Series MSU. Rotary Table. High Precision. Vane Type/Sizes 1, 3, 7, 20. High precision series MSUA introduced to vane type rotary tables CAT.

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CAT.ES20-90 C Rotary Table Series MSU Vane Type/Sizes 1, 3, 7, 20 Peripheral table deflection Table top deflection mm or less High Precision mm or less Series MSUB Series MSUA High precision series MSUA introduced to vane type rotary tables

Rotary Table Series MSU Vane type/sizes 1, 3, 7, 20 High Precision Type Sizes 1, 3, 7, 20 High precision/high rigidity Special bearing (duplex single row ball bearing) Series MSUA Improved table deflection accuracy: 0.03mm or less Easy alignment when mounting the load Table inside/outside diameter tolerance H9/h9 Female threads for load mounting provided in eight places. (increases freedom in mounting the load) Mounting reference pin holes Easy alignment when mounting the body Deflection accuracy: Displacement for 180 rotation Table top deflection Peripheral table deflection mm Model MSUA Table top deflection 0.03 (0.1 to 0.2) Peripheral table deflection 0.03 (0.1 to 0.2) Values inside ( ) are for series MSUB Disengageable Maintenance work is simplified. The drive unit can be replaced with the load mounted. Table unit Drive unit Mounting reference pin holes (alignment with center of body) Provided on three sides, excluding port side Reference diameter h9 (alignment with center of table rotation) Angle is adjustable 90 ±10, 180 ±10 Double vane (MSUB only) 90 ±5 Scale indication Angle adjustment screws Auto switch capable Since switches can be moved anywhere on the circumference, they can be mounted at positions which accommodate the specifications. Features 1

Rotary actuator with lightweight, compact table for robotic hands Free-mount type Can be mounted from three directions: axial, lateral, perpendicular MSUA Bottom mount Axial mounting Top mount Tapped holes (4) Lateral mounting Perpendicular mounting MSUB Tapped holes (4) Through hole (1) Tapped holes (2) Tapped holes (2) Through hole (1) Basic Type Series MSUB Sizes 1, 3, 7, 20 Single vane and double vane standardized Double vane has the same dimensions as single vane (except size 1) Bearing Series variations Series High precision type MSUA MSUB Size 1 3 7 20 1 3 7 20 Rotation Vane type Applicable auto switch 90 180 90 180 Single vane Single vane Double vane Double vane is available with 90 rotation setting only. D-9, D-T99 D-9A, D-S99, S9P D-R73, D-T79 D-R80, D-S79, S7P D-9, D-T99 D-9A, D-S99, S9P D-R73, D-T79 D-R80, D-S79, S7P Single vane Features 2

Without Auto Switch Unit With Auto Switch Unit M MSUA D SUA With auto switch unit Nominal size (torque) 1 3 7 20 MSUA 1 MSUA 3 MSUA 7 MSUA 20 Rotation Application Symbol Rotation Single vane 90 180 90 180 Rotation adjustment range Single vane: Both ends ±5 each How to Order Connection port position Bearing type Nil Side ports A High precision E Top ports Free-mount Available with side ports only, when equipped with switch unit. 20 90 S 20 90 S S Vane type Single vane R73 Applicable auto switches/refer to pages 26 through 35 for detailed auto switch specifications. Applicable model MDSUA1 MDSUA3 MDSUA7 MDSUA20 Type Reed Solid state Solid state Reed Electrical entry Grommet Grommet Connector Grommet Connector Grommet Connector Grommet No Yes Yes No 2 wire 3 wire (NPN) 3 wire (PNP) 2 wire Yes 3 wire (NPN) 3 wire (PNP) 24V 24V DC 12V 12V AC 5V, 12V 5V, 12V, 24V 5V, 12V, 100V 5V, 12V 48V, 100V 5V, 12V Lead wire length symbols 0.5m... Nil (Example) R73C 3m... L (Example) R73CL 5m... Z (Example) R73CZ None... N (Example) R73CN 1 Indicator light Wiring (output) Rotary Table/Vane Type: High Precision Series MSUA Sizes 1, 3, 7, 20 Load voltage 5V, 12V, 24V, 100V 100V 100V 24V, 48V, 100V Auto switch part no. 90 90A 97 93A T99 T99V S99 S99V S9P S9PV R73 R73C R80 R80C T79 T79C S79 S7P Lead wire type Parallel cord Heavy duty Parallel cord Heavy duty Heavy duty Lead wire length (m) 0.5 (Nil) 3 (L) L Number of auto switches S 1 pc. Nil 2 pcs. For 1 piece, a right hand auto switch is installed. Electrical entry/lead wire length Nil L C CL CN Grommet/lead wire 0.5m Grommet/lead wire 3m Connector/lead wire 0.5m Connector/lead wire 3m Connector/without lead wire Available only with R73, R80 and T79 type connectors. Lead wire with connector part nos. D-LC05: Lead wire 0.5m D-LC30: Lead wire 3m D-LC50: Lead wire 5m Type of auto switch Nil Without auto switch Select applicable auto switches from the table below. 5 (Z) None (N) Applicable loads IC circuit IC circuit IC circuit IC circuit Relay, PLC Relay, PLC Operating time 1.2ms Operating temperature range 5 to 60 C Impact resistance 300m/s² (reed), 1000m/s² (solid state) Order example: MSUA20 single vane type (connection port side position selected) 1. Standard type (without auto switches), rotation 90, side port position MSUA20-90S 2. With switch unit (without auto switches), rotation 180, side port position MDSUA20-180S 3. With switch unit + auto switch R73, rotation 180, side port position MDSUA20-180S-R73

Specifications Rotary Table High Precision Type Series MSUA Model 2 Vane type Rotation 1 Fluid Proof pressure MPa Ambient and fluid temperature Operating pressure range MPa Rotation time adjustment range sec/90 Allowable radial load Shaft load Allowable thrust load Allowable moment Bearing Port position Side ports Port size Top ports Deflection accuracy 1. Single vane 90 can be adjusted to 90 ±10 (both ends of rotation ±5 each) Single vane 180 can be adjusted to 180 ±10 (both ends of rotation ±5 each) Note) Refer to page 39 for allowable kinetic energy. MSUA1 MSUA3 MSUA7 MSUA20 Single vane Single vane Single vane Single vane 90 ±10 180 ±10 90 ±10 180 ±10 90 ±10 180 ±10 90 ±10 180 ±10 Air (unlubricated) 1.05 1.5 5 to 60 C 0.2 to 0.7 0.15 to 0.7 0.15 to 1.0 0.07 to 0.3 20N 40N 50N 60N 15N 30N 60N 80N 0.3N m 0.7N m 0.9N m 2.9N m Special bearings Side ports or Top ports M3 x 0.5 M5 x 0.8 M3 x 0.5 M5 x 0.8 0.03mm or less 2. Correspondance Rotary table to equivalent conventional Free-mount/Rotary free-mount actuator types MSUA 1 CRBUW10 MSUA 3 CRBUW15 MSUA 7 CRBUW20 MSUA20 CRBUW30 Table Rotation Range Applicable Auto Switches Angle adjustment is possible as shown in the drawings below using adjustment bolts (A) and (B). Auto switch type MDSUB1, 3 MDSUB7, 20 Adjustment bolt (A) adjustment range (S): 10 Adjustment bolt (B) adjustment range (S): 10 Reed switch Solid state switch D-90/97, D-90A/93A D-S99, D-T99, D-S9P D-R7, R8 D-S7, S7P, T7 90 Weights Unit: g Positioning pin hole 22.5 Adjustment bolt (A) Adjustment bolt (A) adjustment range Adjustment bolt (B) For 90 rotation Single vane (S): 80 to 100 adjustable 180 Adjustment bolt (B) adjustment range Size 1 3 7 20 Rotation 90 180 90 180 90 180 90 180 Basic weight Single vane 162 161 261.5 259.5 440 436 675 670.5 Auto switch unit + Auto switch 2 pcs. 25 30 50 60 10 10 22.5 Allowable Loads Do not permit the load and moment applied to the table to exceed the allowable values shown in the table below. (Operation above the allowable values can cause adverse effects on service life, such as play in the table and loss of accuracy.) Positioning pin hole Adjustment bolt (A) Adjustment bolt (B) For 180 rotation Single vane (S): 170 to 190 adjustable Size 1 3 7 20 Allowable radial load (N) 20 40 50 60 Allowable thrust load (N) Allowable moment (N m) 15 0.3 30 0.7 60 0.9 80 2.9 2

