Glove Box Instrumentation Specifications

Glove Box Instrumentation Specifications April 11, 2006 The following is a brief list of the major technical specifications of the instrumentation for the Glove Box (GB). The spec sheets for the various components are attached at the end of this document. 1 Oxygen Monitor The O 2 monitoring device was obtained from Advanced Micro Instruments (AMI). This monitor will be placed inside of the control box attached to the GB. The specs are as follows: Anodized Aluminum body Power Requirments: 7-28 VDC (250 ma @ 12 VDC) Range: 0-25% O 2 1 4 Compression fittings (Swagelok or similar) Dimensions: 1.8 diameter, 2.15 long 2 Check Valves CV1 and CV4 were purchased from Generant. They both have 303 SS bodies, Viton seals, and a crack pressure of 0.01 bar. 3 Pressure Transducers The pressure transducers used in the system are manufactured by WIKA, and are model number E-10. While all of the transducers we are using are the same basic model number, we have a few with different specs from the rest. The majority of them have the following specs: Pressure Range: 30 inhg to +30 psig (Compound) Output: 1-5 VDC 1

4 VACUUM PUMPS 2 Electrical Connection: 1 2 MNPT Pressure Connection: 1 4 FNPT Explosion Proof The ones that are different have an operating pressure range of 0-100 psig, with all other specs remaining the same. 4 Vacuum Pumps The two pumps in the system are identical, and were manufactured by Air Dimensions Incorporated (ADI). They are double head diaphragm pumps, 316 SS wetted parts, and 100% Teflon diaphragms. They operate on 12VDC, and have 1 8 FNPT inputs. 5 Pressure Regulators The regulators are Swagelok KLF series diaphragm sensing, pressure reducing regulators. The specs are as follows: Body Material: 316 SS Pressure Control Range: Two regulators at 0-2 psig, one at 0-10 psig Max Inlet Pressure: One regulator at 15 psig, two at 3600 psig Port sizes: 1 4 FNPT Seat Material: PCTFE C v : 0.20 Captured Vent 6 Solenoid Valves All of the solenoid valves were manufactured by Asco Inc. All of the valves operate on 24VDC, have PTFE seals and discs, and 316 SS bodies. 7 Flow Meters The flow meters were obtained from Sierra Instruments, and are in the 820s series of their product line. The specs are as follows: Body and sensor mechanism made from 316 SS with Viton o-rings

7 FLOW METERS 3 1 4 compression fittings 24 VDC supply 0-5 VDC Linear output No Display Center Pressure: one at 75 psi, four at 6 psi

Oxygen Analyzers - Model 65 http://www.amio2.com/percent65.html 1 of 2 4/11/2006 5:01 PM The Model 65 is a perfect low cost, high performance solution for measuring percent levels of oxygen in a variety of OEM applications when displays, alarms, and multiple ranges are not required or become redundant in your system design. The Model 65 employs a revolutionary long life zirconium oxide sensor lasting up to 10 years if used continuously and considerably longer if used intermittently. This eliminates the need to purchase, stock, frequently calibrate or replace the standard galvanic type oxygen sensors, greatly reducing overall costs. This device uses state-of-the-art microprocessor based electronics for single range linear analog outputs of 0-2.5VDC full scale. It provides unmatched stability and reliability even in rapid temperature swings from -4 F to +130 F. AMI guarantees higher quality and exceptional services at a lower price. REQUEST QUOTE The installation is simple, requires minimal space and a supply voltage of 12-28VDC. It requires no support or calibration gases and is suitable for single range applications from 0-2% up to 0-95% oxygen. Annual calibrations can easily be performed on ambient air or a suitable level calibration gas. Single 0-25% range. Optional ranges available up to 0-95% Output: 0-2.5VDC Minimum detection: 0.05% of range or 500ppm Repeatability: 0.05% oxygen Operating temperature: -4 F to 131 F (-20 C to 55 C) Diurnal temperature specification: < 1% over temperature range 90% response: < 12 sec Power requirements: 10-24 VDC, < 3 watts. Area Classification: General purpose Weight: < 1lb Dimensions: 1.810"Dia. x 2.00 Single 0-25% range. Optional ranges available up to 0-95% Virtually unaffected by change in temperature RFI protected Linear long life zirconium oxide sensor Rugged compact design Unaffected by change in flow rate (.1 to 5 SCFH) Weather-tight 4-pin interconnection connector, plus cable Barbed sample gas in/out fittings (optional compression fittings) No calibration or support gases necessary 2 year warranty 10-year life sensor Low original cost and virtually maintenance free over its entire life Requires no support or calibration gases (other than ambient air calibration) No sensor replacement or shelf life issues

Inline Check Valve http://www.generant.com/cv.htm 1 of 3 4/11/2006 5:02 PM Description High flow, zero leak, low pressure drop check valve suitable for most fluid and gas applications. Fully guided poppet with free floating O'ring design is extremely tolerant of particulate contamination. A metal to metal positive stop in both the open and checked position protects the O'ring and spring from over-stress fatigue. Zero external leakage is achieved by utilization of a static O'ring seal with TFE backup ring. When specified with the proper seal material, these valves are ideally suited to cryogenic system applications. Technical Data Nominal Crack Pressure:.15, 1, 3 & 8 Psig (0.01, 0.07, 0.21 & 0.55 bar) Leakage: Zero to maximum operating pressure. TFE Seals may require back pressure to seal leak-tite Temperature Rating: -320F - 450F (-195C to 232C)

Inline Check Valve http://www.generant.com/cv.htm 2 of 3 4/11/2006 5:02 PM based on seal material Maximum Operating Pressure to 300F (149C) Materials of Construction Dimensional / Flow Data Ordering Information

