ADRT Series Rotary Stages

ADRT Series Mechanical-Bearing Rotary Stage High torque output, direct-drive brushless servomotor Cog-free design for outstanding velocity stability Outstanding wobble and runout Direct coupled, high-accuracy rotary encoder Large diameter clear aperture Aerotech s ADRT series direct-drive rotary stages provide superior angular positioning and velocity control. Applications range from indexing to high-speed laser machining to precision wafer inspection. Superior Mechanical Design Dual large-diameter bearings are used to maximize performance with respect to wobble, moment stiffness, and repeatability. The large diameter bearings permit large payloads without compromising performance. Brushless Direct Drive To maximize positioning performance, the ADRT series utilizes Aerotech s S-series brushless, slotless motor. This motor has all the advantages of a brushless direct-drive motor no brushes to wear, no gear trains to maintain, and high acceleration and high speeds. Since it is a slotless, ironless design, there is zero cogging, meaning that there is absolutely no torque ripple. With its low inherent inertia and optimized motor design, the ADRT is capable of speeds and accelerations that are significantly higher than other competing products. These stages have a lower height profile compared to competing products within given torque ranges. The low inertia and zero backlash make the ADRT the ideal solution for applications requiring frequent directional changes. Accurate Positioning Line counts range from 3600 to 5400 lines per revolution. When coupled with Aerotech s MXH series resolution multipliers, resolutions can be as fine as 0.12 arc sec. The motor and high-performance rotary encoder are directly coupled to a common shaft. The absence of gear trains and mechanical couplings means no position errors caused by hysteresis, windup, or backlash. Flexible Configurations Options include a high-precision bearing for improved accuracy, smoothness, and run-out performance. Slip rings and rotary unions are available to ease integration of custom tooling, and a holding brake is available to limit movement of the stage during large impulse loads or when power is removed from the motor. The ADRT is the only rotary table available with integrated T-slots. These slots can be used to mount the table horizontally or to attach custom application specific fixtures. Aerotech manufactures a wide range of servo amplifiers and advanced controllers to provide a complete integrated package. 1

ADRT Series SPECIFICATIONS ADRT Series Rotary Stages ADRT Series ADRT-100-85 ADRT-100-135 ADRT-150-115 ADRT-150-135 ADRT-150-180 Bearing Option -P (Precision) / -S (Standard) Maximum Torque (Continuous) 0.48 N m 1.6 N m 2.85 N m 5.06 N m 9.29 N m Bus Voltage (1) Up to 340 VDC Accuracy (2,3) 5 arc sec (-P); 60 arc sec (-S) Repeatability (3) 3 arc sec Axial Error Motion 5 µm (-P); 10 µm (-S) Radial Error Motion (4) 5 µm (-P); 10 µm (-S) Tilt Error Motion 10 arc sec Height 85 mm 135 mm 115 mm 135 mm 180 mm Aperture 13 mm 50 mm Radial Load (5) 10 kg 25 kg Axial Load 15 kg 30 kg Rated Speed 1000 rpm (-S); 1500 rpm (-P) 600 rpm Inertia 0.00028 kg-m 2 0.00067 kg-m 2 0.003379 kg-m 2 0.004958 kg-m 2 0.008118 kg-m 2 Mass 2.3 kg 2.9 kg 5.3 kg 6.9 kg 10.2 kg Finish Table Stage Hardcoat Black Anodize Notes: 1. Bus voltage for ADRT-100 with -25D connector is limited to 160 V. 2. -P accuracy requires calibration and Aerotech controls. 3. Repeatability and accuracy are dependent on encoder resolution. To achieve the listed specifications, encoder resolution must be 0.36 arc sec or less 4. Specifications are for single-axis systems. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications. 5. Moment load based on 5 year continuous rotation at 250 rpm with maximum axial load applied. Larger moment loads possible for low speed and/or low duty cycle applications. Consult Aerotech for additional information. ADRT Series ADRT-200-155 ADRT-200-185 ADRT-260-160 ADRT-260-180 Bearing Option -P (Precision) / -S (Standard) Maximum Torque (Continuous) 11.12 N m 15.93 N m 19.71 N m 29.09 N m Bus Voltage (1) Up to 340 VDC Accuracy (2,3) 5 arc sec (-P); 60 arc sec (-S) Repeatability (3) 3 arc sec Axial Error Motion 5 µm (-P); 10 µm (-S) Radial Error Motion (4) 5 µm (-P); 10 µm (-S) Tilt Error Motion 10 arc sec Height 155 mm 160 mm Aperture 75 mm 100 mm Radial Load (5) 80 kg 110 kg Axial Load 140 kg 170 kg Rated Speed 600 rpm 375 rpm Inertia 0.020991 kg-m 2 0.027666 kg-m 2 0.066488 kg-m 2 0.08566 kg-m 2 Mass 13.4 kg 16.7 kg 25.4 kg 30.6 kg Finish Table Hardcoat Stage Black Anodize Notes: 1. Bus voltage for ADRT-100 with -25D connector is limited to 160 V. 2. -P accuracy requires calibration and Aerotech controls. 3. Repeatability and accuracy are dependent on encoder resolution. To achieve the listed specifications, encoder resolution must be 0.36 arc sec or less 4. Specifications are for single-axis systems. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications. 5. Moment load based on 5 year continuous rotation at 250 rpm with maximum axial load applied. Larger moment loads possible for low speed and/or low duty cycle applications. Consult Aerotech for additional information. ADRT Maximum Speeds for Encoder Option Encoder Option ADRT-100 ADRT-150 ADRT-200 ADRT-260 -AS/-X5/-X10/-X25 1500 rpm (-P) 1000 rpm (-S) 600 rpm 600 rpm 375 rpm -X50 800 rpm 600 rpm 500 rpm 375 rpm 2