Series MSUA Dimensions MSUA1 MSUA1-S, SE 8-M3 x 0.5 depth 5 C These drawings indicate the condition when the B port is pressurized. Scale: 70% ø51 B 23.5 31 38 ø25 4-M4 x 0.7 depth 4 22.5 4.5 +0.025 3-3H9 0 depth 3 ( A, B, C ) 10.3 6.5 5 4.2 2-4.5 through 3-R1.5 A 27 3-R1.5 22.5 16 2.5H9 +0.025 0 Long groove depth 4 (positioning pin hole) Angle adjustment bolt Adjustment: Max. 7.5 +0.025 3-3H9 0 long groove depth 2.5 ( A, B, C ) 2-4.5 through ø36h9 0 0.062 2-M3 x 0.5 2.5 A port 27 5 ø35h9 ø17 H9 0.5 0 0.062 9 +0.043 0 2 31 4.5 6.5 1 B port ø4g6 0.004 0.012 2 31.5 2 37 12.5 8 ø9h9 0 0.036 4-M4 x 0.7 depth 8 2-M3 x 0.5 depth 4 ø29 ø36h9 0 0.062 Top ports/msua1-se A port 9.5 B port 2-M3 x 0.5 8.5 3

Rotary Table High Precision Type Series MSUA These drawings indicate the condition when the B port is pressurized. With auto switch: MSUA1-S Scale: 80% 1) 24 : When using D-90, 90A, S99, S99V, S9P, S9PV, T99, T99V 30 : When using D-97, 93A 2) 60 : When using D-90, 90A, 97, 93A 69 : When using D-S99, S99V, S9P, S9PV, T99, T99V 12.5 Angle adjustment bolt 37 2-M3 x 0.5 (Port position: Side port type only) 1 24 A port B port 28 2 60 (69 ) ø18.5 ø29 For D-97, 93A 15 30 4

5 Series MSUA Dimensions MSUA3 MSUA3-S, SE These drawings indicate the condition when the B port is pressurized. Scale: 70% 8-M4 x 0.7 depth 7 C ø58 B ø30 27 36 44 4-M4 x 0.7 depth 5.5 22.5 A 29 22.5 3H9 +0.025 0 Long groove depth 5 (positioning pin hole) ø41h9 0 0.062 ø21h9 +0.052 0 +0.025 3-3H9 0 depth 3 ( A, B, C ) 11 8 5 5 2-4.5 through 3-R1.5 3-R1.5 18.3 Angle adjustment bolt Adjustment: Max. 8.2 2-4.5 through ø42h9 0 0.062 2-M5 x 0.8 3 29 6 11 2.5 6 8 1.5 2 36 3 15.5 45 9 +0.025 3-3H9 0 long groove depth 2.5 ( A, B, C ) A port 0.5 B port ø5g6 0.004 0.012 ø12h9 0 0.043 4-M4 x 0.7 depth 8 ø34 ø42h9 0 0.062 Top ports/msua3-se 36 A port 10 B port 2-M3 x 0.5 11 5

Rotary Table High Precision Type Series MSUA These drawings indicate the condition when the B port is pressurized. With auto switch: MDSUA3-S Scale: 80% 1) 24 : When using D-90, 90A, S99, S99V, S9P, S9PV, T99, T99V 30 : When using D-97, 93A 2) 60 : When using D-90, 90A, 97, 93A 69 : When using D-S99, S99V, S9P, S9PV, T99, T99V 15.5 Angle adjustment bolt 45 2-M5 x 0.8 (Port position: Side port type only) 1 24 A port B port 29 2 60 (69 ) ø18.5 ø34 D-97, 93A 15 30 6

5 Series MSUA Dimensions MSUA7 MSUA7-S, SE 8-M4 x 0.7 depth 8 ø67 C These drawings indicate the condition when the B port is pressurized. Scale: 60% Top ports/msua7-se A port B port 13 2-M5 x 0.8 B 33 41 50 ø37 4-M5 x 0.8 depth 7 22.5 22.5 3H9 +0.025 0 Long groove depth 5 (positioning pin hole) ø47h9 0 0.062 +0.030 3-4H9 0 depth 4 ( A, B, C ) 10.5 36 2-5.5 through ø48h9 0 0.062 ø26h9 +0.052 0 2-M5 x 0.8 4-M5 x 0.8 depth 10 +0.030 3-4H9 0 long groove depth 3 ( A, B, C ) A port B port ø6g6 0.004 0.012 ø14h9 0.043 0 ø42 0 ø48h9 0.062 41 13 7 3-R2 4 3 4.5 19 36 6 22.3 10.5 14 A 2-5.5 through Angle adjustment bolt 3-R2 Adjustment: Max.10.2 7 11 6 1.5 44 3 10 58.5 0.5 7

Rotary Table High Precision Type Series MSUA These drawings indicate the condition when the B port is pressurized. With auto switch: MDSUA7-S Scale: 60% 25.5 (34.5: Connector type) A port B port ø25 4 65 8 ø42 26.5 34.5 19 Angle adjustment bolt 2-M5 x 0.8 (Port position: Side port type only) 58.5 30 30 20.5 (26.5: Connector type) Connector type Connector type 8

5 Series MSUA Dimensions MSUA20 MSUA20-S, SE 8-M5 x 0.8 depth 10 ø78 C These drawings indicate the condition when the B port is pressurized. Top ports/msua20-se Scale: 50% A port 14 B port 2-M5 x 0.8 B ø42 38 48 59 15.5 4-M6 x 1 depth 7 22.5 A 22.5 3H9 +0.025 0 Long groove depth 5 (positioning pin hole) ø52h9 0 0.074 +0.030 3-4H9 0 depth 4 ( A, B, C ) 10.5 43 3-R2 2-6.6 through ø53.5h9 0 0.074 5 ø30h9 +0.052 0 4 5 2-M5 x 0.8 4-M6 x 1 depth 11 +0.030 3-4H9 0 long groove depth 3 ( A, B, C ) A port B port ø8g6 0.005 0.014 ø16h9 0.043 0 ø50 0 ø53.5h9 0.074 48 21.5 16 6 7 2-6.6 through 23 Angle adjustment bolt Adjustment: Max. 10.3 43 13 6 10.5 46 72 3-R2 4 8 1 2 13 9

