High-Flow Springless Diaphragm Valve

M S - 0 2-2 4 High-Flow Springless Diaphragm Valve Patent Pending DF Series For ultra-high-purity applications Pressures to 300 psig (20.6 bar) 1/4 in. high-flow, 3/8 and 1/2 in. end connections www.swagelok.com

DF Series High-Flow Diaphragm Valve Features Design Flow coefficient of 0.62 for high-flow requirements. Springless design minimizes particle generation. Fully swept flow path enhances purging and gas replacement. Minimal PCTFE volume for low gas adsorption and desorption. Fully contained seat insert for increased cycle life. 1/4 in. high-flow H Type VCR fittings, 1/2 in. VCR fittings, 3/8 and 1/2 in. butt weld end connections. Materials and Surface Finishes Wetted components: 316L VAR stainless steel body, PCTFE seat insert, and Elgiloy diaphragms. Choice of standard, P, or PX internal finishes for a variety of application requirements. P and PX finishes are manufactured to Swagelok Specification SC-01. Cleaning and Testing Ultra-high-purity processing to Swagelok Specification SC-01 with P and PX finishes. Standard finish is cleaned and packaged to Swagelok Specification SC-11. All valves are helium leak tested to a rate of 1 10 9 std cm 3 /s at the seat, envelope, and all seals. Pneumatic Actuation Choice of normally closed or normally open models for remote actuation. Low actuation pressure with air or nitrogen. Lightweight aluminum construction. Manual Actuation Three-quarter turn actuation with round handle. Visual indication of open and closed position in top of handle. Choice of seven handle colors. F l ow Data Pressure Drop to Atmosphere, psig (bar) U.S.gal/min (L/min) Water C v = 0.62 Materials of Construction std ft 3 /min (std L/min) 10 (0.68) 2.0 (7.4) 7.0 (200) 50 (3.4) 4.4 (17) 19 (530) 100 (6.8) 6.2 (23) 33 (930) Part Name Wetted Parts Material Grade/Specification Body 316L VAR SS/A479 Seat PCTFE/AMS 3650 Diaphragms Elgiloy/AMS 5876 Pneumatic Actuator Parts Cylinder, cap, pistons O-rings Aluminum Buna N Te chnical Data Pressure Rating, psig (bar) Temperature Rating, F ( C) Flow Coefficient, (C v ) Operating Vacuum to... 300 (20.6) manual 125 (8.6) pneumatic Burst 3200 (220) Operating Bakeout (with valve open) 10 to 150 ( 23 to 65) 302 (150) Nominal 0.62 Springs Manual Actuator Parts Handle Actuator, bonnet nut Bonnet 17-7 stainless steel Polyester with stainless steel insert 316 stainless steel 17-4PH stainless steel Orifice Size, in. (mm) Internal Volume, in. 3 (cm 3 ) All models 0.23 (5.8) HVCR ends 0.27 (4.4) Actuation Pressure, psig (bar) Air Displacement, in. 3 (cm 3 ) Pneumatic models Pneumatic actuator 70 to 100 (4.8 to 6.8) 0.13 (2.1) 2

