Standard Components. KF Components. ISO Components. CF Components. Quick CF Components

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Transcription:

Standard Components KF Components ISO Components CF Components Quick CF Components

Contents KF Components Introduction Page - to -4 KF Flanges KF Components Page -5 to -6 Page -6 to -16 KF Flexible hoses Page -17 to -18 KF iquid feedthroughs Page -19 KF Glass-to-metal connectors Page -20 KF Viewports Page -21 KF Seals Page -22 to -27 KF Connecting elements Page -28 to -1 ISO Components Introduction Page -2 to -5 ISO Flanges Page -6 to -9 ISO Components Page -40 to -46 ISO Flexible hoses Page -47 ISO Viewports Page -48 to -49 ISO Seals Page -50 to -55 ISO Connecting elements Page -55 to -58 CF Components Introduction Page -59 to -61 CF Flanges Page -62 to -67 CF Components CF Flexible hoses Page -68 to -77 Page -78 CF Quick access door Page -79 to -80 CF iquid feedthroughs Page -81 CF Glass-to-metal connectors Page -82 CF Viewports Page -8 to -84 CF Gaskets Page -84 to -85 CF Connecting elements Page -86 to -89 Quick CF Components Introduction Page -90 to -91 Quick CF Flanges Page -92 to -9 Quick CF Components Page -9 to -95 Quick CF Viewports Page -95 Optical fiber feedthroughs on Quick CF flanges Page -96 SUB-D Feedthroughs on Quick CF flanges Page -96 Edge welded bellows with Quick CF flanges Page -97 UHV angle valve with Quick CF flanges Page -97 Total pressure measurement with Quick CF flanges Page -98 Quick CF Gaskets Page -99 to -100 Quick CF Clamp chains VaCFix, stainless steel Page -101 Heating jackets for Quick CF clamp chains VaCFix Page -101-2 www.vacom-vacuum.com

KF Components KF Flanges KF Blank flanges aluminum stainless steel luminum Stainless steel 04 Stainless steel 16 KF16B KF16BS-04 KF16BS-16 16 0 17.2 KF25B KF25BS-04 KF25BS-16 25 40 26.2 KF40B KF40BS-04 KF40BS-16 40 55 41.2 KF50B KF50BS-04 KF50BS-16 50 75 52.2 Option: clean room products (= CRP) made of stainless steel 16 on request. KF Bored flanges, stainless steel D Stainless steel 04 Stainless steel 16 KF16B19-04 KF16B19-16 16 0 17.2 19 4.5.5 - KF16B20-16 16 0 17.2 20 4..5 KF25B28-04 KF25B28-16 25 40 26.2 28 4.6.5 KF40B41-04 KF40B41-16 40 55 41.2 41 4.9.5 KF40B44-04 KF40B44-16 40 55 41.2 44.5 4.4.5 KF50B5-04 KF50B5-16 50 75 52.2 5 5.9 4.5 KF50B57-04 KF50B57-16 50 75 52.2 57 5.4 4.5 Option: clean room products (= CRP) made of stainless steel 16 on request. Welding flanges made of stainless steel 04 on request. D R 2 www.vacom-vacuum.com -5

KF Components KF Flanges KF Flange caps, plastics KF16CP KF25CP KF40CP KF50CP Packing unit 10 pieces. 16 25 40 50 KF Components KF Tubulations (half nipples), stainless steel Stainless steel 04 Stainless steel 16 TU16K1-19-04-16 0 1 19 TU16K20-20-04 TU16K20-20-16 16 0 20 20 TU16K0-20-04 TU16K0-20-16 16 0 0 20 - TU16K40-20-16 16 0 40 20 TU16K70-20-04 TU16K70-20-16 16 0 70 20 TU25K1-25-04-25 40 1 25 TU25K20-28-04 TU25K20-28-16 25 40 20 28 TU25K0-28-04 TU25K0-28-16 25 40 0 28 - TU25K40-28-16 25 40 40 28 TU25K70-28-04 TU25K70-28-16 25 40 70 28 TU40K19-8-04-40 55 19 8 TU40K20-44.5-04 TU40K20-44.5-16 40 55 20 44.5 TU40K0-44.5-04 TU40K0-44.5-16 40 55 0 44.5 - TU40K40-44.5-16 40 55 40 44.5 TU40K70-44.5-04 TU40K70-44.5-16 40 55 70 44.5 TU50K19-51-04-50 75 19 51 TU50K20-57-04 TU50K20-57-16 50 75 20 57 TU50K0-57-04 TU50K0-57-16 50 75 0 57 - TU50K40-57-16 50 75 40 57 TU50K70-57-04 TU50K70-57-16 50 75 70 57 Option: clean room products (= CRP) made of stainless steel 16 on request. Other lengths and nominal diameters on request. R -6 www.vacom-vacuum.com

KF Components KF Components KF Tube, 1 m length, stainless steel Delivery conditions according to DIN EN 10217-7 longitudinally welded weld seam factor 1.0 inside and outside pickled R RI St. steel 04 St. steel 16 R04-19x1.5-1 R16-19x1.5-1 16 19 16 R04-28x1.5-1 R16-28x1.5-1 25 28 25 R04-41x1.5-1 R16-41x1.5-1 40 41 8 R04-5x1.5-1 R16-5x1.5-1 50 5 50 Other lengths on request. Quality according to DIN 11850/11866 on request Surface finish inside Ra < 0.8 μm weld seam area Ra < 1.6 μm KF Hose nozzles Hose ID 10 mm luminum Stainless steel 16 KF16HN KF16HNS-16 16 0 KF25HN KF25HNS-16 25 40 KF40HN KF40HNS-16 40 55 - KF50HNS-16 50 75 KF Tubulation for PVC hose, stainless steel 16 R KF25TUH-16 25 40 25 8 KF40TUH-16 40 55 8 50 KF50TUH-16 50 75 51 55 Option: clean room products (= CRP) on request. KF Hose clamps for PVC hose KF16HC 16 25 KF25HC 25 6 KF40HC 40 50 KF50HC 50 60 D=max. hose size D www.vacom-vacuum.com -7

KF Components KF Components PVC hoses, by the meter Transparent PVC hose with an internal spring steel spiral Temperature range -15 C to 65 C Differential pressure 900 mbar R RI PVC16 16 26 19 PVC25 25 25 PVC40 40 47 8 PVC50 50 60 50 KF Hose connectors, PVC KF16PVC25 16 0 250 KF16PVC50 16 0 500 KF16PVC100 16 0 1000 KF25PVC25 25 40 250 KF25PVC50 25 40 500 KF25PVC100 25 40 1000 KF40PVC25 40 55 250 KF40PVC50 40 55 500 KF40PVC100 40 55 1000 KF50PVC25 50 75 250 KF50PVC50 50 75 500 KF50PVC100 50 75 1000 Other lengths on request. KF Straight connectors luminum Stainless steel 04 Stainless steel 16 SC16K SC16K-04 SC16K-16 16 0 80 SC25K SC25K-04 SC25K-16 25 40 100 SC40K SC40K-04 SC40K-16 40 55 10 - SC50K-04 SC50K-16 50 75 140 Other lengths on request. Option: clean room products (= CRP) made of stainless steel 16 on request. -8 www.vacom-vacuum.com

KF Components KF Components KF Tubulated reducing adapters, aluminum 2 2 KF25R16-40 25 16 40 0 KF40R16-40 40 16 55 0 KF40R25-40 40 25 55 40 KF50R40-40 50 40 75 55 KF Tubulated reducing adapters, conical, stainless steel Stainless steel 04 Stainless steel 16 KF25R16/CO-04 KF25R16/CO-16 25 16 40 0 26 17 KF40R16/CO-04 KF40R16/CO-16 40 16 55 0 41 17 KF40R25/CO-04 KF40R25/CO-16 40 25 55 40 41 26 KF50R25/CO-04 KF50R25/CO-16 50 25 75 40 52 26 KF50R40/CO-04 KF50R40/CO-16 50 40 75 55 52 41 Option: clean room products (= CRP) made of stainless steel 16 on request. 2 2 D D2 KF Tubulated reducing adapters, stainless steel Stainless steel 04 Stainless steel 16 KF25R16-04 KF25R16-16 25 16 40 0 KF40R16-04 KF40R16-16 40 16 55 0 KF40R25-04 KF40R25-16 40 25 55 40 KF50R25-04 KF50R25-16 50 25 75 40 KF50R40-04 KF50R40-16 50 40 75 55 Option: clean room products (= CRP) made of stainless steel 16 on request. 2 2 www.vacom-vacuum.com -9

KF Components KF Components KF to ISO-K dapters, stainless steel Stainless steel 04 Stainless steel 16 SK06025-04 SK06025-16 6 25 95 40 SK06040-04 SK06040-16 6 40 95 55 SK06050-04 SK06050-16 6 50 95 75 SK100040-04 SK100040-16 100 40 10 55 Option: clean room products (= CRP) made of stainless steel 16 on request. Other lengths on request. KF to ISO-K dapters, conical, stainless steel 04 2 2 KF to CF dapters, stainless steel 16 2 2 D D2 SK06040/CO-04 6 40 95 55 70 41 SK06050/CO-04 6 50 95 75 70 52 SK080040/CO-04 80 40 110 55 8 41 SK080050/CO-04 80 50 110 75 8 52 SK100040/CO-04 100 40 10 55 102 41 SK100050/CO-04 100 50 10 75 102 52 Option: clean room products (= CRP) made of stainless steel 16 on request. 2 2 K016016-16 16 16 4 0 6 K040016-16 40 16 70 0 6 K040025-16 40 25 70 40 6 K040040-16 40 40 70 55 50 K06025-16 6 25 114 40 50 K06040-16 6 40 114 55 50 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other lengths on request. -10 www.vacom-vacuum.com

KF Components KF Components KF-G dapters, G outside thread, stainless steel 16 GZ D SW KF10G14-16 10 0 1/4" 7 20 - KF16G12-16 16 0 1/2" 14 28 16 KF16G14-16 16 0 1/4" 7 22 10 KF16G4-16 16 0 /4" 16 0 18 KF16G8-16 16 0 /8" 10 22 1 KF25G1-16 25 40 1" 25 6 27 KF25G12-16 25 40 1/2" 14 29 16 KF25G14-16 25 40 1/4" 7 22 10 KF25G4-16 25 40 /4" 16 26 18 KF25G114-16 25 40 1 1/4" 25 5 27 KF40G114-16 40 55 1 1/4" 4 5 6 KF40G112-16 40 55 1 1/2" 9 2 6 KF50G2-16 50 75 2" 49 40 - Option: clean room products (= CRP) made of stainless steel 16 on request. KF-G dapters, G inside thread, stainless steel 16 GZ SW KF16GI18-16 16 0 1/8" 7 - KF16GI14-16 16 0 1/4" 10 19 KF16GI8-16 16 0 /8" 14 19 KF25GI14-16 25 40 1/4" 10 19 KF25GI12-16 25 40 1/2" 15 27 KF25GI4-16 25 40 /4" 20 - KF40GI12-16 40 55 1/2" 15 27 KF40GI1-16 40 55 1" 20 41 KF40GI114-16 40 55 1 1/4" 22 - KF40GI14-16 40 55 1/4" 15 19 Option: clean room products (= CRP) made of stainless steel 16 on request. KF Threaded flanges, G outside thread, stainless steel 16 with FKM seal KF Flange adapters for screwing into tubes. GZ D 2 SW KF16EF-16 16 0 1/2" 16 5 15 22 KF25EF-16 25 40 1" 25 45 25 6 KF40EF-16 40 55 1 1/2" 41 50 0 50 www.vacom-vacuum.com -11

KF Components KF Components KF-R dapters, R outside thread, stainless steel 16 GZ D SW KF16R14-16 16 0 1/4" 7 20 - KF16R12-16 16 0 1/2" 14 27 19 KF25R1-16 25 40 1" 25 2 27 KF40R112-16 40 55 1 1/2" 8 40 41 KF50R2-16 50 75 2" 51 4 - Option: clean room products (= CRP) made of stainless steel 16 on request. KF to NPT dapters, NPT outside thread, stainless steel 16 GZ D SW KF16NPT14-16 16 0 1/4" 7.4 25 - KF16NPT12-16 16 0 1/2" 14.9 2 19 KF16NPT4-16 16 0 /4" 16 4 19 KF25NPT14-16 25 40 1/4" 7.4 25 10 KF25NPT4-16 25 40 /4" 16 4 19 KF40NPT12-16 40 55 1/2" 14.9 2 19 Option: clean room products (= CRP) made of stainless steel 16 on request. KF to NPT dapters, NPT inside thread, stainless steel 16 GZ SW KF16NPT18F-16 16 0 1/8" 10 1 KF16NPT14F-16 16 0 1/4" 1 19 KF25NPT14F-16 25 40 1/4" 1 19 KF25NPT18F-16 25 40 1/8" 10 1 Option: clean room products (= CRP) made of stainless steel 16 on request. KF to Swagelok dapters, imperial, stainless steel 16 D RM KSW166-16 16 0 4.8 5 6 KSW168-16 16 0 6.4 8 8 KSW1610-16 16 0 7.9 44 10 KSW256-16 25 40 4.8 6 KSW258-16 25 40 6.4 8 8 KSW2510-16 25 40 7.9 44 10 KSW406-16 40 55 4.8 6 KSW408-16 40 55 6.4 8 8 KSW4010-16 40 55 7.9 44 10 Option: clean room products (= CRP) made of stainless steel 16 on request. -12 www.vacom-vacuum.com