Electronic Pressure Measurement Pressure Transmitter Explosion proof Model E-10, standard version Model E-11, flush diaphragm WIKA Data Sheet PE 81.27 Applications n Wellhead monitoring n Refining / Petrochemical n Offshore plattforms / pipelines n Gas measurement Special eatures n M-approved Explosion proof for Class I Division 1 hazardous locations n ATEX-approved lameproof for II 2G Ex d II C n Available with 4... 20 ma, 2-wire or 1... 5 V, 3-wire output signals n Engineered to meet harsh demands n Retrofits many existing applications ig. left Pressure transmitter E-10 / ATEX ig. center Pressure transmitter E-10 / M, CSA ig. right Pressure transmitter E-11 (open wires) / M, CSA Description The Types E-10 and E-11 explosion proof / flameproof pressure transmitters are specifically designed to meet the durability and performance requirements of industrial applications. These pressure transmitters feature an industry standard 4... 20 ma, 2-wire signal output (optional signal output 1... 5 V), NEMA 4X (IP 67) ingress protection, and are extremely resistant to vibration, moisture instrusion and pressure spikes. They are applicable for acid gas apllications and therefore they provide extra resistance against sulfide stress cracking when exposed to gases containing sulphur. The transmitters are engineered to meet Class I Division 1 Explosion proof protection according to M, CSA or II 2 G Ex d II C according to ATEX for installation in hazardous environments. Each transmitter undergoes extensive quality control testing and calibration to achieve an accuracy of < 0.5 %. In addition, each pressure transmitter is temperature compensated to assure accuracy and long term stability when exposed to severe ambient temperature variations. WIKA Data Sheet PE 81.27 03/2006 Page 1 of 4 Pressure transmitter for general applications Model S-1 S see data sheet PE 81.01 Pressure transmitter Intrinsic safe Model IS-2 S see data sheet PE 81.50 Pressure transmitter Non-incendive Model N-1 S see data sheet PE 81.26

Specifications Model E-10 / E-11 Pressure ranges bar 0.1 1) 0.16 1) 0.25 1) 0.4 0.6 1 1.6 2.5 4 6 10 Over pressure safety bar 1 1.5 2 2 4 5 10 10 17 35 35 Burst pressure bar 2 2 2.4 2.4 4.8 6 12 12 20.5 42 42 Pressure ranges bar 16 25 40 60 100 160 250 400 600 1000 2) Over pressure safety bar 80 50 80 120 200 320 500 800 1200 1500 Burst pressure bar 96 96 400 550 800 1000 1200 1700 3) 2400 3) 3000 Materials n Wetted parts {Vacuum, gauge pressure, compound range, absolute pressure are available} 1) Only with FM, CSA approval available 2) Only Model E-10. 3) For model E-11: the value specified in the table applies only when sealing is realised with the sealing ring underneath the hex. Otherwise max. 1500 bar applies. (other materials see WIKA diaphragm seal program) Ø Model E-10 Stainless steel (> 25 bar stainless steel and Elgiloy ) Ø Model E-11 Stainless steel {Hastelloy} O-ring: NBR {FPM/FKM} n Case Stainless steel Internal transmission fluid Synthetic oil (Not for E-10 with pressure ranges > 25 bar) Power supply U B U B in DC V 10 < U B 30 for 4... 20 ma, 2-wire 6 < U B < 30 for 1... 5 V, 3-wire Signal output and 4... 20 ma, 2-wire R A (U B - 10 V) / 0.02 A maximum load R A R A in Ohm 1... 5 V, 3-wire R A > 10,000 Response time (10... 90 %) ms 1 ( 10 ms at medium temperatures below -30 C for pressure ranges up to 25 bar or with flush diaphragm) Dielectric strength DC V 500 Accuracy % of span 0.25 (BFSL) % of span 0.5 4) 4) Including non-linearity, hysteresis, non-repeatability, zero point and full scale error (corresponds to error of measurement per IEC 61298-2). Adjusted in vertical mounting position with lower pressure connection. Non-linearity % of span 0.2 (BFSL) according to IEC 61298-2 1-year stability % of span 0.2 (at reference conditions) Permissible temperature of n Medium 5) -30... +100 C {-40... +105 C} -22... +212 F {-40... +221 F} n Ambience 5) -30 +100 C {-40... +105 C} -22 +212 F {-40... +221 F} n Storage 5) -30... +105 C {-40... +105 C} -22... +221 F {-40... +221 F} 5) Also complies with EN 50178, Tab. 7, Operation (C) 4K4H, Storage (D) 1K4, Transport (E) 2K3 Compensated temp. range 0... +80 C +32... +176 F Temperature coefficients within compensated temp range n Mean TC of zero % of span 0.2 / 10 K (< 0.4 for pressure ranges < 250 mbar) n Mean TC of range % of span 0.2 / 10 K d - protection ATEX Category 6) 2G Ignition protection type Ex d II C T4, Ex d II C T5, Ex d II C T6 6) Read the operating instructions and safety relevant data in the EC-type examination certificate in any case (KEMA 05 ATEX 2240 X). Approval authority n Factury mutual (FM / CSA) Explosion proof for: a - conformitiy HF-immunity V/m 10 Burst KV 4 n Class 1, Division 1, Groups A, B, C and D Dust ignitionproof for: Class 1, Division 2, Groups E, F and G FM Standards according to class number 3600, 3615 and 3810 89/336/EEC (EMC directive) interference emission (class B) and immunity see EN 61 326, 97/23/EC Pressure equipment directive 97/9/EG (ATEX directive) EN 60079-0:2004, EN 60079-1:2004 Shock resistance g 1000 according to IEC 60068-2-27 (mechanical shock) Vibration resistance g 20 according to IEC 60068-2-6 (vibration under resonance) Wiring protection Mass kg Approx. 0.2 (0.4 lbs) { } Items in curved brackets are optional extras for additional price. Protected against reverse polarity and short circuiting on the instrument side Page 2 of 4 WIKA Data Sheet PE 81.27 03/2006

