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Vacuum component C O N T E N T S variation 420 Position locking valve () 422 Compact vacuum regulator () 426 Vacuum break unit () 436 Vacuum filter large volume union type (VSFB) 440 Compact vacuum filter union type (VSFU) 440 Compact vacuum filter socket type () 440 Vacuum switch () 448 Air tweezers () 454 419

variation (Position locking valve) Separate circuit workpiece maintains Vacuum generator side Workpiece side -M3 vacuum even if workpiece deviates. This is applicable for vacuum pads. -M4 M4 M3 -M5 M5 422 -M6 M6-6A R (c) 1/8 (Compact vacuum regulator) Terminal pressure can be controlled -*A* ø6 ø8 Elbow (Output: male thread) in addition to main pressure. Select either a vacuum pressure switch with a digital indicator or a -*B* Elbow (Supply: male thread) 426 vacuum pressure gauge. (Vacuum break unit) -*U* Union type Vacuum generator side Workpiece side Control vacuum break air while -44 ø4 ø4 maintaining vacuum characteristics of vacuum ejector. Reduction of vacuum break time -66 ø6 ø6 436 realized by vacuum break circuit relief -46A ø4 R1/8 function. -66A ø6 R1/8 420

variation (Vacuum filter) : Standard, : Option M5 ø4 ø6 ø8 ø10 ø12 VSFB Large volume union type Dust and water drops are eliminated VSFB-66 Filtration area: 20cm 2 with the cyclone effect and element. The entire dust case is removed with a single touch, preventing dust from scattering. VSFU Compact union type Tools are not required to replace or clean the element. In-line types are easily installed in piping. VSFB-88 Filtration area: 20cm 2 VSFB-1010 Filtration area: 20cm 2 VSFB-1212 Filtration area: 20cm 2 VSFU-1S Filtration area: 2.8cm 2 VSFU-1L Filtration area: 4.7cm 2 440 VSFU-2 Filtration area: 7.5cm 2 VSFU-3 Filtration area: 12.5cm 2 Compact socket type This is appropriate for discrete ejector, not integrating vacuum filter. (Vacuum switch) -44 Filtration area: 0.8cm 2-66 Filtration area: 1.1cm 2 M5 ø4 ø6 ø8 direct 2 point output and analog output are available. Push-in joint, M5 female thread, or direct installation piping connection is -NW -NA NPN: 2 point output NPN: Analog output 448 available. -PW PNP: 2 point output -PA PNP: Analog output (Air tweezers) Pad diameter ø2 ø4 ø6 ø8 Rubber Material Holder shape Vacuum pad and ejector are integrated VAT-A*N Nitrile rubber Type without valve into a pen shape component. Appropriate for assembly, etc., of small part VAT-A*S Silicon rubber Type without valve 454 A package type is also available. VAT-B*N Nitrile rubber Valve integrated type VAT-B*S Silicon rubber Valve integrated type 421

