Oil Rotary Vacuum Pump VD / VS / PVD / PKS series

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Transcription:

ow Vacuum Pump Oil Rotary Vacuum Pump VD / VS / PVD / PKS series The oil rotary vacuum pumps are the leading vacuum pumps with high pumping efficiency and consistent pumping performance. They can operate under the pressure between atmospheric pressure to 10Pa or lower. A wide variety of product lineup is available for various kinds of operation. VD40C PKS-070B VS650A Selection Guide Structure Model VD Ver.C VD(Small type) PVD VS650A VS PKS Double stage rotary vane type Double stage rotary vane type Double stage rotary vane type Single stage rotary vane type Single stage rotary vane type Rotary plunger type Driving type Direct Direct Belt Belt Direct Belt Cooling method Air cooled Air cooled Air cooled Air cooled /ater cooled ater cooled Air cooled /ater cooled Oil circulation system Forced Forced Differential pressure Differential pressure Forced Differential pressure Oil-backflow prevention device Shutting off the oil circulation Shutting off the oil circulation Optional Oil-backflow prevention device Shutting off the oil circulation Shutting off the oil circulation Note IE3 motor is higher efficient than the conventional motor so the striking current tends to be higher. For the bigger pumps with 5.5k motor or more, there is possibility that pumps don't start running due to insufficient power voltage in case that power capacity is low. Please confirm the power capacity before using bigger pump. Rotary Vane type Explanation image Rotary Plunger type Explanation image Detail of features hat is gas ballast? Gas ballast is a countermeasure when handling condensable gas such as water vapor, etc. Condensable gas is compressed through compression process inside oil vacuum pump, condensed and changed to liquid which mixes with vacuum pump oil. It is left inside in the case of dry vacuum pump. In order to prevent this, it is possible to let condensable gas exhaust without changing from air state to liquid state by ing gas ballast valve and introducing certain amount of air or nitrogen to the working chamber inside pump. ow Vacuum Pump A vane is assembled in the rotor inside the cylinder. The vane compresses and exhausts the gas inside the cylinder. The oil lubricates and cools down the bearing part. It also has a sealing function to secure air tightness of the vane and the cylinder. Excellent in compression efficiency and low vibration. These are the most frequently used vacuum pumps for industrial use. The slide vane sliding on the vane guide part performs piston motion by rotation of eccentric rotor, thereby volume of the space surrounded by slide vane and cylinder is varied and exhausted. Robust and comparatively strong for foreign materials. orkable for long term with appropriate regular maintenance. hat is helium tight type? It is one of optional selections of oil rotation vacuum pump. This type is tested by the helium leak detector and has a leak tightness specification with 1x10-6 (Pa m 3 /s) or below.

