Wireless Autonomous Transducer Solutions

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22 April 2010 Wireless Autonomous Transducer Solutions by N. Lallemant Hall 6, Stand J28

2 Holst Centre Fingerprint Who we are What we do Independent research organization co-founded by IMEC (1300 fte, Belgium) and TNO (4500 fte, the Netherlands) in 2005 150 researchers and 60 resident researchers from industry and university Global network of industrial and academic partners Supported by Dutch Ministry of Economic Affairs Creating generic technologies, time to market 3..10 years Research Focus on Wireless Autonomous Microsystems (WATS) AND Systems-In-Foil (SiF) Partnering with industry and universities How we work Research guided by clear roadmap Day to day interaction with industrial resident Regular review meetings with program partners Open Innovation through precompetitive research programs Results are shared between partners

3 Access to Unique Set of Infrastructures and Process Labs High Tech Campus, Eindhoven (NL) 8000 m 2 cleanroom OLED Device Processing Life Sciences facilities Materials Analysis Thin Film clean room Photonics cleanroom Electronic measurement EMC lab Reliability lab Holst R2R lab Equipment Engineering Electronic Prototyping Holst Offices Amsterdam Netherlands IMEC clean room, Leuven (Be) Eindhoven Düsseldorf Clean room 2 3200 m 2 clean room cleanroom 2200 m 2 vibration Nano- controlled 300 mm pilot elektronicalab line Ball room, clean sub-fab FOUP wafer transport IMEC 4 Office building Clean room 1 5200 m 2 clean room 1750 m 2 class 1 200 mm pilot line Continuous Cleanroom operation: 200mm 24hrs silicium / 7 days pilootlijn Leuven Belgium Aachen IMEC 2 & 3 offices and labs Cafeteria Training infrastructure IMEC 1 Main entrance IMECEXPO visitor center Offices and labs

4 Research Program aligned with Industrial Needs Holst Centre (Netherlands) IMEC-International (Be, NL, Tw, ) TNO (NL) Small IC/MEMS (Silicon) Hard Litho centric Large area Electronic (organic) Flexible Roll to Roll

5 Imagine an active RFID 1 tag (1) Active RFID = battery powered wireless sensor node

6 How does Battery Sampling Size Period affect affect autonomy Autonomy?? 1,000 Autonomy [months] 400 100 10 10 Smaller Batteries = 70 times less autonomy! State of the Art Active RFID State of the Art Active RFID Size tag: 60x40x17 Weight tag: 35g Size battery:25x14 Weight battery: 9g Capacity: 1000 mah Typical autonomy Vary between 2 And 4 years 4cm3 1000mAh 9grams 1 0.5 0.01 0.1 1 10 30 60 100 300 1,000 Sampling period [s] 0.4cm3 15mAh 1gram

7 Possible solution system power optimization 1,000 400 Autonomy [months] 100 10 1 0.5 Size WATS cube: 15x15x15 Size battery:10x10x0.4 Capacity: 15 mah Typical autonomy: up to 7 months State of the Art Active RFID Optimized system power WATS cube with smaller batteries 30 times more autonomy 0.01 0.1 1 10 30 60 100 300 1,000 Sampling period [s]

8 Possible solution micro system harvesters Autonomy [months] 1,000 400 100 10 Size WATS cube: 15x15x15 Size battery:10x10x0.4 Capacity: 15 mah Size harvester (one side): 15x15x1 IMEC Cube + PV Harvester Optimized system power WATS cube with smaller battery and PV harvester 100 times more autonomy State of the Art Active RFID 1 0.5 0.01 0.1 1 10 30 60 100 300 1,000 Sampling period [s]

9 WATS beyond battery powered RFID?

10 IMEC-NL core activities: Ultra low power technology for wireless autonomous transducers Non Electrical World S 10μW A 10μW Front End 20μW μp 20μW DSP 20μW Radio 20μW Micropower System -100μW Thermal, Vibrational, RF, Light, Bio-chemical 10

11 Integrated multi-application platforms Wellness Sleep Stress CV disorders Epilepsy Headset Watch Patch Ultra-low-power technologies for wearable & connected health

12 A System approach: Impact of Radio and DSP on ECG Patch Power Consumption Use thinfilm battery MSP430 only BioASIP 3.7 mw 5.1 days X 10 0.34 mw 54 days X 9 X 18 0.34 mw 0.21 mw 47 days 89 days 12

13 Novel Radios with Record Low Power Consumption Radio power 50-100 nj/bit 1nJ/bit WiMedia 100 mw 10 mw 1 mw 0.1 mw Zigbee IMEC event-driven radio Bluetooth BT -LE IMEC Narrow Band 100 kbps IMEC Impulse UWB 1 Mbps 10 Mbps 100 Mbps Impulse UWB unique combination of low power and high data rate Narrow Band (super-regenerative architecture)10x to 100 lower power than Zigbee & alternatives Event-driven <50 uw continuously on Data rate 13

14 Advancing state of the art : IC design 8-channel EEG 2006 1-channel ExG UWB transmitter 2007 EEG acquisition frontend 2008 15+ patents Analog ECG processor 2010 Radio ADC 2010 Wakeup receiver 2010

15 Application areas for ultra low-power sensors The domestic sector The medical sector The automotive, industrial, and aerospace sector CO, CO 2, humidity, combustible gases (Personal) Environment diagnostics and patient monitoring The security sector NO x, O 2, NH 3, SO 2, O 3, hydrocarbons, CO 2 The food industries pollution, indoor air CO 2, NO x traces of explosives perishables monitoring

16 Air quality monitoring: on & around the body Vehicles Working environment Personal environment Living spaces CO 2, NO x asthma risk prediction lung cancer prevention Volatile mixtures Indoor comfort & health Open spaces fatigue eye irritation headaches anxiety nausea lightheaded drowsy

17 Micropower Program: an integrated approach Harvesting Sources Design, Fabrication and Testing Power management IC Design and Testing AC/DC DC/DC Photovoltaic Vibration Thermal RF Energy Storage Systems Characterization and Selection Battery Supercap Biofuel cell Micropower Module

18 Positioning of micropower research: size matters! Macro devices Target Power [mw] 10 1 0.1 Micro devices Focus Holst Centre / imec μm mm cm dm Size

19 Understand, Design, Manufacture, Integrate and Characterize Thermal Energy Harvester Vibration Energy Harvester Field data Spectral Analysis FFT PSD Concept Design The Physics Concept Design Piezo Adhesive bonds capacitor FEM modeling Electrostatic Piezoelectric Mass Micro Machining Integration, Validation & Test Micro machining Simulation and Validation tests [V] 0.600 0.500 0.400 0.300 Beam Generated Voltage vs. Frequency, dev.10 0.200 0.100 0.000 220 270 320 370 Frequency [Hz]

20 Advancing state of the art : Harvesters and Sensors IBM 2 mw >260x Responsivity Increase 10 4 x Power Reduction 170 nw Vapor (EtOH) sensor 2009 Piezo vibration harvester With record output power (85 μw ) 15+ patents Thermal harvesters on body Frost&Sullivan award ULP T-sensor (10μW)

21 Holst Centre Industrial partners from across the value chain

Reaching out to Partners in Open Innovation QUESTIONS? Visit us at www.holstcentre.com Stand J28 Hall 6 Nicolas Lallemant Tel: Int + 31 40 2774318 E-mail: nicolas.lallemant@imec-nl.nl Visit us at: www.holstcentre.com