Dimensions in mm Ingress Protection IP per IEC 60 529 1/2 NPT Conduit with 2 m (6 ft) flying leads IP 67 (NEMA 4X) ATEX Order code: DX 1/2 male conduit with 2 m (6 ft) flying leads IP 67 (NEMA 4X) M, CSA Order code: 2X 1/2 male conduit with 2 m (6 ft) open wires IP 67 (NEMA 4X) M, CSA Order code: 3X Pressure connection: G 1/2, EN 837, Order code: GD Pressure connection: 1/2 NPT per Nominal size for US standard tapered pipe thread NPT Order code: ND Pressure connections E-10 1/4 NPT per Nominal size for US standard tapered pipe thread NPT Order code: NB 1/ 2 NPT per Nominal size for US standard tapered pipe thread NPT Order code: ND G 1/4 EN 837 Order code: GB G 1/2 EN 837 Order code: GD or installation and safety instructions see the operating instructions for this product. or tapped holes and welding sockets please see Technical Information IN 00.14 for download at www.wika.de -Service Other connections on request WIKA Data Sheet PE 81.27 03/2006 Page 3 of 4

Pressure connections E-11, flush diaphragm G 1 B with o-ring (0... 0.1 to 0... 1.6 bar) Order code: 85 G 1/2 B with o-ring (0... 2.5 to 0... 600 bar) Order code: 86 sealing ring 29.7 x 35.7 x 2.0 sealing ring 18.5 x 23.9 x 1.5 o-ring 26 x 2 o-ring 15 x 2 Wiring details lying leads / open wires 2-wire lying leads / open wires 3-wire Non hazardous area Hazardous (classified area) Non hazardous area Hazardous (classified area) red red brown Legend: black black screen / case (green with open wires) screen / case (green with open wires) urther information You can obtain further information (data sheets, instructions, etc.) via our internet address www.wika.de Other pressure transmitters for hazardous areas Operating Instructions Specifications and dimensions given in this leaflet represent the state of engineering at the time of printing. Modifications may take place and materials specified may be replaced by others without prior notice. ig. left model N-10 Non-incendive ( M, CSA) ig. center model N-10 Non-incendive (ATEX) ig. right model IS-21-S Intrinsic safe Page 4 of 4 WIKA Data Sheet PE 81.27 03/2006 WIKA Alexander Wiegand GmbH & Co. KG Alexander-Wiegand-Straße 30 63911 Klingenberg/Germany Phone (+49) 93 72/132-0 Telefax (+49) 93 72/132-406 E-Mail support-tronic@wika.de www.wika.de 9066438 03/2006 GB

4 3 2 1 D D 6.6 [169 mm] 8.4 [213 mm] C 1/8-27 NPT PORTS C.9 [22 mm].4 [10 mm] 1.8 [44 mm].6 [16 mm] 1.8 [44 mm] RPM ADJUSTMENT ACCESS CAP B B 4.2 [108 mm] A 4 1.9 [47 mm] 4X 6-32 UNC 2A 2.4 [62 mm] 3.5 [90 mm] 2.4 [60 mm] 4.4 [113 mm] DATE 4/26/2001 APPROVED BY FDM 3 2 TITLE DWG NO AIR DIMENSIONS INC. DEERFIELD BEACH, FL. USA 33442 WWW.AIRDIMENSIONS.COM Dbl Headed DC Brushless Micro Bxx2-xx-Hx0 04/04 (0282) MODEL # Bxx2-xx-Hx0 SHEET 1 OF 2 1 A

4 qwer Direct Acting General Service Solenoid Valves Brass or Stainless Steel Bodies 1/8" to 3/8" NPT NC NO 2/2 SERIES 8262 8263 Features Reliable, proven design with high flows. Small poppet valves for tight shutoff. Wide range of elastomers for specialty service. Mountable in any position. Brass and stainless steel constructions. Construction Valve Parts in Contact with Fluids Body Brass 303/304 Stainless Steel Seals and Discs NBR or Cast UR Core Tube 305 Stainless Steel Core and Plugnut 430F Stainless Steel Springs 302 Stainless Steel Shading Coil Copper Silver Stem PA (Normally Open) Note: All 1/8" NPT Normally Open valves contain CA. All 1/4" NPT Normally Open valves contain PA. % ^ # ) Electrical Watt Rating and Power Consumption Spare Coil Part No. Standard Coil and AC General Purpose Explosionproof Class of Insulation DC Watts Watts VA Holding VA Inrush AC DC AC DC F 10.6 6.1 16 30 238210 238310 238214 238314 F 11.6 10.1 25 50 238610 238710 238614 238714 F 22.6 17.1 40 70 238610 238710 238614 238714 Standard Voltages 24, 120, 240, 480 volts AC, 60 Hz (or 110, 220 volts AC, 50 Hz). 6, 12, 24, 120, 240 volts DC. Must be specified when ordering. Other voltages available when required. Solenoid Enclosures Standard: Watertight, Types 1, 2, 3, 3S, 4, and 4X. Optional: Explosionproof and Watertight, Types 3, 3S, 4, 4X, 6, 6P, 7, and 9. (To order, add prefix EF to catalog number) See Optional Features Section for other available options. 8263 Nominal Ambient Temperature Ranges: AC: 32 F to 125 F (0 C to 52 C) DC: 32 F to 104 F (0 C to 40 C) Refer to Engineering Section for details. Approvals: CSA certified. UL listed, as indicated. Normally Closed Valves FM approved. Meets applicable CE directives. Refer to Engineering Section for details. 2.27 R3