Oil Mist Trap TM / TMX series The trap to eliminate oil smoke exhausted from oil rotary vacuum pump. Exhaust sound is reduced especially at the time of repeat operation between ultimate pressure and atmospheric pressure. Cartridge type filter makes filter replacement easy. Model *1 Connecting flange(pump side / outlet side) eight [kg] Material Dimensions [mm] dia. 106 x 193 For (pump model) Remarks *2 TMX-1 Special (with adapter ) / G1 x 1/2 (with screwed cover) 1.1 VD151, VD201, PVD-180, PVD-360 TM201 VF40 / G1 x 1/2 (with screwed cover) 8.5 dia. 165.2 x 280 VD30C / VD301, VD40C / VD401 ow load type TM401 VF40 / G1 x 1/2 (with screwed cover) 10 dia. 165.2 x 350 VD30C / VD301, VD40C / VD401 igh load type VD60C / VD601, VD90C / VD901 ow load type TM-2 VF40 (with adapter) / G2 (with screwed cover) dia. 285 x 520 VD60C / VD601, VD90C / VD901 igh load type 9.3 VG50 / G2 (with screwed cover) dia. 285 x 450 PKS-016 TM-2F VF40 (with adapter) / VG50 dia. 285 x 525 VD60C / VD601, VD90C / VD901 igh load type 9.8 VG50 / VG50 dia. 285 x 455 PKS-016 TM-3 Main unit :soft steel VF50 / G3 (with screwed cover) dia. 362 x 635 VS1501 17 (SPCC) VG80 / G3 (with screwed cover) dia. 362 x 735 PKS-030 Filter :glass wool TM-3F VF50 / VG80 dia. 362 x 600 VS1501 18 VG80 / VG80 dia. 362 x 700 PKS-030 TM-4 VF50 / G4 (with screwed cover) dia. 442 x 945 VS2401 35 VG100 / G4 (with screwed cover) dia. 442 x 1160 PKS-070 TM-4F VF50 / VG100 dia. 442 x 900 VS2401 36 VG100 / VG100 dia. 442 x 1120 PKS-070 TM-4S VF50 / VG100 dia. 450 x 1487 VS2401 igh load type 64 VG100 / VG100 dia. 450 x 1387 PKS-070 igh load type *1 F: Flange connection type instead of screwed cover. *2 Select the high load when the pump repeatedly runs from atmosphere to vacuum in a short period or at the pressure higher than 10,000 Pa (100mbar / 75 Torr) for a long period. Oil Mist Trap Oil Return Mechanism Needle valve Check valve Oil mist Pump Oil mist Oil return from the oil mist trap into the oil rotary vacuum pump. Four kinds of mechanisms are available for different working pressure and operating situations. Oil return mechanism A Pump Oil return mechanism B Details Recovery method Oil return Oil returns into the pump case through mechanism A the check valve when the pump stops. Semi-auto Effect on ultimate pressure ow Recommended pressure range Needle valve Oil return Oil returns from the gas ballast port mechanism B through the needle valve. Manual Some Oil mist Pump Oil return mechanism C Floating-type oil return Oil return mechanism D Oil mist Pump Oil return Oil returns from the inlet port side mechanism C through the needle valve. Oil return Oil collected in the floating type oil mechanism D return returns from the inlet port side. * Oil return mechanism is not workable with the oil mist trap TMX-1. The TMX-1 has a check valve inside like the oil return mechanism A. Manual Auto Atmospheric pressure igh ow [Pa] 1 10 102 1000 10000 [Torr / mbar] 0.01 0.1 1 10 100 Continuously-workable pressure range Repeatable working pressure range UVAC, Inc. Components Division www.ulvac.co.jp/en Overseas Sales in Japan TE +81-467-89-2261 USA : UVAC Technologies, Inc. TE +1-978-686-7550 PIIPPINES : UVAC SINGAPORE PTE TD Philippines Branch TE +63-46-437-7700 GERMANY : UVAC Gmb TE +49-89-960909-0 VIETNAM : UVAC SINGAPORE PTE TD Vietnam Representative Office TE +84-8-6255-6762 CINA : UVAC (SANGAI) Trading Co.,td. TE (86)21-6127-6610 INDONESIA : UVAC SINGAPORE PTE TD Indonesia Representative Office TE +62-21-8990-5070 TAIAN : UVAC TAIAN, Inc. TE +886-3-579-5688 TAIAND : UVAC (TAIAND) TD TE +66-2-7388883 KOREA : UVAC KOREA, td. TE +82-31-683-2922 MAAYSIA : UVAC MAAYSIA SDN. BD. TE +60-3-5121-4700 SINGAPORE : UVAC SINGAPORE PTE TD TE +65-6542-2700 INDIA : UVAC, Inc., India Branch TE +91-40-27007006 This catalog is subject to change without notice. This catalog is published in order to sell this product in overseas. Please see Japanese catalog when purchasing in Japan. 1054E/2018052000SP

