Product amilies Transfer oor Valves ock system Vacuum level materials Opening sizes Transfer Slit Valve amilies RM lock system V grade UV grade luminum lloy Stainless steel 304 Stainless steel 304 3xmm 46x36mm x336mm 70x0mm 3xmm 46x36mm x336mm 70x0mm 3xmm 46x36mm ock system ctuator Orientation ctuator type Vacuum level lange Types UV grade lsolation valves SMRT ate valve amilies SMRT lock system Side of valve s body n- xis with SMRT lock system On valve s bonnet Manual lever Pneumatic Pneumatic V grade UV grade V grade UV grade V grade SO- SO- SO- ctuator type Types Vacuum level lange Types Manual wheel /SO- lsolation Poppet Valve amilies ngle Y shape ngle Y shape UV grade V grade UV grade V grade UV grade V grade UV grade V grade /SO- /SO- Pneumatic /SO- ctuator type Types lange Types lsolation all Valve amilies Manual lever Pneumatic asting N machined asting N machined 5
Product ntroduction Transfer Slit Valve ( TSV ) is connecting two sealed chambers as gate. The object transfer to another chamber. Transfer Slit Valve is designed for single axis motion, no vibration and particle free. Special design RM O motion, make sure the gate absolutely seal in closing position when the power and air are failure during the processing. The valve designed for long endurance up to 1 million cycle. Valve is simple design for easy maintenance, no extra gear, no need to relocation position of mechanism. Product eatures RM O uto- Relocation Mechanism - Stay in closed position against larger pressure difference. - eep closed position losing the air power. Vulcanised seal Particle free sealing technology No gaps eature - Patented mechanism - ow maintenance cost - No gears, no need relocation - More reliable - Particle free seal No gaps between seal and plates roove creates the space to trap particle RM ock System Open losed 6 Телефон: +7 (499) 703-06-36 (многоканальный) e-mail: info@erstvak.com www.erstvak.com
ayout for nline process system Object transfer from load lock to processing chamber. Processing hamber The Transfer Slit Valve is better performance than ircle ate valve. Transfer Slit Valve has no vibration for object transaction. Transfer Slit Valve oad ock Transfer Slit Valve for multiple processing system. Processing hambers oad ock Processing hambers losed position Open position Valve's operation oncept ate plate 7
Position pin holes roove for claws olts holes for chamber interface ate Plate Valve ody onnet Plate ir connectors ctuator lectronic connector for position indicator 8 Телефон: +7 (499) 703-06-36 (многоканальный) e-mail: info@erstvak.com www.erstvak.com
Technical ata for Transfer Slit Valve eedthrough ate seal onnet seal Operate pressure range eak rate ycle life Temperature for Temperature for ctuator Temperature for solenoid / position indicator ake Temperature material Mechanism material ctuator material Mouting position igh Vacuum Ultra igh Vacuum Welded ellows in M3 Welded ellows in M3 M vulcanize ring with bonding on the M vulcanize ring with bonding on the metal ( Optional for M) metal ( Optional for M) M vulcanize ring O metal gasket 760 Torr ~ 1x10 Torr 1,000 mbar~1.33x10 mbar 100 kpa~ 1.13x10 kpa 1 x 10 Torr l/s, e 1.33x10 mbar l/s, e -8 1.13x10 kpa -8-7 -8 760 Torr ~ 1x10 Torr 1,000 mbar~1.33x10 mbar 100 kpa~ 1.13x10 kpa 1 x 10 Torr l/s, e 1.33x10 mbar l/s, e 1.13x10 kpa >5,000,000 ycles luminum version: 1 (30 ) open and close Stainless Steel version= 00 (39 ) open and close 100 (1 ) 176 100 (1 )for M gate seal 00 (39 )for M gate seal Optional for luminum, SUS304/ Optional for SUS304/ and 316/ and SUS316/ Steel and luminum luminum ny Valve operation data Pneumatic operating pressure Position indicator (uild in) ycles counter (uild in) Solenoid (optional) ailure protection (uild in) 3 bar~5 bar kpa~0 kpa 43 psi~7 psi uild in micro switchwith 9 pin connector uild in micro switch with visual 7 digital numbers Optional for 4V, standard uild in RM lock system ( valve colsed position remain and locked ) Valve's Performance data Maximum differential pressure againest gate Maximum differential pressure at opening Pneumatic valve open / close time Valve's ondantance (Molecular flow) 3xmm 0.5(s) 1,590(l/s) 46x36mm x336mm 70x0mm <900 Torr <1,00 mbar <10 kpa <.5 Torr <30 mbar < 3kpa 0.5(s) 0.7(s) 0.9(s) 3,(l/s) 5,000(l/s) 10,400(l/s) 9
10 igure 85 igure 1 igure 3 Телефон: +7 (499) 703-06-36 (многоканальный) e-mail: info@erstvak.com www.erstvak.com
Transfer Slit Valves, luminum imension in mm atalog PN Size igture TSV-3x- 3 x 1 61 3 TSV-46x36-46 x 36 305 36 46 TSV-x336- x 336 440 400 405 81 336 60 TSV-70x0-70 x 0 3 610 59 540 586 104 17 0 70 460 594 335 Transfer Slit Valves, SUS 304 imension in mm atalog PN Size igture TSV-3x-04 3 x 1 61 3 TSV-46x36-04 46 x 36 305 36 46 TSV-x336-04 x 336 440 400 405 81 336 60 TSV-70x0-04 70 x 0 3 610 59 540 586 104 17 0 70 460 594 335 Transfer Slit Valves, UV, SUS 304 imension in mm atalog PN Size igture TSV-UV-3x-04 3 x 1 61 3 TSV-UV-46x36-04 46 x 36 305 36 46 11