SERIES 8262 8263 4 Specifications (English units) Operating Pressure Differential (psi) Max. AC Max. DC Max. Fluid Temp. F Brass Body Stainless Steel Body Watt Rating/ Class of Coil Insulation ➁ Pipe Size (ins.) Orifice Size (ins.) Cv Flow Factor Air- Inert Gas Water Lt. Oil @ 300 SSU Air- Inert Gas Water Lt. Oil @ 300 SSU AC DC Catalog Number Constr. Ref. No. UL ➂ Listing Catalog Number Constr. Ref. No. UL ➂ Listing AC DC NORMALLY CLOSED (Closed when de-energized), NBR Disc 1/8 3/64.06 750 750 530 650 640 550 180 120 8262G1 1 8262G12 1 6.1/F 10.6/F 1/8 3/32.20 275 290 130 150 140 145 180 120 8262G14 1 8262G15 1 6.1/F 10.6/F 1/8 1/8.34 155 180 140 80 80 80 180 120 8262G2 1 8262G6 1 6.1/F 10.6/F 1/4 3/64.06 750 750 500 500 500 500 180 120 8262G19 16 8262G80 11 6.1/F 10.6/F 1/4 3/64.06 1500 1500 1100 475 475 450 140 140 8262G200 ➀ 17 - - - 10.1/F 11.6/F 1/4 3/64.06 2200 2000 1100 - - - 140 140 - - - 8262G214 ➀ 12 10.1/F - 1/4 3/32.17 360 340 160 150 125 125 180 120 8262G20 16 8262G86 11 6.1/F 10.6/F 1/4 1/8.35 140 165 90 65 60 60 180 120 8262G22 16 8262G7 11 6.1/F 10.6/F 1/4 1/8.35 300 300 200 75 70 70 180 150 8262G232 17 - - - 10.1/F 11.6/F 1/4 5/32.50 180 200 145 40 40 45 180 150 8262G202 4 8262G220 12 10.1/F 11.6/F 1/4 7/32.72 90 100 100 25 25 25 180 150 8262G208 4 8262G226 12 10.1/F 11.6/F 1/4 7/32.85 40 50 40 17 20 21 180 120 8262G13 2 8262G36 11 6.1/F 10.6/F 1/4 9/32.88 60 75 60 18 15 18 180 150 8262G210 4 - - - 10.1/F 11.6/F 1/4 9/32.88 90 100 90 25 20 22 180 150 8262G212 6 8262G230 13 17.1/F 22.6/F 1/4 9/32.96 27 36 28 15 16 16 180 120 8262G90 2 8262G38 11 6.1/F 10.6/F 3/8 1/8.35 160 150 90 65 60 60 180 120 8263G2 3 8263G330 3 6.1/F 10.6/F 3/8 5/32.52 100 100 100 35 35 35 180 150 8263G200 5 8263G331 5 10.1/F 11.6/F 3/8 7/32.72 100 100 100 25 25 25 180 150 8263G206 5 8263G332 5 17.1/F 11.6/F 3/8 9/32.85 100 100 70 - - - 180 8263G210 7 8263G333 7 17.1/F - NORMALLY OPEN (Open when de-energized), NBR Disc (except where noted) 1/8 1/16.09 500 300 225 400 250 150 180 120 8262G91 8 8262G92 8 6.1/F 10.6/F 1/8 3/32.15 275 200 150 190 110 110 180 120 8262G93 8 8262G94 8 6.1/F 10.6/F 1/8 1/8.21 125 100 85 80 60 50 180 120 8262G31 8 8262G35 8 6.1/F 10.6/F 1/4 3/64.06 750 700 700 500 500 500 140 140 8262G260 ➀ 9 8262G130 ➀ 14 10.1/F 11.6/F 1/4 3/32.17 300 250 230 200 150 125 140 140 8262G261 ➀ 9 8262G134 ➀ 14 10.1/F 11.6/F 1/4 1/8.35 130 110 100 80 60 60 180 150 8262G262 9 8262G138 14 10.1/F 11.6/F 1/4 5/32.49 85 75 60 45 30 30 180 150 8262G263 4 8262G142 14 10.1/F 11.6/F 1/4 7/32.83 45 45 40 25 20 20 180 150 8262G264 4 8262G148 14 10.1/F 11.6/F 1/4 9/32.96 30 25 20 15 15 15 180 150 8262G265 4 8262G152 14 10.1/F 11.6/F Notes: ➀ Cast UR disc supplied as standard. ➁ On 50 hertz service, the rating for the 6.1/F solenoid is 8.1 watts. ➂ Safety Shutoff Valve; General Purpose Valve. Refer to Engineering Section (Approvals) for details. 2.28 R3

SERIES 8262 8263 4 Dimensions: inches (mm) Constr. Ref. No. H K L P W 1 ins. 2.52 1.30 1.19 2.16 1.69 mm 64 33 30 55 43 2 ins. 2.98 1.71 1.56 2.57 1.69 mm 76 43 40 65 43 3 ins. 3.07 1.63 1.88 2.49 1.69 mm 78 41 48 63 43 4 ins. 3.20 1.78 1.56 2.79 1.95 mm 81 45 40 71 50 5 ins. 3.25 1.70 2.00 2.77 1.95 mm 83 43 51 70 50 6 ins. 3.16 1.78 1.56 2.75 1.95 mm 80 45 40 70 50 7 ins. 3.25 1.70 2.00 2.67 1.95 mm 83 43 51 68 50 8 ins. 3.15 1.32 1.19 2.18 1.69 mm 80 34 30 55 43 9 ins. 3.23 1.67 1.25 2.81 1.95 mm 82 42 32 71 50 11 ins. 2.94 1.71 1.56 2.57 1.69 mm 75 43 40 65 43 12 ins. 3.12 1.78 1.56 2.75 1.95 mm 79 45 40 70 50 13 ins. 3.12 1.78 1.56 2.75 1.95 mm 79 45 40 70 50 14 ins. 3.16 1.65 1.56 2.79 1.95 mm 80 42 40 71 50 16 ins. 3.01 1.73 1.25 2.59 1.69 mm 76 44 32 66 43 17 ins. 3.19 1.80 1.25 2.77 1.95 mm 81 46 32 70 50 IMPORTANT: Valves may be mounted in any position. Constr. Refs. 8 Constr. Refs. 3, 5, 7 Constr. Refs. 11-14, 16, 17 Constr. Refs. 1 Mounting Details Constr. Refs. 2, 4, 6, 9 2.30 R3