Double Stage Rotary Vane type VD series Ver.C ith high efficiency (IE3) full multi-voltage motor developed by UVAC. For various kinds of application. Single kind high efficient (IE3) full multi-voltage covers wide range voltage from 200 to 240V / 380 to 460V. Forced oil circulation makes pumping performance stable even near atmospheric pressure. Suitable for repetitive and consecutive operation between atmospheric and vacuum. Various specification A, B and are available in addition to standard model. Model VD30C VD40C VD60C VD90C Designed pumping speed Ultimate pressure *1 Maximum water vapor tolerance Maximum water vapor capacity close Gas ballast port Gas ballast port Gas ballast port Type Energy efficiency class m 3 /hr 30 40 60 90 /min 500 670 1000 1500 cfm 17.66 23.54 35.31 52.97 m 3 /hr 36 48 72 108 /min 600 800 1200 1800 cfm 21.29 28.25 42.38 63.57 Pa 0.67 Torr 5 10-3 mbar 6.7 10-3 Pa 2 Torr 1.5 10-2 mbar 2.0 10-2 Pa 1300 1360 1320 970 Torr 9.8 10.2 9.9 7.3 mbar 13.0 13.6 13.2 9.7 Pa 1400 1760 2800 2820 *2 Torr 10.5 13.2 21.0 21.2 mbar 14.0 17.6 28.0 28.2 g/h 190 270 430 480 g/h 250 410 1100 1650 *2 Totally enclosed fan cooled 3 phase induction motor IE3 kw (number of poles) 1.5(4) 2.2(4) 3.7(4) Motor *3 P (number of poles) 2 (4) 2.95(4) 4.96(4) 200V~240V/380V~415V Voltage *4 200V~240V/380V~460V Oil UVOI R-7 Oil capacity 1.0 2.5 2.5 4.0 Cooling method Air cooled Inlet VG40 equivalency / KF40 (optional) VG50 equivalency / KF50 (optional) Outlet VG40 equivalency / KF40 (optional) VG40 equivalency / KF40 (optional) eight kg 58 60 90 133 External dimensions xdx mm 210 x 660 x 324 210 x 680 x 324 280 x 761 x 371 280 x 831 x 371 Applicable standard CE / ctuvus Standard accessory A dose of oil, a set of manual Recommended oil mist trap (Optional) *5 TM201: for low load operation TM401: for high load operation TM401: for low load operation TM-2: for high load operation Options, other oil types, gas ballast valve, ISO flange, explosion-resistant motor, special type for special application (spec A, B and ) *1 Measured with a Pirani gauge. (Apprx. 6.7X10-2 Pa when measured with a Mceod vacuum gauge.) *2 VD90C is not allowed the continuous operation in the inlet pressure at 1,000Pa or more. VD90C maximum water vapor tolerance / maximum water vapor capacity (in the continuous operation) : 1000Pa / 600g/h *3 Increased safety explosion-resistant motor and pressure proof explosion-resistant motor are available as an option. *4 Factory shipment setup is 200V class Δ delta connection. Please change it to Y connection if working voltage is 400V class. *5 igh load operation means repeat pumping down between atmospheric pressure and vacuum in short term or long time operation at 10,000 Pa (75 Torr) or higher. Pumping Speed Curves Applications Evaporation and sputtering Vacuum filling and gas exchange Vacuum adsorption, transport and casting Vacuum molding Vacuum drying and freeze drying Automated leak testing, etc 2