ADRT Series SPECIFICATIONS Axial and Radial Cantilevered Load Capability (ADRT-100-85) Axial and Radial Cantilevered Load Capability (ADRT-100-135) Axial and Radial Cantilevered Load Capability (ADRT-150-115) Axial and Radial Cantilevered Load Capability (ADRT-150-135) Axial and Radial Cantilevered Load Capability (ADRT-150-180) 3

ADRT Series SPECIFICATIONS ADRT Series Rotary Stages Axial and Radial Cantilevered Load Capability (ADRT-200-155) Axial and Radial Cantilevered Load Capability (ADRT-200-185) Axial and Radial Cantilevered Load Capability (ADRT-260-160) Axial and Radial Cantilevered Load Capability (ADRT-260-180) 4

ADRT Series DIMENSIONS ADRT-100 5

ADRT Series Rotary Stages 6 ADRT Series DIMENSIONS ADRT-150

ADRT Series DIMENSIONS ADRT-150 Limits/Hardstops ADRT-150 LIMIT OPTION: AVAILABLE TRAVELS LIMITS HARDSTOPS CONFIGURATION ANGLE CONFIGURATION ANGLE -LI+-5 +/- 5 -HS+-10 +/- 10 -LI+-10 +/- 10 -HS+-15 +/- 15 -LI+-20 +/- 20 -HS+-25 +/- 25 -LI+-30 +/- 30 -HS+-35 +/- 35 -LI+-40 +/- 40 -HS+-45 +/- 45 -LI+-45 +/- 45 -HS+-50 +/- 50 -LI+-50 +/- 50 -HS+-55 +/- 55 -LI+-60 +/- 60 -HS+-65 +/- 65 -LI+-70 +/- 70 -HS+-75 +/- 75 -LI+-80 +/- 80 -HS+-85 +/- 85 -LI+-90 +/- 90 -HS+-95 +/- 95 -LI+-100 +/- 100 -HS+-105 +/- 105 -LI+-110 +/- 110 -HS+-115 +/- 115 -LI+-120 +/- 120 -HS+-125 +/- 125 -LI+-130 +/- 130 -HS+-135 +/- 135 7

ADRT Series Rotary Stages 8 ADRT Series DIMENSIONS ADRT-200

ADRT Series DIMENSIONS ADRT-200 Limits/Hardstops ADRT-200 LIMIT OPTION: AVAILABLE TRAVELS LIMITS HARDSTOPS CONFIGURATION ANGLE CONFIGURATION ANGLE -LI+-30 +/- 30 -HS+-35 +/- 35 -LI+-20 +/- 20 -HS+-25 +/- 25 -LI+-10 +/- 10 -HS+-15 +/- 15 -LI+-5 +/- 5 -HS+-10 +/- 10 -LI+-40 +/- 40 -HS+-45 +/- 45 -LI+-45 +/- 45 -HS+-50 +/- 50 -LI+-50 +/- 50 -HS+-55 +/- 55 -LI+-60 +/- 60 -HS+-65 +/- 65 -LI+-70 +/- 70 -HS+-75 +/- 75 -LI+-80 +/- 80 -HS+-85 +/- 85 -LI+-90 +/- 90 -HS+-95 +/- 95 -LI+-100 +/- 100 -HS+-105 +/- 105 -LI+-110 +/- 110 -HS+-115 +/- 115 -LI+-120 +/- 120 -HS+-125 +/- 125 -LI+-130 +/- 130 -HS+-135 +/- 135 -LI+-135 +/- 135 -HS+-140 +/- 140 -LI+-140 +/- 140 -HS+-145 +/- 145 -LI+-150 +/- 150 -HS+-155 +/- 155 9