KF Components KF Components KF to Swagelok dapters, imperial, stainless steel 16 D RZ KSW167-16 16 0 4.8 5 1/4" KSW169-16 16 0 7.1 44 /8" KSW161-16 16 0 10.4 5 1/2" KSW257-16 25 40 4.8 1/4" KSW259-16 25 40 7.1 44 /8" KSW251-16 25 40 10.4 5 1/2" KSW407-16 40 55 4.8 1/4" KSW409-16 40 55 7.1 44 /8" KSW401-16 40 55 10.4 5 1/2" Option: clean room products (= CRP) made of stainless steel 16 on request. KF to VCR dapters, female or male, stainless steel 16 female male D RZ Female Male KVCR166F-16 KVCR166M-16 16 0 4.8 6 1/4" KVCR161F-16 KVCR161M-16 16 0 10.4 41 1/2" KVCR256F-16 KVCR256M-16 25 40 4.8 6 1/4" KVCR251F-16 KVCR251M-16 25 40 10.4 41 1/2" KVCR406F-16 KVCR406M-16 40 55 4.8 6 1/4" KVCR401F-16 KVCR401M-16 40 55 10.4 41 1/2" Option: clean room products (= CRP) made of stainless steel 16 on request. VCR Compatible gaskets, stainless steel 16 Planar gaskets with or without retainer for sealing VCR compatible connections. Design RZ VCR-1/4-SE-16UHP without retainer 1/4" VCR-1/2-SE-16UHP without retainer 1/2" VCR-1/4-SE-RT-16UHP with retainer 1/4" VCR-1/2-SE-RT-16UHP with retainer 1/2" Option: clean room products (= CRP) on request. www.vacom-vacuum.com -1

KF Components KF Components KF Pinch screw connection, stainless steel, FKM seal KF flange adapters for detachable connection of glass and stainless steel tubes. R KF16T12-16 16 0 1.1 50 12.7 KF25T12-16 25 40 1.1 50 12.7 KF25T25-16 25 40 25.8 60 25.4 KF40T25-16 40 55 25.8 60 25.4 D KF Elbows 45, stainless steel S E416KF-16 16 0 2 E425KF-16 25 40 28 E440KF-16 40 55 4 E450KF-16 50 75 51 Option: clean room products (= CRP) made of stainless steel 16 on request. KF Elbows, 90 aluminum stainless steel S luminum Stainless steel 04 Stainless steel 16 E16K E16K-04 E16K-16 16 0 40 E25K E25K-04 E25K-16 25 40 50 E40K E40K-04 E40K-16 40 55 65 - E50K-04 E50K-16 50 75 70 Option: clean room products (= CRP) made of stainless steel 16 on request. -14 www.vacom-vacuum.com

KF Components KF Components KF Tees aluminum stainless steel luminum Stainless steel 04 Stainless steel 16 TE16K TE16K-04 TE16K-16 16 0 80 40 TE25K TE25K-04 TE25K-16 25 40 100 50 TE40K TE40K-04 TE40K-16 40 55 10 65 - TE50K-04 TE50K-16 50 75 140 70 Option: clean room products (= CRP) made of stainless steel 16 on request. S KF Unequal tees, stainless steel 16 2 2 S UTE025016K-16 25 16 40 0 100 40 UTE040016K-16 40 16 55 0 10 40 UTE040025K-16 40 25 55 40 10 50 UTE050016K-16 50 16 75 0 140 50 UTE050025K-16 50 25 75 40 140 65 UTE050040K-16 50 40 75 55 140 65 Option: clean room products (= CRP) made of stainless steel 16 on request. KF 4-way crosses aluminum stainless steel luminum Stainless steel 04 Stainless steel 16 X16K X16K-04 X16K-16 16 0 80 X25K X25K-04 X25K-16 25 40 100 X40K X40K-04 X40K-16 40 55 10 - X50K-04 X50K-16 50 75 140 Option: clean room products (= CRP) made of stainless steel 16 on request. www.vacom-vacuum.com -15

KF Components KF Components KF Reducing 4-way crosses, stainless steel 16 2 2 S X25K16-16 25 16 40 0 100 40 X40K16-16 40 16 55 0 10 40 X40K25-16 40 25 55 40 10 50 X50K25-16 50 25 75 40 140 50 X50K40-16 50 40 75 55 140 65 Option: clean room products (= CRP) made of stainless steel 16 on request. KF 6-way crosses, stainless steel 16 XX16K-16 16 0 80 XX25K-16 25 40 100 XX40K-16 40 55 10 XX50K-16 50 75 140 Option: clean room products (= CRP) made of stainless steel 16 on request. -16 www.vacom-vacuum.com

KF Components KF Flexible hoses KF Flexible hoses, stainless steel Flexible hoses of stainless steel for flexible connection of KF components. KF connecting piece st. steel 04/16 Flexible hose st. steel 16/16Ti Dynamic bending radii acc. to EN ISO 1080 Base load 10,000 cycles Bending Stainless steel 04 Stainless steel 16 Stainless steel 04 annealed radius FX16K25-04 FX16K25-16 FX16K25N-04 16 0 250 145 FX16K50-04 FX16K50-16 FX16K50N-04 16 0 500 145 FX16K75-04 FX16K75-16 FX16K75N-04 16 0 750 145 FX16K100-04 FX16K100-16 FX16K100N-04 16 0 1000 145 FX25K25-04 FX25K25-16 FX25K25N-04 25 40 250 195 FX25K50-04 FX25K50-16 FX25K50N-04 25 40 500 195 FX25K75-04 FX25K75-16 FX25K75N-04 25 40 750 195 FX25K100-04 FX25K100-16 FX25K100N-04 25 40 1000 195 FX40K25-04 FX40K25-16 FX40K25N-04 40 55 250 255 FX40K50-04 FX40K50-16 FX40K50N-04 40 55 500 255 FX40K75-04 FX40K75-16 FX40K75N-04 40 55 750 255 FX40K100-04 FX40K100-16 FX40K100N-04 40 55 1000 255 FX50K25-04 FX50K25-16 FX50K25N-04 50 75 250 280 FX50K50-04 FX50K50-16 FX50K50N-04 50 75 500 280 FX50K75-04 FX50K75-16 FX50K75N-04 50 75 750 280 FX50K100-04 FX50K100-16 FX50K100N-04 50 75 1000 280 Option: clean room products (= CRP) made of stainless steel 16 on request. Other lengths on request. KF Braided flexible hoses, stainless steel BFX25K1 25 40 15 BFX25K25 25 40 250 BFX40K1 40 55 15 BFX40K25 40 55 250 BFX50K1 50 75 15 BFX50K25 50 75 250 www.vacom-vacuum.com -17

KF Components KF Flexible hoses KF Hydroformed bellows connectors, stainless steel Hydroformed bellows are applied to reduce vibrations and conduct a vertical stroke. KF connecting piece stainless steel 04/16 Hydroformed bellows stainless steel 16Ti connectors Tolerance length ±5 mm Stainless steel 04 Stainless steel 16 KF16FXB-04-16 0 64 70 KF25FXB-04 KF25FXB-16 25 40 6 80 KF40FXB-04 KF40FXB-16 40 55 84 100 KF50FXB-04 KF50FXB-16 50 75 84 100 - KF16FXB-121-16 16 0 90 121 - KF25FXB-121-16 25 40 90 121 - KF40FXB-121-16 40 55 95 121 - KF50FXB-121-16 50 75 100 121 Option: clean room products (= CRP) made of stainless steel 16 on request. Other lengths on request. min -18 www.vacom-vacuum.com

KF Components KF iquid feedthroughs KF 1-way liquid feedthroughs, stainless steel 16 for liquid for liquid nitrogen iquid iquid nitrogen Vacuum side FKF16PP-16 NFKF16PP-16 16 0 6 55 50 tube tube FKF40PP-16 NFKF40PP-16 40 55 6 55 50 tube tube FKF40PP-16 NFKF40PP-16 40 55 12 65 60 tube tube FKF40PS-16 NFKF40PS-16 40 55 12 85 60 tube SW 12 mm FKF40SS-16 NFKF40SS-16 40 55 12 85 80 SW 12 mm SW 12 mm Option: clean room products (= CRP) made of stainless steel 16 on request. Other lengths and connections on request. SW (Swagelok compatible adapter) R 2 ir side KF 2-way liquid feedthroughs, stainless steel 16 for liquid for liquid nitrogen iquid iquid nitrogen Vacuum side FKF402PP-16 NFKF402PP-16 40 55 80 85 50 tube tube FKF402PS-16 NFKF402PS-16 40 70 80 100 50 tube SW 6 mm FKF402SP-16 NFKF402SP-16 40 55 95 85 65 SW 6 mm tube Option: clean room products (= CRP) made of stainless steel 16 on request. Other lengths and connections on request. SW (Swagelok compatible adapters) 2 4 ir side www.vacom-vacuum.com -19

KF Components KF Glass-to-metal connections KF Glass-to-metal connections, Kodial/Pyrex Flange stainless steel 04 Tolerances R ±1 mm, ± mm Bakeout temperature max. 200 C Bakeout rate 2 to K/min Kodial Pyrex GM-KF16-KG-17 GM-KF16-KP-17-TD1 16 0 1 GM-KF25-KG-17-TD19 GM-KF25-KP-17-TD19 25 40 19 GM-KF25-KG-17 GM-KF25-KP-17 25 40 25 GM-KF40-KG-17-TD25 GM-KF40-KP-17-TD25 40 55 25 GM-KF40-KG-17 GM-KF40-KP-17 40 55 8 Other lengths and versions on request. R -20 www.vacom-vacuum.com

KF Components KF Viewports KF Viewports with removable O-ring seal, borosilicate and quartz glass (fused silica, SiO2) Description viewport with removable O-ring seal (FKM) Connection type KF flange He leak rate < 1.0E-9 mbar l/s Window material borosilicate glass (Borofloat ) or fused silica (Silux ) Flange material stainless steel 04 Frame material FKM, O-ring Transmission range ca. 0.4 m to 2 m (Borofloat ), ca. 0. m to m (Silux ) Temperature range up to 150 C (aluminum frame up to 120 C) Coating anti-reflective coating possible D 2 Borosilicate Quartz VPKF40B-E-Z VPKF40Q-E-Z 40 57 40 10.8 VPKF50B-E-Z VPKF50Q-E-Z 50 77 50 10.8 Option: flange, stainless steel 16. KF Viewports with permanent joint, borosilicate glass Description Connection type He leak rate Window material viewport with permanent windowflange-connection KF flange < 1.0E-10 mbar l/s borosilicate glass (Borofloat ) Flange material stainless steel 04 Frame material Kovar Transmission range ca. 0.4 m to 2 m Temperature range up to 150 C Max. heating and cooling K/min rate VPKF16B- 16 0 16 1 1.6 VPKF25B- 25 40 16 1 1.6 VPKF40B- 40 55 2 1 7. VPKF50B- 50 75 2 1 7. D 2 www.vacom-vacuum.com -21

KF Components KF Seals KF O-rings, elastomer Temperature range -10 C to 150 C D2 FKM treated FKM vacuum baked* KF10VR-BEH KF10VR-VB 10 15 KF16VR-BEH KF16VR-VB 16 18 KF25VR-BEH KF25VR-VB 25 28 KF40VR-BEH KF40VR-VB 40 42 KF50VR-BEH KF50VR-VB 50 55 * Option: low outgassing and clean room products (= CRP) on request. Chemically resistant KF O-rings, treated, FKM The c irrevers have a Vacuum baked KF O-rings, FKM The ratio and the -22 www.vacom-vacuum.com

KF Components KF Seals KF O-rings, elastomer O-rings for KF centering rings. Temperature range NBR -10 C to 100 C Temperature range FKM -10 C to 150 C Temperature range MVQ -55 C to 200 C D2 NBR FKM MVQ KF10NR KF10VR - 10 15 KF16NR KF16VR KF16SR 16 18 KF25NR KF25VR KF25SR 25 28 KF40NR KF40VR KF40SR 40 42 KF50NR KF50VR - 50 55 Other sealing materials on request KF Centering rings without O-rings, stainless steel KF Centering rings, stainless steel, without O-ring. D D2 St. steel 04 St. steel 16 KF16CRS-04 KF16CRS-16 16 17.2 16 KF25CRS-04 KF25CRS-16 25 26.2 25 KF40CRS-04 KF40CRS-16 40 41.2 40 KF50CRS-04 KF50CRS-16 50 52.2 50 Option: clean room products (= CRP) made of stainless steel 16 on request. KF Blank centering rings without O-rings, stainless steel 16 Closed KF centering rings made of stainless steel to introduce apertures, without O-ring. D D2 KF16CRBS-16 16 17.2 16 KF25CRBS-16 25 26.2 25 KF40CRBS-16 40 41.2 40 KF50CRBS-16 50 52.2 50 Option: clean room products (= CRP) made of stainless steel 16 on request. www.vacom-vacuum.com -2

KF Components KF Seals KF Edge seals Temperature range up to 150 C aluminum Temperature range PTFE up to 120 C Connecting elements KF clamp chains luminum PTFE KF10/16MS KF10/16TS 16 2 KF20/25MS KF20/25TS 25 42 KF2/40MS KF2/40TS 40 57 KF50MS KF50TS 50 77 D KF Centering rings, NBR Temperature range -10 C to 100 C D D2 luminum Stainless steel KF10NCR KF10SNCR 10 12 10 KF16NCR KF16SNCR 16 17 16 KF25NCR KF25SNCR 25 26 25 KF40NCR KF40SNCR 40 41 40 KF50NCR KF50SNCR 50 52 50 KF Centering rings, FKM Temperature range -10 C to 150 C D D2 luminum Stainless steel 04 KF10VCR KF10SVCR-04 10 12 10 KF16VCR KF16SVCR-04 16 17 16 KF25VCR KF25SVCR-04 25 26 25 KF40VCR KF40SVCR-04 40 41 40 KF50VCR KF50SVCR-04 50 52 50-24 www.vacom-vacuum.com

