vacuum valve effective area 2 way valve specifications: 3.5mm 2 (ø4), 4.5mm 2 (ø6) 3 way valve specifications: 3.0mm 2 (ø4), 3.6mm 2 (ø6) Page 168 184 Vacuum valve effective area 16.5mm 2 214 M M Wire-saving vacuum unit for manifold. Air consumption is reduced by suppressing valve energy consumption to 0.55 W. Compatible with a wide range of applications and broad vacuum sensor variations. VSZPM Vacuum valve effective area 4.5mm 2 226 166 167

Universal type vacuum changeover unit with break air flow and relief pressure adjusting needle Series Features M M Pressure control is added to the conventional vacuum break air flow control to prevent the work piece from blown away. Relief function (function to release excessive pressure) is incorporated in the vacuum break circuit to shorten vacuum break time. Use the vacuum-pump-compatible model when large amounts of vacuum air are required or when a vacuum must be generated for a long time. Vacuum pump Compressor Vacuum pad Extremely small/light workpiece Vacuum air Compressed air Pressure control added to vacuum break air's flow control * Vacuum break air refers to the air flow for releasing a vacuum. Vacuum air Vacuum break air Vacuum pad A manifold model also enables piping to be reduced. The piping direction is selectable from front or back to match the installation site. Three types of supply valves are available; self-holding, normally closed, normally open. The power-saving selfholding type is suitable for special applications such as the vacuum must be generated for a long time. LED display with enhanced visibility are used for the vacuum sensor display. 2 types vacuum sensor are available; with 2-point switch output, with analog output, to match your application. Connector wiring is used to facilitate wiring layout. 168

Specifications Descriptions Working fluid Working pressure range MPa 0.3 to 0.7 Ambient temperature range 5 to 50 Use vacuum kpa 0 to -101 Air Series Specifications Solenoid valve (for vacuum supply, vacuum break) specifications Pilot valve Descriptions Valve for vacuum supply Valve for vacuum break Actuation Direct operation Valve structure Rubber sealant, poppet valve Rated voltage 24 VDC 100 VAC 24 VDC 100 VAC Allowable voltage fluctuation range 24 VDC 10% 100 VAC 10% 24 VDC 10% 100 VAC 10% Surge protective circuit Surge absorber Bridge diode Surge absorber Bridge diode Power consumption 1.2W (with LED) 1.5VA (with LED) 1.2W (with LED) 1.5VA (with LED) Manual override Push type non-locking type Operating indication During coil exciting: Red LED ON Connector type (cable length: 500 mm) Electric connection Red: 24 VDC Red: 24 VDC Blue Black: COM Black: COM Blue Switching valve Descriptions Valve for vacuum supply Valve for vacuum supply Actuation Air pressure operation using pilot valve Valve structure Rubber sealant, poppet valve Withstanding pressure 1.05MPa Valve type Self hold, normally closed, normally open Normally closed Minimum excitation time 50msec (double solenoid type) Lubrication Not required M M Effective sectional area Air supply (PS) port size ø4: 3.5mm 2 1mm 2 ø6: 5mm 2 169