Option Specification Model Main Seal Material Independent oil filling (oiler) e eak Test Standard VD30C, VD40C, VD60C, VD90C Fluorine Rubber n/a n/a Spec. A VD30C-A, VD40C-A Nitrile Rubber n/a n/a Spec. B VD30C-B, VD40C-B Silicon Rubber - n/a Spec. VD30C-, VD40C-, VD60C-, VD90C- Fluorine Rubber - - Model Explanation E.g.) VD30C-02211-19030022 30m 3 /h () / Standard / FKM / R-7 / Totally enclosed external fan motor / Multiple voltage / ISO-KF / ithout gas ballast valve / ithout e leak test / English Instruction manual / English arning label Model Rev. Naming Pump head option External option VD30 C - - 0 2 2 1 1-1 9 0 3 0 0 2 2 Model VD30:30m 3 /h() VD40:40m 3 /h() VD60:60m 3 /h() VD90:90m 3 /h() Rev. C:Current Rev. Naming *1 None : Standard A : Spec. A B : Spec. B : Spec. 1 2 3 4 5 6 7 8 9 10 11 12 13 1Structure 0 : Standard 1 : Independent oil filling (oiler) 2Seal 1 : NBR 2 : FKM std 5 : Silicon+NBR 3Oil 1 : Mineral oil(r-4) 2:Mineral oil(r-7) std 6:Fluorine oil (J60) 4Vane 1 : Resin std 5Exhaust valve plate 1 : Stainless std 6Motor kind *2 1:Totally enclosed external fan motor std 2:Explosion-protection(indoor) 4:Flame-proof (indoor) 7Motor voltage 9:Multiple voltage std A:Other (specified voltage) 8Motor frequency 0:Not select std 1: 2: 9Inlet/Outlet flange 3:Inlet/Outlet ISO-KF 4:Inlet/Outlet JIS std 7:Inlet ISO-KF 10Gas ballast valve 0:None std 1:Manual gas ballast valve 11e leak test 0 : ithout std 1 : ith ( type only) 12Instruction manual 1 : Japanese 2 : English 13arning label 1 : Japanese 2 : English 3 : Simplified Chinese 4 : Traditional Chinese 5 : Korean *1 There is not any naming for standard type. A, B or spec is selectable as option. Options for pump head and accessories are different depending on the type. *2 Multiple voltage motor is not available in the case of explosion-protection and flame-proof motor. Voltage needs to be specified. Dimensions VD-C Inlet port(q) Tap depth 14 G3/8 Outlet port VG40 Tap depth 14 Oil supply port G1 (option) Totally enclosed fan cooled motor A C 1 3 1 5 4 (TM-2) (TM201) (TM401) R N M P O 2 Oil drain valve Rc1/2 TYPE A C 3 4 5 1 M N O P Q R 1 2 VD30C 73 210 324 281 287 561 631-660 363 395 365 150 4-φ11 VG40 128 214 107 210 VD40C 73 230 324 281 287 561 631-680 383 395 365 150 4-φ11 128 214 107 210 VD60C 88 255 371 328 324-678 848 761 435 390 365 230 4-φ11 VG50 92 264 132 280 VD90C 88 306 371 328 348-678 848 831 486 570 540 200/230 8-φ11 182 264 132 280 3

Small Size Double Stage Rotary Vane type VD series Single kind high efficient (IE3) full multi-voltage covers wide range voltage from 200 to 240V / 380 to 460V. Forced oil circulation makes pumping performance stable even near atmospheric pressure. Suitable for repetitive and consecutive operation between atmospheric and vacuum. Model VD151 VD201 m 3 /hr 14.4 20.2 /min 240 336 Designed pumping speed cfm 8.47 11.89 m 3 /hr 17.3 24.2 /min 288 403 cfm 10.18 14.24 Pa 0.67 close Torr 5 10-3 mbar 6.7 10-3 Ultimate pressure *1 Pa 6.7 Torr 5 10-2 mbar 6.7 10-2 Pa 500 1300 Maximum water vapor tolerance Torr 3.8 9.8 mbar 5.0 13.0 Maximum water vapor capacity g/h 40 138 Type Totally enclosed fan cooled 3 phase induction motor Energy efficiency class IE1 *2 IE3 Motor kw (number of poles) 0.55 (4) 0.75 (4) P (number of poles) 0.75 (4) 1 (4) 200V~240V/380V~415V Voltage 200V~240V/380V~460V Oil UVOI R-7 Oil capacity 0.7 1.1 Cooling method Air cooled Inlet KF25 equivalency Outlet G1 eight kg 29 34.5 External dimensions xdx mm 170 x 513 x 240 170 x 536 x 265 Applicable standard CE Standard accessory A dose of oil, a set of manual Recommended oil mist trap (Optional) TMX-1 + adapter flange Options *1 Measured with a Pirani gauge. (Apprx. 