Process Specifications Refer to Swagelok Specifications SC-01 and SC-11 for details on processes, process controls, and process verification. Surface Finish Surface Roughness Average (R a ) Process Specification Assembly and Packaging Testing Cleaning PX P Standard Electropolished and finished to an average of 4 µin. (0.10 µm) Electropolished and finished to an average of 5 µin. (0.13 µm) Finished to an average of 10 µin. (0.25 µm) Swagelok Specification SC-01 Swagelok Specification SC-11 Performed in Class 10 work areas, valves are double bagged and vacuum sealed in cleanroom bags Performed in specially cleaned areas, valves are individually double bagged Inboard helium leak tested to a rate of 1 10 9 std cm 3 /s at the seat, envelope, and all seals. Optional: outboard helium leak tested to a rate of 5 10 7 std cm 3 /s Ultra-high-purity cleaning with a continuously monitored, deionized water, ultrasonic cleaning system Special cleaning with non-ozone-depleting chemicals Performance Specifications Refer to DF Series Diaphragm Valve Technical Report NC-600DF for surface finish graphs, cleanliness data, and lab cycle test data. Options Seat Material Vespel For temperatures from 50 to 270 F (10 to 132 C). Includes fluorocarbon O-rings in pneumatic actuator. All other materials and ratings remain the same. To order, insert V after the series designator in the valve ordering number as shown. Example: 6 LV- D FVB W 8-PX-C Handle Colors Seven handle colors available for color coding of process lines. Available in black (-BK), blue (-BL), green (-GR), orange (-OR), red (-RD), white (-WH), or yellow (-YW). To order, add the preferred handle color designator to the valve ordering number. Example: 6 LV- D F B W 8-P-RD Indicator Switch Transmits a signal to an electrical device indicating either the open or closed position of the pneumatically actuated valve. Features single-pole, single-throw switch rated at 1/2 A for 115 V (ac) resistive. Includes a 24 in. wire lead with an in-line clip. Available assembled on any n o r m a l ly cl o s e d, pneumatically actuated DF Series valve, or for field assembly. To order a valve with an indicator switch, add M for a normally open switch, or M-2 for a normally closed switch, as a suffix to the valve ordering number. Example: 6LV- D F B W 8 - P - CM 6 LV- D F B W 8 - P - CM - 2 To order a kit for an existing valve, use ordering number M S - I S K - D F - C M for a normally open switch, or M S - I S K - D F - C M - 2 for a normally closed s w i t c h. Panel Mounting Available for manual model. Includes threaded bonnet nut and 1 1 /8 inch hex panel mount nut. Requires 0.96 in. (24.4 mm) diameter hole. To order, add - P M to the valve ordering number as shown. Example: 6LV- D F B W 8 - R D- P M 3

Dimensions and Ordering Information Pneumatic Actuator 1.50 (38.1) Air Inlet 1/8-27 NPT M a nual Actuator 1.50 (38.1) J Hex J Hex 3.71 (94.2) 3.18 (80.8) 4 mounting holes, M5 X 0.8-6H thread, 0.25 (6.4) deep, located 45 from centerline, on a 1.00 (25.4) bolt circle H Female VCR 1.25 (31.8) 1.25 (31.8) H 0.45 H 0.45 (11.4) (11.4) Male Rotatable HVCR Butt weld Bottom Vi e w Dimensions are in inches (mm), for reference only - subject to change. End Connection Inlet and Outlet Basic Ordering Number 3/8 in. butt weld 6LV-DFBW6-10 mm butt weld 6LV-DFBW10M- 1/2 in. butt weld 6LV-DFBW8-12 mm butt weld 6LV-DFBW12M- 1/4 in. male rotatable HVCR Dimensions,in. (mm) H 2.25 (57.1) 2.78 (70.6) 2.96 (75.2) J Hex 3/4 5/8 Maintenance Kits Diaphragm Replacement Kit Includes two diaphragms and replacement instructions. To order, use kit ordering number E-3DK-DF 1/4 in. female HVCR to 1/4 in. male rotatable HVCR 1/2 in. male rotatable VCR For a complete ordering number, select the Basic Ordering Number, then add the desired Surface Finish designator followed by the Actuation designator (pneumatic or manual). Surface Finishes standard, average of 10 µin. (0.25 µm) Ra P electropolished, average of 5 µin. (0.13 µm) Ra PX electropolished, average of 4 µin. (0.10 µm) Ra Pneumatic Actuators Manual Actuators -C Normally closed -BK black -RD red -O Normally open -BL blue -WH white -CM Normally closed -GR green -YW yellow with Indicator Switch -OR orange Examples 6LV-DFBW6-P-BL 6LV-DFHFR4-PX-C 6LV-DFHMR4-P-O 2.96 6LV-DFHFR4HMR4-5/8 (75.2) 1/4 in. female HVCR 6LV-DFHFR4-6LV-DFHMR4-6LV-DFMR8-4.16 (106) 15/16 1/2 in. female VCR 6LV-DFFR8-1 1/16 P finish, blue handle PX finish, normally closed actuator P finish, normally open actuator Actuator Replacement Kit Includes upper assembly of valve and service instructions. Upper assembly of valve includes all components except for body and diaphragms. To order, select the preferred ordering number: Manual (green handle) PY-DF-K1-GR Pneumatic with Buna O-rings, standard (normally closed) A-DF-K1-C (normally open) A-DF-K1-O Pneumatic with fluorocarbon O-rings, for use with Vespel seat option: (normally closed) A-DFV-K1-C (normally open) A-DFV-K1-O 4