Rotary Table High Precision Type Series MSUA These drawings indicate the condition when the B port is pressurized. With auto switch: MDSUA20-S Scale: 50% 25.5 (34.5: Connector type) Angle adjustment bolt 2-M5 x 0.8 (Port position: Side port type only) 31 21.5 72 A port B port 31 4 65 8 20.5 (26.5: Connector type) Connector type ø25 ø50 34.5 Connector type 26.5 10

Series MSUA Construction 180 (Indicates intermediate position) 90 (Indicates A port pressurized) Single vane Parts list No. Description 1 Body A 2 Body B 3 Body C 4 Vane shaft 5 Stopper 6 Stopper seal 7 Table 8 Stopper lever 9 Stopper guide 10 Lever retainer 11 Bearing retainer 12 Bearing 13 Special bearing 14 Back-up ring 15 O-ring 16 Adjustment bolt 17 Hexagon nut 18 Hexagon socket head cap screw 19 Hexagon socket head cap screw 20 Hexagon socket head cap screw 21 Button bolt 22 Hexagon socket head set screw 23 Label The plug 22 is used only when the connection port is type SE. Material Aluminum alloy Aluminum alloy Aluminum alloy Stainless steel (MSUA20 is carbon steel) Resin NBR Aluminum alloy Carbon steel Stainless steel Carbon steel Aluminum alloy High carbon chrome bearing steel High carbon chrome bearing steel Stainless steel NBR Carbon steel Carbon steel Stainless steel Stainless steel Carbon steel Carbon steel Stainless steel Note Light gray color Light gray color Light gray color Single vane Single vane Light gray color Light gray color SE type only Internal construction with auto switch MDSUA1, 3 MDSUA7, 20 Model MDSUA 1 MDSUA 3 MDSUA 7 MDSUA20 Auto switch unit part number P211070-1 P211090-1 P211060-1 P211080-1 Auto switches are not included with switch units. A port B port Auto switch block unit MDSUA1, 3 MDSUA7, 20 Right-handed Left-handed Combination left & right-handed Auto switch unit Part no.: P211070-8 Part no.: P211070-9 Part no.: P211060-8 A switch block unit is the assembly required to mount one auto switch on a switch unit. 11

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Rotary Table/Vane Type: Basic Series MSUB Sizes 1, 3, 7, 20 How to Order Without Auto Switch Unit With Auto Switch Unit 1 3 7 20 M With auto switch unit Nominal size (torque) MSUB 1 MSUB 3 MSUB 7 MSUB 20 Bearing type B Basic type Free-mount MSUB D SUB Application Single vane Double vane Connection port position Nil Side ports E Top ports Available with side ports only, when equipped with switch unit. Symbol 90 180 20 90 S 20 90 S Rotation Rotation 90 180 90 90 Rotation adjustment range Single vane: Both ends ±5 each Double vane: Both ends ±2.5 each S D Vane type Single vane Double vane R73 L Number of auto switches S 1 pc. Nil 2 pcs. For 1 piece, a right hand auto switch is installed. Electrical entry/lead wire length Nil L C CL CN Nil Without auto switch Select applicable auto switches from the table below. Grommet/lead wire 0.5m Grommet/lead wire 3m Connector/lead wire 0.5m Connector/lead wire 3m Connector/without lead wire Available only with R73, R80 and T79 type connectors. Lead wire with connector part nos. D-LC05: Lead wire 0.5m D-LC30: Lead wire 3m D-LC50: Lead wire 5m Type of auto switch Applicable auto switches/refer to pages 26 through 35 for detailed auto switch specifications. Applicable model MDSUB1 MDSUB3 MDSUB7 MDSUB20 Type Reed Solid state Solid state Reed Electrical entry Grommet Indicator light No Yes Wiring (output) 2 wire 3 wire (NPN) 3 wire (PNP) 24V Grommet Yes Connector Grommet No 2 wire Connector 24V Grommet Connector Yes 3 wire (NPN) Grommet 3 wire (PNP) Load voltage Auto switch DC AC part no. 5V, 12V 5V, 12V, 24V 90 5V, 12V, 100V 12V 5V, 12V 48V, 100V 12V 5V, 12V Lead wire length symbols 0.5m... Nil (Example) R73C 3m... L (Example) R73CL 5m... Z (Example) R73CZ None... N (Example) R73CN 13 5V, 12V, 24V, 100V 100V 100V 24V, 48V, 100V Lead wire type Parallel cord 90A Heavy duty 97 Parallel cord 93A T99 T99V S99 Heavy duty S99V S9P S9PV R73 R73C R80 R80C Heavy duty T79 T79C S79 S7P Lead wire length (m) 0.5 (Nil) 3 (L) 5 (Z) None (N) Applicable loads IC circuit IC circuit IC circuit Relay, PLC IC circuit Relay, PLC Operating time 1.2ms Operating temperature range 5 to 60 C Impact resistance 300m/s² (reed), 1000m/s² (solid state) Order example: MSUA20 single vane type (connection port side position selected) 1. Standard type (without auto switches), rotation 90, side port position MSUB20-90S 2. With switch unit (without auto switches), rotation 180, side port position MDSUB20-180S 3. With switch unit + auto switch R73, rotation 180, side port position MDSUB20-180S-R73