KF Components KF Seals KF Centering rings, FKM, stainless steel 16 Temperature range -10 C to 150 C Option low-outgassing or with improved chemical resistance (see page -22) D D2 FKM FKM treated FKM vacuum baked KF10SVCR-16 KF10SVCR-BEH-16 KF10SVCR-VB-16 10 12 10 KF16SVCR-16 KF16SVCR-BEH-16 KF16SVCR-VB-16 16 17 16 KF25SVCR-16 KF25SVCR-BEH-16 KF25SVCR-VB-16 25 26 25 KF40SVCR-16 KF40SVCR-BEH-16 KF40SVCR-VB-16 40 41 40 KF50SVCR-16 KF50SVCR-BEH-16 KF50SVCR-VB-16 50 52 50 * Option: low outgassing and clean room products (= CRP) on request. KF Mesh centering rings, stainless steel 04 Temperature range NBR -10 C to 100 C Temperature range FKM -10 C to 150 C Mesh size 1 mm Wire diameter 0.2 mm KF Centering rings with sintered metal screen, stainless steel 04 D D2 NBR FKM KF16MCR1N-04 KF16MCR1V-04 16 17 14 KF25MCR1N-04 KF25MCR1V-04 25 26 2 KF40MCR1N-04 KF40MCR1V-04 40 41 8 KF50MCR1N-04 KF50MCR1V-04 50 52 48 Filtration of liquids and gases Centering ring stainless steel 0 Sintered metal stainless steel 16 Temperature range 0 C to 40 C Pore width 20 μm Pressure difference 20 mbar at 0 C www.vacom-vacuum.com D2 KF16FMCRV-0 16 17 15 KF25FMCRV-0 25 26 24 KF40FMCRV-0 40 41 9 KF50FMCRV-0 50 52 49 D -25

KF Components KF Seals KF Outer centering rings, aluminum Temperature range NBR -10 C to 100 C Temperature range FKM -10 C to 150 C D NBR FKM KF16ZRN KF16ZRV 16 2 0 KF25ZRN KF25ZRV 25 42 40 KF40ZRN KF40ZRV 40 57 55 KF50ZRN KF50ZRV 50 77 75 KF Trapped centering rings with retaining ring, NBR Temperature range -10 C to 100 C Outer centering ring aluminum Retaining ring stainless steel 04 D D2 KF16TCRN-04 16 2 0 16 KF25TCRN-04 25 42 40 25 KF40TCRN-04 40 57 55 40 KF50TCRN-04 50 77 75 50 KF Trapped centering rings with retaining ring, FKM Temperature range -10 C to 150 C Outer centering ring aluminum / PTFE Retaining ring stainless steel / PTFE D D2 lu/stainless steel 04 lu/stainless steel 16 PTFE/PTFE KF16TCRV-04 KF16TCRV-16 KF16TVCR 16 2 0 16 KF25TCRV-04 KF25TCRV-16 KF25TVCR 25 42 40 25 KF40TCRV-04 KF40TCRV-16 KF40TVCR 40 57 55 40 KF50TCRV-04 KF50TCRV-16 KF50TVCR 50 77 75 50-26 www.vacom-vacuum.com

KF Components KF Seals KF Reducing centering rings, aluminum Temperature range NBR -10 C to 100 C Temperature range FKM -10 C to 150 C 2 D D2 D NBR FKM KF10/16NRCR KF10/16VRCR 16 10 17 10 12 KF20/25NRCR KF20/25VRCR 25 20 26 20 22 KF2/40NRCR KF2/40VRCR 40 2 41 2 4 KF dapter centering rings, stainless steel 04 Temperature range NBR -10 C to 100 C Temperature range FKM -10 C to 150 C 2 D D2 D NBR FKM KF10/16SNRCR-04 KF10/16SVRCR-04 16 10 17 10 12 KF20/25SNRCR-04 KF20/25SVRCR-04 25 20 26 20 22 KF2/40SNRCR-04 KF2/40SVRCR-04 40 2 41 2 4 www.vacom-vacuum.com -27

KF Components KF Connecting elements KF Clamp chains, polyamide Temperature up to 100 C Color black Spec. resistance 1,0E15 Ohmcm Dielectric strength 26 kv/mm Chain links polyamide (5% glass fiber content) ock stainless steel and aluminum Bolt stainless steel Suitable gaskets elastomer D D2 R WH16 16 51 22 18 48 WH25 25 61 2 18 55 WH40 40 76 47 18 59 WH50 50 96 67 20 68 KF Clamp chains,aluminum alloy Temperature range up to 150 C Chain links lmgsi1 ock stainless steel Bolt stainless steel Suitable gaskets elastomer, aluminum, copper D D2 R Closing moment [Nm] X16 16 51 22 18 45 2.5 X25 25 61 2 18 50.5 X40 40 76 47 18 61 5.0 X50 50 96 67 20 7 6.0 Please note the closing torque during over pressure applications. -28 www.vacom-vacuum.com

KF Components KF Connecting elements Quick CF Clamp chains VaCFix, stainless steel Quick CF Clamp chains for quick and space-saving mounting of KF flange connection Material Suitable flanges Suitable gaskets Mounting stainless steel, non-magnetic QCF flanges KF flanges metal edge gaskets O-ring gaskets with torque wrench D D2 R Number of links SW Tightening torque [Nm] Weight [g] XS16 16 21 5 47 24 1 5 220 XS40 40 46 82 67 24 4 15 9 40 Other sizes in section Quick-CF components. Option: clean room products (= CRP) on request. Clean room compatible clamp chains require a higher tightening torque. KF Bulkhead clamps, aluminum Incl. screws BHC16 16 50 8 11 7 yes BHC25 25 60 48 11 7 yes BHC40 40 75 6 11 7 yes BHC50 50 95 8 12 7 yes BHC16K 16 50 8 11 7 no BHC25K 25 60 48 11 7 no BHC40K 40 75 6 11 7 no BHC50K 50 95 8 12 7 no D C 2 Option: clean room compatible products (= CRP) on request. Used screws: ISO4017 M5, length 16 mm (BHC16-40), length 18 mm (BHC50) www.vacom-vacuum.com -29

KF Components KF Connecting elements ISO Claw clamps, aluminum KFC 16-50 C Number of required clamps 10 45 2 16 45 2 20 55 25 55 2 71 40 71 50 91 KF Clamp rings, aluminum Temperature range -10 C to 150 C D D2 KF16C 16 62 42 16 KF25C 25 72 52 16 KF40C 40 90 70 16 KF50C 50 11 90 20 Option: clean room products (= CRP) on request. KF Clamp rings, stainless steel Temperature range -10 C to 125 C D KF16CR 16 50 KF25CR 25 6 KF40CR 40 76 KF50CR 50 100 KF Clamp rings for metal seals, aluminum Temperature range up to 200 C D KF10/16MSC 16 52 18 KF20/25MSC 25 75 20 KF2/40MSC 40 90 2 KF50MSC 50 115 28-0 www.vacom-vacuum.com

KF Components KF Connecting elements KF Clamp rings for metal seals, stainless steel 04 D2 KF10/16MSC-04 16 55 22 18 KF20/25MSC-04 25 66,5 2 18 KF2/40MSC-04 40 82,5 47 18 KF50MSC-04 50 96 65 21 Option: clean room products (= CRP) on request. D www.vacom-vacuum.com -1

ISO Components ISO Flanges ISO-K Clow clamp blank flanges, stainless steel Stainless steel 04 Stainless steel 16* ISO6BK-04 ISO6BK-16 6 95 70 12 ISO80BK-04 ISO80BK-16 80 110 8 12 ISO100BK-04 ISO100BK-16 100 10 102 12 ISO160BK-04 ISO160BK-16 160 180 15 12 ISO200BK-04 ISO200BK-16 200 240 21 12 ISO250BK-04 ISO250BK-16 250 290 261 12 ISO20BK-04 ISO20BK-16 20 70 18 17 ISO400BK-04-400 450 400 17 ISO500BK-04-500 550 501 17 ISO60BK-04-60 690 651 22 * Option: clean room products (= CRP) made of stainless steel 16 on request. ISO Blank flanges, conical, stainless steel 04 D KF6BS-04 6 87 70 5 KF80BS-04 80 114 8 12 KF100BS-04 100 14 102 12 With ISO and Quick CF clamp chains mountable D ISO-F Blank flanges, stainless steel D D2 ISO6FBK-04 6 10 110 9 12 ISO80FBK-04 80 145 125 9 12 ISO100FBK-04 100 165 145 9 12 ISO160FBK-04 160 225 200 11 16 ISO200FBK-04 200 285 260 11 16 ISO250FBK-04 250 5 10 11 16 ISO20FBK-04 20 425 95 14 20 Option: stainless steel 16. Option: clean room products (= CRP) made of stainless steel 16 on request. -6 www.vacom-vacuum.com

ISO Components ISO Flanges ISO-F Chamber flanges, stainless steel Flange stainless steel 16 O-ring stainless steel Screws DIN 7964KE, 2 Temperature range -10 C to 150 C pplication wall mounting D M ISOF40KM-16 40 100 80 12 M6 ISOF6KM-16 6 10 110 12 M8 ISOF100KM-16 100 165 145 12 M8 ISOF160KM-16 160 225 200 12 M10 ISO-K Welding flanges, stainless steel D D2 R 2 Stainless steel 04 Stainless steel 16 ISO6B70-04 ISO6B70-16 6 95 70 66 70 12 8 ISO6B76-04 ISO6B76-16 6 95 70 70 76 12 6 ISO80B85-04 ISO80B85-16 80 110 8 81 85 12 8 ISO80B89-04 ISO80B89-16 80 110 8 8 89 12 6 ISO100B104-04 ISO100B104-16 100 10 102 100 104 12 8 ISO100B108-04 ISO100B108-16 100 10 102 102 108 12 6 ISO160B154-04 ISO160B154-16 160 180 15 150 154 12 8 ISO160B159-04 ISO160B159-16 160 180 15 15 159 12 6 ISO200B204-04 ISO200B204-16 200 240 21 200 204 12 8 ISO200B219-04 ISO200B219-16 200 240 21 21 219 12 6 ISO250B254-04 ISO250B254-16 250 290 261 250 254 12 8 ISO250B267-04 ISO250B267-16 250 290 261 261 267 12 6 ISO20B24-04 ISO20B24-16 20 70 18 18 24 17 10 ISO400B406-04 - 400 450 400 400 406 17 10 ISO500B508-04 - 500 550 501 501 508 17 10 * Option: clean room products (= CRP) made of stainless steel 16 on request. Welding flanges made of stainless steel 04 on request. www.vacom-vacuum.com -7

ISO Components ISO Flanges ISO-K Bored flanges with reinforced tubulation, stainless steel 16 Reinforced ISO-K Flanges for welding to components, to reduce welding distortion ISO160S154-16 160 180 15 150 154 12 12 20 ISO200S204-16 200 240 21 200 204 12 12 20 ISO250S254-16 250 290 261 250 254 12 12 20 ISO20S24-16 20 70 18 18 24 17 17 25 D D2 R 2 Option: clean room products (= CRP) made of stainless steel 16 on request. ISO Bored flanges, conical, stainless steel 04 R KF6B6-04 6 87 70 6 5 KF80B76-04 80 114 8 76 12 KF100B102-04 100 14 102 102 12 With ISO and Quick CF clamp chains mountable D ISO-F Bored flanges, stainless steel 04 D D2 D R ISO6F70-04 6 10 110 9 70 70 12 ISO80F85-04 80 145 125 9 8 85 12 ISO100F104-04 100 165 145 9 102 104 12 ISO160F154-04 160 225 200 11 15 154 16 ISO200F204-04 200 285 260 11 21 204 16 ISO250F254-04 250 5 10 11 261 254 16 ISO20F24-04 20 425 95 14 18 24 20 Option: stainless steel 16. Option: clean room products (= CRP) made of stainless steel 16 on request. -8 www.vacom-vacuum.com

ISO Components ISO Flanges ISO Rotatable bolt rings with retaining ring, stainless steel 04 D2 D ISO6R-04 6 10 110 9 95 12 ISO80R-04 80 145 125 9 110 12 ISO100R-04 100 165 145 9 10 12 ISO160R-04 160 225 200 11 180 16 ISO200R-04 200 285 260 11 240 16 ISO250R-04 250 5 10 11 290 16 ISO20R-04 20 425 95 14 71 20 Option: clean room products (= CRP) on request. D ISO Replacement retaining rings for rotatable bolt rings, stainless steel 04 ccessories for ISO6RR-04 ISO6R ISO80RR-04 ISO80R ISO100RR-04 ISO100R ISO160RR-04 5 ISO160R ISO200RR-04 5 ISO200R ISO250RR-04 5 ISO250R ISO20RR-04 5 ISO20R Option: clean room products (= CRP) on request. ISO-K-F Flange caps, plastics Pack size ISO6CP 6 10 ISO80CP 80 10 ISO100CP 100 10 ISO160CP 160 10 ISO200CP 200 1 ISO250CP 250 1 ISO20CP 20 1 www.vacom-vacuum.com -9

ISO Components ISO Components ISO Tube, 1m length, stainless steel Delivery conditions according to DIN EN 10217-7 engthwise welded Weld seam factor 1.0 Inside and outside pickled RI R St. steel 04 St. steel 16 R04-70x2.0-1 R16-70x2.0-1 6 66 70 R04-85x2.0-1 R16-85x2.0-1 80 81 85 R04-104x2.0-1 R16-104x2.0-1 100 100 104 R04-154x2.0-1 R16-154x2.0-1 160 150 154 R04-204x2.0-1 R16-204x2.0-1 200 200 204 Other lengths on request. Quality according to DIN 11850/11866 on request Surface finish inside Ra < 0.8 μm weld seam area Ra < 1.6 μm ISO-K Claw clamp tubulations (half nipples), stainless steel ISO-K Straight connectors (full nipples), stainless steel 16 R ISO6TU-100-76-16 6 95 76 ISO6TU-100-70-16 6 95 70 ISO80TU-100-89-16 80 110 89 ISO80TU-100-85-16 80 110 85 ISO100TU-100-108-16 100 10 108 ISO100TU-100-104-16 100 10 104 ISO160TU-100-159-16 160 180 159 ISO160TU-100-154-16 160 180 154 ISO200TU-100-219-16 200 240 219 ISO200TU-100-204-16 200 240 204 ISO250TU-100-254-16 250 290 254 ISO20TU-100-24-16 20 70 24 Option: clean room products (= CRP) made of stainless steel 16 on request. Other lengths and tube sizes on request. Option: stainless steel 04. ISO6SC-16 6 95 ISO80SC-16 80 110 ISO100SC-16 100 10 ISO160SC-16 160 180 ISO200SC-16 200 240 ISO250SC-16 250 290 Option: clean room products (= CRP) on request. Other lengths and stainless steel 04 on request. -40 www.vacom-vacuum.com