Multiport and Elbow Valves To customize a valve to meet your system requirements, select multiport or elbow flow path end connections for each port surface finish actuator (manual or pneumatic) Flow path Select the desired internal flow path as viewed from the top of the valve. Use the Flow Path Designator in the valve ordering number, page 6. a next to the port number indicates a port above the valve seat. b next to the port number indicates a port below the valve seat. Schematic closed Flow Path open Designator D End Connections Select an end connection for each port on the body starting with Port 1 and continuing in numerical sequence with Ports 2, 3, and 4. Place the End Connection Designator in the valve ordering number in the same sequence it is selected. End Connection Designator 4 port E 1/2 in. male rotatable VCR 7 K 1/2 in. female VCR 8 3/8 in. butt weld (3/8 0.035 in.) 9 A 1/4 in. female HVCR D 3 port B C F 1/4 in. male rotatable HVCR E D i m e n s i o n s Top View 4 1.125 (31.8) square L Side View 0.61 (15.5) (1/2 FVCR only) 0.45 (11.3) 1 2 1 2 G L 3 L L Not shown: 4 bottom mounting holes, same as 2 port body, page 4. 5 Exception: N body, NO mounting holes. M L End Connection Size and Style 1/2 in. male rotatable VCR 1/2 in. female VCR Dimensions, in. (mm) L 2.08 (52.8) M 1.90 (48.3) 2 port N 3/8 in. butt weld (3/8 0.035 in.) 1.125 (28.6) 1/4 in. female HVCR 1.39 (35.3) 0.95 (24.1) 1.21 (30.7) 1/4 in. male rotatable HVCR 1.48 (37.6) 1.30 (33.0) R Dimensions are in inches (mm), for reference only - subject to change. Surface Finish and Actuator Refer to valve ordering number matrix on page 6 for selection details. 5

Multiport Valve Ordering Number Build a valve ordering number by combining the designators in the sequence shown below. 6LV D F C D D D P X C PM MATERIAL Designator 6LV 316L vacuum arc remelt stainless steel SERIES Designator DF High-Flow Springless Diaphragm Valve FLOW PATH Designator A B C D F G L R Select 1 END CONNECTION Designator Select a designator for each port on your valve. Port 1 Port 2 Port 3 Port 4 OPTIONS Designator PM Panel mount (manual only) ACTUATION Designator Pneumatic C Normally closed O Normally open CM Normally closed with indicator switch Manual BK Black RD Red BL Blue WH White GR Green YW Yellow OR Orange SURFACE FINISH Designator PX electropolished, average of 4 µin. (0.10 µm) Ra P electropolished, average of 5 µin. (0.13 µm) Ra standard, average of 10 µin. (0.25 µm) Ra Typical Ordering Numbers Order Number 6LV-DFLEEP-RD 6LV-DFC999PX-O 6LV-DFADDDPX-C Body Flow Path L C A End Connections Port 1 1/4 in. male rotatable HVCR 3/8 in. butt weld 1/4 in. female HVCR Port 2 3/8 in. butt weld 1/4 in. female HVCR Port 3 3/8 in. butt weld 1/4 in. female HVCR Port 4 1/4 in. male rotatable HVCR Surface Finish P PX PX Actuator Style red handle normally open normally closed 6