4 qwer Pilot Operated General Service Solenoid Valves Brass or Stainless Steel Bodies 3/8" to 2 1/2" NPT NC NO 2/2 SERIES 8210 Features Wide range of pressure ratings, sizes, and resilient materials provide long service life and low internal leakage. High Flow Valves for liquid, corrosive, and air/inert gas service. Industrial applications include: - Car wash - Laundry equipment - Air compressors - Industrial water control - Pumps Construction Valve Parts in Contact with Fluids % ) Body Brass 304 Stainless Steel Seals and Discs Disc-Holder Core Tube Core and Plugnut Springs NBR or PTFE PA 305 Stainless Steel 430F Stainless Steel 302 Stainless Steel Shading Coil Copper Silver Electrical Watt Rating and Power Consumption Spare Coil Part Number Standard Coil and AC General Purpose Explosionproof Class of Insulation DC Watts Watts VA Holding VA Inrush AC DC AC DC F - 6.1 16 40 238210-238214 - F 11.6 10.1 25 70 238610 238710 238614 238714 F 16.8 16.1 35 180 272610 97617 272614 97617 F - 17.1 40 93 238610-238614 - F - 20 43 240 99257-99257 - F - 20.1 48 240 272610-272614 - H 30.6 - - - - 74073-74073 H 40.6 - - - - 238910 238914 Standard Voltages: 24, 120, 240, 480 volts AC, 60 Hz (or 110, 220 volts AC, 50 Hz). 6, 12, 24, 120, 240 volts DC. Must be specified when ordering. Other voltages available when required. Solenoid Enclosures Standard: Red-Hat II - Watertight, Types 1, 2, 3, 3S, 4, and 4X; Red-Hat - Type I. Optional: Red-Hat II - Explosionproof and Watertight, Types 3, 3S, 4, 4X, 6, 6P, 7, and 9; Red-Hat - Explosionproof and Watertight, Types 3, 4, 4X, 7, and 9. (To order, add prefix EF to catalog number, except Catalog Numbers 8210B57, 8210B58, and 8210B59. Valves not available with Explosionproof enclosures.) See Optional Features Section for other available options. Nominal Ambient Temperature Ranges: Red-Hat II/ Red-Hat AC: 32 F to 125 F (0 C to 52 C) Red-Hat II DC: 32 F to 104 F (0 C to 40 C) Red-Hat DC: 32 F to 77 F (0 C to 25 C) (104 F/40 C occasionally) Refer to Engineering Section for details. Approvals: CSA certified. Red-Hat II meets applicable CE directives. Refer to Engineering Section for details. 2.09 R4