ISO Components ISO Components ISO-K Straight connectors with lateral KF ports, stainless steel 16 S2 S ISO6SC4016K-16 6 95 80 60 88 ISO100SC4016K-16 100 10 75 75 108 ISO160SC4016K-16 160 180 100 100 18 Option: clean room products (= CRP) made of stainless steel 16 on request. ISO-K Tubulated reducing adapters, conical, stainless steel 04 2 2 D D2 ISO80R6/CO-04 80 6 110 95 8 70 ISO100R6/CO-04 100 6 10 95 102 70 ISO100R80/CO-04 100 80 10 110 102 8 ISO160R6/CO-04 160 6 180 95 15 70 ISO160R100/CO-04 160 100 180 10 15 102 Option: clean room products (= CRP) made of stainless steel 16 on request. ISO-K Tubulated reducing adapters, stainless steel Stainless steel 04 Stainless steel 16* ISO100R6-04 ISO100R6-16 100 6 10 95 50 ISO160R6-04 ISO160R6-16 160 6 180 95 50 ISO160R100-04 ISO160R100-16 160 100 180 10 50 ISO200R100-04 ISO200R100-16 200 100 240 10 90 ISO250R100-04 ISO250R100-16 250 100 290 10 90 * Option: clean room products (= CRP) made of stainless steel 16 on request. Other lengths on request. 2 2 www.vacom-vacuum.com -41

ISO Components ISO Components ISO-K to KF dapters, stainless steel Stainless steel 04 Stainless steel 16* SK06025-04 SK06025-16 6 25 95 40 SK06040-04 SK06040-16 6 40 95 55 SK06050-04 SK06050-16 6 50 95 75 SK100040-04 SK100040-16 100 40 10 55 * Option: clean room products (= CRP) made of stainless steel 16 on request. Other lengths on request. ISO-K to KF dapters, conical, stainless steel 04 2 2 2 2 D D2 SK06040/CO-04 6 40 95 55 70 2 SK06050/CO-04 6 50 95 75 70 52 SK080040/CO-04 80 40 95 55 8 9 SK080050/CO-04 80 50 95 75 8 51 SK100040/CO-04 100 40 10 55 102 9 SK100050/CO-04 100 50 10 75 102 52 Option: clean room products (= CRP) made of stainless steel 16 on request. ISO-K to CF dapters, stainless steel 04 2 2 S0606-04 6 6 114 95 S10006-04 100 6 152 95 S100100-04 100 100 152 10 S160100-04 160 100 20 10 S160160-04 160 160 20 180 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other lengths on request. Option: stainless steel 16. -42 www.vacom-vacuum.com

ISO Components ISO Components ISO-K Elbows 90, stainless steel Stainless steel 04 Stainless steel 16* Design ISO6E-04 ISO6E-16 6 95 88 swept ISO80E-04 ISO80E-16 80 110 98 swept ISO100E-04 ISO100E-16 100 10 108 swept ISO160E-04 ISO160E-16 160 180 18 mitred ISO200E-04 ISO200E-16 200 240 178 mitred * Option: clean room products (= CRP) made of stainless steel 16 on request. S ISO-K Tees, stainless steel Stainless steel 04 Stainless steel 16* ISO6TE-04 ISO6TE-16 6 95 176 88 ISO80TE-04 ISO80TE-16 80 110 196 98 ISO100TE-04 ISO100TE-16 100 10 216 108 ISO160TE-04 ISO160TE-16 160 180 276 18 ISO200TE-04 ISO200TE-16 200 240 56 178 ISO250TE-04 ISO250TE-16 250 290 416 208 * Option: clean room products (= CRP) made of stainless steel 16 on request. S www.vacom-vacuum.com -4

ISO Components ISO Components ISO-K Unequal tees, stainless steel Stainless steel 04 Stainless steel 16* ISO100TE6-04 ISO100TE6-16 100 6 10 95 216 107 ISO160TE6-04 ISO160TE6-16 160 6 180 95 276 10 ISO160TE100-04 ISO160TE100-16 160 100 180 10 276 11 * Option: clean room products (= CRP) made of stainless steel 16 on request. 2 2 S ISO-K to KF Reducing tees, stainless steel Stainless steel 04 Stainless steel 16* ISO6TE25-04 ISO6TE25-16 6 25 95 40 204 79 ISO6TE40-04 ISO6TE40-16 6 40 95 55 204 76 ISO100TE40-04 ISO100TE40-16 100 40 10 75 260 111 * Option: clean room products (= CRP) made of stainless steel 16 on request. 2 2 S -44 www.vacom-vacuum.com

ISO Components ISO Components ISO-K 4-way crosses, stainless steel Stainless steel 04 Stainless steel 16* ISO6X-04 ISO6X-16 6 95 176 88 ISO80X-04 ISO80X-16 80 110 196 98 ISO100X-04 ISO100X-16 100 10 216 108 ISO160X-04 ISO160X-16 160 180 276 18 ISO200X-04 ISO200X-16 200 240 56 178 ISO250X-04 ISO250X-16 250 290 416 208 * Option: clean room products (= CRP) made of stainless steel 16 on request. S ISO-K Unequal 4-way crosses, stainless steel Stainless steel 04 Stainless steel 16* ISO100X6-04 ISO100X6-16 100 6 10 95 114 108 ISO160X6-04 ISO160X6-16 160 6 180 95 260 18 ISO160X100-04 ISO160X100-16 160 100 180 10 262 18 * Option: clean room products (= CRP) made of stainless steel 16 on request. 2 2 S www.vacom-vacuum.com -45

ISO Components ISO Components ISO-K to KF Reducing crosses, stainless steel Stainless steel 04 Stainless steel 16* ISO6X25-04 ISO6X25-16 6 25 95 40 204 58 ISO6X40-04 ISO6X40-16 6 40 95 55 204 76 ISO100X40-04 ISO100X40-16 100 40 10 55 260 95 * Option: clean room products (= CRP) made of stainless steel 16 on request. 2 2 S ISO-K 6-way crosses, stainless steel S ISO6XX-16 6 95 176 88 ISO80XX-16 80 110 196 98 ISO100XX-16 100 10 216 108 ISO160XX-16 160 180 276 18 ISO200XX-16 200 240 56 178 ISO250XX-16 250 290 416 208 Option: clean room products (= CRP) made of stainless steel 16 on request. Option: stainless steel 04. -46 www.vacom-vacuum.com

ISO Components ISO Flexible hoses ISO-K Flexible hoses, stainless steel 04 Flexible hoses of stainless steel for flexible connection of ISO-K components. Material stainless steel 04 Dynamic bending radii acc. to EN ISO 1080 Base load 10,000 cycles Bending radius ISO6FX25-04 6 95 250 200 ISO6FX50-04 6 95 500 200 ISO6FX75-04 6 95 750 200 ISO6FX100-04 6 95 1000 200 ISO80FX25-04 80 110 250 240 ISO80FX50-04 80 110 500 240 ISO80FX75-04 80 110 750 240 ISO80FX100-04 80 110 1000 240 ISO100FX25-04 100 10 250 290 ISO100FX50-04 100 10 500 290 ISO100FX75-04 100 10 750 290 ISO100FX100-04 100 10 1000 290 ISO160FX25-04 160 180 250 400 ISO160FX50-04 160 180 500 400 ISO160FX75-04 160 180 750 400 ISO160FX100-04 160 180 1000 400 Option: stainless steel 16. Option: clean room products (= CRP) made of stainless steel 16 on request. ISO-K Hydroformed bellows connectors, stainless steel 04 Flange stainless steel 04 Bellow st. steel 16 / 16Ti Tolerances ±5 mm min ISO6FXB-04 6 95 112 10 ISO80FXB-04 80 110 112 10 ISO100FXB-04 100 10 112 10 ISO160FXB-04 160 180 192 220 ISO200FXB-04 200 240 180 200 ISO250FXB-04 250 290 180 200 ISO20FXB-04 20 70 155 200 Option: stainless steel 16. Option: clean room products (= CRP) made of stainless steel 16 on request. www.vacom-vacuum.com -47

ISO Components ISO Viewports Viewports with removable O-ring seal on ISO-K Flange, flange mounting with clamps He leak rate < 1.0E-9 mbar l/s Window material borosilicate glass (Borofloat ) or fused silica (Silux ) Flange material stainless steel 04 Transmission range ca. 0.4 m to 2 m (Borofloat ), ca. 0. m to m (Silux ) Temperature range up to 150 C (aluminum frame up to 120 C) Coating anti-reflective coating possible Borosilicate glass Quartz glass VPISOK6B-E-Z VPISOK6Q-E-Z 6 98 70 14.8 VPISOK100B-E-Z VPISOK100Q-E-Z 100 1 102 1 5 VPISOK160B-E-Z VPISOK160Q-E-Z 160 18 15 17 9 VPISOK200B-E-Z VPISOK200Q-E-Z 200 24 200 17 9 Option: flange, stainless steel 16. Viewports with removable O-ring seal on ISO-K flange, wall mounting with clamps D 2 He leak rate < 1.0E-9 mbar l/s Window material borosilicate glass (Borofloat ) or fused silica (Silux ) Flange material stainless steel 04 Transmission range ca. 0.4 m to 2 m (Borofloat ), ca. 0. m to m (Silux ) Temperature range up to 150 C (aluminum frame up to 120 C) Coating anti-reflective coating possible Borosilicate glass Quartz glass VPISOK6B-E VPISOK6Q-E 6 95 70 12.8 VPISOK100B-E VPISOK100Q-E 100 10 102 12 5 VPISOK160B-E VPISOK160Q-E 160 180 15 15 9 VPISOK200B-E VPISOK200Q-E 200 240 200 19 1 Option: flange, stainless steel 16. D 2-48 www.vacom-vacuum.com

ISO Components ISO Viewports Viewports with removable O-ring seal on ISO-F flange, wall mounting with screws He leak rate Window material Flange material Transmission range < 1.0E-9 mbar l/s borosilicate glass (Borofloat ) or fused silica (Silux ) aluminum, anodized ca. 0.4 m to 2 m (Borofloat ), ca. 0. m to m (Silux ) Temperature range up to 150 C (aluminum frame up to 120 C) Coating anti-reflective coating possible D 2 Borosilicate glass Quartz glass VPISOF6B-E VPISOF6Q-E 6 10 70 12.8 VPISOF100B-E VPISOF100Q-E 100 165 102 12 5 VPISOF160B-E VPISOF160Q-E 160 225 15 16 9 VPISOF200B-E VPISOF200Q-E 200 285 200 16 9 Viewports with permanent joint, borosilicate glass He leak rate < 1.0E-10 mbar l/s Window material borosilicate glass (Corning 7056) Flange material stainless steel 04 Frame material Kovar Transmission range ca. 0.4 m to 2 m Temperature range up to 150 C Max. heating and cooling K/min rate D 2 VPISOK6B- 6 95 49 14.5 VPISOK100B- 100 10 65 16.5 VPISOK160B- 160 180 90 18 6 VPISOK200B- 200 240 15 18 8 VPISOK250B- 250 290 15 18 8 www.vacom-vacuum.com -49

ISO Components ISO Seals ISO O-rings, elastomer Temperature range -10 C to 150 C D FKM treated FKM vac. baked* ISO6VR-BEH ISO6VR-VB 6 76 5. ISO80VR-BEH ISO80VR-VB 80 88 5. ISO100VR-BEH ISO100VR-VB 100 107 5. ISO160VR-BEH ISO160VR-VB 160 158 5. ISO200VR-BEH ISO200VR-VB 200 209 5. ISO250VR-BEH ISO250VR-VB 250 25 5. ISO20VR-BEH ISO20VR-VB 20 0 7 * Option: low outgassing and clean room products (= CRP) on request. Chemically resistant ISO O-rings, treated, FKM The c irrevers have a Vacuum baked ISO O-rings, FKM The rat and the order to -50 www.vacom-vacuum.com

ISO Components ISO Seals ISO O-rings, elastomer O-rings for ISO centering rings. Temperature range NBR -10 C to 100 C Temperature range FKM -10 C to 150 C Temperature range MVQ -55 C to 200 C D NBR FKM MVQ ISO6NR ISO6VR ISO6SR 6 76 5. ISO80NR ISO80VR ISO80SR 80 88 5. ISO100NR ISO100VR ISO100SR 100 107 5. ISO160NR ISO160VR - 160 158 5. ISO200NR ISO200VR - 200 209 5. ISO250NR ISO250VR - 250 25 5. ISO20NR ISO20VR - 20 0* 7 * Dimensions can vary ISO Centering rings, NBR Temperature range -10 C to 100 C D D2 2 luminum Stainless steel ISO6NCR ISO6SNCR-04 6 70 68 8.9 5. ISO80NCR ISO80SNCR-04 80 8 81 8.9 5. ISO100NCR ISO100SNCR-04 100 102 100 8.9 5. ISO160NCR ISO160SNCR-04 160 15 150 8.9 5. ISO200NCR ISO200SNCR-04 200 21 210 8.9 5. ISO250NCR ISO250SNCR-04 250 261 258 8.9 5. ISO20NCR ISO20SNCR-04 20 18* 15* 14 5.6 7 * Dimensions can vary arger nominal diameters on request. www.vacom-vacuum.com -51