M u l t i valve Manifo l d s To customize a manifold to meet your system requirements, select flow path end connections for each port surface finish actuator (manual or pneumatic) F l ow Pa t h Select the desired internal flow path. Use the Flow Path Designator in the manifold ordering number, page 8. P1, P2, and P3 designate port numbers. V1 and V2 designate valve numbers. Description Schematic Flow Path Designator 2 valve, 3 port 1V D i m e n s i o n s 1V Body 5V Body 5.67 (144.0) 2.52 (64.0) Port 2 Port 2 1 valve, 3 port 5V 4.07 (103.4) L2 3.59 (91.2) L2 Port 1 Port 3 Port 1 End Connections Select an end connection for each port on the body starting with Port 1 and continuing in numerical sequence with Ports 2, and 3. Place the End Connection Designator in the valve ordering number in the same sequence it is selected. L1 L3 Front View 2.59 (65.8) 0.45 (11.4) 1.25 (31.8) L1 L3 Front View 1.58 (40.1) Port 3 Ports 1 and 3 End Connection Designator Bottom View 4 mounting holes, M5 X 0.8-6H thread, 0.25 (6.4) deep, located 45 from centerline, on a 1.00 (25.4) bolt circle Bottom View 3/8 in. butt weld (3/8 0.035 in.) 9 1/4 in. female HVCR D 1/4 in. male rotatable HVCR E Po rts 1 and 3 End Connection 3/8 in. butt weld (3/8 0.035 in.) Dimensions,in. (mm) 1V Body 5V Body L1 L3 L1 L3 1.81 (46.0) 1.81 (46.0) 0.90 (22.9) 1/4 in. female HVCR 2.03 (51.6) 2.18 (55.4) 1.18 (30.0) Port 2 End Connection Designator 1/4 in. butt weld (1/4 0.035 in.) 3 1/4 in. male rotatable HVCR 2.39 (60.7) 2.18 (55.4) 1.18 (30.0) Po rt 2 Dimensions, in. (mm) 1V Body 5V Body End Connection L2 1/4 in. female VCR 2 1/4 in. male rotatable VCR 1 1/4 in. butt weld (1/4 0.035 in.) 2.79 (70.9) 1/4 in. female VCR 2.66 (67.6) 1/4 in. male rotatable VCR 3.35 (85.1) Dimensions are in inches (mm), for reference only - subject to change. Surface Finish and Actuator Refer to manifold ordering number matrix on page 8 for selection details. 2.54 (64.5) 7

Multivalve Ordering Number Build a multivalve Ordering Number by combining the designators in the sequence shown below. 6LV F 1V D 2 D P X A A Material Designator 6LV 316L vacuum arc remelt stainless steel Series Designator F High-Flow Springless Diaphragm Valve Flow Path Designator 1V 2 valve, 3 port body 5V 1 valve, 3 port body Actuation Designator Pneumatic A Normally closed B Normally open C Normally closed with indicator switch Manual T Black W Red U Blue Y White S Green Z Yellow V Orange End Connection Designator Select a designator for each port on your valve. Port 1 Port 2 Port 3 Surface Finish Designator PX electropolished, average of 4 µin. (0.10 µm) Ra P electropolished, average of 5 µin. (0.13 µm) Ra standard, average of 10 µin. (0.25 µm) Ra Typical Ordering Numbers Order Number 6LV-F1V939PX-AB 6LV-F5VD1EP-S Body Style 1V 5V End Connections Port 1 3/8 in. butt weld 1/4 in. female HVCR Port 2 1/4 in. butt weld 1/4 in. male VCR Port 3 3/8 in. butt weld 1/4 in. male HVCR Surface Finish PX P Actuators Valve 1 normally closed green handle Valve 2 normally open S a fe Component Selection When selecting a component, the total system design must be considered to ensure safe, t ro u ble-free perfo r m a n c e. Component function, material compatibility, adequate ratings, p ro p e r i n s t a l l a t i o n, o p e r a t i o n, and maintenance are the responsibilities of the system designer an user. C a u t i o n : Do not mix or interch a n ge parts with those of other manu f a c t u r e rs. Vespel TM DuPont Elgiloy TM Elgiloy Limited Partnership Swagelok, VCR TM Swagelok Marketing Co. 1997, 1998 Swagelok Marketing Co. Printed in U.S.A., CR September 1998, R1

www.swagelok.com Diaphragm Valves DL and DS Series Packless, all-metal containment Pressures from vacuum to 3500 psig (241 bar) Temperatures from 100 to 250 F ( 73 to 121 C)

