Turbomolecular Pump Systems TURBOLAB 80, 350, 450 This new smart TURBOLAB generation is built on one basic design platform with the opportunity to create three different variants. Each version can be customized to individual needs regarding add-ons like vacuum measurement devices, a choice of accessories, e.g. valves and heaters. Turbomolecular pump system TURBOLAB 350 (top left), TURBOLAB 80 (down left) and TURBOLAB 350 Cart (right) Basic Equipment Turbomolecular pump TURBOVAC i models from 80 l/s to 450 l/s including frequency converter Backing pump Dry or oil-sealed, 1 m 3 /h - 30 m 3 /h, 24 V DC/110-230 V Backlight display Every TURBOLAB comes with the Turbo Pressure Unit TPU for control, configuration and monitoring of the pump system Built-in support for accessories - Purge - Vent - Air or water cooling unit - Flange heaters - Two pressure gauges (1000 mbar to 1 x 10-9 mbar) - Foreline safety valve Built-in webserver - Condition monitoring - Data analysis - Software updates - Control, monitor and configure your TURBOLAB system 1 Easily relocate pump away from the frame and on your chamber Remote control via the X1 Interface - Configurable X1 Digital/Analog I/O - Start/Stop - Error - Warning - Analog Output Advantage to the User - Enhanced pump performance - Compact mobile design - Small foot print - Easy to relocate pumps out and away from the frame - Backlight display (control/monitoring/configuration) Oerlikon Leybold Vacuum Full Line Catalog 2016 - Monitored data like frequency, temperature, current, pressure are automatically stored to a data log file in the TURBOLAB. Users easily view the log file with the TURBOLAB data viewer software tool which can be downloaded for free from the OLV website or the last 512 data points can be viewed from the TURBOLAB data viewer in the web server - Covering more applications with a full range of high vacuum and dry or wet forevacuum pumps to cover more high vacuum applications - Benchmark turbostation offering dedicated ports for the connection of - six different accessories - two gauges - Benchmark functionality, reliability and design - Prepared for worldwide voltage coverage - Price-to-performance ratio leybold
Typical Applications - Analytical Instruments - Spectroscopy - Tube manufacturing - Beam guidance systems - Micro balances - Sputtering and evaporation systems - Surface physics - Laboratory pump systems Options - Alternatively ISO-K or CF connection - The Cart version comprises a baseplate, mounting column, castors or a benchtop frame with rubber feet - Relocation kits available to relocate the pumps away from the frame and onto your chamber The pump system can be upgraded with further components: - Vacuum gauges: TTR 91 (N), TTR 101 (N), PTR 91 (N). Simultaneous operation of two gauges is possible - Adsorption trap - Exhaust filter - Air cooling unit - Water cooling unit - Flange heater - Venting valve - Purge gas valve - Foreline venting valve - Vacuum safety valve SECUVAC DN 15/25/40 ISO-KF Scope of delivery - Transport lock at the high vacuum flange by way of a Plexiglas disc - Covering caps for the threads of the transport lock - Exhaust side: centering ring and clamping ring - Documentation - The TRIVAC and SOGEVAC are filled with LVO oil Vacuum Pump Systems 4 TPU 1 2 3 5 6 1 7 10 or 11, or 11 and 10 12 Legend 1 = TURBOVAC 2 = Metal hose 3 = Backing pump 4 = Vacuum gauge 5 = Gate valve 6 = Flange heater 7 = Shut-off valve 8 = Adsorption trap 9 = Exhaust filter 10 = Venting valve 11 = Purge gas valve 12 = Bypass line 7 4 2 8 3 9 Schematic diagram of the turbomolecular pump systems TURBOLAB (left basic version, right equipment with accessories (TPU not shown) leybold Oerlikon Leybold Vacuum Full Line Catalog 2016 2
465 144 371 404 154 275 190 280 Dimensional drawing TURBOLAB 80, dimensions in mm 465 144 105 371 985 1240 480 390 580 480 611 Dimensional drawing TURBOLAB 80 Cart, dimensions in mm 3 Oerlikon Leybold Vacuum Full Line Catalog 2016 leybold