SERIES 8210 4 Specifications (English units) Operating Pressure Differential (psi) Max. AC Max. DC Pipe Size Orifice Size Cv Flow Air- Inert Light Oil @ 300 Air- Inert Light Oil @ 300 (ins.) (ins.) Factor Min. Gas Water SSU Gas Water NORMALLY CLOSED (Closed when de-energized), NBR or PTFE ➁ Seating 2.10 R4 Max. Fluid Temp. F Brass Body Stainless Steel Body Constr. Constr. Catalog Ref. UL ➄ Catalog Ref. Number No. ➃ Listing Number No. ➃ SSU AC DC Watt Rating/ Class of Coil Insulation ➆ UL ➄ Listing AC DC 3/8 3/8 1.5 ➀ 150 125-40 40-180 150 8210G73 ➂ 1P 8210G36 ➂ 1P 6.1/F 11.6/F 3/8 5/8 3 0 150 150-40 40-180 150 8210G93 5D - - - 10.1/F 11.6/F 3/8 5/8 3 5 200 150 135 125 100 100 180 150 8210G1 6D - - - 6.1/F 11.6/F 3/8 5/8 3 5 300 300 300 - - - 175-8210G6 5D - - - 17.1/F - 1/2 7/16 2.2 ➀ 150 125-40 40-180 150 8210G15 ➂ 2P 8210G37 ➂ 2P 6.1/F 11.6/F 1/2 5/8 4 0 150 150-40 40-180 150 8210G94 5D - - - 10.1/F 11.6/F 1/2 5/8 4 0 150 150 125 40 40-175 150 - - - 8210G87 7D 17.1/F 11.6/F 1/2 5/8 4 5 200 150 135 125 100 100 180 150 8210G2 6D - - - 6.1/F 11.6/F 1/2 5/8 4 5 300 300 300 - - - 175-8210G7 5D - - - 17.1/F - 1/2 3/4 4 5-300 - - 300-180 125 8210G227 5D - - - 17.1/F 40.6/H 3/4 5/8 4.5 0 150 150 125 40 40-175 150 - - - 8210G88 7D 17.1/F 11.6/F 3/4 3/4 5 5 125 125 125 100 90 75 180 150 8210G9 9D - - - 6.1/F 11.6/F 3/4 3/4 5 0 150 150-40 40-180 150 8210G95 8D - - - 10.1/F 11.6/F 3/4 3/4 6.5 5 250 150 100 125 125 125 180 150 8210G3 11D - - - 6.1/F 11.6/F 3/4 3/4 6 0 - - - 200 180 180-77 8210B26 ➁ 10P - - - - - 30.6/H 3/4 3/4 6 0 350 300 200 - - - 200-8210G26 ➁ 40P - - - 16.1F - 1 1 13 0 - - - 100 100 80-77 8210B54 31D - 8210D89 15D - - 30.6/H 1 1 13 0 150 125 125 - - - 180-8210G54 41D 8210G89 45D 16.1/F - 1 1 13 5 150 150 100 125 125 125 180 150 8210G4 12D - - - 6.1/F 11.6/F 1 1 13.5 0 300 225 115 - - - 200-8210G27 42P - - - 20.1/F - 1 1 13.5 10 300 300 300 - - - 175-8210G78 ➁ 13P - - - - 17.1/F - 1 1/4 1 1/8 15 0 - - - 100 100 80-77 8210B55 32D - - - - - 30.6/H 1 1/4 1 1/8 15 0 150 125 125 - - - 180-8210G55 43D - - - 16.1/F - 1 1/4 1 1/8 15 5 150 150 100 125 125 125 180 150 8210G8 16D - - - 6.1/F 11.6/F 1 1/2 1 1/4 22.5 0 - - - 100 100 80-77 8210B56 33D - - - - - 30.6/H 1 1/2 1 1/4 22.5 0 150 125 125 - - - 180-8210G56 44D - - - 16.1/F - 1 1/2 1 1/4 22.5 5 150 150 100 125 125 125 180 150 8210G22 18D - - - 6.1/F 11.6/F 2 1 3/4 43 5 150 125 90 50 50 50 180 150 8210G100 20P - - - 6.1/F 11.6/F 2 1/2 1 3/4 45 5 150 125 90 50 50 50 180 150 8210G101 21P - - - 6.1/F 11.6/F NORMALLY OPEN (Open when de-energized), NBR Seating (PA Disc-Holder, except as noted) 3/8 5/8 3 0 150 150 125 125 125 80 180 150 8210G33 23D - - - 10.1/F 11.6/F 3/8 5/8 3 5 250 200 200 250 200 200 180 180 8210G11 ➇ ➈ 39D - - - 10.1/F 11.6/F 1/2 5/8 4 0 150 150 125 125 125 80 180 150 8210G34 23D - - - 10.1/F 11.6/F 1/2 5/8 3 0 150 150 100 125 125 80 180 150 - - - 8210G30 37D 10.1/F 11.6/F 1/2 5/8 4 5 250 200 200 250 200 200 180 180 8210G12 ➇ ➈ 39D - - - 10.1/F 11.6/F 3/4 3/4 5.5 0 150 150 125 125 125 80 180 150 8210G35 25D - - - 10.1/F 11.6/F 3/4 5/8 3 0 150 150 100 125 125 80 180 150 - - - 8210G38 38D 10.1/F 11.6/F 3/4 3/4 6.5 5 - - - 250 200 200-180 8210C13 24D - - - - 16.8/F 3/4 3/4 6.5 5 250 200 200 - - - 180-8210G13 46D - - - 16.1/F - 1 1 13 0 125 125 125 - - - 180-8210B57 ➅ ➉ 34D - - - 20/F - 1 1 13 5 - - - 125 125 125-180 8210D14 26D - - - - 16.8/F 1 1 13 5 150 150 125 - - - 180-8210G14 47D - - - 16.1/F - 1 1/4 1 1/8 15 0 125 125 125 - - - 180-8210B58 ➅ ➉ 35D - - - 20/F - 1 1/4 1 1/8 15 5 - - - 125 125 125-180 8210D18 28D - - - - 16.8/F 1 1/4 1 1/8 15 5 150 150 125 - - - 180-8210G18 48D - - - 16.1/F - 1 1/2 1 1/4 22.5 0 125 125 125 - - - 180-8210B59 ➅ ➉ 36D - - - 20/F - 1 1/2 1 1/4 22.5 5 - - - 125 125 125-180 8210D32 29D - - - - 16.8/F 1 1/2 1 1/4 22.5 5 150 150 125 - - - 180-8210G32 49D - - - 16.1/F - 2 1 3/4 43 5 - - - 125 125 125-150 8210103 30P - - - - 16.8/F 2 1 3/4 43 5 125 125 125 - - - 180-8210G103 50P - - - 16.1/F - 2 1/2 1 3/4 45 5 - - - 125 125 125-150 8210104 27P - - - - 16.8/F 2 1/2 1 3/4 45 5 125 125 125 - - - 180-8210G104 51P - 16.1/F - Notes: ➀ 5 psi on Air; 1 psi on Water. ➁ Valve provided with PTFE main disc. ➂ Valve includes UItem (G.E. trademark) piston. ➃ Letter "D" denotes diaphragm construction; "P" denotes piston construction. ➄ Safety Shutoff Valve; General Purpose Valve. Refer to Engineering Section (Approvals) for details. ➅ Valves not available with Explosionproof enclosures. ➆ On 50 hertz service, the watt rating for the 6.1/F solenoid is 8.1 watts. ➇ AC construction also has PA seating. ➈ No disc-holder. ➉ Stainless Steel disc-holder. Must have solenoid mounted vertical and upright.