Series M M Vacuum switch with LED display specifications Descriptions With 2 point switch output (-W) With analog output (-A) Default set value - 50kPa (SW1), - 10kPa (SW2) -50kPa Current consumption Pressure detection method Working pressure range Set pressure range Withstanding pressure 40mA or less Carrier diffusion type semiconductor pressure switch 0 to -100kPa 0 to -99kPa 0.2MPa Storage temperature range -20 to 80 (atmospheric pressure, humidity 60%RH or less) Operating temperature range 0 to 50 (no freezing) Operation humidity range 35 to 85%RH (no freezing) Power voltage 12 to 24 VDC 10% ripple (P - P) 10% or less Protective structure IEC standards IP40 or equivalent Pressure setting point 2 1 Operation precision 3% F. S. max. (at Ta = 25 ) Hysteresis Fixing (2% F. S. max.) Variable (set point 0 to 15%) Switch output NPN open collector output 30V 80mA or less residual voltage 0.8V or less Output voltage - 1 to 5V Zero point voltage - 1 0.1 V Analog Span voltage - 4 0.1 V output Output current - 1mA or less (load resistance 5k and over) LIN/HYS - ±0.5% F. S. max. Responsiveness 2msec max. Indicator 0 to -99kPa (2 digit red LED display) Number of displays Approx. 4 times/sec. Display precision 3% F. S. 2 digit Resolution 1 digit Operating indication SW1: red LED lighting if setting pressure or more SW2: green LED lighting if setting pressure or more Red LED lighting if setting pressure or more 1. MODE switchover switch (ME, S1 or S2) 1. MODE switchover switch (ME or SW) Function 2. S1 setting trimmer (2/3 rotation trimmer) 2. SW setting trimmer (2/3 rotation trimmer) 3. S2 setting trimmer (2/3 rotation trimmer) 3. HYS setting trimmer (set point 0 to 15%) Vacuum break specifications Descriptions Break air flow Break air relief valve structure Relief starting setting range Vacuum break function 0 to 50 l/min. (A.N.R.) (at supply pressure 0.5MPa) Rubber sealant, poppet valve 0.005 to 0.05MPa Vacuum filter specifications Descriptions Vacuum filter Element material PVF (poly-vinyl formal) Filtration 10μm Filter area 1130mm 2 Replacement filter element model no. For vacuum For break VSJ-VE VSJ-PE 170

Weight Series Weight / electric circuit / circuit diagram 1 Discrete unit 3 Manifold side block Weight (g) Remarks -*-****-**-* 152.0 Vacuum port: ø4, ø6 With sensor -*-8***-**-* 158.5 Vacuum port: ø8 -*-****-** 125.5 Vacuum port: ø4, ø6 Without sensor -*-8***-** 132.0 Vacuum port: ø8 2 Manifold intermediate block Weight (g) Remarks Manifold intermediate block 18.5 For 1 station Weight (g) Remarks Vacuum changeover unit 106.0 Cartridge quantity: 6 pieces 4 Cartridge (input, exhaust port) Weight (g) Push-in joint for ø6 11.5 Push-in joint for ø8 10.0 Push-in joint for ø10 13.0 Remarks Obtain the VSJ weight using the following formula. Manifold weight = ( 1 Discrete VSJ unit + 2 Manifold intermediate block) x No. of stations + 3 Manifold side block + 4 Cartridge x No. used Electric circuit (solenoid valve) 24 VDC specifications vacuum supply, vacuum break valve 100 VAC specifications vacuum supply, vacuum break valve -0V (black) + 24V (red) ( ) blue ( ) blue M M Circuit diagram Self hold type Normally closed type Normally open type (Digital) (Digital) (Digital) PV PV PV PS V PS V PS V 171

Series How to order (discrete type) 20mm width universal type discrete vacuum changeover unit type A 6 6 6 3 W A Valve type Symbol A Valve type A Normally open type B Normally closed type D Self hold type Descriptions M M B Vacuum port (V) C Air supply port (PS) D Vacuum supply port (PV) E Solenoid valve voltage F Vacuum switch specifications B Vacuum port (V) 4 ø4 push-in joint 6 ø6 push-in joint 8 ø8 push-in joint C Air supply port (PS) 4 ø4 push-in joint 6 ø6 push-in joint D Vacuum supply port (PV) 4 ø4 push-in joint 6 ø6 push-in joint E Solenoid valve voltage 1 100 VAC 3 24 VDC F Vacuum switch specifications Blank Without vacuum switch W 2-point NPN output with LED display A 1-point NPN output + analog output with LED display 172