Vacuum switch with LED display improves visibility Vacuum switch with LED display : M5, ø4, ø6, ø8 Set and applied pressure are displayed on the LED. Features The 2-point vacuum switch output type or analog output type vacuum switch is selectable to match different applications. Connector wiring facilitates easy wiring layout. The push-in joint, M5 metric screw (female screw), or directly installed piping connection is selectable to match the application. Pressure is detected with an electric switch, ensuring stable accuracy. Specifications Descriptions 2 point output (NW) With analog output (NA) 2 point output (PW) With analog output (PA) Default setting value -50kPa (SW1), -10kPa (SW2) -50kPa -50kPa (SW1), -10kPa (SW2) -50kPa Current consumption 40mA or less Pressure detection method Diffused semiconductor pressure switch Working pressure range -100 to 0kPa Set pressure range -99 to 0kPa Withstanding pressure 0.2MPa Storage temperature range -20 to 70 C (atmospheric pressure, humidity 60%RH or less) Operating temperature range 0 to 50 C (no freezing and dew condensation) Operation humidity range 35 to 85%RH (with no dew condensation) Power voltage 12 to 24 VDC 10% ripple (P - P) 10% or less Protective structure IEC standards IP40 or equivalent Pressure setting point 2 1 2 1 Operation precision 3%F.S. max. (at Ta = 25 C) Hysteresis Fixing (2%F.S. or less) Variable (0 to 15% F.S.) Fixing (2%F.S. or less) Variable (0 to 15% F.S.) Switch output NPN open collector output 30V 80mA or less residual voltage 0.8V or less PNP open collector output power voltage 80mA or less residual voltage 0.8V or less Output voltage - 1 to 5V - 1 to 5V Zero pint voltage - 1 0.1 V - 1 0.1 V Analog output Span voltage - 4 0.1 V - 4 0.1 V Output current - 1mA or less (load resistance 5kΩ and over) - 1mA or less (load resistance 5kΩ and over) LIN/HYS - 0.5%F.S. or less - 0.5%F.S. or less Responsiveness Approx. 2m/sec or less Display 0 to -99kPa (2 digit red LED display) Number of display Approx. 4 times/sec. Display precision 3%F.S. 2digit Resolution 1digit Operating indication SW1: Red LED turns ON when SW1 is above set pressure SW1: Red LED turns ON when SW1 is above set pressure Red LED turns ON when SW1 is above set pressure Red LED turns ON when SW1 is above set pressure SW2: Green LED turns ON when SW2 is above set pressure SW2: Green LED turns ON when SW2 is above set pressure 1. MODE switching switch (ME, S1 or S2) 1. MODE switching switch (ME or SW) 1. MODE switching switch (ME, S1 or S2) 1. MODE switching switch (ME or SW) Function 2. S1 setting trimmer (2/3 rotation trimmer) 2. SW setting trimmer (2/3 rotation trimmer) 2. S1 setting trimmer (2/3 rotation trimmer) 2. SW setting trimmer (2/3 rotation trimmer) 3. S2 setting trimmer (2/3 rotation trimmer) 3. HYS setting trimmer (set point 0 to 15%) 3. S2 setting trimmer (2/3 rotation trimmer) 3. HYS setting trimmer (set point 0 to 15%) 448

Electric circuit Vacuum switch with 2-point switch output Vacuum switch with analog output Electric circuit / how to order V + (brown) V + (brown) Load Load Main circuit SW1OUT (black) Load SW2OUT (gray) Main circuit SWOUT (black) ANALOGOUT (gray) How to order Vacuum switch COM (blue) P W M5 COM (blue) A Switch output status B Switch specifications C Symbol Descriptions A Switch output status N NPN output P PNP output B Switch specifications W 2-point output A 1-point output + analog output C 4 ø4 push-in joint 6 ø6 push-in joint 8 ø8 push-in joint M5 M5 x 0.8 F Direct mount type 449

Dimensions Push-in joint type 12.3 11.8 6.8 6 Approx. 500 Trimmer for hysteresis setting *) 2-point SW; SW2 pressure setting Trimmer for pressure setting *) 2-point SW; SW1 pressure setting MODE switchover switch *) 2-point SW; 3 contact/analog; 2 point LED display Operation checking light 24.5 C L 14.5 20 2-ø2.6 (installation hole) Spot face diameter ø4.5 depth 2.5 Direct mount type Unit: mm Tube outer diameter Weight L C ød (g) -**-4 4 6.1 11.2 28 -**-6 6 8.9 11.9 28 -**-8 8 17.3 18.2 34.5 6 61 55 7.5 7 ød 3 12.3 11.8 6.8 6 Approx. 500 Trimmer for hysteresis setting *) 2-point SW; SW2 pressure setting 6 Trimmer for pressure setting *) 2-point SW; SW1 pressure setting ø8 (pressure inlet) 61 55 MODE switchover switch *) 2-point SW; 3 contact/analog; 2 point LED display Operation checking light ø11.2 7 7.5 O ring; 8 x 1 2-ø3.8 depth 1.2 24.5 3 14.5 20 2-ø2.6 (installation hole) Spot face diameter ø4.5 depth 2.5 Unit: mm Weight (g) -**-F 19 450

