ATS1000 Series. Mechanical Bearing, Ball-Screw Stage. Precision-ground ball screw. Long-life linear motion guide bearing system

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ATS1000 Series Mechanical Bearing, Ball-Screw Stage Precision-ground ball screw Long-life linear motion guide bearing system Low-cost high performance stage Optional bellows waycovers Optional hard cover with side seals The ATS1000 is available with and without bellows or hard cover to provide a versatile positioning solution. The ATS1000 is a compact, high-performance stage that is as accurate as it is versatile. It provides a small cross-section, medium payload capacity, environmentally protected, costeffective solution for precision applications. A rigid base and high-performance brushless servomotor make the ATS1000 the stage of choice in industrial applications such as laser machining, or in any other application requiring high accuracy in a production environment. Construction Features The tabletop utilizes stainless steel Helicoil TM inserts to protect mounting holes against thread wear. For industrial applications that expose the stage to debris, both full bellows waycovers and a hard cover with side sealing are available as options. These durable waycovers protect both the precision-ground ball screw and linear guide bearing system over the entire travel of the stage. An optional air-purge fitting is available that allows air to be forced into the body of the stage. This creates a positive pressure that prevents particulates from entering the stage. High Performance and Versatility Sealed linear motion guide bearings with integral wipers are incorporated to provide excellent payload capability and long life. The precision-ground ball screw offers application versatility by providing high speed without sacrificing resolution or accuracy. The optional HALAR factory calibration option is available to further increase standard accuracy and repeatability. Motor and Drives All ATS1000 series stages include Aerotech s high performance BMS series brushless, slotless servomotor. Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized motion solution. Hard Cover Features Both the metal waycover and tabletop are treated with a Teflon -impregnated hardcoat (Rockwell 62 hardness) that is scratch-resistant and provides outstanding protection in the harshest applications. An optional air-purge fitting is available that allows air to be forced into the body of the stage to create a positive internal pressure that resists particulates from entering the stage. The tabletop utilizes stainless steel Helicoil TM inserts to protect mounting holes against thread wear. Optional stage finishes are available for various environments. These include electroless nickel plating and vacuum preparation. Load (kg) 60 55 50 45 40 35 30 25 20 15 10 5 0 Lsc Lvc 0 25 50 75 100 125 150 175 200 225 250 275 300 Distance of Load C.G from Tabletop () L VC and L SC Cantilevered Load Capability (ATS1000)

ATS1000 Series SPECIFICATIONS Linear Stages ATS1000 Series ATS1000 Series ATS10010 ATS10015 ATS10020 ATS10030 Total Travel Drive System Bus Voltage Continuous Current Feedback Resolution 1) M aximum Travel Speed (2) M aximum Load Accuracy A pk A rms Repeatability (bidirectional) Straightness and Flatness Nominal Stage (with motor) Construction Weight 100 150 200 300 Precision Ball Screw/Brushless Servomotor (BMS60-A-D25-E2000H) Up to 160 VDC Up to 2.3 A Up to 1.6 A Noncontact Rotary Encoder (2000 line) 8 /rev lead 1.0 µm @ 2000 steps/rev Motor Resolution ( 400 / s Standard 3) H ALAR 50 kg (horizontal), 25 kg (vertical), 50 kg (side) ± 4 µ m ± 6 µ m ± 8 µ m ±12 µ m ( ±1.0 µ m (3) ± 1.0 µm standard; ±0.5 µm with HALAR ± 2.4 µ m ± 3.6 µ m ± 4.8 µ m ±7.2 µ m A TS1000 7.2 kg (15.9 lb) 7.7 kg (16.9 lb) 9.4 kg (20.7 lb) A TS1000-B 8.1 kg (17.8 lb) 8.7 kg (19.1 lb) 10.8 kg (23.8 lb) A TS1000-H 8.0 kg (17.7 lb) 8.7 kg (19.1 lb) 9.4 kg (20.6 lb) 11.0 kg (24.2 lb) Black Anodized Aluminum Body with Hardcoated Tabletop Notes: 1. Excessive duty cycle may impact stage accuracy. 2. Payload specifications are for single axis systems and based on ball screw and bearing life of 2500 km (100 million inches) of travel. 3. Available with Aerotech controllers. 4. Specifications are for single-axis systems, measured 50 above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications. ATS1000 Series ATS10040 ATS10045 ATS10050 ATS10060 Total Travel Drive System Bus Voltage Continuous Current Feedback Resolution 1) M aximum Travel Speed (2) M aximum Load Accuracy A pk A rms Repeatability (bidirectional) Straightness and Flatness Nominal Stage (with motor) Construction Weight 400 450 500 600 Precision Ball Screw/Brushless Servomotor (BMS60-A-D25-E2000H) Up to 160 VDC Up to 2.3 A Up to 1.6 A Noncontact Rotary Encoder (2000 line) 8 /rev lead 1.0 µm @ 2000 steps/rev Motor Resolution ( 400 / s Standard 3) H ALAR 50 kg (horizontal), 25 kg (vertical), 50 kg (side) ± 16 µ m ± 18 µ m ± 20 µ m ±24 µ m ( ±1.0 µ m (3) ± 1.0 µm standard; ±0.5 µm with HALAR ± 9.6 µ m ± 10.8 µ m ± 12.0 µ m ±14.4 µ m A TS1000 10.4 kg (22.9 lb) 11.0 kg (24.2 lb) 12.6 kg (27.7 lb) A TS1000-B 12.4 kg (27.3 lb) 13.4 kg (29.5 lb) 15.5 kg (34.1 lb) A TS1000-H 12.3 kg (27.1 lb) 13.9 kg (30.5 lb) 15.4 kg (33.9 lb) Black Anodized Aluminum Body with Hardcoated Tabletop Notes: 1. Excessive duty cycle may impact stage accuracy. 2. Payload specifications are for single axis systems and based on ball screw and bearing life of 2500 km (100 million inches) of travel. 3. Available with Aerotech controllers. 4. Specifications are for single-axis systems, measured 50 above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