2 DL and DS Series Diaphragm Valves Features DL Series DL series diaphragm valves require just one-quarter turn of the handle to actuate the valve from fully open to closed. Position indicator ring provides visual confirmation that the valve is fully open or closed. Splined handle and actuator prevent handle slippage and assure positive valve actuation. DS Series DS series diaphragm valves require approximately 1 1/2 turns to operate from fully open to closed. Flow coefficient of 0.30 for high-flow requirements. VCR, weld, gageable Swagelok tube fitting, NPT, and VCO end connections SS-DLV51 shown Repetitive shutoff with fully contained softseat stem tip Bottom mounting and panel mounting as standard Technical Data Flow Coefficient at Turns Open Series DL DS Orifice in.(mm) 0.156 (4.0) Flow Coefficient C v 0.14 0.30 ➁ Pressure Rating at 70 F (20 C) 3500 psig (241 bar) Differential Back ➀ Pressure Max. at 70 F (20 C) 1500 psig (103 bar) Temperature Rating 100 to 250 F ( 73 to 121 C) ➀ A 17-7 PH spring is available to increase the rating to 2500 psig (172 bar). To order, add -PS as a suffix to the ordering number. Example: SS-DLS4-PS ➁ C v for 6LV-DSBW4 valve is 0.25. ➂ Determined using Swagelok ended valves. Internal ➂ Volume 0.18 in. 3 max. (2.9 cm 3 ) Flow Coefficient (C v ) 0.3 0.2 0.1 0 0 0.5 1.0 Number of Turns Open 1.5 Materials of Construction Component Grade/ASTM Specification 2 1 Pressure-Temperature Ratings 1 Set screw (DS series) Alloy steel/ansi 18.3 2 Handle ➅ (DS series) Aluminum 6061-T6/B211 Actuating lever ➅ (DL series) Aluminum 2011-T3/B211 Handle center (DL series) Sintered 316 SS 3 4 Temperature F ( C) 100 to 100 ( 73 to 37) Working Pressure psig (bar) 3500 (241) Handle insert (DL series) Nut (DL series) Indicator ring (DL Series) 3 Bonnet nut ➁ 66 nylon/d4066 18-8 SS 316 SS/A240 316 SS/A479 5 6 200 (93) 250 (121) 2950 (203) 2800 (192) 4 Panel mount nut Sintered 316 SS 5 Bonnet 316 SS/A479 7 6 Wiper ring Glass Filled PTFE 7 Actuator ➂➄ 416 SS/A582 8 8 Actuator button ➂ Brass 360/B16 9 9 Diaphragms (three) 316L SS/A240 10 Stem 11 Stem plug 316 SS/A479 12 Stem container 13 Stem insert PCTFE/D1430 14 Spring 316L SS/A313 15 Gasket ➃ 16 Guide ➀ 316 SS/A240 316 SS/A479 17 Nuts and ferrules 316 SS/A479 18 Body 316 SS/A479 17 10 11 12 14 15 16 13 18 Wetted parts are shown in italics. Lubricants, Platings, and Coatings ➀ Electropolished ➁ Silver-plated threads ➂ Molybdenum-disulfide based ➃ PTFE-coated ➄ Chrome-plated (DL series only) ➅ Epoxy-coated