6.7X10-2 Pa when measured with a Mceod vacuum gauge.) *2 The energy efficiency regulation is not applicable for this motor. *3 Factory shipment setup is 200V class Δ delta connection. Please change it to Y connection if working voltage is 400V class. Applications Pumping Speed Curves Vacuum filling and gas exchange Vacuum adsorption, transport and casting Vacuum molding Vacuum drying and freeze drying VD201 4

Small Size Double Stage Rotary Vane type PVD series egacy and small size double stage oil rotary vane pump. Quiet and low speed rotation. Enclosed belt cover for safety. Model *1 PVD-180 PVD-360 m 3 /hr 9 19 /min 155 310 Designed pumping speed cfm 5.3 11.2 m 3 /hr 11 22 /min 186 372 cfm 6.5 13 Pa 0.67 close Torr 5.0 10-3 mbar 6.7 10-2 Ultimate pressure *2 Pa 6.7 Torr 5 10-2 mbar 6.7 10-2 Type Totally enclosed fan cooled 3 phase induction motor Energy efficiency class IE1 *3 IE3 Motor kw (number of poles) 0.4 (4) 0.75 (4) P (number of poles) 0.54 (4) 1 (4) Voltage 200V 200V / 220V 200V / 220V / 230V Oil UVOI R-7 Oil capacity 0.3 0.5 Cooling method Air cooled Inlet dia.28 dia.19 dia.34 dia.27 Outlet G3/4 G1 eight Kg 33.5 43 External dimensions xdx mm 265 x 470 x 321 303 x 488 x 321 Applicable standard - Standard accessory A dose of oil, a set of manual Recommended oil mist trap (Optional) TMX-1 + adapter flange Options, other oil types, explosion-resistant motor, special type for special application (spec B and ) *1 PVD-B models (with oil back-flow prevention mechanism) are designated as PVD-180-B for the PVD-180 model and PVD-360-B for the PVD-360 models. *2 Measured with a Pirani gauge. (Apprx. 6.7X10-2 Pa when measured with a Mceod vacuum gauge.) *3 The energy efficiency regulation is not applicable for this motor. Applications Vacuum filling and gas exchange Vacuum adsorption, transport and casting Vacuum molding Vacuum drying and freeze drying Pumping Speed Curves 5

Small Size Double Stage Rotary Vane type VD / PVD series Dimensions VD A B Inlet port KF25 O u t l e t( J ) Oil supply port G3/4 TMX-1(Option) Totally enclosed fan cooled motor 3 4 C G E D F Drain valve Rc3/8 TYPE A B C D E F G 3 4 VD151 238 154 33 260 120 130 65-240 213 228 396 513 170 VD201 258 143 31.5 260 136 130 65 271 265 254 233 439 535.5 181 PVD C D B A Solenoid valve (B-type) Outlet pipe screw(j) Outlet (Oil supply port) TMX-1(Option) Inlet port O D(M )/ I D(N ) Screw(P) 4 Totally enclosed fan cooled motor Oil drain port M12 3 G 2 1 F E 4-φ12 2 TYPE A B C D E F G 3 J 2 M N P 1 2 PVD-180 65 90 420 15 150 15 27 321 315-177 G3/4 470 450 φ28 φ19 G3/4 265 65 180 PVD-180B 65 90 420 15 150 15 27 321 315 321 177 G3/4 470 450 φ28 φ19 G3/4 265 65 180 PVD-360 85 90 440 15 190 15 30.5 321 315-195.5 G1 488 470 φ34 φ27 G1 303.5 80 220 PVD-360B 85 90 440 15 190 15 30.5 321 315 327 195.5 G1 488 470 φ34 φ27 G1 303.5 80 220 6