Dimensions Female thread type Dimensions 12.3 11.8 6.8 6 Approx. 500 Trimmer for hysteresis setting *) 2-point SW; SW2 pressure setting Trimmer for pressure setting *) 2-point SW; SW2 pressure setting MODE switchover switch *) 2-point SW; 3 contact/analog; 2 point LED display Operation checking light 24.5 14.5 20 2- ø2.6 (installation hole) Spot face diameter ø4.5 depth 2.5 Unit: mm Weight (g) -**-M5 28.5 3 7 7.5 61 55 6 M5 x 0.8 451

Safety precautions CAUTION Do not use this vacuum switch in fluids or in an atmosphere with corrosive substances. The switch may fail. Do not use wiring or applications that may cause noise (surge), etc., to be applied. The switch may fail. Do not use this vacuum switch in an atmosphere containing fluids or flammable or explosive gases. This device is not explosion-proof, so fire or explosion may occur. Do not use this vacuum switch where it may be exposed to water, oil, or dust. This device is not drip-proof, so faults may occur. Do not use this vacuum switch for applications that generate heat exceeding the working temperature range. The switch may fail. Turn power off before wiring. Check the lead wire color during wiring, and check that the output terminal, power terminal, and COM terminal are not short-circuited. The switch may fail if these terminals are short-circuited. Do not apply excessive tension or bend the connector cable excessively. Wires or connector section may break. Check that pressure exceeding 0.2 MPa is not constantly applied during a vacuum break. Constant application of this pressure may damage the switch. When setting pressure or hysteresis, use a small screwdriver, and gently turn the trimmer within its rotation range. Do not force it. The trimmer or PCB may be damaged if excessive force is applied during adjustment. Use stabilized DC power. Insert a surge voltage absorption circuit in the relay or solenoid valve, etc., connected to the output terminal or power terminal. Avoid uses in which current exceeds 80 ma. Ground the FG terminal when using unit power, such as switching power. Do not short-circuit the output terminal (black or gray lead) with other terminals. Do not apply excessive external impact or force to the switch. M2.5 screw installation holes are provided on the switch body. Tighten screws into these holes with the recommended tightening torque. Use clean fluids when possible. 452

How to use How to use Fixing the vacuum switch with LED display 1 Fixing the vacuum switch with LED display Fix the vacuum switch with LED display with M2.5 screws using installation holes on the body. (See the procedures of dimensions for fixing hole spacing.) Using the vacuum switch 1. Setting pressure 1 Energizing (checking wiring and supplying DC power.) 2 Set the display change switch to pressure setting mode (ME S1 or S2, SW). 2-2. Only for analog output vacuum switches Turn the hysteresis setting trimmer (HYS) fully in the CCW direction to set hysteresis to a minimum. 3 Turn the pressure setting trimmer (S1 or S2, SW) with a small screwdriver, setting it to the required setting. 4 Set the display change switch to ME, apply pressure, and check that the switch operates appropriately. (For vacuum sensors with 2-point switch output) Switch output 1 (S1): The operation LED (red) turns on when set pressure is exceeded. Switch output 2 (S2): The operation LED (green) turns on when set pressure is exceeded. (For vacuum sensors with analog output) Switch output (SW): The operation LED (red) turns on when set pressure is exceeded. 2. Setting hysteresis 1 Hysteresis is adjusted using the hysteresis setting trimmer (HYS). 2 Hysteresis is adjusted from 0 to 15% of the setting. Hysteresis increases when the trimmer is turned to CW. 3 Checking hysteresis Set the display change switch to pressure display mode (ME) and gradually increase and decrease pressure near the set pressure. Read values at which the operation indicator is turned on and off. The difference in displayed values is hysteresis. 4 Example of hysteresis adjustment If pressure has a pulse and output is thin and intermittent, use large hysteresis. To set the tolerable range for pressure drops. Hysteresis setting trimmer for SW2 pressure setting MODE switchover switch 2 point MODE switchover switch 3 contact Trimmer for pressure setting SW1 pressure setting trimmer LED display * Upper level: Vacuum switch with analog output Lower level: Vacuum switch with 2-point switch output 453