Specifications Rotary Table Series MSUB Vane type Rotation 1 Model 3 Fluid Proof pressure MPa Ambient and fluid temperature Operating pressure range MPa Rotation time adjustment range sec/90 Shaft load Bearing Port position Allowable radial load Allowable thrust load 2 Allo wable moment MSUB1 MSUB3 MSUB7 Single vane Double vane Single vane Double vane Single vane Double vane Single vane Double vane 90 ±10 180 ±10 90 ±5 90 ±10 180 ±10 90 ±5 90 ±10 180 ±10 90 ±5 90 ±10 180 ±10 90 ±5 0.2 to 0.7 20N 15N 10N 0.3N m 40N 30N 15N 0.7N m Air (unlubricated) 5 to 60 C 0.15 to 0.7 0.07 to 0.3 Bearings Side ports or Top ports 50N 60N 30N 0.9N m Port size Side ports M3 x 0.5 M5 x 0.8 Top ports M3 x 0.5 M5 x 0.8 1. Single vane 90 type can be adjusted to 90 ±10 (both ends of rotation ±5 each) 3. Correspondence to equivalent conventional free-mount types Single vane 180 type can be adjusted to 180 ±10 (both ends of rotation ±5 each) Rotary table Free-mount rotary actuator Double vane 90 type can be adjusted to 90 ±5 (both ends of rotation ±2.5 each) MSUB 1 CRBUW10 Rotation angles other than 90 and 180 (single vane) are available by special order. MSUB 3 CRBUW15 2. The allowable thrust load is directional. For details refer to the allowable load table below. MSUB 7 CRBUW20 (Note) Refer to page 39 for allowable kinetic energy. MSUB20 CRBUW30 MSUB20 1.05 1.5 0.15 to 1.0 60N 80N 40N 2.9N m Table Rotation Range Angle adjustment is possible as shown in the drawings below using adjustment bolts (A) and (B). Adjustment bolt (A) adjustment range (S): 10 (D): 5 Positioning pin hole 90 22.5 Adjustment bolt (A) Adjustment bolt (B) adjustment range (S): 10 (D): 5 Adjustment bolt (B) For 90 rotation Single vane (S): 80 to 100 adjustable Double vane (D): 85 to 95 adjustable Applicable Auto Switches Auto switch type Reed switch Solid state switch MDSUB1, 3 D-90/97, D-90A/93A D-S99, D-T99, D-S9P Size Rotation Basic weight Single vane Double vane 1 90 145 150 180 140 3 90 230 240 180 225 7 90 360 375 180 355 20 90 510 580 180 505 Weights MDSUB7, 20 D-R7, R8 D-S7, D-S7P, T7 Auto switch unit + Auto switch 2 pcs. 25 30 50 60 Unit: g Adjustment bolt (A) adjustment range 10 10 22.5 180 Adjustment bolt (B) adjustment range Allowable Loads Do not permit the load and moment applied to the table to exceed the allowable values shown in the table below. (Operation above the allowable values can cause adverse effects on service life, such as play in the table and loss of accuracy.) A B Positioning pin hole Adjustment bolt (A) Adjustment bolt (B) For 180 rotation Single vane (S): 170 to 190 adjustable The double vane type is not available with 180 rotation. Size 1 3 7 20 Allowable radial load (N) Allowable thrust load (N) Allowable moment (N m) 20 A 15 B 10 0.3 40 30 15 0.7 50 60 30 0.9 60 80 40 2.9 14

Series MSUB Dimensions These drawings indicate the condition when the B port is pressurized. MSUB1 (Single vane) MSUB1-S, SE If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type. Since this will make it impossible to satisfy the specifications, operate with adjustment within the range of maximum values. 15

Rotary Table Series MSUB These drawings indicate the condition when the B port is pressurized. With auto switch: MDSUB1-S 1) When using 24 : D-90, 90A, S99(V), T99(V), S9P(V) When using 30 : D-97, 93A 2) When using 60 : D-90, 90A, 97, 93A When using 69 : D-S99(V), T99(V), S9P(V) D-97, 93A If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type. Since this will make it impossible to satisfy the specifications, operate with adjustment within the range of maximum values. 16

Series MSUB Dimensions These drawings indicate the condition when the B port is pressurized. MSUB1 (Double vane) MSUB1-D If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type. Since this will make it impossible to satisfy the specifications, operate with adjustment within the range of maximum values. 17

Rotary Table Series MSUB These drawings indicate the condition when the B port is pressurized. With auto switch: MDSUB1-D 1) When using 24 : D-90, 90A, S99(V), T99(V), S9P(V) When using 30 : D-97, 93A 2) When using 60 : D-90, 90A, 97, 93A When using 69 : D-S99(V), T99(V), S9P(V) D-97, 93A If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type. Since this will make it impossible to satisfy the specifications, operate with adjustment within the range of maximum values. 18

Series MSUB Dimensions These drawings indicate the condition when the B port is pressurized. MSUB3 (Single vane, Double vane) MSUB3-S, D 19 The outside drawings show the single vane type, but only the position of the chamfered sections shown in the above drawings differs for single and double vane. If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type. Since this will make it impossible to satisfy the specifications, operate with adjustment within the range of maximum values.

Rotary Table Series MSUB These drawings indicate the condition when the B port is pressurized. With auto switch: MDSUB3 1) When using 24 : D-90, 90A, S99(V), T99(V), S9P(V) When using 30 : D-97, 93A 2) When using 60 : D-90, 90A, 97, 93A When using 69 : D-S99(V), T99(V), S9P(V) If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type. Since this will make it impossible to satisfy the specifications, operate with adjustment within the range of maximum values. D-97, 93A 20

Series MSUB Dimensions These drawings indicate the condition when the B port is pressurized. MSUB7 (Single vane, Double vane) MSUB7-S, D The outside drawings show the single vane type, but only the position of the chamfered sections shown in the above drawings differs for single and double vane. If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type. Since this will make it impossible to satisfy the specifications, operate with adjustment within the range of maximum values. 21

Rotary Table Series MSUB These drawings indicate the condition when the B port is pressurized. With auto switch: MDSUB7 1) 25.5: Grommet type 34.5: Connector type 2) 20.5: Grommet type 26.5: Connector type If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type. Since this will make it impossible to satisfy the specifications, operate with adjustment within the range of maximum values. 22

Series MSUB Dimensions These drawings indicate the condition when the B port is pressurized. MSUB20 (Single vane, Double vane) MSUB20-S, D 23 The outside drawings show the single vane type, but only the position of the chamfered sections shown in the above drawings differs for single and double vane. If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type. Since this will make it impossible to satisfy the specifications, operate with adjustment within the range of maximum values.

Rotary Table Series MSUB These drawings indicate the condition when the B port is pressurized. With auto switch: MDSUB20 1) 25.5: Grommet type 34.5: Connector type 2) 20.5: Grommet type 26.5: Connector type If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type. Since this will make it impossible to satisfy the specifications, operate with adjustment within the range of maximum values. 24

Series MSUB Construction/Parts List Single vane: Size 1 Single vane: Sizes 3, 7, 20 Double vane: Size 1 Double vane: Sizes 3, 7, 20 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 Description Body (A) Body (B) Vane shaft Stopper Stopper Stopper seal Table Stopper lever (D) Stopper lever (S) Lever retainer Ring collar Bearing Bearing Back-up ring Scraper O-ring Adjustment bolt Hexagon nut Hexagon socket head cap screw Hexagon socket head cap screw Hexagon socket head cap screw Button bolt Rubber cap Hexagon socket head set screw Cover Plate Gasket O-ring O-ring Label Material Aluminum alloy Aluminum alloy Stainless steel (MSUB20: Carbon steel) Carbon steel Resin Stainless steel NBR Aluminum alloy Carbon steel Carbon steel Carbon steel Carbon steel High carbon chrome bearing steel High carbon chrome bearing steel Stainless steel NBR NBR Carbon steel Stainless steel Stainless steel Stainless steel Stainless steel Carbon steel NBR Stainless steel Aluminum alloy Resin NBR NBR NBR The plug number 24 is used only when the connection port is type SE. Note Light gray color Light gray color Single vane Double vane Single vane Double vane Light gray color SE type only Internal construction with auto switch Units are common for both single and double vane. MDSUB1, 3 MDSUB7, 20 Model MDSUB 1 MDSUB 3 MDSUB 7 MDSUB20 Auto switch unit part no. P211070-1 P211090-1 P211060-1 P211080-1 Auto switches are not included with switch units. Auto switch block unit For MDSUB1, 3 For MDSUB7, 20 Right-handed Left-handed Combination left & right-handed 25 The external configuration of the ( MDSUB1 double vane is different. ) Part no.: P211070-8 Part no.: P211070-9 Part no.: P211060-8 A switch block unit is the assembly required to mount one auto switch on a switch unit.