Single Stage Oil Rotary Vane type VS series ower ultimate pressure even it is single stage oil rotary vane pump. ower vibration structure compared with Rotary plunger model. Suitable when installing at upper floor. Forced oil circulation makes pumping performance stable even near atmospheric pressure. Suitable for repetitive and consecutive operation between atmospheric and vacuum. Model VS1501 VS2401 m 3 /hr 150 240 /min 2500 4000 Designed pumping speed cfm 88.2 141.2 m 3 /hr 180 288 /min 3000 4800 cfm 105.9 169.4 Pa 5.3 close Torr 3.9 10-2 mbar 5.3 10-2 Ultimate pressure *1 Pa 80 Torr 0.6 mbar 0.8 Type Totally enclosed fan cooled 3 phase induction motor Energy efficiency class IE3 kw (number of poles) 5.5 (4) 7.5 (4) P (number of poles) 7.5 (4) 10 (4) Motor 200V~240V/380V~415V Voltage 200V~240V/380V~460V Capacity 40 55 (kva) 35 50 Oil UVOI R-7 Oil capacity 8.0 ~ 10.5 Cooling method ater cooled Inlet VG80 equivalency Outlet VG50 equivalency eight kg 232 271 External dimensions xdx mm 330 941 460 333 1061 460 Applicable standard - Standard accessory A dose of oil, a set of manual Recommended oil mist trap (Optional) TM-2(F)+ adapter flange TM-3(F)+ adapter flange Options *2 *1 Measured with a Pirani gauge. (Apprx. 5.3X10-1 Pa when measured with a Mceod vacuum gauge.), other oil types, gas ballast valve, ISO flange,explosion-resistant motor, special type for special application (spec and R) Pumping Speed Curves Applications Evaporation and sputtering Vacuum filling and gas exchange Vacuum adsorption, transport and casting Vacuum molding Vacuum drying and freeze drying Automated leak testing, etc Pumping Speed [m3/hour] 300 250 200 150 100 Gas Ballast Closed Gas Ballast Open VS2401 VS2401 VS1501 VS1501 50 0 1 10 100 1000 10000 100000 Pressure [Pa] 7

Single Stage Oil Rotary Vane type VS650A / VS750A Ultimate pressure *1 arge size and low vibration single stage oil rotary vane pump. Selectable from air and water cooled type. Oil cooler is used for oil temperature cooling for a air cooled model. Equipped with a cartridge-type oil mist filter inside the oil tank. Cleaning of the inside of the oil tank and replacement of the oil mist filter are easy. Model VS650A-A VS650A- VS750A-A VS750A- m 3 /h 650 750 /min 10833 12500 Max. pumping speed cfm 383 441 m 3 /h 750 n/a /min 12500 n/a cfm 441 n/a Pa 8 GP Torr 6 10 close mbar 8 10-2 Max. water vapor tolerance *2 Max. water vapor capacity *2 Motor *3 GP1 GP1 2 Pa 70 Torr 0.52 mbar 0.7 Pa 200 Torr 1.5 mbar 2.0 Pa 4500 2500 5500 2500 Torr 33.8 18.8 41.4 18.8 GP1 mbar 45 25 55 25 Pa 5500 2500 n/a Torr 41.4 18.8 n/a mbar 55 25 n/a Pa 6000 3800 7500 4000 Torr 45.1 28.6 56.4 30.1 GP2 mbar 60 38 75 40 Pa 7500 4000 n/a Torr 56.4 30.1 n/a mbar 75 40 n/a GP1 kg/h 17 11 24 13 kg/h 24 13 n/a GP2 kg/h 26 15 34 19 kg/h 34 19 n/a Type Totally enclosed external fan 3 phase AC motor kw (poles) 22 (4) P (poles) 29.5 (2) Power k 8 11 consumption *4 k 11 n/a V 200V~240/380V~415 200V~240/380V~415 Voltage *5 V 200V~240/380V~460 n/a Capacity kva 130 200 kva 200 n/a Oil UVOI R-7 Oil capacity 23~27 25~30 23~27 25~30 Cooling method Air cooled ater cooled Air cooled ater cooled Primary side pressure MPa - 0.5-0.5 psi - 72.5-72.5 Inlet/outlet differential MPa - 0.1-0.1 Cooling water pressure psi - 14.5-14.5 Capacity /min - 3.0-3.0 Temperature - 5~30-5~30 F - 41~86-41~86 Inlet DN 100 ISO-K Outlet DN 100 ISO-K eight kg 806 800 802 796 External dimensions xdx mm 1490 905 705 1490 841 705 1490 905 705 1490 841 705 Applicable standard - Standard accessories Oil for one pump, 1 set of instruction manual Options other oil types, flame-proof motor, specified voltage motor,jis flange *6, gas ballast valve 2 (manual) *1 Measured with a Pirani vacuum gauge. (Approx. 