ISO Components ISO Seals ISO Outer ring, aluminum Outer ring, aluminum profile, with stainless steel spring to fix O-rings on ISO centering rings. ISO6SCRT/01 6 94 ISO80SCRT/01 80 109 ISO100SCRT/01 100 128 ISO160SCRT/01 160 179 ISO200SCRT/01 200 29 ISO250SCRT/01 250 287 ISO Centering rings, stainless steel 16 ISO Centering rings, stainless steel, without O-ring. D D2 2 ISO6CRS-16 6 70 68 8.9 ISO100CRS-16 100 102 100 8.9 ISO160CRS-16 160 15 150 8.9 ISO200CRS-16 200 21 210 8.9 ISO250CRS-16 250 261 258 8.9 ISO20CRS-16 20 18* 15* 14 5.6 * Dimensions can vary Option: clean room products (= CRP) made of stainless steel 16 on request. ISO Centering rings, stainless steel 16, unslotted ISO Centering rings, stainless steel, unslotted, without O-ring. D D2 2 ISO6CRSU-16 6 70 68 8.9 ISO80CRSU-16 80 8 81 8.9 ISO100CRSU-16 100 102 100 8.9 ISO160CRSU-16 160 15 150 8.9 Option: clean room products (= CRP) made of stainless steel 16 on request. -52 www.vacom-vacuum.com

ISO Components ISO Seals ISO Centering rings, FKM Temperature range -10 C to 150 C D D2 2 luminum Stainless steel 04 ISO6VCR ISO6SVCR-04 6 70 68 8.9 5. ISO80VCR ISO80SVCR-04 80 8 81 8.9 5. ISO100VCR ISO100SVCR-04 100 102 100 8.9 5. ISO160VCR ISO160SVCR-04 160 15 150 8.9 5. ISO200VCR ISO200SVCR-04 200 21 210 8.9 5. ISO250VCR ISO250SVCR-04 250 261 258 8.9 5. ISO20VCR ISO20SVCR-04 20 18* 15* 14 5.6 7 * Dimensions can vary arger nominal diameters on request. ISO Centering rings, FKM, stainless steel 16 Temperature range -10 C to 150 C D D2 2 FKM* FKM treated FKM vacuum baked* ISO6SVCR-16 ISO6SVCR-BEH-16 ISO6SVCR-VB-16 6 70 68 8.9 5. ISO80SVCR-16 ISO80SVCR-BEH-16 ISO80SVCR-VB-16 80 8 81 8.9 5. ISO100SVCR-16 ISO100SVCR-BEH-16 ISO100SVCR-VB-16 100 102 100 8.9 5. ISO160SVCR-16 ISO160SVCR-BEH-16 ISO160SVCR-VB-16 160 15 150 8.9 5. ISO200SVCR-16 ISO200SVCR-BEH-16 ISO200SVCR-VB-16 200 21 210 8.9 5. ISO250SVCR-16 ISO250SVCR-BEH-16 ISO250SVCR-VB-16 250 261 258 8.9 5. ISO20SVCR-16 ISO20SVCR-BEH-16 ISO20SVCR-VB-16 20 18* 15* 14 5.6 7 * Option: low outgassing and clean room products (= CRP) on request. * Dimensions can vary www.vacom-vacuum.com -5

ISO Components ISO Seals ISO Centering rings with outer ring, NBR Temperature range -10 C to 100 C D D2 2 lu/lu lu/stainless steel ISO6NCRT ISO6SNCRT-04 6 94 70 8.9 5. ISO80NCRT ISO80SNCRT-04 80 109 8 8.9 5. ISO100NCRT ISO100SNCRT-04 100 128 102 8.9 5. ISO160NCRT ISO160SNCRT-04 160 179 15 8.9 5. ISO200NCRT ISO200SNCRT-04 200 29 21 8.9 5. ISO250NCRT ISO250SNCRT-04 250 287 261 8.9 5. ISO20NCRT ISO20SNCRT-04 20 58* 18* 14 5.6 7 * Dimensions can vary arger nominal diameters on request. ISO Centering rings with outer ring, FKM Temperature range -10 C to 150 C D D2 2 lu/lu lu/stainless steel 04 lu/stainless steel 16 ISO6VCRT ISO6SVCRT-04 ISO6SVCRT-16 6 94 70 8.9 5. ISO80VCRT ISO80SVCRT-04 ISO80SVCRT-16 80 109 8 8.9 5. ISO100VCRT ISO100SVCRT-04 ISO100SVCRT-16 100 128 102 8.9 5. ISO160VCRT ISO160SVCRT-04 ISO160SVCRT-16 160 179 15 8.9 5. ISO200VCRT ISO200SVCRT-04 ISO200SVCRT-16 200 29 21 8.9 5. ISO250VCRT ISO250SVCRT-04 ISO250SVCRT-16 250 287 261 8.9 5. ISO20VCRT ISO20SVCRT-04 ISO20SVCRT-16 20 58 18 14 5.6 7 ISO400VCRT ISO400SVCRT-04 ISO400SVCRT-16 400 446 400 14 5.6 7 * Dimensions can vary -54 www.vacom-vacuum.com

ISO Components ISO Seals ISO Mesh centering rings, stainless steel, FKM Temperature range -10 C to 150 C Mesh size MCRV 4 mm Mesh size MCR1V 1 mm Wire diameter MCRV 0.9 mm Wire diameter MCR1V 0. mm D MCRV MCR1V ISO6MCRV ISO6MCR1V 6 70 ISO100MCRV ISO100MCR1V 100 102 ISO160MCRV ISO160MCR1V 160 15 ISO Connecting elements ISO Clamp chains, aluminum Temperature range up to 150 C Chain links lmgsi1 ock stainless steel Bolt stainless steel Suitable flanges conical ISO flanges Suitable gaskets elastomer D D2 R X6 6 112 77 78 20 X80 80 144 10 107 4 X100 100 164 12 11 4 www.vacom-vacuum.com -55

ISO Components ISO Connecting elements QCF Clamp chains VaCFix, stainless steel Material Suitable flanges Suitable gaskets Mounting stainless steel, non-magnetic QCF flanges conical ISO flanges metal edge gaskets O-ring gaskets with torque wrench XS6 XS100V D D2 R Number of links Tightening torque [Nm] Weight [g] XS6 6 7 121 89 28 5 19 2 980 XS100V 100 117 176 117 41 6 24 8 2540 SW Other sizes in section Quick-CF components. Option: clean room products (= CRP) on request. Clean room compatible clamp chains require a higher tightening torque. Set of hex head screws, for ISO flanges with through-holes, stainless steel Screw Nut Washer ISO 4014, 4017, 2 ISO 402, 2 ISO 7089, 2 Number of drilling holes Size of screws FK-ISO6 6 4 M8 x 40 mm FK-ISO80 80 8 M8 x 40 mm FK-ISO100 100 8 M8 x 40 mm FK-ISO160 160 8 M10 x 50 mm FK-ISO200 200 12 M10 x 50 mm FK-ISO250 250 12 M10 x 50 mm FK-ISO20 20 12 M12 x 60 mm -56 www.vacom-vacuum.com

ISO Components ISO Connecting elements ISO Double claw clamps, aluminum Double claw clamps usable with centering ring. max min ISO6/100DC 6-100 M8 50 28 22 ISO160/250DC 160-250 M10 51 4 2 ISO20/500DC 20-500 M12 67 50 6 M ISO Double claw clamps Double claw clamps usable with centering ring. Mild steel, zinc plated Stainless steel* ISO6/250DCMS ISO6/250DCSS 6-250 M10 60 27 16 ISO20/500DCMS ISO20/500DCSS 20-500 M12 76 7 27 ISO60DCMS - 60 M12 86 46 6 * Option: clean room products (= CRP) on request. M max min www.vacom-vacuum.com -57

ISO Components ISO Connecting elements ISO Claw clamps Claw clamps for tapped holes usable with centering ring. luminum Mild steel, zinc plated Stainless steel* ISO6/100WC ISO6/100WCMS ISO6/100WCSS 6-100 M8 5 2 14 ISO160/250WC ISO160/250WCMS ISO160/250WCSS 160-250 M10 5 2 14 ISO20/500WC ISO20/500WCMS ISO20/500WCSS 20-500 M12 50 0 20 - ISO60WCMS ISO60WCSS 60 M12 59 40 25 * Option: clean room products (= CRP) on request. M 2 ISO Claw clamps, with nuts Claw clamps for through bolt holes usable with centering ring. luminum Mild steel, zinc plated ISO6/100WCN ISO6/100WCN 6-100 M8 45 2 14 ISO160/250WCN ISO160/250WCN 160-250 M10 50 2 14 ISO20/500WCN ISO20/500WCN 20-500 M12 60 0 20 M 2 ISO Claw clamps, mild steel, zinc plated Claw clamps for ground plates usable with O-ring without centering ring. ISO6/100WCO 6-100 M8 0 19 10 ISO160/250WCO 150-250 M10 5 19 10 ISO20/500WCO 20-500 M12 45 0 15 M 2-58 www.vacom-vacuum.com

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CF Components CF Flanges CF Blank flanges, fixed, stainless steel Stainless steel 04 Stainless steel 16 Stainless steel 16N-ESR - F10-16 - 10 25. 6 - F16-16 F16-16NS 16 4 4. 7 F40-04 F40-16 F40-16NS 40 70 6.7 1 F6-04 F6-16 F6-16NS 6 114 8.4 17 F100-04 F100-16 F100-16NS 100 152 8.4 20 F160-04 F160-16 F160-16NS 160 20 8.4 22 F200-04 F200-16 F200-16NS 200 254 8.4 24 F250-04 F250-16 F250-16NS 250 05 8.4 25 F00-04 F00-16 F00-16NS 00 68 10.8 28 F50-04 F50-16 F50-16NS 50 419 10.8 28 F400-04 F400-16 F400-16NS 400 470 10.8 28 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Flanges according to STM E274/E274M-10 on request. Option: with tapped holes Flanges made of stainless steel 04 on request. Quick CF Blank flanges, conical, stainless steel D Stainless steel 04 Stainless steel 16 Stainless steel 16N-ESR QCF16-04 QCF16-16 QCF16-16NS 16 0 6.5 QCF40-04 QCF40-16 QCF40-16NS 40 55 6.5 QCF6-04 QCF6-16 QCF6-16NS 6 87 7.5 QCF100-04 QCF100-16 QCF100-16NS 100 14 14 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Flanges made of stainless steel 04 on request. -62 www.vacom-vacuum.com

CF Components CF Flanges CF Blank flanges, rotatable, stainless steel Stainless steel 04 Stainless steel 16 Stainless steel 16N-ESR - F10R-16-10 25. 6 - F16R-16 F16R-16NS 16 4 4. 7 F40R-04 F40R-16 F40R-16NS 40 70 6.7 1 F6R-04 F6R-16 F6R-16NS 6 114 8.4 17 F100R-04 F100R-16 F100R-16NS 100 152 8.4 20 F160R-04 F160R-16 F160R-16NS 160 20 8.4 22 F200R-04 F200R-16 F200R-16NS 200 25 8.4 24 F250R-04 F250R-16 F250R-16NS 250 05 8.4 25 F00R-04 F00R-16 F00R-16NS 00 68 10.8 28 F50R-04 F50R-16 F50R-16NS 50 419 10.8 28 F400R-04 F400R-16 F400R-16NS 400 470 10.8 28 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Flanges according to STM E274/E274M-10 on request. Option: with tapped holes Flanges made of stainless steel 04 on request. CF Double sided blank flanges, stainless steel D F16DB-04 F16DB-16NS 16 4 7 F40DB-04 F40DB-16NS 40 70 1 F6DB-04 F6DB-16NS 6 114 17 F100DB-04 F100DB-16NS 100 152 20 F160DB-04 F160DB-16NS 160 20 22 St. steel 04 St. steel 16N-ESR Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Flanges made of stainless steel 04 on request. www.vacom-vacuum.com -6

CF Components CF Flanges CF Bored flanges, fixed, stainless steel Stainless steel 04 Stainless steel 16 Stainless steel 16N-ESR - F10B10-16 - 10 25 10 9 6 - F16B19-16 F16B19-16NS 16 4 19 16 7.6 4.8 F40B41-04 F40B41-16 F40B41-16NS 40 70 41 8 1 4.8 F40B42-04 F40B42-16 F40B42-16NS 40 70 42 8 1 4.8 F6B6-04 F6B6-16 F6B6-16NS 6 114 6 61 17 7.9 F6B70-04 F6B70-16 F6B70-16NS 6 114 70 66 17 7.9 F100B101-04 F100B101-16 F100B101-16NS 100 152 101 98 20 9.5 F100B104-04 F100B104-16 F100B104-16NS 100 152 104 100 20 9.5 F160B152-04 F160B152-16 F160B152-16NS 160 20 152 149 22 9.5 F160B154-04 F160B154-16 F160B154-16NS 160 20 154 150 22 9.5 F200B204-04 F200B204-16 F200B204-16NS 200 254 204 200 25 9.5 F250B254-04 F250B254-16 F250B254-16NS 250 05 254 250 25 12.7 F00B06-04 F00B06-16 F00B06-16NS 00 68 06 00 28 12.7 F50B56-04 F50B56-16 F50B56-16NS 50 419 56 50 28 12.7 F400B406-04 F400B406-16 F400B406-16NS 400 470 410 406 28 12.7 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Flanges according to STM E274/E274M-10 on request. Option: with tapped holes Flanges made of stainless steel 04 on request. Quick CF Bored flanges, conical, stainless steel R D 2 Stainless steel 04 Stainless steel 16 Stainless steel 16N-ESR QCF16B19-04 QCF16B19-16 QCF16B19-16NS 16 0 16 19 10 8 QCF40B8-04 QCF40B8-16 QCF40B8-16NS 40 55 5 8 10 8 QCF40B41-04 QCF40B41-16 QCF40B41-16NS 40 55 8 41 10 8 - - QCF6B6-16NS 6 87 61 6 11 10 - - QCF6B70-16NS 6 87 6 70 11 10 QCF100B101-04 QCF100B101-16 QCF100B101-16NS 100 14 96 101 19 17 QCF100B104-04 QCF100B104-16 QCF100B104-16NS 100 14 100 104 19 17 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Flanges made of stainless steel 04 on request. D R 2-64 www.vacom-vacuum.com

