TURBOVAC i Multi Inlet Line Turbomolecular pumps

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TURBOVAC 350-400 i Multi Inlet Line Turbomolecular pumps

A giant leap in vacuum performance: one-of-a-kind vacuum techno logy Precision is key when it comes to analytical instruments that is why we invented the most advanced turbo molecular pump on the market: TURBOVAC 350-400 i Multi Inlet. Outfitted with two or more inlets, the innovative turbopumps with integrated drive electronics provide extraordinary pumping performance and are adaptable to the system requirements of each instrument. In combination with our support for the whole vacuum system design, it will result in the best possible level of pump system integration you have ever experienced. Save money and maintenance costs High-end technology does not necessarily equate to a high-end price. Your investment costs for the entire system are now significantly lower compared to the use of discrete single inlet pumps as fewer components are needed. Moreover, our Multi Inlet pumps are light-weight, save space and increase the reliability of the entire system. TURBOVAC 350-400 i Multi Inlet typical applications Analytical instruments based on mass spectrometers - Liquid chromatography/mass spectrometry (LC-MS) - Gas chromatography/mass spectrometry (GC-MS) - Time-of-flight/mass spectrometry (TOF-MS) - Inductively coupled plasma/ mass spectrometry (ICP-MS) Helium leak detectors Multi chamber vacuum system with discrete turbomolecular pumps Multi chamber vacuum system with Multi Inlet turbomolecular pump MS Instrument MS Instrument IS 2 IS 1 HV Forevacuum pump Rotary vane pump SOGEVAC SV 40BI High vacuum pump Turbomolecular pump TURBOVAC i MI Forevacuum pump Rotary vane pump SOGEVAC SV 40BI High vacuum pump Turbomolecular pump TURBOVAC i 02 TURBOVAC 350-400 i Multi Inlet

Nothing is more vital for an excellent performance than the perfect combination of pumping speed, compression and throughput. TURBOVAC 350-400 i Multi Inlet has it all: discover new dimensions. Advantages at a glance Best performance for your investment Tailor-made turn-key vacuum solutions to shorten your time to market Hassle-free installation, operation and control Highest productivity and system uptime at lowest CoO TURBOVAC 350-400 i Multi Inlet 03

The best of all worlds Outstanding performance Thanks to its variable rotor and drag stage design, our new Multi Inlet product line provides the highest performance for all mass spectrometer applications. With increased pumping speed levels especially for light gases which are up to 60% higher than those offered by other products currently on the market, it provides significant advantages for your instruments: lower pressures, improved detection sensitivity levels and higher sample throughput rates. Superior reliability The unique maintenance and oil free hybrid bearing system is characterized by its extreme reliability and durability that s because we equipped it with an innovative lifetime lubrication system that never needs an oil change. The simply-supported shaft system results in a low vibration pump design which reduces noise, mechanical stress and negative impact on vibration sensitive applications. Optimized cooling of the bearings is ensured through thermal isolation and the highly efficient motor. To protect the bearings from critical gases or particles, all pumps are equipped with a purge port. As a consequence, not only pump lifetime is increased significantly, but also system uptime as well as productivity. In combination with low costs of own ership, the operation of your vacuum system will be more efficient than ever. 04 TURBOVAC 350-400 i Multi Inlet

A universe of options Boundless flexibility Whatever you need we have it. The TURBOVAC 350-400 i Multi Inlet line has been especially developed to meet the requirements of analytical instruments and features an extremely high level of flexibility, allowing you to choose the number, height and position of the multiple vacuum ports. The result: a pump that is perfectly fitted to your specific performance needs and installation requirements. Additionally, we offer the support and experience in vacuum system design which opens a wide range of possibilities, from the adaptation of the pump housing to your vacuum chamber through to the design of a custom-built housing/chamber that meets your particular needs. Your benefit: optimum system integration of the pump(s) into your instrument and a reduced time to market. In order to simplify installation, opera tion and control, all TURBOVAC i variants feature an integrated elec tronic drive with 24/48V DC supply and a detachable operator interface with USB, RS 485 and digital I/O connections. TURBOVAC 350-400 i Multi Inlet 05

More in it for you... Performance Industry-leading pumping speed especially for light gases (up to 60 % higher than existing products) Optimized rotor diameter to provide maximum pumping performance > 40 l/s pumping speed at Interstage port 2 Flexibility Vacuum port design flexibility Rotatable fore-vacuum port Multiple interstage ports available High level of flexibility in terms of height and position of vacuum ports Unique cartridge solutions for optimized system integration with fast and simple field replacement Special pump housing solutions adapted to your instrument Complete vacuum system design including your vacuum chamber Variable rotor and Holweck design to adapt performance to application requirements Installation, operation and control Integrated 24/48 V DC drive electronics to avoid expensive cabling Widest range of communication interfaces: USB, RS485 and remote 15 pin digital I/O as standard options Highly efficient motor Thermal isolation by design for optimized cooling of bearing and improved pump lifetime Simply-supported shaft reduces vibration Maintenance free upper passive magnetic bearing Oil free, lifetime lubricated lower mechanical ceramic ball bearing, field-replaceable 06 TURBOVAC 350-400 i Multi Inlet