0.8Pa when measured with a Mceod vacuum gauge.) *2 ater vapor tolerance and capacity are measured under following cooling water capacity. Cooling water temperature at inlet port is 26 (78.8F). GP1 GP1 2 VS650A- VS750A- 3 /min. 5 /min. 5 /min. - 3 /min. 5 /min. 5 /min. - *3 Increased safety explosion-resistant motor and pressure proof explosion-resistant flange motor are available as option. owever, multiple voltage cannot be selected. *4 At ultimate pressure *5 Factory shipment setup is 200V class Δ delta connection. Please change it to Y connection if working voltage is 400V class. *6 Size to connect pipe changes when JIS flange is selected for inlet/ outlet port. Pumping Speed [m 3 /h] 900 800 700 600 500 400 300 200 100 Pumping Speed Curves Gas Ballast Closed Gas Ballast Valve 1 Opened Gas Ballast Valve 1+2 Opened 0 1 10 100 1000 10000 100000 Pressure [Pa] VS650 ( VS750 ) VS650 8

Model Explanation E.g.) VS650A--02222-192211131 650m 3 /h () [750m 3 /h ()] / totally enclosed external fan motor / multiple voltage / ISO-K flange ater cooling / 1 gas ballast valve (manual) / Japanese & English Instruction manual / Japanese arning label Model Rev. Naming Pump head option External option VS650 A - - 0 2 2 2 2-1 9 2 1 1 1 1 1 2 3 4 5 6 7 8 9 10 11 12 13 3 1 14 Model 650:650m 3 /h() 750m 3 /h() 750:750m 3 /h() *1 Rev. A : Current Rev. Naming equal option 9 A : Air cooling : ater cooling 1Structure 0 : Standard 2Seal 2 : FKM 3Oil 2 : Mineral oil(r-7) 4Vane 2 : Resin 5Exhaust valve vane 2 : Stainless 6Motor kind 1 : Totally enclosed external fan motor *1 *2 4 : Flame-proof (indoor) 7Motor voltage 9 : Multiple voltage A : Other (specified voltage) 8Inlet/Outlet flange 2 : ISO-K flange 4 : JIS flange 9Cooling method 1 : Air cooling 2 : ater cooling 10Gas ballast valve 1 : 1 gas ballast valve (Manual) 3 : 2 gas ballast valves (Manual) 11Oil filter 1 : ith oil filter 12Back flow prevention valve 1 : ith spring 13Instruction manual 3 : Japanese & English 14arning label 1 : Japanese 2 : English 3 : Simplified Chinese 4 : Traditional Chinese 5 : Korean *1 VS750A is only. It is impossible to run at. *2 Explosion-resistant is available with only motor. Not attached thermostat and electrical box in the case of selecting explosion-resistant motor. *3 Multiple voltage motor is not available with Explosion-resistant motor. Explanation image 1 2 14 3 5 8 4 7 6 9 13 10 12 11 15 1. Inlet 2. Anti Suckback Valve 3. Cylinder 4. Rotor 5. Vane 6. Oil Feed ine 7. Gas Ballast 8. Exhaust Valve 9. Oil Tank 10. Oil Filter 11. Oil evel Gauge 12. Oil Mist Filter Elements 13. Oil Return Valve 14. Oil Return ine 15. Outlet Dimensions VS650A Inlet port DN 100 ISO-K Oil suppy plag G1 1 C A B Outlet port DN100 ISO-K ater outlet G1/2 (ater cooling type) ater inlet G1/2 (ater cooling type) D E Oil drain plug Rc1 G F TYPE A B C D E F G 1 VS650/VS750 887 951 308 1170 127 386.5 257 774 705 505 1541 850 486.5 9