ADRT Series DIMENSIONS ADRT-260 ADRT Series Rotary Stages 10

ADRT Series DIMENSIONS ADRT-260 Limits/Hardstops ADRT-260 LIMIT OPTION: AVAILABLE TRAVELS LIMITS HARDSTOPS CONFIGURATION ANGLE CONFIGURATION ANGLE -LI+-5 +/- 5 -HS+-10 +/- 10 -LI+-10 +/- 10 -HS+-15 +/- 15 -LI+-20 +/- 20 -HS+-25 +/- 25 -LI+-30 +/- 30 -HS+-35 +/- 35 -LI+-40 +/- 40 -HS+-45 +/- 45 -LI+-45 +/- 45 -HS+-50 +/- 50 -LI+-50 +/- 50 -HS+-55 +/- 55 -LI+-60 +/- 60 -HS+-65 +/- 65 -LI+-70 +/- 70 -HS+-75 +/- 75 -LI+-80 +/- 80 -HS+-85 +/- 85 -LI+-90 +/- 90 -HS+-95 +/- 95 -LI+-100 +/- 100 -HS+-105 +/- 105 -LI+-110 +/- 110 -HS+-115 +/- 115 -LI+-120 +/- 120 -HS+-125 +/- 125 -LI+-130 +/- 130 -HS+-135 +/- 135 -LI+-135 +/- 135 -HS+-140 +/- 140 -LI+-140 +/- 140 -HS+-145 +/- 145 -LI+-150 +/- 150 -HS+-155 +/- 155 11

ADRT Series ORDERING INFORMATION ADRT Series Rotary Stages Ordering Example ADRT -200-155 -S -50 mm -AS -NO LI±10 -PLOTS Series Width (mm) -100-150 -200-260 Height -85/-135-115/-135/-180-155/-185-160/-180 Bearing Type -S -P Shaft Configuration Position Transducer -50 mm -AS -XX Brake Options -NO -BK Limits -UNLIMITED -LI -HS -SRCE -HCW -NOP -24V Options -PLOTS -HPD -25D -RS -AP ADRT Series Rotary Stage ADRT-100-85 Direct-drive rotary table with 13 mm clear aperture and 0.64 N-m continuous torque ADRT-100-135 Direct-drive rotary table with 13 mm clear aperture and 1.6 N-m continuous torque ADRT-150-115 Direct-drive rotary table with 50 mm clear aperture and 2.85 N-m continuous torque ADRT-150-135 Direct-drive rotary table with 50 mm clear aperture and 5.06 N-m continuous torque ADRT-150-180 Direct-drive rotary table with 50 mm clear aperture and 9.29 N-m continuous torque ADRT-200-155 Direct-drive rotary table with 75 mm clear aperture and 11.12 N-m continuous torque ADRT-200-185 Direct-drive rotary table with 75 mm clear aperture and 15.93 N-m continuous torque ADRT-260-160 Direct-drive rotary table with 100 mm clear aperture and 19.71 N-m continuous torque ADRT-260-180 Direct-drive rotary table with 100 mm clear aperture and 29.09 N-m continuous torque Stage Bearing Options -S Dual standard-grade bearings -P Dual precision-grade bearings Shaft Configuration* -50mm 50 mm clear aperture *Note: Required for ADRT-150-xxx only Position Transducer -AS Standard feedback device; 1 Vpp sine wave output; 3600 lines/rev on the ADRT-100/150; 5400 lines/rev on ADRT-200/260; final resolution multiplier dependent -X5 Square wave digital output; 18 arc sec resolution on ADRT-100/150; 12 arc sec resolution on ADRT-200/260 -X10 Square wave digital output; 9 arc sec resolution on ADRT-100/150; 6 arc sec resolution on ADRT-200/260 -X25 Square wave digital output; 3.6 arc sec resolution on ADRT-100/150; 2.4 arc sec resolution on ADRT-200/260 -X50 Square wave digital output; 1.8 arc sec resolution on ADRT-100/150; 1.2 arc sec resolution on ADRT-200/260 Note: Digital output encoder signals are synthesized with a 16 MHz clock. Care must be taken to ensure that the encoder sample rate on the controller is at least 16 MHz or higher. Slower clock rates are available on request. Brake Options* -NO No brake -BK Holding brake *Note: Not available on ADRT-100. Not available with limits. Limits* -UNLIMITED Continuous Rotation -LI±x Normally-closed limits at ±x degrees, where x=5/10/20/30/40/45/50/60/70/80/90/100/110/120/130 (/135/140/150 on ADRT-200 and ADRT-260) -HS±x Hardstop end of travel at ±x degrees, where x=10/15/25/35/45/50/55/65/75/85/95/105/115/125/135 (/140/145/155 on ADRT-200 and ADRT-260) -SRCE Current sourcing limits -HCW Home limit uses clockwise limit (counter clockwise default) -NOP Normally open limit (normally closed default) 12

ADRT Series ORDERING INFORMATION -24V 24 VDC rated limits *Note: Not available with brake. No limits or hardstops on ADRT-100. Options -PLOTS Stage accuracy and repeatability documentation; included with -P; optional with -S -HPD 4-pin D-style motor power connector with 25-pin D-style feedback connector. Stage-mounted connectors on ADRT-150-xxx, ADRT-200-xxx, and ADRT-260-xxx. Strain-relieved 300 mm pigtail cable connection on ADRT-100-xxx -25D 25-pin D-style motor power connector with 25-pin D-style feedback connector; 160 VDC bus voltage max; available on ADRT-100 only; strain-relieved 300 mm pigtail cable connection -RS Rear shaft seal on ADRT-100-xxx -AP Air-purge fitting (ADRT-100-xxx only) 13