How to order (manifold type) 20mm width universal type vacuum changeover unit manifold type M D 6 10 10 10 3 10 A W Series How to order A Valve type B Vacuum port (V) C Air supply port (PS) D Exhaust port (EX) E Vacuum supply port (PV) F Solenoid valve voltage H G Number of manifold stations Common piping outlet direction I Vacuum switch specifications Symbol Descriptions A Valve type Note 1 A Normally open type B Normally closed type D Self hold type Z For mix specifications (indicate details in specification sheet) B Vacuum port (V) Note 1 4 ø4 push-in joint 6 ø6 push-in joint 8 ø8 push-in joint CX For mix joint (indicate details in specification sheet) C Air supply port (PS) 6 ø6 push-in joint 8 ø8 push-in joint 10 ø10 push-in joint D Exhaust port (EX) 6 ø6 push-in joint common exhaust 8 ø8 push-in joint common exhaust 10 ø10 push-in joint common exhaust E Vacuum supply port (PV) 6 ø6 push-in joint 8 ø8 push-in joint 10 ø10 push-in joint F Solenoid valve voltage 1 100 VAC 3 24 VDC G Number of manifold stations 2 2 stations to to 10 10 stations H Common piping outlet direction A Vacuum port side B Supply port side I Vacuum switch specifications Note 1 Blank Without vacuum switch W 2-point NPN output with LED display A 1-point NPN output + analog output with LED display Z For mix specifications (indicate details in specification sheet) M M Note on model no. selection Note 1: Indicate "Mixed manifold specifications" when selecting mixed specifications. Refer to page 182 for details. Model no. Filter element for vacuum side VSG-E Filter element for break side VSJ-PE 173

Series Internal structure drawing Discrete type without vacuum switch Destruction unit Ass'y Filter unit Ass'y Connector M M Pilot valve Ass'y Valve unit Ass'y Discrete type with vacuum switch Destruction unit Ass'y Connector Pilot valve Ass'y Valve unit Ass'y Manifold type without vacuum switch Destruction unit Ass'y Connector Filter unit Ass'y Filter unit Ass'y Switch unit Ass'y Pilot valve Ass'y Valve unit Ass'y Manifold Manifold type with vacuum switch Filter unit Ass'y Destruction unit Ass'y Connector Switch unit Ass'y Pilot valve Ass'y 174 Valve unit Ass'y Manifold

Dimensions (discrete type) Series Dimensions Without vacuum switch Manual control button Operation confirmation LED 6.1 Vacuum break pressure adjusting needle Valve for break valve Valve for vacuum supply ød1; vacuum supply port ød1; air supply port 4 4 C1 12.5 16.5 C2 L1 52 L2 Air supply port Vacuum port C1 L1 tube outer diameter ød1 tube outer diameter ød2 C2 L2 4 11.5 14.9 4 11.2 14.6 6 11.9 17.3 6 11.9 17.4 8 18.2 25.8 With vacuum switch 12 7 34 26 6 Approx. 500 Manual control button 4.5 14.6 2-ø3.2 Vacuum break flow rate adjusting needle 26 3 12 16 55 56.6 6 20 ød2; vacuum port 7 M M Operation confirmation LED 6.1 Vacuum break pressure adjusting needle 4.5 Vacuum break flow rate adjusting needle Valve for break valve Valve for vacuum supply ød1; vacuum supply port ød1; air supply port 4 4 12 7 34 26 6 Approx. 500 14.6 6 56.5 2-ø3.2 50.5 12.3 11.8 3 12 55 C2 61 6 Approx. 500 Hysteresis setting trimmer * 2 point SW; SW2 pressure setting Pressure setting trimmer for * 2 point SW; SW1 pressure setting MODE switchover switch * 2 point SW; 3 contact/analog; 2 point LED display 6.6 6 ød2; vacuum port 20 7 C1 12.5 41 L1 76.5 L2 Air supply port tube outer diameter ød1 C1 L1 4 11.5 14.9 6 11.9 17.3 Vacuum port tube outer diameter ød2 C2 L2 4 11.2 6.1 6 11.9 8.9 8 18.2 17.3 175

Series Dimensions (manifold type M) Common exhaust, common piping outlet direction, vacuum port side, without vacuum switch Approx. 500 6 26 34 14.6 8 6.1 20 5 3.5 4.5 6.1 46 72 C1 L1 M M 26 55.5 10 18 18 14 12.5 12.5 23 P = 21 ød2; vacuum port 55 20 6 56.5 50 + 21 x n (n = station number) 60 + 21 x n (n = station number) 70 + 21 x n (n = station number) 25 25 ød1; exhaust port ød1; vacuum supply port ød1; air supply port 6 0.5 7.5 Air supply port Vacuum port C1 L1 tube outer diameter ød1 tube outer diameter ød2 C2 L2 6 17 11.6 4 11.2 14.6 8 18.2 13.1 6 11.9 17.4 10 20.7 16.7 8 18.2 23.0 C2 L2 Common exhaust, common piping outlet direction, supply port side, without vacuum switch 70 + 21 x n (n = station number) 60 + 21 x n (n = station number) 50 + 21 x n (n = station number) 23 P = 21 20 ød2; vacuum port 6 56.6 55 16 7 L1 46 24 C1 20 5 3.5 6.1 6.1 4.5 C2 86.5 L2 12.5 12.5 Approx. 500 6 60.5 ød1; exhaust port ød1; vacuum supply port 55.5 18 18 ød1; air supply port 10 0.5 6 Air supply port tube outer diameter ød1 C1 L1 6 17 11.6 8 18.2 13.1 10 20.7 16.7 Vacuum port tube outer diameter ød2 C2 L2 4 11.2 14.6 6 11.9 17.4 8 18.2 23.0 176