723 658 120 440 Vacuum Pump Systems 289 390 240 360 Dimensional drawing TURBOLAB 350/450, dimensions in mm 667 120 440 990 1091 480 390 580 480 611 Dimensional drawing TURBOLAB 350/450 Cart, dimensions in mm 1000 mbar Forevacuum pressure 100 10 Maximum rise in pressure 1 0 5 10 15 20 25 s 30 Time leybold Oerlikon Leybold Vacuum Full Line Catalog 2016 4
Technical Data Pump system TURBOLAB 80 350 450 Inlet flange 63 CF 100 ISO-K 100 CF 160 ISO-K 160 CF Forevacuum connection DN 16 ISO-KF 25 ISO-KF 25 ISO-KF Pumping speed l s -1 65 290 430 Ultimate pressure mbar 10-7 10-7 10-8 10-10 10-8 10-10 Mains Supply 50/60 Hz V AC 110 ± 10% 230 ± 10% 110 ± 10% 230 ± 10% 110 ± 10% 230 ± 10% Power consumption, max. VA 1760 3680 1760 3680 1760 3680 Weight (ISO-KF / CF) Table top unit Cart kg 20 100 35 110 35 110 Number of accessories, max. 6 6 6 Number of gauges, max. 2 2 2 CBM Internal condition monitoring Internal condition monitoring Internal condition monitoring Software Internal webserver (no software to install) Internal webserver (no software to install) Internal webserver (no software to install) Technical Data Backing pumps Diaphragm vacuum pump DIVAC Pumping speed m 3 s -1 Exhaust connection DN Noise level db(a) Scroll vacuum pump SCROLLVAC Pumping speed m 3 s -1 Exhaust connection DN Noise level db(a) Rotary vane vacuum pump TRIVAC Pumping speed m 3 s -1 Exhaust connection DN Noise level db(a) Rotary vane vacuum pump SOGEVAC Pumping speed m 3 s -1 Exhaust connection G Noise level db(a) 0.8 T 3.0 0.7 3.0 Silencer Silencer 49 54 SC 5 D SC 15 D SC 30 D 5.4 15.0 30.0 16 ISO-KF 16 ISO-KF 25 ISO-KF 52 58 62 D 4 B D 8 B 4.8 9.7 16 ISO-KF 16 ISO-KF 52 52 SV 16 D 16.0 1/2" 59 5 Oerlikon Leybold Vacuum Full Line Catalog 2016 leybold
Ordering Information TURBOLAB 80 Pump system with TURBOVAC SL 80 H and frequency converter TD 400 Table top unit with DIVAC 0.8 T DIVAC 3.0 SCROLLVAC SV 5 D SCROLLVAC SV 15 D SCROLLVAC SV 30 D TRIVAC D 4 B TRIVAC D 8 B SOGEVAC SV 16 D 230 V, 50/60 Hz 110 V, 50/60 Hz 501592V02000000 501592V03000000 501592V02001000 501592V03001000 501592V02020000 501592V02030000 501592V03020000 501592V03030000 501592V02040000 501592V02050000 501592V03040000 501592V03050000 501592V02060000 501592V02070000 501592V03060000 501592V03070000 501592V02120000 501592V02080000 501592V03120000 501592V03080000 501592V02130000 501592V02090000 501592V03130000 501592V03090000 501592V02100000 501592V03100000 Vacuum Pump Systems leybold Oerlikon Leybold Vacuum Full Line Catalog 2016 6
Ordering Information TURBOLAB 350 Pump system with TURBOVAC 350 i 230 V, 50/60 Hz 110 V, 50/60 Hz Table top unit with DIVAC 3.0 SCROLLVAC SV 5 D SCROLLVAC SV 15 D SCROLLVAC SV 30 D TRIVAC D 4 B TRIVAC D 8 B SOGEVAC SV 16 D 501592V04001000 501592V05001000 501592V04020000 501592V04030000 501592V05020000 501592V05030000 501592V04040000 501592V04050000 501592V05040000 501592V05050000 501592V04060000 501592V04070000 501592V05060000 501592V05070000 501592V04120000 501592V04080000 501592V05120000 501592V05080000 501592V04130000 501592V04090000 501592V05130000 501592V05090000 501592V04100000 501592V05100000 7 Oerlikon Leybold Vacuum Full Line Catalog 2016 leybold
Ordering Information TURBOLAB 450 Pump system with TURBOVAC 450 i 230 V, 50/60 Hz 110 V, 50/60 Hz Table top unit with DIVAC 3.0 SCROLLVAC SV 5 D DN 106 CF SCROLLVAC SV 15 D SCROLLVAC SV 30 D TRIVAC D 4 B TRIVAC D 8 B SOGEVAC SV 16 D 501592V06001000 501592V07001000 501592V06020000 501592V06030000 501592V07020000 501592V07030000 501592V06040000 501592V06050000 501592V07040000 501592V07050000 501592V06060000 501592V06070000 501592V07060000 501592V07070000 501592V06120000 501592V06080000 501592V07120000 501592V07080000 501592V06130000 501592V06090000 501592V07130000 501592V07090000 501592V06100000 501592V07100000 Vacuum Pump Systems leybold Oerlikon Leybold Vacuum Full Line Catalog 2016 8