CF Components CF Flanges CF Bored flanges, rotatable, stainless steel Stainless steel 04 Stainless steel 16 Stainless steel 16N-ESR - F10RB10-16 - 10 25 10 9 6 - F16RB19-16 F16RB19-16NS 16 4 19 16 7 4.8 F40RB41-04 F40RB41-16 F40RB41-16NS 40 70 41 8 1 4.8 F40RB42-04 F40RB42-16 F40RB42-16NS 40 70 42 8 1 4.8 F6RB6-04 F6RB6-16 F6RB6-16NS 6 114 6 61 17 7.9 F6RB70-04 F6RB70-16 F6RB70-16NS 6 114 70 66 17 7.9 F100RB101-04 F100RB101-16 F100RB101-16NS 100 152 101 98 20 9.5 F100RB104-04 F100RB104-16 F100RB104-16NS 100 152 104 100 20 9.5 F160RB152-04 F160RB152-16 F160RB152-16NS 160 20 152 149 22 9.5 F160RB154-04 F160RB154-16 F160RB154-16NS 160 20 154 150 22 9.5 F200RB204-04 F200RB204-16 F200RB204-16NS 200 25 204 200 25 9.5 F250RB254-04 F250RB254-16 F250RB254-16NS 250 05 254 250 25 12.7 F00RB06-04 F00RB06-16 F00RB06-16NS 00 68 06 00 28 12.7 F50RB56-04 F50RB56-16 F50RB56-16NS 50 419 56 50 28 12.7 F400RB406-04 F400RB406-16 F400RB406-16NS 400 470 410 406 28 12.7 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Flanges according to STM E274/E274M-10 on request. Quick CF flanges can you find on page -92 Option: with tapped holes Flanges made of stainless steel 04 on request. CF Double sided bored flanges, stainless steel R D 2 F16D16-04 F16D16-16NS 16 4 1 7 F40D8-04 F40D8-16NS 40 70 8 1 F6D66-04 F6D66-16NS 6 114 66 17 F100D100-04 F100D100-16NS 100152100 20 F160D150-04 F160D150-16NS 16020150 22 St. steel 04 St. steel 16N-ESR Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Option: radial connections Flanges made of stainless steel 04 on request. D www.vacom-vacuum.com -65

CF Components CF Flanges CF Welded flanges, stainless steel Flanges with tapped holes for flush welding to tubes of the same diameter F16WF16-16 16 41 16 12 F40WF8-16 40 70 8 21 F6WF66-16 6 114 66 20 F100WF100-16 100 154 100 20 F160WF160-04 160 204 160 20 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Flanges made of stainless steel 04 on request. D CF Reducer flanges, stainless steel Orientation of bolt circle according to ISO 980-2:2008 Stainless steel Stainlees steel 16N-ESR Z016010-16 - 16 10 4 9 M 10 Z040010-04 - 40 10 70 9 M4 1 Z040016-04 Z040016-16NS 40 16 70 16 M4 1 Z06016-04 Z06016-16NS 6 16 114 16 M4 17 Z06040-04 Z06040-16NS 6 40 114 8 M6 17 Z100040-04 Z100040-16NS 100 40 152 8 M6 20 Z10006-04 Z10006-16NS 100 6 152 66 M8 20 Z160040-04 Z160040-16NS 160 40 20 8 M6 22 Z16006-04 Z16006-16NS 160 6 20 66 M8 22 Z160100-04 Z160100-16NS 160 100 20 100 M8 22 Z200100-04 Z200100-16NS 200 100 254 100 M8 25 Z200160-04 Z200160-16NS 200 160 254 150 M8 25 Z250100-04 Z250100-16NS 250 100 05 100 M8 28 Z250160-04 Z250160-16NS 250 160 05 150 M8 28 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. 2 D M -66 www.vacom-vacuum.com

CF Components CF Flanges Quick CF to CF Reducer flanges, stainless steel Z040016QCF-04 Z040016QCF-16NS 40 16 55 16 12 M4 Z06040QCF-04 Z06040QCF-16NS 6 40 87 8 16 M6 Z100016QCF-04 Z100016QCF-16NS 100 16 14 16 14 M4 Z100040QCF-04 Z100040QCF-16NS 100 40 14 8 14 M6 Z10006QCF-04 Z10006QCF-16NS 100 6 14 66 19 M8 Stainless steel 04 Stainlees steel 16N-ESR Option: clean room products (= CRP) made of stainless steel 16/16NS on request. 2 D M CF Flange caps, plastics Pack size CF16CP 16 10 CF40CP 40 10 CF6CP 6 10 CF100CP 100 10 CF160CP 160 10 CF200CP 200 1 CF250CP 250 1 CF00CP 00 1 Quick CF Flange caps, plastics QCF16CP QCF40CP QCF6CP QCF100CP Packing unit 10 pieces 16 40 6 100 www.vacom-vacuum.com -67

CF Components CF Components CF Tubes, 1m length, stainless steel Delivery conditions according to DIN EN 10217-7 longitudinally welded weld seam factor 1.0 inside and outside pickled RI R St. steel 04 St. steel 16 R04-19x1.5-1 R16-19x1.5-1 16 16 19 R04-41x1.5-1 R16-41x1.5-1 5 8 41 R04-70x2.0-1 R16-70x2.0-1 6 66 70 R04-104x2.0-1 R16-104x2.0-1 100 100 104 R04-154x2.0-1 R16-154x2.0-1 160 150 154 R04-204x2.0-1 R16-204x2.0-1 200 200 204 Other lengths on request. Quality according to DIN 11850/11866 on request Surface finish inside Ra < 0.8 μm weld seam area Ra < 1.6 μm CF Tubulations, rotatable, stainless steel Stainless steel Stainlees steel 16N-ESR TU10R-0-10-16-10 0 0 10 TU16R-8-19-04 TU16R-8-19-16NS 16 4 8 19 TU40R-6-41-04 TU40R-6-41-16NS 5 70 6 41 TU6R-105-6-04-6 114 105 6 TU6R-105-70-04 TU6R-105-70-16NS 6 114 105 70 TU100R-15-104-04 TU100R-15-104-16NS 100 152 15 104 TU160R-167-154-04 TU160R-167-154-16NS 160 20 167 154 TU200R-167-204-04 TU200R-167-204-16NS 200 254 167 204 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other lengths and nominal diameter on request. Options: with threaded holes, with fixed flanges, stainless steel 16 R -68 www.vacom-vacuum.com

CF Components CF Components Quick CF Flanges with tubulation, stainless steel R TU16QCF-8-19-04 16 0 8 19 TU40QCF-6-41-04 40 55 6 41 TU6QCF-105-70-16NS 6 87 105 70 TU100QCF-15-104-04 100 14 15 104 Option: stainless steel 16, 16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other lengths on request. CF Straight connectors, stainless steel, 1 flange rotatable SC16R-16 16 4 76 SC40R-04 40 70 126 SC6R-04 6 114 210 SC100R-04 100 152 270 SC160R-04 160 20 4 SC200R-04 200 254 4 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other lengths on request. Options: with threaded holes, with fixed flanges, stainless steel 16 Quick CF Connection, stainless steel SC16QCF-04 16 0 76 SC40QCF-04 40 55 126 SC6QCF-16NS 6 87 210 SC100QCF-04 100 14 270 Option: stainless steel 16, 16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other lengths on request. www.vacom-vacuum.com -69

CF Components CF Components CF Tubulated reducing adapters, small flange rotatable, stainless steel 04 2 2 T040016R-04 40 16 70 4 70 T06016R-04 6 16 114 4 70 T06040R-04 6 5 114 70 70 T100040R-04 100 5 152 70 70 T10006R-04 100 6 152 114 70 T16006R-04 160 6 20 114 127 T160100R-04 160 100 20 152 127 Options: with threaded holes, with fixed flanges, stainless steel 16 Option: clean room products (= CRP) made of stainless steel 16 on request. Other lengths on request. CF to Quick CF dapters, stainless steel 04 2 QCF16-04 16 0 4 50 QCF40-04 40 55 70 60 QCF6-04 6 87 114 90 QCF100-04 100 14 152 100 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. CF to KF dapters, stainless steel 16 2 2 K016016-16 16 16 4 0 6 K040016-16 40 16 70 0 6 K040025-16 40 25 70 40 6 K040040-16 40 40 70 55 50 K06025-16 6 25 114 40 50 K06040-16 6 40 114 55 50 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other lengths on request. Options: stainless steel 04, other variations -70 www.vacom-vacuum.com

CF Components CF Components CF to ISO-K dapters, stainless steel 04 2 2 S0606-04 6 6 114 95 S10006-04 100 6 152 95 S100100-04 100 100 152 10 S160100-04 160 100 20 10 S160160-04 160 160 20 180 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Options: stainless steel 04, other variations CF to VCR Compatible adapters, stainless steel female male Flange stainless steel 04 (16 of 16) dapter stainless steel 16 D RZ Female Male F16VCR6F-16 F16VCR6M-16 16 4 4.6 6 1/4" F16VCR1F-16 F16VCR1M-16 16 4 10.1 41 1/2" F40VCR6F-04 F40VCR6M-04 40 70 4.6 41 1/4" F40VCR9F-04 F40VCR9M-04 5 70 7.1 46 /8" F40VCR1F-04 F40VCR1M-04 40 70 10.1 46 1/2" F40VCR19F-04 F40VCR19M-04 40 70 15.7 5 /4" F40VCR25F-04 F40VCR25M-04 40 70 22 58 1" Option: clean room products (= CRP) made of stainless steel 16/16NS on request. VCR Compatible gaskets, stainless steel 16 Plane gaskets with or without mounting for sealing of VCR compatible connections Design RZ VCR-1/4-SE-16UHP without retainer 1/4" VCR-1/2-SE-16UHP without retainer 1/2" VCR-1/4-SE-RT-16UHP with retainer 1/4" VCR-1/2-SE-RT-16UHP with retainer 1/2" Option: clean room products (= CRP) made of stainless steel 16/16NS on request. www.vacom-vacuum.com -71

CF Components CF Components CF to Swagelok compatibe adapters, metric, stainless steel Flange stainless steel 04 (16 of 16) dapter stainless steel 16 CF to Swagelok compatibe adapters, imperial, stainless steel D RM F16SW6M-16 16 4 4.8 8 6 F16SW8M-16 16 4 7.9 44 8 F16SW10M-16 16 4 7.9 44 10 F40SW6M-04 40 70 4.8 4 6 F40SW8M-04 40 70 6.4 47 8 F40SW10M-04 40 70 7.9 49 10 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Flange stainless steel 04 (16 of 16) dapter stainless steel 16 CF Elbows 90, 2 flanges rotatable, stainless steel D RZ F16SW7-16 16 4 4.8 8 1/4" F40SW7-04 40 70 4.8 4 1/4" F40SW9-04 40 70 7.1 48 /8" F40SW1-04 40 70 10.4 52 1/2" Option: clean room products (= CRP) made of stainless steel 16/16NS on request. S St. steel St. steel 16N-ESR E16R-16 E16R-16NS 16 4 8 E40R-04 E40R-16NS 40 70 6 E6R-04 E6R-16NS 6 114 105 E100R-04 E100R-16NS 100 152 15 E160R-04 E160R-16NS 160 20 167 E200R-04 E200R-16NS 200 254 20 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Components with fixed flanges on request. -72 www.vacom-vacuum.com

CF Components CF Components Quick CF Elbows 90, stainless steel S E16QCF-04 16 0 8 E40QCF-04 40 55 6 E6QCF-16NS 6 87 105 E100QCF-04 100 14 15 Option: stainless steel 16, 16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. CF Tees, 2 flanges rotatable, stainless steel Orientation of bolt holes according to ISO 980- S Stainless steel 04 Stainless steel 16N-ESR TE16RS-16 TE16RS-16NS 16 4 76 8 TE40RS-04 TE40RS-16NS 40 70 126 6 TE6RS-04 TE6RS-16NS 6 114 210 105 TE100RS-04 TE100RS-16NS 100 152 270 15 TE160RS-04 TE160RS-16NS 160 20 4 167 TE200RS-04 TE200RS-16NS 200 254 406 20 TE250RS-04-250 05 450 225 Options: fixed flanges, stainless steel 16 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Quick CF Tees, stainless steel S TE16QCF-04 16 0 76 8 TE40QCF-04 40 55 126 6 TE6QCF-16NS 6 87 210 105 TE100QCF-04 100 14 270 15 Option: stainless steel 16, 16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. www.vacom-vacuum.com -7

CF Components CF Components CF Unequal tees, 2 flanges rotatable, stainless steel 04 Orientation of bolt holes according to ISO 980- UTE040016RS-04 40 16 70 4 126 60 UTE06040RS-04 6 40 114 70 210 77 UTE100040RS-04 100 40 152 70 270 95 UTE10006RS-04 100 6 152 114 270 95 UTE16006RS-04 160 6 20 114 4 120 UTE160100RS-04 160 100 20 152 4 120 2 2 S Options: fixed flanges, stainless steel 16 Option: clean room products (= CRP), stainless steel 16 on request. CF 4-way reducing crosses, 2 flanges rotatable, stainless steel 04 Orientation of bolt holes according to ISO 980- UX040016RS-04 40 16 70 4 126 120 UX06040RS-04 6 40 114 70 210 154 UX10006RS-04 100 6 152 114 270 190 UX16006RS-04 160 6 20 114 4 240 UX200100RS-04 200 100 254 152 406 290 2 2 2 Option: fixed flange, stainless steel 16 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. -74 www.vacom-vacuum.com