Dimensions (manifold type M) Common exhaust, common piping outlet direction, vacuum port side, with vacuum switch Series Dimensions 5 6.1 Approx. 5006 26 34 14.6 8 55.5 20 3.5 C1 L1 35.5 12.3 18 12.5 12.5 23 P = 21 ød2; vacuum port 20 50 + 21 x n (n = station number) 60 + 21 x n (n = station number) 70 + 21 x n (n = station number) 25 25 ød1; exhaust port ød1; vacuum supply port ød1; air supply port 18 6 7.5 10 0.5 4.5 6.1 6 56.5 55 Approx. 500 6 61 Air supply port Vacuum port C1 L1 tube outer diameter ød1 tube outer diameter ød2 C2 L2 6 17 11.6 4 11.2 6.1 8 18.2 13.1 6 11.9 8.9 10 20.7 16.7 8 18.2 17.3 Common exhaust, common piping outlet direction, supply port side, with vacuum switch 70 + 21 x n (n = station number) 60 + 21 x n (n = station number) 50 + 21 x n (n = station number) 23 P = 21 20 ød2; vacuum port 11.8 Approx. 5006 61 55 7 C2 38.5 46 L2 L2 96.5 M M L1 46 48.5 C1 20 5 3.5 6.1 6.1 4.5 50.5 12.3 6 56.6 C2 111 12.5 12.5 Approx. 5006 60.5 ød1; exhaust port ød1; vacuum supply port ød1; air supply port 10 0.5 6 55.5 18 18 11.8 Air supply port tube outer diameter ød1 C1 L1 6 17 11.6 8 18.2 13.1 10 20.7 16.7 Vacuum port tube outer diameter ød2 C2 L2 4 11.2 6.1 6 11.9 8.9 8 18.2 17.3 177

Series Safety precautions Refer to Intro 13 for general precautions of vacuum system components. WARNING Check that the leakage current is 1mA or less when operating valves. Malfunctions may result from the leakage current and cause problems. Vacuum leaks are tolerated with vacuum holding function. Provide separate safety measures if the vacuum must be held for a long time. M M When continuously energizing the pilot valve for a long time, heat generated from the coil could cause burns or adversely affect peripheral devices. Contact CKD when energizing the pilot valve for a long time. When using a self-hold type (VSJ-**A... ), the switching valve location is neutral when the pilot air supply is stopped and then restarted, including when first used after delivery. When restarting the pilot air supply, issue a signal to the pilot valve or switch the valve manually. CAUTIONS Do not apply excessive tension or bending to the pilot valve or vacuum switch leads. Wires or connectors may break. When using manifold specifications, the number of manifold or combination of installed devices may adversely affect performance or other station vacuum ports. Consult with CKD. Compressed air contains large amounts of drainage (water, oxidized oil, tar, foreign matter, etc.). The drainage may adversely affect performance. Dehumidify air with an after cooler and dryer and improve air quality. Do not use the lubricator. Rust etc. in the pipe may result in operation faults. Install a 5 μm or smaller filter preceding the supply port. Avoid using this vacuum changeover unit in environments with corrosive or flammable gas. Do not use this unit for fluids. Do not operate the vacuum break solenoid valve while generating vacuum. When replacing the vacuum port's cartridge joint, wipe away all dirt and substance and insert the lock pin securely. When replacing the supply port joint block, check that packing has not dropped off. Wipe away all dirt and substance and tighten the set screw securely to the specified. 178