... get more out of it Best performance for your investment Flexible performance adaptation tailor-made to perfectly meet your requirements Outstanding performance for all mass spectrometer applications thanks to innovative technology Perfectly fitted turn-key solutions to shorten your time to market Custom-built vacuum system solutions for your instruments (cartridge/housing/chamber) Quick response time for new variants: prototypes in less than 12 weeks Wide range of communication interfaces Hassle-free installation, operation and maintenance Plug & Play: integrated electronics, communication options and flexible accessories Installation in any orientation Increased productivity and system uptime at lowest cost Superior reliability thanks to innovative pump and bearing design Fit & Forget: first and only maintenance-free hybrid mechanical TMP no need for oil changes Possibility of on-site bearing replacement and easy field exchange (cartridge design) reduces cost of ownership and downtime TURBOVAC 350-400 i Multi Inlet 07

Technical specifications 2x O-Ring 150 x 3 FKM 70 5.8 Ø 168 8 Ø 160 107.5 54 h3 h4 11.7 39 19.4 32 h h2 h1 68.2 88.2 20 177 25.5 99 67.8 X 32 19 47 105 18.4 35 35 Ø 130 Ø 192 88.5 56.7 h6 h5 2x M6-10 O-Ring 160 x 3 FKM 70 X 10 PURGE G1/8" DN 25 KF 3x M4-8 Ø 130 Ø 180 45 4x Ø 6.6 65.5 TURBOVAC h h1 h2 h3 h4 h5 h6 400/300/50 ic 350/300/50 ic 139.6 141.8 185.3 247.8 259.5 123.8 79.8 350/250/50 ic 160.8 163 206.5 269 280.7 131.2 87.2

Technical specifications Technical data excerpt for selected TURBOVAC 350-400 ic cartridge pumps; performance data will differ depending on customization level Technical data TURBOVAC 350/250/50 ic 350/300/50 ic 400/300/50 ic Fore-vacuum connection DN 25 KF Pumping speed HV connection / Interstage I / II I s -1 N 2 350/250/50 350/300/50 400/300/50 Operating pressure HV connection mbar 10-5 - 10-7 Interstage I 10-2 - 10-4 Interstage II 10-1 Max. permissible mbar 10 fore-vacuum pressure for N 2 Operating speed rpm 60 000 Cooling standard Convection Cooling optional Air or water Cooling water connection plug connection for 6x1 hose Cooling water consumption l/h 50 to 100 Supply voltage 24/48V DC ± 10 % Max. current consumption 10A at 24V DC Max. power consumption 240W Interfaces RS 485, USB, 15-pin digital I/O

Order information Examples of TURBOVAC ic cartridge part numbers. For customized solutions (vacuum chambers, pump housings with customized flanges etc.) please contact us. Pumps TURBOVAC 350/250/50 ic 832304V1000C 350/300/50 ic 832306V1000C 400/300/50 ic 832307V1000C Accessories Power supply, cables and accessories 800100V0003 TURBO.POWER integra 800096V0100 Cable TURBOVAC i TURBO.POWER integra, 1m 800096V0300 Cable TURBOVAC i TURBO.POWER integra, 3m 800096V0500 Cable TURBOVAC i TURBO.POWER integra, 5m 800102V0002 Mains cable, 3m, Euro plug 800102V0003 Mains cable, 3m, UK plug 800102V1002 Mains cable, 3m, US plug 5-15P, 115V 800095V0100 TURBOVAC i DC-cable open stranded wires, 1m 800095V0300 TURBOVAC i DC-cable open stranded wires, 3m 800095V0500 TURBOVAC i DC-cable open stranded wires, 5m 800090V0000 24/48 V DC-in plug TURBOVAC i Cooling 800136V0006 Air cooling TURBOVAC i axial 800135V0005 Water cooling TURBOVAC 300/400 i Purge 800120V0013 Purge gas valve TURBOVAC i, 24V DC, 24 sccm, G 1/8 800120V0014 Purge gas restrictor TURBOVAC i, 24 sccm, G 1/8 800110V0022 Air filter for TMP, G 1/8 Headquarter Germany Oerlikon Leybold Vacuum GmbH Bonner Straße 498 D-50968 Köln T +49 (0) 221-347-0 F +49 (0) 221-347-1250 info.vacuum@oerlikon.com www.oerlikon.com/leyboldvacuum rheinfaktor 175.63.02 Printed in Germany on chlorine-free bleached paper Technical alterations reserved