CF Components CF Components CF 4-way crosses, 2 flanges rotatable, stainless steel Orientation of bolt holes according to ISO 980- Stainless steel 04 Stainlees steel 16N-ESR X16RS-16 X16RS-16NS 16 4 76 X40RS-04 X40RS-16NS 40 70 126 X6RS-04 X6RS-16NS 6 114 210 X100RS-04 X100RS-16NS 100 152 270 X160RS-04 X160RS-16NS 160 20 4 X200RS-04 X200RS-16NS 200 254 406 X250RS-04-250 05 450 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Options: fixed flanges, stainless steel 16 Quick CF 4-way crosses, stainless steel S X16QCF-04 16 0 76 8 X40QCF-04 40 55 126 6 X6QCF-16NS 6 87 210 105 X100QCF-04 100 14 270 15 Option: stainless steel 16, 16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. www.vacom-vacuum.com -75

CF Components CF Components CF Cluster flanges, stainless steel 04 2 Number of ports CFP-04 100 40 152 70 15 208 11.9 CF4P-04 160 40 4 20 70 167 250 1 2 S R Option: stainless steel 16 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other constructions on request. CF 6-way crosses, flanges rotatable, stainless steel Orientation of bolt holes according to ISO 980- Stainless steel 04 Stainless steel 16N-ESR XX16RS-16-16 4 76 XX40RS-04 XX40RS-16NS 40 70 126 XX6RS-04 XX6RS-16NS 6 114 210 XX100RS-04 XX100RS-16NS 100 152 270 XX160RS-04 XX160RS-16NS 160 20 4 XX200RS-04 XX200RS-16NS 200 254 406 XX250RS-04-250 05 450 Option: fixed flange, stainless steel 16 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. -76 www.vacom-vacuum.com

CF Components CF Components Quick CF 6-way crosses, stainless steel S XX16QCF-04 16 0 76 8 XX40QCF-04 40 55 126 6 XX6QCF-16NS 6 87 210 105 XX100QCF-04 100 14 270 15 Option: stainless steel 16, 16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. CF Cubes, stainless steel Rectangularity Parallelism 0.1 mm 0.1 mm D St. steel 04 St. steel 16N-ESR CUBE16-04 CUBE16-16NS 16 15.8 5 CUBE40-04 CUBE40-16NS 40 8 70 CUBE6-04 CUBE6-16NS 6 64 114 CUBE100-04 CUBE100-16NS 100 102 152 CUBE160-04 CUBE160-16NS 160 152 20 CUBE200-04 CUBE200-16NS 200 200 254 Option: stainless steel 16 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other designs on request. www.vacom-vacuum.com -77

CF Components CF Flexible Hoses CF Flexible hoses, 1 flange rotatable, stainless steel 04 Flange stainless steel 04 Hose stainless steel 04 Bending radius FX16CF25R-04 16 4 250 58 FX16CF50R-04 16 4 500 58 FX16CF75R-04 16 4 750 58 FX16CF100R-04 16 4 1000 58 FX40CF25R-04 40 70 250 10 FX40CF50R-04 40 70 500 10 FX40CF75R-04 40 70 750 10 FX40CF100R-04 40 70 1000 10 FX6CF25R-04 6 114 250 200 FX6CF50R-04 6 114 500 200 FX6CF75R-04 6 114 750 200 FX6CF100R-04 6 114 1000 200 FX100CF25R-04 100 152 250 400 FX100CF50R-04 100 152 500 400 FX100CF75R-04 100 152 750 400 FX100CF100R-04 100 152 1000 400 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other lengths on request. Options: fixed flanges, stainless steel 16 CF Hydroformed bellows, 1 flange rotatable, stainless steel 04 Flange stainless steel 04 Bellow stainless steel 16Ti Tolerances ±5 mm min FXB16R-04 16 4 110 74 FXB40R-04 40 70 175 150 FXB6R-04 6 114 240 20 FXB100R-04 100 152 250 20 FXB160R-04 160 20 270 240 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other lengths on request. -78 www.vacom-vacuum.com

CF Components CF Quick ccess Doors CF Quick access doors with and without exchangeable viewport, stainless steel/aluminum The quick connection system enables a fast access to ports and chambers with viewport 6CF - 200CF without viewport 40CF - 00CF with viewport 250CF, 00CF Mounting with allen head screws Max. bakeout temperature 120 C Flange stainless steel 04 Door frame aluminum, anodized Door sealing stainless steel Viewport Borofloat eakage rate < 1.0E-9 mbar l/s D D2 D D4 with viewport without viewport - QD40BK--04 40 80 10 8-4 QD6VP--04 QD6BK--04 6 124 149 6 57 0 QD100VP--04 QD100BK--04 100 165 194 100 95 QD160VP--04 QD160VP--04 160 241 216 150 146 5 QD200VP--04 QD200BK--04 200 297 274 200 195 4 QD250VP--04 QD250BK--04 250 60 05 250 150 5 QD00VP--04 QD00BK--04 00 410 68 05 150 5 Suitable screws see page -80. Please find technical data on viewports in chapter 7 Vacuum Optics. www.vacom-vacuum.com -79

CF Components CF Quick ccess Doors llen head bolt sets for CF quick access doors, stainless steel Mounting on CF flange llen head bolts Nut Washer ISO 4762, 2 ISO 402, 2 ISO 7089, 2 Number of drilling holes Size of screws FK-QD40 40 6 M6 x 0 FK-QD6 6 8 M8 x 40 FK-QD100 100 16 M8 x 40 FK-QD160 160 20 M8 x 45 FK-QD200 200 24 M8 x 45 FK-QD250 250 2 M8 x 45 FK-QD00 00 2 M10 x 60 llen head bolt sets for CF quick access doors, stainless steel, silver plated Mounting on chamber wall with tapped holes llen head bolts ISO 4762, 2 Number of drilling holes Size of screws FK-QD40-SG- 40 6 M6 x 12 FK-QD6-SG- 6 8 M8 x 16 FK-QD100-SG- 100 16 M8 x 20 FK-QD160-SG- 160 20 M8 x 20 FK-QD200-SG- 200 24 M8 x 0 FK-QD250-SG- 250 2 M8 x 0 FK-QD00-SG- 00 2 M10 x 0-80 www.vacom-vacuum.com

CF Components CF iquid Feedthroughs CF 1-way liquid feedthroughs, stainless steel for liquid for liquid nitrogen iquid iquid nitrogen Vacuum side F16PP-16 NF16PP-16 16 4 60 55 tube 6 tube 6 F16PS-16 NF16PS-16 16 4 75 55 tube 6 SW 6 F40PP-04 NF40PP-04 40 70 65 55 tube 6 tube 6 F40PS-04 NF40PS-04 40 70 80 55 tube 6 SW 6 F40PP-04 NF40PP-04 40 70 75 65 tube 12 tube 12 F40PS-04 NF40PS-04 40 70 95 65 tube 12 SW 12 SW (Swagelok compatible adapter) Option: clean room products (= CRP) made of stainless steel 16/16NS on request. 1 2 ir side CF 2-way liquid feedthroughs, stainless steel 04 for liquid for liquid nitrogen iquid iquid nitrogen Vacuum side F402PP-04 NF402PP-04 65 85 95 55 tube 6 tube 6 F402PS-04 NF402PS-04 80 85 110 55 tube 6 SW 6 F402SP-04 NF402SP-04 65 100 95 70 SW 6 tube 6 F402SS-04 NF402SS-04 80 100 110 70 SW 6 SW 6 SW (Swagelok compatible adapter) Option: clean room products (= CRP) made of stainless steel 16/16NS on request. 1 2 4 ir side www.vacom-vacuum.com -81

CF Components CF Glass-to-Metal Connections CF Glass-to-metal connections, Pyrex Flange stainless steel 04 Tolerances R ±1 mm, ± mm Bakeout temperature max. 200 C Bakeout rate 2 to K/min Gasket OFHC copper, vacuum annealed GM-CF16-KP-17-TD1 16 4 1 17 GM-CF40-SP-17 40 70 8 17 GM-CF40-KP-17-TD25 40 70 25 17 GM-CF6-KP-191 6 114 64 191 D -82 www.vacom-vacuum.com

CF Components CF Viewports CF Viewports with permanent joint, borosilicate glass, Kovar sleeve He leak rate < 1.0E-10 mbar l/s Window material borosilicate glass (Corning 7056) Flange material stainless steel 04 Transmission range ca. 0.4 m to 2 m Max. heating and cooling K/min rate Magn. permeability (r) >> 1.07 Frame material Kovar Max. temperature 50 C VPCF16B- 16 4 16 12.7 1.5 VPCF40B- 40 70 8 12.7 VPCF6B- 6 114 6 17.4.5 VPCF100B- 100 152 90 19.9 6 VPCF160B- 160 20 16 22. 8 D 2 Quick CF Viewports with permanent joint, borosilicate glass VaCFix Clamp chains ensure a very uniform contact pressure on the Quick CF flanges when using a torque wrench. Thus, the Quick CF connection is perfectly suited for the mounting of stress-sensitive flange components (feedthroughs and viewports). He leak rate < 1.0E-10 mbar l/s Window material borosilicate glass (Corning 7056) Flange material stainless steel 04 Kovar Transmission range 400 to 2,500 nm Max. bakeout temperature 50 C Max. heating and cooling K/min rate VPQCF40B- 40 55 25 12 2,5 VPQCF6B- 6 87 49 17 2,5 VPQCF100B- 100 14 65 14.5 D 2 www.vacom-vacuum.com -8

CF Components CF Viewports CF Viewports with permanent joint, borosilicate glass, tantalum sleeve He leak rate < 1.0E-10 mbar l/s Window material borosilicate glass (Corning 7056) Flange material stainless steel 16N Transmission range ca. 0.4 m to 2 m Max. heating and cooling K/min rate Magn. permeability (r) < 1.005 Frame material tantalum Max. temperature 120 C VPCF16B-K-NM 16 4 16 12.7 1.5 VPCF40B-K-NM 40 70 2 12.7 VPCF6B-K-NM 6 114 6 17.4.5 VPCF100B-K-NM 100 152 90 19.9 6 VPCF160B-K-NM 160 20 16 22. 8 CF Gaskets CF Copper gaskets, OFHC D 2 Material Vickers hardness Bakeout temperature Suitable flanges Packing unit OFHC copper ca. 70 HV10 (vacuum annealed copper gaskets ca. 40 HV10) 450 C CF flange QCF flange 5 pieces * 10 pieces CF copper gaskets CF copper gaskets, vacuum annealed CF copper gaskets, silver plated CU10* - - CU16* CU16 CU16SP CU40* CU40 CU40SP CU6* CU6 CU6SP CU100* CU100 CU100SP CF copper gaskets, silver plated, vacuum annealed - CU16SP CU40SP CU6SP CU100SP CU160 CU160 CU160SP CU160SP 160 CU200 CU200 CU200SP CU200SP 200 CU250 CU250 CU250SP CU250SP 250 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. 10 16 40 6 100 D 1.4 21 48 82 120 171 222 272.7 D2 8.5 16 9 6 101 152 20 254-84 www.vacom-vacuum.com

CF Components CF Gaskets CF Blank copper gaskets, OFHC Material OFHC copper Vickers hardness ca. 70 HV10 Bakeout temperature 450 C Suitable flanges CF flanges Quick CF flanges D CUB16-1 16 21 CUB40-1 40 48 CUB6-1 6 82 CUB100-1 100 120 Option: clean room products (= CRP) on request. CF luminum gaskets, EN W-1050 Material EN W 1050 Suitable flanges CF flanges Quick CF flanges D D2 40-D48.2-ID9 40 48 9 6-D82.4-ID6 6 82 6 100-D120.5-ID101 100 120 101 160-D171.-ID152 160 171 152 CF Gaskets, FKM Mehrmals verwendbar Temperature range -10 C to 150 C Suitable flanges CF flanges Quick CF flanges D D2 D Flat profile profile VGF10-10 1.4 7 - VGF16 VG16 16 21 16 22 VGF40 VG40 40 48 7 49 VGF6 VG6 6 82 6 8 VGF100 VG100 100 120 101 121 VGF160 VG160 160 171 152 172 VGF200 VG200 200 222 202 22 VGF250 VG250 250 272.7 254 274 Option: low outgassing and clean room products (= CRP) on request. www.vacom-vacuum.com -85

CF Components CF Connecting Elements We provid e CF Flange kits, hex-head For the connection of two CF flanges with through bore-hole Flange thickness Number of drilling holes Size of screws FK-CF16 16 7.6 6 M4 x 20 FK-CF40 40 1 6 M6 x 5 FK-CF6 6 17.5 8 M8 x 45 FK-CF100 100 20 16 M8 x 50 FK-CF160 160 22 20 M8 x 55 FK-CF200 200 25 24 M8 x 60 CF Flange kits, hex-head, silver plated For the connection of two CF flanges with through bore-hole Flange thickness Number of drilling holes Size of screws FK-CF40-40 1 6 M6 x 5 FK-CF6-6 17.5 8 M8 x 45 FK-CF100-100 20 16 M8 x 50 FK-CF160-160 22 20 M8 x 55 FK-CF200-200 25 24 M8 x 60-86 www.vacom-vacuum.com