Ordering Information TURBOLAB 80 TURBOLAB 350 / 450 Accessories Mains cable TURBOLAB 230 V, 5.0 m 110 V, 5.0 m 230 V, UK, 5,0 m Accessory cable TURBOVAC i (air cooling & valve connection) M 8 - M 8, 0.3 m M 8 - M 8, 2.0 m Y cable TURBOVAC i, M 8 Start stop switch for connection to X1 Remote USB cable 2.0, Type A/B, 1.8 m Accessory cable TURBOLAB M 8 - M 8, 0.3 m (air cooling & valve connection) M 8 - M 8, 5.0 m (air cooling & valve connection) M 12 - M 12, 5.0 m (DIVAC 0.8, 3.0) C13 - C14, 5.0 m (SOGEVAC) C14 - NEMA, 5.0 m (SCROLLVAC 110 V) C14 - Schuko, 5.0 m (SCROLLVAC 230 V) C14 - C16-1 (230 V), 5.0 m (TRIVAC 230 V) C14 - C16-1 (110 V), 5.0 m (TRIVAC 110 V) Accessory cable TURBOLAB TURBOVAC i, 5.0 m (24 V DC voltage supply) TD 400, 5.0 m (24 V DC voltage supply) Communication TURBOLAB - TMP 5.0 m 1.0 m Mains cable backing pump TURBOLAB C13 - C14, 1.8 m C14 - NEMA, 0.5 m C14 - Schuko, 0.5 m C14 - C16-1 (230 V), 1.8 m C14 - C16-1 (110 V), 5.0 m Mains cable TURBOLAB - TURBOVAC 350 i, 0.55 m TURBOLAB - TD 400, 0.55 m Connection cable Typ A 1.5 m 5.0 m Connection cable C14 - valve plug, 1,8 m (Control 110/230 V AC SECUVAC valve) Connection cable C14 - valve plug, 5 m (Control 110/230 V AC SECUVAC valve) Connection cable C14 - valve plug, 1,8 m (Control 24 V DC SECUVAC valve) Connection cable C14 - valve plug, 5 m (Control 24 V DC SECUVAC valve) LEYASSIST software for TMPs Air cooling (incl. 4 screws M4x10, DIN 912) Air cooling TURBOVAC 350/450 i radial Water cooling TURBOVAC 350/450 Water cooling with G 1/8 connections (incl. 2 hose nipples G 1/8, outer Ø 8 mm for water hose, 2 sealing rings approx. 10x4x1, screws) 800103V0030 800103V0031 800103V0037 800103V0001 800110V0016 800110V0020 800110V0021 800110V0108 800103V0001 800103V0003 800103V0005 800103V0017 800103V0008 800103V0011 800103V0014 800103V0016 800103V0030 800103V0031 800103V0037 800103V0001 800110V0016 800110V0020 800110V0021 800110V0108 800103V0001 800103V0003 800103V0005 800103V0017 800103V0008 800103V0011 800103V0014 800103V0016 800103V0020 800103V0023 800103V0029 800103V0027 800103V0015 800103V0006 800103V0009 800103V0012 800103V0013 800103V0029 800103V0027 800103V0015 800103V0006 800103V0009 800103V0012 800103V0013 800103V0018 800103V0021 800103V0032 800103V0032 12426 12426 800103V0033 800103V0035 800103V0034 800103V0036 230439V01 800103V0033 800103V0035 800103V0034 800103V0036 230439V01 800136V0001 800136V0005 800135V0005 800135V0001 1) For space reasons, when the frequency converter is installed at the side, only either the air-cooler or a purge gas valve can be connected 9 Oerlikon Leybold Vacuum Full Line Catalog 2016 leybold
Ordering Information TURBOLAB 80 TURBOLAB 350 / 450 Accessories Venting valve 24 V DC, G 1/8" Power failure venting valve 24 V DC, G 1/8" Purge gas valve 24 V DC, G 1/8", 24 sccm Purge gas throttle G 1/8", 24 sccm Air filter for TMP G 1/8" Purge gas and venting valve 0.4 mbar l/s at 1 bar, 24 V DC DN 10 KF G1/4 Pump connection: Adapter M8 DN-16-KF incl. O-Ring 9.25 x 1.78 and adapter centering ring DN 10/16 KF with sinter filter 800120V0012 800120V0022 800120V0013 800120V0014 800110V0022 800152V0013 800110V0011 Gas side connection: G1/4-in. adapter with filter Including O-ring and gasket Connection cable: Accessory cable M8 bare wire ends 800110V0012 800110V0017 Vacuum Pump Systems Venting valve 24 V DC Power failure venting valve 24 V DC Spare filter Flange heater, 230 V, 110 V, 230 V, 115 V, 230 V, 115 V Vibration absorber other flange sizes Centering ring with protection screen with splinter guard Splinter guard (coarse) (fine) (0.8 mm) (0.8 mm) Protection screen (3.2 mm) (3.2 mm) 800120V0011 800120V0021 E 200 18 517 85404 85407 800137V0005 800137V0006 800137V0007 800137V0008 800131V1100 on request on request 800133V0021 800133V0031 800133V0022 800133V0032 E20017170 E20017171 800132V0101 800132V0102 800132V0022 800132V0032 800132V0021 800132V0031 1) For space reasons, when the frequency converter is installed at the side, only either the air-cooler or a purge gas valve can be connected leybold Oerlikon Leybold Vacuum Full Line Catalog 2016 10