Series MSU Auto Switch Specifications Applicable auto switches Applicable series Auto switch model Electrical entry MDSU1 Reed switch D-90, 90A D-97, 93A Grommet (2 wire) Grommet (2 wire) MDSU3 D-S99, S99V Grommet (3 wire) Solid state D-S9P, S9PV switch Grommet (3 wire) PNP MDSU7 Reed switch D-T99, T99V D-R73 D-R80 Grommet (2 wire) Grommet (2 wire) Grommet (2 wire), Connector (2 wire) MDSU20 D-S79 Grommet (3 wire) Solid state D-S7P switch Grommet (3 wire) PNP D-T79 Grommet (2 wire), Connector (2 wire) Table Positioning Pin Hole Rotation Range and Auto Switch Mounting Position MSU1, 3 Single vane type 90 180 Double vane type (MSUB only) 90 MSU7, 20 Single vane type 90 180 Double vane type (MSUB only) 90 In drawings that show the rotation range, the arrows on the solid line 90 (180 ) indicate the rotation range of the positioning pin holes on the table surface. When the pin hole is at END1, the END1 switch operates, and when the pin hole is at END2, the END2 switch operates. The arrows on the broken line indicate the rotation range of the internal magnet. The rotation range of each switch can be reduced by moving the END1 switch clockwise and the END2 switch counterclockwise. Auto switch rotation and actuation ranges Model Rotation range Actuation range MDSU1, 3 110 10 MDSU7, 20 90 26

Series MSU Auto Switch Specifications How to change Auto switch Detecting Positions To set a new detection position, slightly loosen the set screw, move the switch to the desired position and retighten the screw. Over-tightening can damage the screw making it impossible to hold the position. Use a tightening torque of about 0.5N m. Auto Switch Mounting Classifications MDSU1, 3 Set screw Left-handed D-992 MDSU7, 20 Right-handed D-991 MDSU1, 3 MDSU7, 20 Left-handed D-2 Right-handed D-1 Auto Switch Units Auto switch unit part numbers Model Unit part number MDSU 1 P211070-1 MDSU 3 P211090-1 MDSU 7 P211060-1 MDSU20 P211080-1 The magnet lever is included. Auto switch block units Right-handed MDSU1, 3 MDSU7, 20 Left-handed Combination left & right-handed Magnet lever Part no.: P211070-8 Part no.: P211070-9 A switch block unit is the assembly required to mount one switch on a switch unit. Part no.: P211060-8 Auto switch unit Caution Be sure to read before handling. Refer to pages 45 through 47 before using auto switches. 27

Auto Switch Specifications Series MSU Auto Switch Common Specifications Type Leakage current Operating time Impact resistance Insulation resistance Withstand voltage Reed switch Solid state switch None 3 wire: 100µA or less, 2 wire: 0.8mA or less 1.2ms 1ms or less 300m/s² 1000m/s² 50MΩ or more at 500VDC (between lead wire and case) 1500VAC for 1 min. 1) (between lead wire and case) Ambient temperature 10 to 60 C Enclosure IEC529 standard IP67, JISC0920 watertight construction 1) Electrical entry: Connector type (R73C, R80C) and D-9, 9A, A9 and A9V are 1000VAC for 1 min. (between lead wire and case) 1000VAC for 1 min. (between lead wire and case) Lead Wire Length Lead wire length indication (Example) D-90A L Lead wire length Nil L Z N Lead wire with connector part number (applicable only for connector type) Model Lead wire length D-LC05 0.5m D-LC30 3m D-LC50 5m 0.5m 3m 5m None Applicable only for connector type switch D-C. Note 1) Lead wire length Z: 5m applicable auto switches Reed: D-90/97/90A/93A, D-R73C/R80C Solid state: All types are produced upon receipt of order (standard availability). Contact Protection Boxes/CD-P11, CD-P12 <Applicable switches> D-R73(C)/R80(C), D-9, 9A The above auto switches do not have internal contact protection circuits. 1. The operating load is an induction load. 2. The length of wiring to the load is 5m or more. 3. The load voltage is 100 or 200VAC. Use a contact protection box in any of the above situations. The life of the contacts may otherwise be reduced. (They may stay ON all the time.) Contact protection box specifications Part number CD-P11 CD-P12 Load voltage 100VAC 200VAC 24VDC Maximum load current 25mA 12.5mA 50mA Lead wire length Switch connection side 0.5m Load connection side 0.5m Contact protection box internal circuits CD-P11 Surge absorber Choke coil OUT Brown (Red) OUT Blue (Black) CD-P12 OUT (+) Choke Brown (Red) Zener diodes coil OUT ( ) Blue (Black) Lead wire colors inside ( ) are those prior to conformity with IEC standards. Contact protection box/dimensions Contact protection box/connection To connect a switch to a contact protection box, connect the lead wire from the side of the contact protection box marked SWITCH to the lead wire coming out of the switch. Furthermore, the switch unit should be kept as close as possible to the contact protection box, with a lead wire length of no more than 1 meter between them. 28

Reed Switches/Direct Mount Type D-90, D97 D-90 Grommet Lead wire: Parallel cord Auto switch internal circuits Lead wire colors inside ( ) are those prior to conformity with IEC standards. Reed switch OUT (±) OUT (±) Black line Contact protection box CD-P11 CD-P12 OUT (±) Brown [Red] OUT (±) Blue [Black] Auto Switch Specifications D-90 (without indicator light) Auto switch part no. Application D-97 (with indicator light) Auto switch part no. Application Load voltage Load current range Internal voltage drop Lead wire Vinyl parallel cord, 0.2mm², 2 wire, 0.5m Note 1) Refer to page 28 for auto switch common specifications Note 2) Refer to page 28 for lead wire length. Dimensions D-90 Load voltage Maximum load current Internal resistance D-90 Relay, IC circuit, PLC AC 5V 12V AC 24V AC DC DC DC 50mA 1Ω or less (including lead wire length of 3m) D-97 Relay, PLC 24VDC 5 to 40mA 2.4V or less D-97 Reed switch LED Zener Diode Resistor Contact protection box CD-P12 Choke coil OUT (+) OUT (+) Brown [Red] Zener Diode OUT ( ) Black line OUT ( ) Blue [Black] D-97 Note) 1. The load is an induction load 2. The lead wire length to the load is 5m or more Use a contact protection box in either of the above situations, as the life of the contacts may otherwise be reduced. (Refer to page 28 for details regarding contact protection boxes.) 29

Reed Switches/Direct Mount Type D-90A, D-93A Auto Switch Specifications Grommet Lead wire: Heavy duty cord Auto switch internal circuits Lead wire colors inside ( ) are those prior to conformity with IEC standards. D-90A D-90A (without indicator light) Auto switch part no. Applicable load Load voltage Maximum load current Internal resistance D-93A (with indicator light) Auto switch part no. Application D-93A Relay, PLC Load voltage Load current range 24VDC 5 to 40mA 100VAC 5 to 20mA Internal voltage drop Indicator light 2.4V or less Red LED lights up when ON Lead wires Oil resistant vinyl heavy duty cord, 0.2mm², 2 wire [Brown, Blue (Red, Black)], 0.5m Note 1) Refer to page 28 for reed switch common specifications. Note 2) Refer to page 28 for lead wire length. Dimensions D-90A AC 5V DC D-90A Relay, IC circuit, PLC AC AC AC 12V DC 24V DC 100VDC 50mA 20mA 1Ω or less (including lead wire length of 3m) Reed switch Contact protection box CD-P11 CD-P12 OUT (±) Brown [Red] OUT(±) Blue [Black] D-93A Reed switch LED Zener Diode Resistor Brown [Red] Blue [Black] Contact protection box CD-P11 CD-P12 OUT (+) Brown [Red] OUT ( ) Blue [Black] D-93A Note) 1. The load is an induction load 2. The lead wire length to the load is 5m or more 3. The load voltage is 100VAC Use a contact protection box in any of the above situations, as the life of the contacts may otherwise be reduced. (Refer to page 28 for details regarding contact protection boxes.) 30