ATS1000 Series DIMENSIONS ATS1000 ATS1000-B

ATS1000 Series DIMENSIONS Linear Stages ATS1000-H ATS1000 Series

HDZ10M DIMENSIONS HDZ10M

ATS1000 Series ORDERING INFORMATION Ordering Example Linear Stages ATS1000 Series AT10 010 -M -80P -BMS -NC Series Travel 010 015 020* 030 040 045** 050* 060 * ATS1000-H only **ATS1000 and ATS1000-B only Construction VAC3 VAC6 Nickel Waycover Option -B -H Mounting and Grid Pattern -M -U Drive Screw Motor -80P -BMS -DC -SM -NM -BM200 Limits -NC -NO Options -FB10 -P02 -BRK23 Coupling -NO COUPLING -STD COUPLING -LGR MTR COUPLING ATS1000 Series Linear Ball-Screw Stage ATS10010 100 (4 in) travel stage with ground ball screw, recirculating bearings, and limits ATS10015 150 (6 in) travel stage with ground ball screw, recirculating bearings, and limits ATS10030 300 (12 in) travel stage with ground ball screw, recirculating bearings, and limits ATS10040 400 (16 in) travel stage with ground ball screw, recirculating bearings, and limits ATS10045 450 (18 in) travel stage with ground ball screw, recirculating bearings, and limits ATS10060 600 (24 in) travel stage with ground ball screw, recirculating bearings, and limits ATS1000-B Series Linear Ball-Screw Stage with Bellows ATS10010-B 100 (4 in) travel stage with ground ball screw, recirculating bearings, limits, and bellows ATS10015-B 150 (6 in) travel stage with ground ball screw, recirculating bearings, limits, and bellows ATS10030-B 300 (12 in) travel stage with ground ball screw, recirculating bearings, limits, and bellows ATS10040-B 400 (16 in) travel stage with ground ball screw, recirculating bearings, limits, and bellows ATS10045-B 450 (18 in) travel stage with ground ball screw, recirculating bearings, limits, and bellows ATS10060-B 600 (24 in) travel stage with ground ball screw, recirculating bearings, limits, and bellows ATS1000-H Series Linear Ball-Screw Stage with Hard Cover ATS10010-H 100 (4 in) travel stage with ground ball screw, recirculating bearings, limits, hard cover and side seals ATS10015-H 150 (6 in) travel stage with ground ball screw, recirculating bearings, limits, hard cover and side seals ATS10020-H 200 (8 in) travel stage with ground ball screw, recirculating bearings, limits, hard cover and side seals ATS10030-H 300 (12 in) travel stage with ground ball screw, recirculating bearings, limits, hard cover and side seals ATS10040-H 400 (16 in) travel stage with ground ball screw, recirculating bearings, limits, hard cover and side seals ATS10050-H 500 (20 in) travel stage with ground ball screw, recirculating bearings, limits, hard cover and side seals ATS10060-H 600 (24 in) travel stage with ground ball screw, recirculating bearings, limits, hard cover and side seals Stage Construction Options -VAC3 Vacuum preparation of stage to 10-3 torr (no bellows and no side seals) -VAC6 Vacuum preparation of stage to 10-6 torr (no bellows and no side seals) -Nickel Electroless nickel finish (consult factory) Mounting and Grid Pattern -M Metric dimension mounting pattern and holes -U English dimension mounting pattern and holes Drive Screw -80P 8 /per rev precision-ground ball screw Motor -BMS -DC -SM -NM -BM200 Brushless servomotor with connectors and 2000-line encoder; requires cable (BMS60-A-D25-E2000H) DC servomotor with connector and 2000-line encoder; requires cable (1050LT-MSOF-E2000LD) Stepping motor with connector and home marker pulse (one per rev); requires cable (101SMB2-HM) No motor or encoder Brushless servomotor with connectors, 2000-line encoder, and fail-safe brake; requires cable (BM200-D25- E2000H-BRK23)

ATS1000 Series ORDERING INFORMATION Limits -NC Normally-closed end of travel limit switches (standard) -NO Normally-open end of travel limit switches Options -BRK23 24 VDC spring-set motor brake for NEMA 23 motor -FB10 Foldback motor kit -P02 Air-purge pressure fittings Coupling -NO COUPLING No coupling -STD COUPLING 0.25 in coupling -LGR MTR COUPLING 0.375 in coupling Accessories (to be ordered as separate line item) ALIGNMENT-NPA Non-precision XY assembly ALIGNMENT-NPAZ Non-precision XZ or YZ assembly ALIGNMENT-PA10 XY assembly; 10 arc sec orthogonal ALIGNMENT-PA10Z XZ or YZ assembly with L-bracket; 10 arc second orthogonal ALIGNMENT-PA5 XY assembly; 5 arc sec orthogonal ALIGNMENT-PA5Z XZ or YZ assembly with L-bracket; 5 arc second orthogonal HDZ10M Metric right-angle L-bracket HALAR High-accuracy system linear error correction for accuracy and repeatability