SERIES 8210 4 Dimensions: inches (mm) Constr. Ref. No. H K L P W 1* ins. 3.85 3.00 1.91 3.41 1.69 mm 98 76 49 87 43 2* ins. 4.17 3.25 2.28 3.63 1.69 mm 106 83 58 92 43 13 ins. 4.44 3.22 3.75 4.19 5.81 mm 113 82 95 106 147 5 ins. 3.84 2.31 2.75 3.28 2.28 mm 98 59 70 83 58 6* ins. 3.38 1.94 2.75 2.80 2.28 mm 86 49 70 71 58 7 ins. 4.19 2.50 2.81 3.47 2.39 mm 106 64 71 88 61 8 ins. 4.13 2.47 2.81 3.44 2.29 mm 105 63 71 87 58 9* ins. 3.66 2.10 2.81 2.96 2.28 mm 93 53 71 75 58 10*➀ ins. 5.25 X 2.81 4.59 2.31 mm 133 X 71 117 59 11* ins. 4.16 2.66 3.84 3.52 2.75 mm 106 68 98 89 70 12 ins. 5.64 3.15 3.75 4.01 3.36 mm 143 80 95 102 85 15* ins. 5.34 X 3.75 4.47 3.84 mm 136 X 95 114 98 16 ins. 5.64 3.15 3.66 4.01 3.56 mm 143 80 93 102 90 18 ins. 6.11 3.30 4.38 4.16 3.92 mm 155 84 111 106 100 20* ins. 7.33 3.71 5.06 4.57 4.87 mm 186 94 129 116 124 21* ins. 7.33 3.71 5.50 4.57 4.87 mm 186 94 140 116 124 23 ins. 4.35 2.65 2.75 3.79 2.28 mm 110 67 70 96 58 24 ins. 5.06 X 3.78 4.44 2.75 mm 129 X 96 113 70 25 ins. 4.64 2.81 2.81 3.94 2.28 mm 118 71 71 100 58 26 ins. 6.53 X 3.75 4.91 3.19 mm 166 X 95 125 81 27 ins. 8.22 X 5.50 5.47 4.87 mm 209 X 140 139 124 28 ins. 6.53 X 3.66 4.91 3.19 mm 166 X 93 125 81 29 ins. 7.03 X 4.38 5.06 4.40 mm 179 X 111 129 112 ➀ Valves must be mounted with solenoid vertical and upright. * DC dimensions slightly larger. Constr. Refs. 1, 2 Constr. Ref. 13 W P K L Constr. Refs. 5-9, 11, 20, 21, 23, 25, 37,38 H 2.12 R4

Mass Flow Meters for Corrosive and Toxic Gases Features Direct monitoring of mass flow rate eliminates need for ancillary pressure and temperature sensing Stainless-steel flow body accommodates most corrosive and toxic gas applications Digital display of mass flow rate on flow body or in remote version for panel mounting Electronic output of mass flow rate for control or data-logging Large, straight sensor tube reduces contamination and maintenance down-time Platinum sensor eliminates zero drift and ensures long-term repeatability Primary standard calibration ensures starting point accuracy and NIST traceability CE Approved 5 Harris Court, Bldg. L Monterey CA 93940 831/373-0200 800/866-0200 FAX: 831/373-4402 www.sierrainstruments.com ISO REGISTERED 9001 820-S Series Top-Trak S Description ierra Instruments' Model 820-S Top-Trak is designed for precise measurement of any process gas in ranges from 0 to 10 sccm to 0 to 500 slpm. Because all wetted materials are 316 stainless steel, the device accommodates most clean gases, including corrosives. The Model 820-S measures and displays the mass flow rate directly in any user defined gas mass units. The instrument display is tiltable over 180 for easy viewing and can be removed for remote panel mounting. A 0 5 VDC or 4 20 ma linearly output signal proportional to gas mass flow rate is provided for recording, data-logging or control. Top-Trak's outstanding accuracy is a function of a high-stability platinum flow sensor. This sensor has been continuously tested for over two years. The maximum deviation (drift) during that time was less than 0.5%. The sensor's large internal diameter also prevents the clogging and contamination often associated with capillary type thermal mass flow meters. Top-Trak's broad range of sizes, electronics, process connections and input/output options provide flexibility, versatility and ultimately, the ideal instrument package for your specific application. The information contained herein is subject to change without notice.

Low Flow Body Medium Flow Body High Flow Body FLOW RANGE 0 10 sccm 0 15 slm Process.25.25 Tubing (6.4) (6.4) FLOW RANGE, slm 0 15 0 100 Process.25 or.375.25 or.375 Tubing (6.4 or 9.5) (6.4 or 9.5) FLOW RANGE, slm 0 100 0 500 Process.375 or.50.50 Tubing (9.5 or 12.7) (12.7) FITTING TYPE,.562-18 THREAD (1) Compression VCO(male) VCR(male).125 or.25.25.25 Dim. L 4.84 or 5.0 4.60 4.90 (122.9 or 127.0) (116.8) (124.5) FITTING TYPE,.562-18 THREAD (1) Compression VCO(male) VCR(male).25 or.375.25 or.375.25 or.375 Dim. L 6.27 or 6.39 5.81 or 6.25 6.13 or 6.43 (159.3 or 162.3) (147.6 or 158.8) (155.7 or 163.3) FITTING TYPE,.75-16 THREAD (1) Compression VCO(male) VCR(male).375 or.50.375.375 Dim. L 11.89 or 12.17 11.75 12.19 (302 or 309.1) (298.5) (309.6) Note: (1) Metric fittings are available, consult factory. Model 820-S Side View Model 820-S Side View Model 820-S Side View 4.23 (107.4) 5.21 (132.3) 4.01 (101.9) without display 1.25 (31.8) 4.23 (107.4) 5.67 (144.0) 4.47 (113.5) without display 1.25 (31.8) 1.45 6.66 (36.8) (169.2) 9.15 (232.4) L L L Model 820-S Bottom View Model 820-S Bottom View Model 820-S Bottom View.13 (3.3) (A) M4, 2PL A B 2.750 (69.85) 3.00 (76.20) B A (B) 6-32, 2PL.12.750 (3.0) (19.1) (B) 8-32, 2PL (A) M6, 2PL 1.9 (48.3) B A 4.25 (108.0) 2.00 (50.80) A B 1.00 (25.40).23 (5.8) (B) M6, 2PL (A) 10-34, 2PL A B B A 3.0 2.00 (76.2) (50.80) 9.75 (247.7) 2.00 (50.80).22 (5.6) Model 820-S Outlet View 1.13 (28.7) Model 820-S Outlet View 1.13 (28.7) Model 820-S Outlet View 1.13 (28.7).49 (12.4).73 (18.5) 1.58 (40.1).98 (24.9).49 (12.4) 2.05 (52.1).73 (18.5) 1.45 (36.8) 1.45 (36.8) 1.22 (31.0) 2.44 (62.0) 2.44 (62.0) 1.22 (31.0) All dimensions are inches. Millimeters are in parentheses. Certified drawings are available on request.

