Now available. in size. PrimeLocK Fittings. A premium PFA fitting for high-purity and corrosive chemical applications

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Contamination Control Solutions PrimeLocK Fittings A premium PFA fitting for high-purity and corrosive chemical applications Now available in 1 1 4 size

enabling clean, consistent leak-free connections Creating a Material Advantage Entegris has supplied innovative connection technology into the high-purity chemical handling markets for over 30 years. Our PrimeLock fittings (now available in a 1 1 /4" size) are clean, robust and very easy to assemble. With audible and visual indicators, users can quickly verify the proper makeup of the connection. Heat is not required to assemble this fitting, saving time and money. Designed to effectively handle temperatures up to 200 C (392 F) at 276 kpa (40 psig), the PrimeLock series connection ensures leak-free performance in the most demanding chemical applications. At room temperature, PrimeLock fittings are rated at 827 kpa (120 psig). The ultraclean design provides enhanced reliability within your system, with an all-pfa wetted construction. PrimeLock fittings are fully tested using Entegris stringent testing and qualification methodology. This extremely robust, clean fitting is the most reliable connection technology on the market. Applications High-purity, corrosive chemical handling Semiconductor applications Photolithography Bulk chemical delivery CMP Wet etch and clean High-temperature cleaning processes Solar, LED, flat panel display Excellent performance with low surface tension chemistries now available in 1 1 4" size Features and Benefits PrimeLock fittings Features Ease of assembly All wetted components are PFA Robust thread design Unique seal design No heat required to flare tubing Connection verification ring Capable of 200 C (392 F) temperature rating, all sizes Benefits Consistent and repeatable fitting makeup Broad chemical compatibility No cross-threading, quick makeup, increased sealing force Nonwetted insert reduces entrapment, leak points and flow interruptions Saves time and money; reduces operator variability Audible and visual indication of proper fitting makeup Simplifies product selection Compatible with high-temperature chemical processes 2 Entegris, Inc.

Specifications Materials: Body, insert, nut PFA Operating conditions: Compliant: Connection verification ring ETFE Media pressure @ 21 C (70 F) 827 kpa (120 psig) 200 C (392 F) 276 kpa (40 psig) Temperature range (fluid) 21 200 C (70 392 F) RoHS Applicable PFA Tube Dimensions OD OD Tolerance Wall Thickness Wall Thickness Tolerance 1 4 (6.35 mm) ±0.004 (±0.10 mm) 0.047 (1.19 mm) ±0.004 (±0.10 mm) 3 8 (9.52 mm) ±0.004 (±0.10 mm) 0.062 (1.57 mm) ±0.005 (±0.13 mm) 1 2 (12.70 mm) ±0.005 (±0.13 mm) 0.062 (1.57 mm) ±0.005 (±0.13 mm) 3 4 (19.05 mm) ±0.005 (±0.13 mm) 0.062 (1.57 mm) ±0.005 (±0.13 mm) 1 (25.40 mm) ±0.005 (±0.13 mm) 0.062 (1.57 mm) ±0.005 (±0.13 mm) 1 1 4 (31.75 mm) ±0.007 (±0.18 mm) 0.075 (1.90 mm) ±0.007 (±0.18 mm) PrimeLock Cross-section Backup seal 2: Surface between ID of tube and OD of insert Primary seal Backup seal 1: Surface between insert and fitting nose Tube insert, nonwetted Backup seal 3: Surface between OD of tube and inside of fitting body Entegris, Inc. 3

Fittings Reliability Test Results Test Type Test Conditions Acceptance Criteria Results Burst pressure Media pressure increased until leak occurs prior to tube rupturing Cyclic pressure 1241 kpa (180 psig) water leak test @ 23 C (73 F) after 1 million cycles @ 1.5 rated pressure 414 kpa (60 psig) hydraulic oil @ 200 C (392 F) after 1 million cycles @ 1.5 rated pressure High pressure leak test Submerge fitting Apply nitrogen pressure equaling 80% of the tube burst pressure allowed Tube pull out test Apply tensile load to 1 4 (178 N) 40 lbf tube/fitting until tube 3 8 (400 N) 90 lbf separates from fitting 1 2 (534 N) 120 lbf 3 4 (890 N) 200 lbf 1 (1112 N) 250 lbf 1 1 4 (1557 N) 350 lbf Chemical testing Sulfuric acid Fluorosurfactant Copper sulfate after 2 million cycles Performance Data 70 Pressure vs. Temperature Rating Temperature ( F) 122 212 302 392 140 965 120 827 Differential Pressure (psig) 100 80 60 40 Acceptable operating range 690 552 414 276 Differential Pressure (kpa) 20 138 0 21 50 100 150 200 Temperature ( C) 0 Note: Consult factory for applications outside these pressure ranges. 4 Entegris, Inc.