Rotary Plunger type PKS series PKS series models are extremely durable rotary plunger vacuum pumps with very stable pumping. Robust and long-life and low-speed-rotatation pump with less rotary sliding parts. Materials in the pump is highly resistant to abrasion. The high-efficiency (IE3) multi-voltage motor, fully developed by UVAC. The enclosed belt cover and the inspection hole to check the rotation direction and belt tension in safe. (PKS-070B) Model PKS-016 PKS-030 PKS-070B *1 m 3 /hr 96 180 420 Designed pumping speed /min 1600 3000 7000 cfm 57 106 247 Pa 2.7 close Torr 2 10-2 mbar 2.7 10-2 Ultimate pressure *2 Pa 30 170 300 Torr 0.2 1.3 2.3 mbar 0.3 1.7 3.0 Pa 650 900 6000 Maximum water vapor tolerance Torr 4.9 6.8 45.1 mbar 6.5 9.0 60.0 Maximum water vapor capacity g/h 5 7 12 Type Totally enclosed fan cooled 3 phase induction motor Energy efficiency class IE3 kw (number of poles) 2.2(4) 3.7(4) 11(6) P (number of poles) Motor Voltage 200V~240V/380V~415V 200V~240V/380V~460V Capacity 65 10 15 (kva) 75 Oil UVOI R-7 Oil capacity 6.5 8 20 Cooling method Air cooled ater cooled Inlet VG50 VG80 VG100 Outlet VF50 VF80 VF100 eight kg 225 380(/O moter) 900(/O moter) External dimensions xdx mm 587 884 572 721 675 973 971 983 1190 Applicable standard CE ctuvus *3 Standard accessory A dose of oil, a set of manual Recommended oil mist trap (Optional) TM-2 TM-3 TM-4 TM-4S Options, other oil types, ISO flange, explosion-resistant motor, special type for special application (spec and ) *1 The PKS-070B model is improved with the change on cast iron shape, a larger oil level gauge, a larger capacity oiler, and an enclosed belt cover with an inspection hole. It has the same mounting dimension and performance as the conventional model. *2 Measured with a Pirani gauge. (Apprx.2.7 10-1 Pa when measured with a Mceod vacuum gauge. ) *3 Expected to obtain in March 2018 Applications Vacuum heat treatment furnaces, sintering fumaces, brazing fumaces Vacuum molding Evaporation and sputtering Vacuum drying and freeze drying Vacuum distillation solvent and powder Pumping Speed Curves 10

VS1501 / VS2401 / PKS series Dimensions VS (Option) Totally enclosed fan cooled motor Inlet port VG80 G3/8 Tap depth 22 Outlet port VG50 Tap depth 17 PKS PKS-016 Oil drain port(m) B A Outlet port(k) Tap depth16 F E (For anchor bolt) Inlet port(j) Tap depth20 Oil supply port(n) ater outlet Rc3/8 ater inlet Rc3/8 Outlet port(k) Tap depth25/070 Tap depth18/030 Totally enclosed fan cooled motor Inlet port(j) Tap depth18 PKS-030/PKS-070B (Option) Totally enclosed fan cooled motor Oil supply port(n) 1 4 (TM-4) A B 1 Oil supply port G1 Oil return port G1/4 External filter port outlet G3/8 3 (TM-3) ater outlet G3/8 P M ater inlet G3/8 4-φ15 N 3 (TM-2) 4 (TM-3) 5 (TM-4) External filter port inlet G3/8 Oil drain plug G3/4 TYPE A B 3 4 1 M N P 1 VS1501 116 340 460 420 391 1035 1365 941 571 394 286 77 333.5 163 VS2401 116 422 460 420 393 1035 1365 1061 653 476 286 77 333.5 163 B A C D (For anchor bolt) 1 1 93 6 G Oil drain valve (M) F (For anchor bolt) E C D (For anchor bolt) G TYPE A B C D E F G 3 4 5 6 J K M N 1 PKS-016 70 260 190 440 60 700 4-Φ19 572 550 350 1025 - - - VG50 VF50 884 Rc3/8 G3/4 587 247 PKS-030 80 485 112.5 225 25 470 4-Φ22 973 624 - - 1345-610 VG80 VF80 675 Rc1/2 G3/4 712 137 PKS-070 93 655 173 346 25 537 4-Φ22 1190 743 987 - - 1887 727 VG100 VF100 983 Rc3/4 G1 1/4 971 200 11