Grommet Electrical entry direction: In-line D-2 Reed Switches/Direct Mount Type D-R73, D-R80 D-1 Auto Switch Specifications D-R73 (with indicator light) Auto switch part no. Applicable load Load voltage Maximum load current and load current range Contact protection circuit Internal voltage drop Indicator light D-R80 (without indicator light) Auto switch part no. Applicable loads Load voltage Maximum load current and load current range Contact protection circuit Internal voltage drops Indicator light Dimensions 24V D-R73C, D-R732 Relay, PLC D-R801, D-R802 Relay, IC circuit, PLC Lead wires Oil resistant vinyl heavy duty cord, 0.2mm², 2 wire [Brown, Blue (Red, Black)], 0.5m Note 1) Refer to page 28 for reed switch common specifications. Note 2) Refer to page 28 for lead wire length. AC DC 50mA 100VAC 5 to 20mA or less None 2.4V or less Red LED lights up when ON 48V AC DC 40mA None 0 None 24VDC 5 to 40mA 100V AC DC 20mA Left-handed Auto switch internal circuits Lead wire colors inside ( ) are those prior to conformity with IEC standards. D-R731, R732 Right-handed D-R731: Right-handed D-R732: Left-handed Reed switch LED Resistor Zener Diode Brown [Red] Blue [Black] Contact protection box CD-P11 CD-P12 OUT (+) Brown [Red] OUT ( ) Blue [Black] D-R801: Right-handed D-R802: Left-handed D-R801, R802 Reed switch Contact protection box CD-P11 CD-P12 OUT (±) Brown [Red] OUT (±) Blue [Black] 31

Connector Electrical entry direction: In-line D-C Reed Switches/Direct Mount Type D-R73C, D-R80C D-C Auto Switch Specifications D-R73C (with indicator light) Auto switch part no. Applicable load Load voltage Load current range Contact protection circuit Internal voltage drop Indicator light D-R80C (without indicator light) Auto switch part no. Applicable load Load voltage Load current range Contact protection circuits Internal voltage drops Indicator light Lead wires Oil resistant vinyl heavy duty cord, ø3.4, 0.2mm² Note 1) Refer to page 28 for reed switch common specifications. Note 2) Refer to page 28 for lead wire length. Dimensions D-R731C: Right-handed D-R731C, D-R732C Relay, PLC 24VDC 5 to 40mA None 2.4V or less Red LED lights up when ON D-R801C, D-R802C Relay, PLC AC 24V DC or less 50mA None 0 None D-R732C: Left-handed Left-handed Right-handed Auto switch internal circuits Lead wire colors inside ( ) are those prior to conformity with IEC standards. D-R731, R732 Reed switch LED Resistor Zener Diode Brown [Red] Blue [Black] Contact protection box CD-P11 CD-P12 OUT (+) Brown [Red] OUT ( ) Blue [Black] D-R801C: Right-handed D-R802C: Left-handed D-R801, R802 Reed switch Contact protection box CD-P11 CD-P12 OUT (±) Brown [Red] OUT (±) Blue [Black] 32

D-T99 D-991 Solid State Switches/Direct Mount Type D-S99(V), D-S9P(V), D-T99(V) Grommet D-S99 D-S9P 2 wire D-992 3 wire Auto Switch Specifications D-S99 (V), D-S9P (V), D-T99 (V) (with indicator light) Auto switch model no. Electrical entry direction Wiring type Output type Applicable load Power supply voltage Current consumption Load voltage Load current Internal voltage drop Leakage current Indicator light Dimensions D-S991 D-S992 D-S99V1 D-S99V2 D-S9P1 D-S9P2 D-S9PV1 D-S9PV2 D-T991 D-T992 D-T99V1 D-T99V2 In-line Perpendicular In-line Perpendicular In-line Perpendicular 3 wire 2 wire NPN PNP IC circuit, Relay, PLC 24VDC Relay, PLC 5, 12, 24VDC (4.5 to 28VDC) 10mA or less 28VDC or less 24VDC (10 to 28VDC) 40mA or less 80mA or less 5 to 40mA 1.5V or less (0.8V or less at 10mA load current) 0.8V or less 4V or less 100µA or less at 24VDC 0.8mA or less at 24VDC Red LED lights up when ON Lead wires Oil resistant, vinyl heavy duty cord, ø3.4, 0.2mm², 3 wire [Brown, Black, Blue (Red, White, Black)], 2 wire [Brown, Blue (Red, Black)], 0.5m Note 1) Refer to page 28 for solid state switch common specifications. Note 2) Refer to page 28 for lead wire length. D-S991: Right-handed D-S9P1: D-S992: Left-handed D-S9P2: D-99V1 D-99V2 Auto switch internal circuits Lead wire colors inside ( ) are those prior to conformity with IEC standards. D-S99(V)1, S99(V)2 DC (+) Brown [Red] D-T991: Right-handed D-T992: Left-handed Main switch circuit OUT Black [White] D-S9P(V)1, S9P(V)2 DC ( ) Blue [Black] D-S99V1: Right-handed D-S9PV1: D-S99V2: Left-handed D-S9PV2: DC (+) Brown [Red] Main switch circuit OUT Black [White] DC ( ) Blue [Black] D-T99(V)1, T99(V)2 D-T99V1: Right-handed D-T99V2: Left-handed OUT (+) Brown [Red] Main switch circuit OUT ( ) Blue [Black] 33

Solid State Switches/Direct Mount Type D-S79, D-S7P, D-T79(C) Auto Switch Specifications Grommet, Connector Electrical entry direction: In-line D-S79, D-T79 (with indicator light) Auto switch model no. D-S791, D-S792 D-S7P1, D-S7P2 Wiring type 3 wire 2 wire Output type NPN PNP Applicable load IC circuit, Relay, PLC 24VDC relay, PLC Power supply voltage 5, 12, 24VDC (4.5 to 28VDC) Current consumption 10mA or less Load voltage Load current 28VDC or less 40mA or less 80mA or less 24VDC (10 to 28VDC) 5 to 40mA Internal voltage drop 1.5V or less (0.8V or less at 10mA load current) 0.8V or less D-T791, D-T792, D-T791C, D-T792C 4V or less Leakage current 100µA or less at 24VDC 0.8mA or less at 24VDC Indicator light Red LED lights up when ON Lead wires Oil resistant, vinyl heavy duty cord, ø3.4, 0.2mm², 3 wire [Brown, Black, Blue (Red, White, Black)], 2 wire [Brown, Blue (Red, Black)], 0.5m Note 1) Refer to page 28 for solid state switch common specifications. Note 2) Refer to page 28 for lead wire length. D-2 D-1 Dimensions D-S791: Right-handed D-S7P1: D-S792: Left-handed D-S7P2: Auto switch internal circuits Lead wire colors inside ( ) are those prior to conformity with IEC standards. D-S791, S792 DC (+) Brown [Red] Main switch circuit OUT Black [White] D-T791: Right-handed D-T792: Left-handed DC ( ) Blue [Black] D-S7P1, S7P2 DC (+) Brown [Red] Main switch circuit OUT Black [White] DC ( ) Blue [Black] D-T791C: Right-handed D-T792C: Left-handed D-T791(C), T792(C) OUT (+) Brown [Red] Main switch circuit OUT ( ) Blue [Black] 34