Insert Installation Tools Handheld Insertion Tool: Clamp insert Mandrel Bench Top Insertion Tool: Clamp insert Mandrel PrimeLock Nut Wrenches: Ordering Information Tools and Kits Part Number Tool Description PHND-TOOL PHND-TOOL-L PBNCH-TOOL PBNCH-TOOL-L Handheld insertion tool, 1 4 1 sizes Handheld insertion tool, 1 1 4 size Bench top insertion tool, 1 4 1 sizes Bench top insertion tool, 1 1 4 size Tool only, requires mandrel kit and clamp insert kit Tool only, components sold separately Tool only, requires mandrel kit and clamp insert kit Tool only, components sold separately PMND-KIT Mandrel kit* Holds the insert in place during installation 1 4, 3 8, 1 2, 3 4, 1 PMND-KIT-B Mandrel kit* directional sleeve 3 8 1 PCLMP-KIT Clamp insert kit* Holds the tube in place during installation 1 4, 3 8, 1 2, 3 4, 1 PCLMP-R-KIT Clamp insert kit* EPDM-lined 1 4 1 PHMND-KIT Hot-air mandrel kit** 1 2, 3 4, 1 PMTMND-KIT Minimum tube union mandrel kit* Allows fabrication of minimum length tube unions 1 4, 3 8, 1 2, 3 4, 1 PWR-KIT PrimeLock nut wrench kit 1 4, 3 8, 1 2, 3 4, 1, 1 1 4 wrenches 01-1015292 Component case Organizes mandrels, clamp inserts and wrenches in individual compartments, 1 4 1 size only * Kit does not include 1 1 4 size ; part number sold separately. ** Inserts can be installed using a mandrel and a hot air gun when space restrictions prevent the use of handheld and bench top insertion tools. Entegris, Inc. 5

Ordering Information Individual Tool Components Part Number Tool Description PMND-4 Mandrel 1 4 PMND-6 Mandrel 3 8 PMND-8 Mandrel 1 2 PMND-12 Mandrel 3 4 PMND-16 Mandrel 1 PMND-20 Mandrel 1 1 4 PMND-6-B Mandrel directional sleeve* 3 8 PMND-8-B Mandrel directional sleeve* 1 2 PMND-12-B Mandrel directional sleeve* 3 4 PMND-16-B Mandrel directional sleeve* 1 PMND-20-B Mandrel - directional sleeve* 1 1 4 PFA Inserts*** Part Number Description PINS-4-SET10 1 4 PINS-6-SET10 3 8 PINS-8-SET10 1 2 PINS-12-SET10 3 4 PINS-16-SET10 1 PINS-20-SET10 1 1 4 ***10 per pack. PMTMND-4 Minimum tube union mandrel 1 4 PMTMND-6 Minimum tube union mandrel 3 8 PMTMND-8 Minimum tube union mandrel 1 2 PMTMND-12 Minimum tube union mandrel 3 4 PMTMND-16 Minimum tube union mandrel 1 PMTMND-20 Minimum tube union mandrel 1 1 4 PCLMP-4 Clamp insert 1 4 PCLMP-6 Clamp insert 3 8 PCLMP-8 Clamp insert 1 2 PCLMP-12 Clamp insert 3 4 PCLMP-16 Clamp insert 1 PCLMP-20 Clamp insert 1 1 4 PCLMP-4-R Clamp insert EPDM lined** 1 4 PCLMP-6-R Clamp insert - EPDM lined** 3 8 PCLMP-8-R Clamp insert - EPDM lined** 1 2 PCLMP-12-R Clamp insert - EPDM lined** 3 4 PCLMP-16-R Clamp insert - EPDM lined** 1 PCLMP-20-R Clamp insert - EPDM lined** 1 1 4 PHMND-8 Hot-air mandrel 1 2 PHMND-12 Hot-air mandrel 3 4 PHMND-16 Hot-air mandrel 1 PWR-4 Wrench 1 4 PWR-6 Wrench 3 8 PWR-8 Wrench 1 2 PWR-12 Wrench 3 4 PWR-16 Wrench 1 PWR-20 Wrench 1 1 4 * Prevents backwards installation of insert. ** Eliminates clamp marks on tubing. 6 Entegris, Inc.

Ordering Information PrimeLock Fittings* Part Number P - -3 Configuration S = Straight E = Elbow T = Tee*** P = Panel mount Leg 1 Connection 4 = 1 4 6 = 3 8 8 = 1 2 12 = 3 4 16 = 1 20 = 1 1 4 PX = Extended panel mount CAP = Cap PLG = Plug NT = Nut Description K = PrimeLock V = PrimeLock SpaceSaver P = PureBond Leg 2 Connection 4 = 1 4 6 = 3 8 8 = 1 2 12 = 3 4 16 = 1 20 = 1 1 4 Description K = PrimeLock V = PrimeLock SpaceSaver P = PureBond Leg 3 Connection 4 = 1 4 6 = 3 8 8 = 1 2 12 = 3 4 16 = 1 20 = 1 1 4 Nut Material** 3 = PFA Description K = PrimeLock V = PrimeLock SpaceSaver P = PureBond * Part number exception: When selecting the same size and configuration for a fitting with multiple legs, the part number is shortened to a single size description. Examples: PT-12K12K12K-3 = PT-12K-3 PE-8V8V-3 = PE-8V-3 ** PrimeLock only available in PFA material. *** Tee fitting leg orientation. Leg 2 Leg 1 Leg 3 Entegris, Inc. 7

For More Information Please call your Regional Customer Service Center today to learn what Entegris can do for you. Visit www.entegris.com and select the Customer Service link for the center nearest you. Terms and Conditions of Sale All purchases are subject to Entegris Terms and Conditions of Sale. To view and print this information, visit www.entegris.com and select the Legal Notices link from the footer. Entegris, PureBond and PrimeLock are registered trademarks of Entegris, Inc. ENTEGRIS, INC. Corporate Headquarters 129 Concord Road Billerica, MA 01821 USA Customer Service Tel. +1 952 556 4181 Customer Service Fax +1 952 556 8022 In North America 800 394 4083 www.entegris.com 2011 2012 Entegris, Inc. All rights reserved Printed in USA 3110-6180ENT-0612