How to use Series How to use 1. Vacuum switch (1) Pressure setting procedures 1 Energizing (checking wiring and supplying DC power.) 2 Set the display change switch to pressure setting mode (ME S1 or S2, SW). 2-2. (Only for analog output vacuum sensors) Turn the hysteresis setting trimmer (HYS) fully in the CCW direction to set hysteresis to a minimum. 3 Turn the pressure setting trimmer (S1 or S2, SW) with a small screwdriver, setting it to the required setting. 4 Set the display change switch to ME, apply pressure, and check that the sensor operates appropriately. (For vacuum sensors with 2-point switch output) Switch output 1 (S1): The operation LED (red) turns on when set pressure is exceeded. Switch output 2 (S2): The operation LED (red) turns on when set pressure is exceeded. (For vacuum sensors with analog output) Switch output (SW): The operation LED (red) turns on when set pressure is exceeded. (2) Setting hysteresis 1 Hysteresis is adjusted using the hysteresis setting trimmer (HYS). 2 Hysteresis is adjusted from 0 to 15% of the setting. Hysteresis increases when the trimmer is turned to CW. 3 Checking hysteresis Set the display change switch to pressure display mode (ME) and gradually increase and decrease pressure near the set pressure. Read values at which the operation indicator is turned on and off. The difference in displayed values is hysteresis. 4 Example of hysteresis adjustment If pressure has a pulse and output is thin and intermittent, use large hysteresis. Hysteresis setting trimmer For setting SW2 pressure MODE switchover switch 2 point MODE switchover switch 3 contact Pressure setting trimmer for SW1 pressure setting trimmer M M LED display Upper level: Analog output vacuum sensor Lower level: Vacuum sensor with 2-point switch output Cautions 1 Do not use this vacuum switch in fluids or in an atmosphere with corrosive substances. The switch may fail. 2 Do not use wiring or applications that may cause noise (surge), etc., to be applied. The switch may fail. 3 Do not use this vacuum switch in an atmosphere containing fluids or flammable or explosive gases. This device is not explosionproof, so faults may occur. 4 Do not use this vacuum switch where it may be exposed to water, oil, or dust. This device is not drip-proof, so faults may occur. 5 Do not use this vacuum switch for applications that generate heat exceeding the working temperature range. The switch may fail. 6 Turn power off before wiring. Check the lead wire color during wiring, and check that the output terminal, power terminal, and COM terminal are not short-circuited. The switch may fail if these terminals are short-circuited. 7 Do not apply excessive tension or bend the connector cable excessively. Wires or connector section may break. 8 Check that pressure exceeding 0.2 MPa is not constantly applied during a vacuum break. Constant application of this pressure may damage the switch. 9 When setting pressure or hysteresis, use a small screwdriver, and gently turn the trimmer within its rotation range. Do not force it. The trimmer or PCB may be damaged if excessive force is applied during adjustment. 10 Use stabilized DC power. 11 Insert a surge voltage absorption circuit in the relay or solenoid valve, etc., connected to the output terminal or power terminal. Avoid uses in which current exceeds 80 ma. 12 Ground the FG terminal when using unit power, such as switching power. 13 Do not short-circuit the output terminal (black or gray lead) with other terminals. 14 Do not apply excessive external impact or force to the switch. 179

Series How to use (4) Connection method V + (brown) V + (brown) M M Main circuit Load SW1 OUT (black) Load SW2 OUT (gray) COM (blue) Vacuum switch with 2 point switch output 2. Adjusting the relief valve (1) circuit diagram, structural drawing (Digital) PV V PS Main circuit Load SW1 OUT (black) ANALOG OUT (gray) COM (blue) Vacuum switch with analog output Relief pressure adjusting needle Vacuum break air flow rate adjusting needle Stamp indication "R" side Stamp indication "F" side Vacuum break air flow rate adjusting needle Relief mechanism Relief valve Circuit diagram (-**B normally closed type) Vacuum break unit structure drawing (2) Adjust the relief needle referring the relief needle opening limit on the Table 1 below, and set the relief pressure. Table 1. Relief needle opening limit Vacuum characteristics H: (High vacuum medium flow type) L: (Medium vacuum large flow rate type) E: (High vacuum small flow rate type) Nozzle diameter (mm) 0.5 0.7 1.0 1.2 0.5 0.7 1.0 0.7 1.0 1.2 Max. opening (rotation) 6.5 7.5 8.5 9.0 7.5 8.0 9.0 7.5 8.0 8.5 * The needle opening limit for the vacuum pump-compatible unit (*) differs based on the performance of the vacuum pump. Set the needle opening so that the vacuum startup time and vacuum degree are not affected. * Values in Table 1 apply to rated air pressure. The relief needle opening limit differs based on the supplied air pressure, vacuum properties, and vacuum piping (capacity), etc., so use values in Table 1 as references. 180 (3) After setting the relief needle, confirm that the vacuum properties and vacuum startup time are correct. * If the relief needle opening limit in Table 1 is exceeded, the vacuum startup time could be delayed, or the correct vacuum degree may not be attained. (Refer to "(5) Other " on page 181) (4) Set the required vacuum break flow rate with the vacuum break flow rate adjustment needle. * To shorten the vacuum break time, increase the vacuum air break flow rate. * If the workpiece is blown, etc., reduce the vacuum air break flow rate.