CF Components CF Connecting Elements CF Flange kits, hex-head, with plate nuts, stainless steel For the connection of two CF flanges with through bore-hole Flange thickness Number of drilling holes Size of screws FK-CF16-PN 16 7.6 6 M4 x 20 FK-CF40-PN 40 1 6 M6 x 5 FK-CF6-PN 6 17.5 8 M8 x 45 FK-CF100-PN 100 20 16 M8 x 50 FK-CF160-PN 160 22 20 M8 x 55 FK-CF200-PN 200 25 24 M8 x 60 CF Flange kits, hex-head, for tapped flanges, silver plated For the connection of a CF-flange with through bore holes and a CF flange with tapped holes Flange thickness Number of drilling holes Size of screws FK-CF16-G- 16 7.6 6 M4 x 16 FK-CF40-G- 40 1 6 M6 x 25 FK-CF6-G- 6 17.5 8 M8 x 40 FK-CF100-G- 100 20 16 M8 x 45 FK-CF160-G- 160 22 20 M8 x 50 FK-CF200-G- 200 25 24 M8 x 55 CF Flange kits, hex-head, for tapped flanges, silver plated For the connection of a CF-flange with through bore holes and a CF flange with tapped holes Flange thickness Number of drilling holes Size of screws FK-CF16-SG- 16 7.6 6 M4 x 12 FK-CF40-SG- 40 1 6 M6 x 20 FK-CF6-SG- 6 17.5 8 M8 x 0 FK-CF100-SG- 100 20 16 M8 x 0 FK-CF160-SG- 160 22 20 M8 x 5 FK-CF200-SG- 200 25 24 M8 x 5 Flange kits with other connecting elements or of other materials on request. In addition, we provide a range of screws, nuts and washers with and without vent holes for HV and UHV systems. www.vacom-vacuum.com -87

CF Components CF Connecting Elements CF Plate nuts, stainless steel 04 Plate nuts allow quick and space-saving mounting of CF flanges GM Design PN16-04 16 20 1 7 M4 radius PN40-04 40 41 29 11 M6 radius PN6-04 6 51 5 12 M8 radius PN100-04 100 44 25 12 M8 straight PN160-04 160 44 28 12 M8 straight PN200-04 200 45 0 1 M8 straight PN250-04 250 41 28 1 M8 straight Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Packing unit 25 pieces. 2 CF Horse shoe plate nuts, stainless steel 04 D2 PN16HS-04 16 4 21 6 PN40HS-04 40 70 46 8 PN6HS-04 6 11 72 12 PN100HS-04 100 152 110 12 PN160HS-04 160 20 162 12 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Scope of delivery with screws and washers. D CF Thread lubricant For easier loosening of screws after bakeout. T100 Material MoS2-88 www.vacom-vacuum.com

CF Components CF Connecting Elements Quick CF Clamp chains VaCFix, stainless steel Quick CF Clamp chains for quick and space-saving mounting of UHV flange connections. Material Suitable flanges Suitable gaskets Mounting ccessories stainless steel, non-magnetic QCF flanges KF flanges conical ISO flanges copper gaskets aluminum gaskets FKM gaskets with torque wrench spare parts (eye screw, nut) XS16 - XS6 XS100V D D2 R Number of links Tightening torque [Nm] Weight [g] XS16 16 21 5 47 24 1 5 220 XS40 40 46 82 67 24 4 15 9 40 XS6 6 7 121 89 28 5 19 2 980 XS100V 100 117 176 117 41 6 24 8 2540 SW Option: clean room products (= CRP) on request. Clean room compatible clamp chains require a higher tightening torque. www.vacom-vacuum.com -89

Quick CF Components Quick CF Flanges Quick CF Blank flanges, conical, stainless steel Stainless steel 04 Stainless steel 16 Stainless steel 16N-ESR QCF16-04 QCF16-16 QCF16-16NS 16 0 6.5 QCF40-04 QCF40-16 QCF40-16NS 40 55 6.5 QCF6-04 QCF6-16 QCF6-16NS 6 87 7.5 QCF100-04 QCF100-16 QCF100-16NS 100 14 14 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Quick CF Bored flanges, conical, stainless steel Stainless steel 04 Stainless steel 16 Stainless steel 16N-ESR QCF16B19-04 QCF16B19-16 QCF16B19-16NS 16 0 16 19 9 8 QCF40B8-04 QCF40B8-16 QCF40B8-16NS 40 55 5 8 9 8 QCF40B41-04 QCF40B41-16 QCF40B41-16NS 40 55 8 41 9 8 - - QCF6B6-16NS 6 87 61 6 11 10 - - QCF6B70-16NS 6 87 6 70 11 10 QCF100B101-04 QCF100B101-16 QCF100B101-16NS 100 14 98 101 19 17 QCF100B104-04 QCF100B104-16 QCF100B104-16NS 100 14 100 104 19 17 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. D R 2-92 www.vacom-vacuum.com

Quick CF Components Quick CF Flanges Quick CF to CF dapters, stainless steel QCF to CF reducing flange Stainlees steel 04 Stainlees steel 16N-ESR Z040016QCF-04 Z040016QCF-16NS 40 16 55 16 12 M4 Z06040QCF-04 Z06040QCF-16NS 6 40 87 8 16 M6 Z100016QCF-04 Z100016QCF-16NS 100 16 14 16 14 M4 Z100040QCF-04 Z100040QCF-16NS 100 40 14 8 14 M6 Z10006QCF-04 Z10006QCF-16NS 100 6 14 66 19 M8 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Quick CF Flange caps, plastics 2 D M QCF16CP QCF40CP QCF6CP QCF100CP Packing unit 10 pieces. 16 40 6 100 Quick CF Components Quick CF Tubulation (half nipples), stainless steel R TU16QCF-8-19-04 16 0 8 19 TU40QCF-6-41-04 40 55 6 41 TU6QCF-105-70-16NS 6 87 105 70 TU100QCF-15-104-04 100 14 15 104 Option: stainless steel 16, 16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other lengths on request. www.vacom-vacuum.com -9

Quick CF Components Quick CF Components Quick CF Straight connectors (full nipples), stainless steel SC16QCF-04 16 0 76 SC40QCF-04 40 55 126 SC6QCF-16NS 6 87 210 SC100QCF-04 100 14 270 Option: stainless steel 16, 16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other lengths on request. Quick CF to CF dapters, stainless steel 04 2 QCF16-04 16 0 4 50 QCF40-04 40 55 70 60 QCF6-04 6 87 114 90 QCF100-04 100 14 152 100 Option: stainless steel 16, 16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other lengths on request. Quick CF Elbows 90, stainless steel S E16QCF-04 16 0 8 E40QCF-04 40 55 6 E6QCF-16NS 6 87 105 E100QCF-04 100 14 15 Option: stainless steel 16, 16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Quick CF Tees, stainless steel S TE16QCF-04 16 0 76 8 TE40QCF-04 40 55 126 6 TE6QCF-16NS 6 87 210 105 TE100QCF-04 100 14 270 15 Option: stainless steel 16, 16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. -94 www.vacom-vacuum.com

Quick CF Components Quick CF Components Quick CF 4-way crosses, stainless steel S X16QCF-04 16 0 76 8 X40QCF-04 40 55 126 6 X6QCF-16NS 6 87 210 105 X100QCF-04 100 14 270 15 Option: stainless steel 16, 16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Quick CF 6-way crosses, stainless steel S XX16QCF-04 16 0 76 8 XX40QCF-04 40 55 126 6 XX6QCF-16NS 6 87 210 105 XX100QCF-04 100 14 270 15 Option: stainless steel 16, 16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Quick CF Viewports QCF Viewports with permanent joint, borosilicate glass VaCFix Clamp chains ensure a very uniform contact pressure on the Quick CF flanges when using a torque wrench. Thus, the Quick CF connection is perfectly suited for the mounting of stress-sensitive flange components (feedthroughs and viewports). He leak rate < 1.0E-10 mbar l/s Window material borosilicate glass (Corning 7056) Flange material stainless steel 04 Frame material Kovar Transmission range ca. 400 to 2,500 nm Max. bakeout temperature 50 C Max. heating and cooling K/min rate D 2 VPQCF40B- 40 55 25 12 2.5 VPQCF6B- 6 87 49 17 2.5 VPQCF100B- 100 14 65 14.5 www.vacom-vacuum.com -95

Quick CF Components Optical Fiber Feedthroughs on Quick CF Flanges Optical fiber feedthroughs on Quick CF flanges Please find technical data on optical fiber feedthroughs in chapter 5 Vacuum Optics. Flange Number of couplings QCF16-SM110-FCPC-1 16QCF 1 QCF40-SM110-FCPC-1 40QCF 1 QCF6-SM110-FCPC-2 6QCF 2 QCF100-SM110-FCPC- 100QCF Other combinations of optical fiber feedthroughs on Quick CF flanges on request. SUB-D Feedthroughs on Quick CF Flanges SUB-D feedthroughs on Quick CF flanges VaCFix Clamp chains ensure a very uniform contact pressure on the Quick CF flanges when using a torque wrench. Thus, the Quick CF connection is perfectly suited for the mounting of stress-sensitive flange components (feedthroughs and viewports). Please find technical data on electrical feedthroughs in chapter 4 Electrical Feedthroughs. Flange Number of contacts QCF40-SUBD-9-DE-CE-SSG 40QCF 9 QCF6-SUBD-15-DE-CE-SSG 6QCF 15 QCF6-SUBD-25-DE-CE-SSG 6QCF 25 QCF100-SUBD-50-DE-CE-SSG 100QCF 50 Further feedthroughs on Quick CF flanges on request. -96 www.vacom-vacuum.com

Quick CF Components Edge Welded Bellows with Quick CF Flanges Edge welded bellows with Quick CF flanges By using Quick CF flanges and VaCFix clamp chains for mounting, the connecting pieces of the edge welded bellows can be designed very short. Please find technical data on edge welded bellows in chapter 6 Edge Welded Bellows. Flange Stroke EWB16QCF-10 16QCF 10 EWB40QCF-10 40QCF 10 EWB6QCF-10 6QCF 10 EWB100QCF-10 100QCF 10 arger strokes for edge welded bellows with Quick CF flanges on request. www.vacom-vacuum.com -97

Quick CF Components Total Pressure Measurement with Quick CF Flanges BRION pro/extended Bayard-lpert gauge with X-ray compensation Passive hot cathode ionisation gauge, fine vacuum to XHV, BTXQ-40Q Description BRION pro/extended Vacuum connection 40QCF -98 www.vacom-vacuum.com

Quick CF Components Quick CF Gaskets Quick CF Copper gaskets, OFHC The below-mentioned gaskets (copper, aluminium and FKM flat gaskets) are identical with those for CF components. The use of standard copper gaskets according to ISO 669 for CF flanges is an important advantage for Quick-CF flange connections. Material Vickers hardness Bakeout temperature Suitable flanges Packing unit OFHC copper ca. 70 HV10 (vacuum annealed copper gaskets ca. 40 HV10) 450 C CF flanges QCF flanges 5 pieces * 10 pieces CF copper gaskets CF copper gaskets, vacuum annealed CF copper gaskets, silver plated CU10* - - CU16* CU16 CU16SP CU40* CU40 CU40SP CU6* CU6 CU6SP CU100* CU100 CU100SP CF copper gaskets, silver plated, vacuum annealed - CU16SP CU40SP CU6SP CU100SP CU160 CU160 CU160SP CU160SP 160 CU200 CU200 CU200SP CU200SP 200 CU250 CU250 CU250SP CU250SP 250 Option: clean room compatible products (= CRP) made of stainless steel 16/16NS on request. 10 16 40 6 100 D 1.4 21 48 82 120 171 222 272.7 D2 8.5 16 9 6 101 152 20 254 Quick CF Blank copper gaskets, OFHC Material OFHC copper Vickers hardness ca. 70 HV10 Bakeout temperature 450 C Suitable flanges CF flanges Quick CF flanges D CUB16-1 16 21 CUB40-1 40 48 CUB6-1 6 82 CUB100-1 100 120 Option: clean room products (= CRP) on request. www.vacom-vacuum.com -99

Quick CF Components Quick CF Gaskets Quick CF luminum gasket, EN W-1050 Material EN W 1050 Suitable flanges CF flanges Quick CF flanges D D2 40-D48.2-ID9 40 48 9 6-D82.4-ID6 6 82 6 100-D120.5-ID101 100 120 101 Quick CF Flat gaskets, FKM For multiple use Temperature range -10 C to 150 C Suitable flanges CF flanges Quick CF flanges D D2 VGF16 16 21 16 VGF40 40 48 7 VGF6 6 82 6 VGF100 100 120 101 Option: low outgassing and clean room products (= CRP) on request. -100 www.vacom-vacuum.com

Quick CF Components Quick CF Clamp chains VaCFix, stainless Steel Quick CF Clamp chains VaCFix, stainless steel Quick CF Clamp chains for quick and space-saving mounting of UHV flange connections. Material Suitable flanges Suitable gaskets Mounting ccessories stainless steel, non-magnetic QCF flanges KF flanges conical ISO flanges copper gaskets aluminum gaskets FKM gaskets with torque wrench spare parts (eye screw, nut) XS16 - XS6 XS100V D D2 R Number of links Tightening torque [Nm] Weight [g] XS16 16 21 5 47 24 1 5 220 XS40 40 46 82 67 24 4 15 9 40 XS6 6 7 121 89 28 5 19 2 980 XS100V 100 117 176 117 41 6 24 8 2540 SW Option: clean room products (= CRP) on request. Clean room compatible clamp chains require a higher tightening torque. Heating jackets for Quick CF clamp chains VaCFix Heating jackets for Quick CF clamp chains VaCFix Fiberglass sleeve with perfect fit and heat transfer for Quick CF connections. to 250 C to 450 C ccessories for Power [W] BKE-PTFE-QCF16 BKE-GS-QCF16 XS16 50 BKE-PTFE-QCF40 BKE-GS-QCF40 XS40 90 BKE-PTFE-QCF6 BKE-GS-QCF6 XS6 10 BKE-PTFE-QCF100 BKE-GS-QCF100 XS100V 200 Option: clean room products (= CRP) made of PTFE on request. www.vacom-vacuum.com -101

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