Performance Specifications Accuracy ± 1.5 of full scale including linearity over 15 to 25 C and 5 to 60 psia (0.3 to 4 bara) If the meter is mounted with a vertical (up or down) flow path the folowing accuracy de-rating applies: OPERATING PRESSURE Inlet Pressure Deviation 2 50 psig 100 psig 150 psig ± 1 psig ± 1.5% of ± 1.5% of ± 1.5% of full scale full scale full scale ± 5 psig ± 3.8% of ± 4.5% of ± 5.3% of full scale full scale full scale ± 10 psig ± 6% of ± 7.5% of ± 9% of full scale full scale full scale Notes: (1) Do not exceed 150 psig. (2) Difference between inlet pressure and calibrated pressure. Do not exceed ± 10 psig. Repeatability ± 0.5% of full scale Temperature Coefficient 0.08% of full scale per F (0.15% of full scale per C), or better Pressure Coefficient 0.01% of full scale per psi (0.15% of full scale per bar) or better Response Time 800 ms time constant; six seconds (typical) to within ± 2% of final value over 25 to 100% of full scale Gas & Ambient Temperature 32 to 122 F (0 to 50 C) Leak Integrity 5 X 10-9 atm cc/sec of helium maximum Power Requirements 12 to 18 VDC, 15 VDC nominal, 100 ma maximum 24 VDC optional, specify when ordering Output Signal Linear 0 5 VDC, 1000 ohms minimum load resistance Linear 4 20 ma, 500 ohms maximum loop resistance Display (optional) 3.5 digit LCD (0.6 in H); removable for remote mounting Physical Specifications Wetted Materials 316 stainless steel, Viton O -rings standard Neoprene and 4079 Kal-Rez 0 -rings optional Options See Price List for available CE options Operating Specifications Gases Most gases; check compatibility with wetted materials; specify when ordering Mass Flow Rates 0 to 10 sccm to 0 to 500 slpm; flow ranges specified are for an equivalent flow of nitrogen at 760 mm Hg and 21 C (70 F); other ranges in other units are available (e.g., scfh or nm 3 /h) Gas Pressure 500 psig (34 barg) maximum; 1000 psig (69 barg) maximum available for low flow bodies only upon request, please consult factory. 30 psig (2 barg) optimum Pressure Drop 820-S (low)........ 0.08 psi (0.006 bar or 6 cm of water) differential max; 15 slpm: 1.5 psi (0.10 bar or 105 cm of water) differential max 820-S (med)........ 0.08 psi (0.006 bar or 6 cm of water) differential max; 100 slpm: 1.5 psi (0.10 bar or 105 cm of water) differential max 820-S (high)........ 0.08 psi (0.006 bar or 6 cm of water) differential max; 300, 400 and 500 slpm: 2 psi (0.14 bar or 140 cm of water) differential max Viton, Neoprene, Kal-Rez, and Teflon are registered trademarks of DuPont.

Ordering the Model 820-S PARENT NUMBER 822-S Mass Flow Meter with Display 824-S Mass Flow Meter FLOW BODY L Low Flows M Medium Flows H High Flows INLET/OUTLET FITTINGS 1 1/8-inch Compression 2 1/4-inch Compression 3 3/8-inch Compression 4 1/2-inch Compression 5 1/4-inch VCO 6 1/2-inch VCO (low, medium flow bodies) 7 1/2-inch VCO (high flow bodies) 8 1/4-inch VCR 9 1/2-inch VCR 10 6 mm Compression 11 10 mm Compression 12 12 mm Compression ELASTOMERS OV1 Viton ON1 Neoprene (low, medium flow) ON2 Neoprene (high flow) OK1 Kal Rez (low flow) OK2 Kal Rez (medium flow) OK3 Kal Rez (high flow) INPUT POWER PV1 12 to 15 VDC PV2 24 VDC OUTPUT SIGNAL V1 0 5 VDC, Linear V4 4 20 ma, Linear OPTIONS RD(ft) MP HP A1 LF Remote Display (Cable Length in Feet) Medium Pressure Calibration, 40 100 psig (2.8 6.9 barg) High Pressure Calibration,100 500 psig (6.9 34.5 barg) High Accuracy Calibration Low Flow Calibration, (0 20 sccm or below) GAS, FLOW RATE ACCESSORIES (Consult Factory) 5 Harris Court, Building L Monterey, California U.S.A. (800) 866-0200 (831) 373-0200 Fax (831) 373-4402 www.sierrainstruments.com SIERRA INSTRUMENTS b.v. Bijlmansweid 2 1934 RE Egmond a/d Hoef The Netherlands +31 (0) 72 5071400 Fax +31 (0) 72 5071401 820-S A 3M 08/03