Basic Wiring Auto Switch Connections and Examples Solid state 3 wire, NPN Main switch circuit Black [White] Brown [Red] Load Blue [Black] (Power supplies for switch and load are separate.) Brown [Red] Main switch circuit Black [White] Blue [Black] Load Examples of Connection to PLC Solid state 3 wire, PNP Main switch circuit Black [White] Brown [Red] Load Blue [Black] 2 wire <Solid state> Main switch circuit Main switch circuit Brown [Red] Blue [Black] Brown [Red] Load Load Blue [Black] 2 wire <Reed switch> Indicator light, protection circuit, etc. Indicator light, protection circuit, etc. Brown [Red] Blue [Black] Brown [Red] Load Load Blue [Black] Sink input specifications Source input specifications 3 wire, NPN Black 3 wire, PNP Switch [White] Brown [Red] Input Switch Brown [Red] Black [White] Input Connect according to the applicable PLC input specifications, as the connection method will vary depending on the PLC input specifications. Blue [Black] COM PLC internal circuit 2 wire 2 wire Brown [Red] Input Blue [Black] Blue [Black] COM Input PLC internal circuit Switch Switch Blue [Black] COM PLC internal circuit Connection Examples for AND (Series) and OR (Parallel) 3 wire AND connection for NPN output (using relays) 2 wire with 2 switch AND connection 2 wire with 2 switch OR connection Switch 1 Switch 2 Brown [Red] Black Switch 1 Relay [White] Blue [Black] Brown [Red] Black Switch 2 Relay [White] Blue [Black] Brown [Red] Blue [Black] Brown [Red] Blue [Black] Load = 24V 4V x 2 pcs. = 16V Example: Power supply is 24VDC Voltage decline in switch is 4V Load Relay contact When two switches are connected in series, a load may malfunction because the load voltage will decline when in the ON state. The indicator lights will light up if both of the switches are in the ON state. Residual voltage Load voltage at ON = Power supply voltage x 2 pcs. Switch 1 Switch 2 Brown [Red] Brown [Red] Blue [Black] Brown [Red] Blue [Black] COM AND connection for NPN output (performed with switches only) Brown [Red] Black Switch 1 [White] Load Blue [Black] Brown [Red] Black Switch 2 [White] Blue [Black] The indicator lights will light up when both switches are turned ON. Load voltage at OFF = Load Leakage current PLC internal circuit x 2 pcs. x = 1mA x 2 pcs. x 3kΩ = 6V Example: Load impedance is 3kΩ Leakage current from switch is 1mA OR connection for NPN output Switch 1 Switch 2 Blue [Black] Blue [Black] <Solid state> When two switches are connected in parallel, malfunction may occur because the load voltage will increase when in the OFF state. Load impedance Brown [Red] Black [White] Brown [Red] Load Black [White] <Reed switch> Because there is no current leakage, the load voltage will not increase when turned OFF. However, depending on the number of switches in the ON state, the indicator lights may sometimes get dark or not light up, because of dispersion and reduction of the current flowing to the switches. 35

Series MSU Model Selection Selection Procedure Formulae Selection Example 1 2 3 Operating conditions Enumerate the operating conditions according to the mounting position. Required torque Rotation time H Vertical mounting M = Fr L Horizontal mounting L Fr G FS M = FS H Confirm the type of load as shown below, and select an actuator that satisfies the required torque. Static load: Ts Resistance load: Tf Inertial load: Ta G Load types Confirm that it is within the adjustable range of rotation time. Model used Operating pressure Mounting position Load type Ts (N m) Tf (N m) Ta (N m) Load configuration Rotation time t (s) Rotation Load mass m (kg) Distance between central axis and center of gravity H (mm) Mass point distance L (mm) Effective torque Ts Effective torque (3 to 5) Tf Effective torque 10 Ta Effective torque 0.07 to 0.3s/90 b Rotary table: MSUA7-90S, Pressure: 0.5MPa Mounting position: Vertical, Type of load: Inertial load Ta Load configuration: 60mm x 40mm (rectangular plate) Rotation time (t): 0.2s, Rotation (θ): 90 Load mass (m): 0.15kg, Distance between central axis and center of gravity (H): 30mm Inertial load. 10 x Ta = 10 x I x ω = 10 x 0.0002 x π/0.2² = 0.157N m <Effective torque OK H G Note) I substitutes for the value for moment of inertia. ω = 2θ. (ω: Angular acceleration) t² 0.2s/90 OK a 4 Allowable load Confirm that the radial load, thrust load and moment are within the allowable ranges. Thrust load: m x 9.8 Allowable load Moment: m x 9.8 x H Allowable moment Allowable load 0.15 x 9.8 x 1.47N < Allowable load OK 0.15 x 9.8 x 0.03 = 0.044N m 0.044N m < Allowable moment OK 5 Moment of inertia Find the load's moment of inertia "I" for the energy calculation. I = m x (a² + b²)/12 + m x H² Moment of inertia I = 0.15 x (0.06² + 0.04²)/12 + 0.15 x 0.03² = 0.0002kg m² 6 Kinetic energy Confirm that the load's kinetic energy is within the allowable value. Note) Table's moment of inertia = Io. 1/2 x (I + Io) x ω² <Allowable energy ω = 2θ/t (ω: Terminal angular velocity) θ: Rotation angle (rad) t: Rotation time (s) Allowable kinetic energy/rotation time 1/2 x (0.0002 + 0.000028) x (2 x (π/2)/0.2)² 0.028J < Allowable energy OK 36