How to use Series How to use (5) Other 1) If the relief needle opening is within the range, vacuum startup with 1 in the graph below is attained. 2) If the relief needle limit is exceeded, the vacuum startup state with 2 in the graph below is attained and the vacuum startup time is delayed. 3) If the relief needle is further opened, the state with 3 in the graph below is attained, and the correct vacuum degree is not attained. Vacuum generation valve signal Ultimate vacuum pressure Vacuum Atmospheric pressure ON Vacuum startup time is delayed because of delayed response in relief valve closing 1 Relief valve is not closed, so correct vacuum is not attained. 2 3 Time M M 181

Series Preparing the M mixed manifold specifications Mix manifold model no. (example) A B C D E F G H I M - Z CX 8 8 8-3 - 5 B - Z Mix manifold specifications (example) Vacuum changeover unit model no. A B I Layout 1 2 3 4 5 6 7 8 9 10 Quantity M M M - B 4 - W 3 M - B 6 - A 1 M - B 8 - W 1 M - - M - - <Specifications when only output port size joints are mixed> Mix manifold model no. (example) A B C D E F G H I M - B CX 6 8 8-3 - 5 B - W Mix manifold specifications (example) Vacuum changeover unit model no. A B I Layout 1 2 3 4 5 6 7 8 9 10 M - B 4 - W 3 M - B 6 - W 1 M - B 8 - W 1 Quantity M - - M - - Exhaust port Vacuum port Vacuum supply port (Vacuum pump type) R side Air supply port L side St 1 St 2 St 3 182 * The stations numbers are assigned as St. 1, St. 2 to St. 10 from the L side looking at the vacuum port from the front. <Completing the form> Piping locations start from the vacuum port, and are set in order from the left. Indicate the total number of designated product models required at the far right in the table.

M Series M mix manifold specifications Issue / / Contact Quantity Set Request date / / Your company name Slip No. Mix manifold model no. A B C D Order No. Contact Messrs. Purchase order No. E F G H I M - - - - A Valve type F Solenoid valve voltage A Normally open type 1 100 VAC B Normally closed type 3 24 VDC D Self hold type G Number of manifold stations Z For mix specifications (indicate details in specification sheet) 2 to 10 2 stations to 10 stations B Vacuum port (V) H Common piping outlet direction 4 ø4 push-in joint A Vacuum port side 6 ø6 push-in joint B Supply port side 8 ø8 push-in joint I Vacuum switch specifications CX For mix joint (indicate details in specification sheet) Blank Without vacuum switch C Air supply port (PS) W 2-point NPN output with LED display 6 ø6 push-in joint A 1-point NPN output + analog output with LED display 8 ø8 push-in joint Z For mix specifications (indicate details in specification sheet) 10 ø10 push-in joint D Exhaust port (EX) 6 ø6 push-in joint common exhaust 8 ø8 push-in joint common exhaust 10 ø10 push-in joint common exhaust E Vacuum supply port (PV) 6 ø6 push-in joint 8 ø8 push-in joint 10 ø10 push-in joint M M Mix manifold specifications Vacuum changeover unit model no. A B I M - - M - - M - - M - - M - - Layout 1 2 3 4 5 6 7 8 9 10 Quantity 183