Effective torque Series MSU Model Selection Vane type Single vane Double vane MSU1 0.4 Size MSU 1 MSU 3 MSU 7 MSU 20 MSUB 1 MSUB 3 MSUB 7 MSUB20 1N m = 10.2kgf cm 0.1 0.15 0.05 0.14 0.40 0.11 0.29 0.86 0.2 0.03 0.09 0.21 0.58 0.06 0.18 0.44 1.22 0.3 0.06 0.16 0.37 0.99 0.12 0.32 0.78 2.04 0.4 0.09 0.23 0.52 1.38 0.18 0.46 1.10 2.82 Operating pressure (MPa) 0.5 0.11 0.31 0.69 1.78 0.23 0.62 1.42 3.63 0.6 0.14 0.38 0.83 2.19 0.29 0.77 1.74 4.43 0.7 0.17 0.45 0.98 2.58 0.35 0.91 2.04 5.22 Unit: N m 0.8 2.99 6.04 0.9 3.39 6.83 1.0 3.73 7.49 MSU3 MSU7 MSU20 1N m = 10.2kgf cm 1N m = 10.2kgf cm 8 1N m = 10.2kgf cm 1.0 2.0 Effective output (N m) 0.3 0.2 0.1 Double vane Single vane Effective output (N m) 0.8 0.6 0.4 0.2 Double vane Single vane Effective output (N m) 1.6 1.2 0.8 0.4 Double vane Single vane Effective output (N m) 6 4 2 Double vane Single vane 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Operating pressure (MPa) 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Operating pressure (MPa) 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Operating pressure (MPa) 0 0 0.2 0.4 0.6 0.8 1.0 Operating pressure (MPa) Load Types Static load: Ts A load as represented by the clamp which requires pressing force only ( ) During examination if it is decided to consider the mass of the clamp itself in the drawing below, it should be regarded as an inertial load. (Example) Allowable Load F: Pressing force (N) Static torque calculation Ts = F x l (N m) Resistance load: Tf A load that is affected by external forces such as friction or gravity Since the object is to move the load, and speed adjustment is necessary, allow an extra margin of 3 to 5 times in the effective torque. Actuator effective torque (3 to 5) Tf During examination if it is decided to consider ( the mass of the lever itself in the drawing below, it should be regarded as an inertial load. ) (Example) Weight m Movement Load Lever Shaft center Friction coefficient µ F = µmg Static torque calculation Tf = F x l (N m) g = 9.8m/s² Inertial load: Ta The load which must be rotated by the actuator Since the object is to rotate the load, and speed adjustment is necessary, allow an extra margin of 10 times or more in the effective torque. Actuator effective torque S Ta (S is 10 times or more) Accelerating torque calculation Ta = I ω (N m) I: Moment of inertia Refer to page 38. Load ω: Angular acceleration 2θ ω = (rad/s²) t² θ: Rotation angle (rad) t: Rotation time (S) Rotary actuator Do not permit the load and moment applied to the table to exceed the allowable values shown in the table at the right. (Operation above the allowable values can cause adverse effects on service life, such as play in the table and loss of accuracy.) MSUA MSUB A B ROTARY TABLE Size 1 3 7 20 Allowable radial load (N) 20 40 50 60 Allowable thrust load (N) 15 A 15 30 30 60 60 80 80 B 10 15 30 40 Allowable moment (N m) 0.3 0.7 0.9 2.9 37

Model Selection Series MSU Moment of Inertia 1. Thin shaft Position of rotational axis: Perpendicular to the shaft through one end I: Moment of Inertia kg m², m: Load mass kg 6. Column (including thin round plate) Position of rotational axis: Central axis I = m₁ a₁ ² + m₂ a₂ ² 3 3 I = m r² 2 2. Thin shaft Position of rotational axis: Through the shaft's center of gravity 7. Solid sphere Position of rotational axis: Diameter I = m 12 a² 2r² I = m 5 3. Thin rectangular plate (rectangular parallelopiped) Position of rotational axis: Through the plate's center of gravity 8. Thin round plate Position of rotational axis: Diameter I = m 12 a² I = m r² 4 4. Thin rectangular plate (rectangular parallelopiped) Position of rotational axis: Perpendicular to the plate through one end (also the same in case of a thicker plate) 9. Load at end of lever I = m₁ 4a1² + b² 12 + m₂ 4a₂² + b² 12 I = m₁ a1² + m₂ a₂² + K 3 (Example) When shape of m₂ is a 2r² sphere refer to 7, and K = m₂ 5 5. Thin rectangular plate (rectangular parallelopiped) Position of rotational axis: Through the center of gravity and perpendicular to the plate (also the same in case of a thicker plate) I = m a² + b² 12 10. Gear transmission Number of teeth = b Number of teeth = a 1. Find the moment of inertia IB for the rotation of shaft (B). 2. Next, IB is entered to find IA the moment of inertia for the rotation of shaft (A) as a IA = ( )² IB b 38

Kinetic Energy/Rotation Time Even in cases where the torque required for rotation of the load is small, damage to internal parts may result from the inertial force of the load. Select models giving consideration to the load's moment of inertia, kinetic energy and rotation time during operation. (The moment of inertia and rotation time charts can be used for your convenience in making model selections.) 1. Allowable kinetic energy and rotation time adjustment range From the table below, set the rotation time within the adjustment range for stable operation. Note that operation beyond the upper limit of the low speed range, 0.3S/90, may lead to sticking or stopping of operation. MSUA/Sizes 1 to 20 MSUB/Sizes 1 to 20 Size MSUA 1 MSUA 3 MSUA 7 MSUA20 MSUA/Sizes 1 to 20 MSUB/Sizes 1 to 20 x 10 ⁶ x 10 ⁶ 1000 Series MSU Model Selection Allowable kinetic energy J 0.0065 0.017 0.042 0.073 2. Moment of inertia calculation Rotation time adjustment range for stable operation S/90 0.07 to 0.3 Since the formulae for moment of inertia differ depending on the configuration of the load, refer to the moment of inertia calculation formulae on page 38. 3. Model selection Select models by applying the moment of inertia and rotation time which have been found to the charts below. Size MSUB 1 MSUB 3 MSUB 7 MSUB20 1000 Allowable kinetic energy J 0.005 0.013 0.032 0.056 Rotation time adjustment range for stable operation S/90 0.07 to 0.3 I: Load's moment of inertia (kg m²) 150 100 20 10 1 2 1 MSUA1 selection range MSUA3 selection range MSUA7 selection range MSUA20 selection range I: Load's moment of inertia (kg m²) 100 10 1 MSUB1 selection range MSUB3 selection range MSUB7 selection range MSUB20 selection range 0.1 0.07 0.1 0.14 0.2 0.3 0.15 0.25 Rotation time S/90 1. <Viewing the charts> Moment of inertia 20 x 10 - ⁶ kg m² Rotation time... 0.14S/90 MSUA3 or MSUA7, 20 is selected for the above. 2. <Example calculation> Load configuration: A cylinder of radius 0.05m and mass 0.12kg Rotation time: 0.2S/90 I = 0.12 x 0.05² 2 = 150 x 10 - ⁶ kg m² In the moment of inertia and rotation time chart, find the intersection of the lines extended from the points corresponding to 150 x 10-6 kg m² on the vertical axis (moment of inertia) and 0.2S/90 on the horizontal axis (rotation time). Since the resulting intersection point lies within the MSUA7 selection range, MSUA7 or MSUA20 can be selected. 0.1 0.07 0.1 0.15 0.2 0.25 0.3 Rotation time S/90 Load energy calculation method 1 E = (I + Io) ω², ω = 2θ t 2 E: Kinetic energy (J) I: Load's moment of inertia... (kg m 2 ) Io: Table's moment of inertia (kg m 2 ) Size Io MSU 1 2.5 x 10 - ⁶ MSU 3 6.2 x 10 - ⁶ MSU 7 16.0 x 10 - ⁶ MSU20 28.0 x 10 - ⁶ ω: Angular velocity (rad/s) θ: Rotation. (rad) 180 = 3.14rad t: Rotation time.. (s) The "ω" which is sought here is the terminal angular velocity for an equivalent angular acceleration. 39