DL and DS Series Diaphragm Valves 3 Process Specifications Surface Roughness (R a ) Finished to an average of 20 µin. (0.51 µm) Cleaning Special cleaning with non-ozone-depleting chemicals Surface Finish Standard Process Specification Swagelok Specification SC-11 Assembly and Packaging Performed in specially cleaned areas; valves are individually bagged Testing Electropolished and finished to an average of 8 µin. (0.20 µm) Ultrahigh - purity cleaning with a continuously monitored, deionized water, ultrasonic cleaning system Optional (See Options and Accessories) Swagelok Specification SC-01 Performed in Class 100 work areas; valves are double bagged and vacuum sealed in cleanroom bags Inboard helium leak tested to a rate of 4 x 10-9 std cm 3 /s at the seat, envelope, and all seals. Ordering Information /Dimensions Dimensions, in inches (millimeters), are for reference only and are subject to change. Globe Patterns 3.12 (79.2) open 0.78 (19.8) panel hole 0.41 (10.4) J max 0.26 (6.6) 1.74 (44.2) radius 0.035 (0.9) 1.06(26.9) H H 1/4 in. Butt Weld Angle Patterns 0.90 (22.9) dia. 0.25 (6.4) dia. 1.71 (43.4) 0.45 (11.4) 3/8 0.34 (8.6) 3.19 (81.0) open 0.16 (4.1) 1/4 in. Tube Socket / 3/8 in. Tube Butt Weld 0.78 (19.8) panel hole J 0.41 (10.4) max 1.87 dia. (0.47) 10-32 mounting hole, 0.25 (6.4) deep (2) all globe valves 1.00 (25.4) 1.00 (25.4) H 1.06(26.9) H Swagelok Tube Fitting 1/4 1.13 (28.7) 1.71 (43.4) 0.45 (11.4) End Connection 1/4 in. tube butt weld 1/4 in. tube socket / 3/8 in. tube butt weld 3/8 in. tube socket / 1/2 in. tube butt weld 1/4 in. Swagelok tube fitting 3/8 in. Swagelok tube fitting 6 mm Swagelok tube fitting 8 mm Swagelok tube fitting 1/4 in. female VCR fitting 1/4 in. female to male VCR fitting 1/4 in. VCO O-ring fitting 1/4 in. male VCR fitting 1/4 in. butt weld 1/4 in. tube socket / 3/8 in. tube butt weld 3/8 in. tube socket / 1/2 in. tube butt weld 3/8 in. Swagelok tube fitting 6 mm Swagelok tube fitting 8 mm Swagelok tube fitting DL Series DS Series Ordering Number 6LV-DLBW4 SS-DLTW4 SS-DLTW6 SS-DLS4 SS-DLS6 SS-DLS6MM SS-DLS8MM SS-DLV51 SS-DLV51-VCR4 SS-DLVCO4 SS-DLVCR4 6LV-DSBW4 SS-DSTW4 SS-DSTW6 SS-DSS6 SS-DSS6MM SS-DSS8MM 1/4 in. female VCR fitting SS-DSV51 1/4 in. female to male VCR fitting SS-DSV51-VCR4 1/4 in. male VCR fitting SS-DSVCR4 Dimension H in. (mm) 1.74 (44.2) 1.75 (44.4) 1.81 (46.0) 2.46 (62.5) 2.58 (65.5) 2.46 (62.5) 2.53 (64.3) 2.76 (70.1) 2.54 (64.5) 2.00 (50.8) 2.30 (58.4) 1.74 (44.2) 1.75 (44.4) 1.81 (46.0) 1/4 in. Swagelok tube fitting SS-DSS4 2.46 (62.5) Swagelok nuts are shown finger-tight, where applicable. 2.58 (65.5) 2.46 (62.5) 2.53 (64.3) 2.76 (70.1) 2.54 (64.5) 2.30 (58.4) Inlet Outlet Ordering Number DL Series 2.98 (75.7) 3.06 (77.7) 1/4 in. male NPT 1/4 in. female NPT SS-DLM4F4A 1.57 (39.9) 1.57 (39.9) DS Series 1/4 in. male NPT 1/4 in. female NPT SS-DSM4F4A 1.09 (27.7) 1.09 (27.7) 0.68 (17.3) 0.95 (24.1) 0.68 (17.3) 0.95 (24.1)

Options and Accessories Optional Stem Tip Materials To order a valve with an optional stem tip material, insert the stem tip designator after the series designator in the ordering number. Colored Handles To order colored handles, add the color designator as a suffix to the ordering number. Green is standard and requires no designator. Stem Tip Material PTFE Designator T Color Black Designator -BK Polyimide V Blue -BL Example: 6LV-DLTBW4. Orange Red -OR -RD Stem Replacement Kit A stem replacement kit includes a stem tip assembly, spring, guide ring, and installation instructions. Stem Tip Material PCTFE PTFE Polyimide Stem Replacement Kit Ordering Number 6L-3AK-DS-KF 6L-3AK-DS-T 6L-3AK-DS-VL White Yellow -WH -YW Example: 6LV-DLBW4-RD Surface Finish To order a valve with a surface finish of 8 µin. (0.20 µm) R a, add -P as a suffix to the ordering number. Example: 6LV-DLBW4-P Diaphragm Seal Kits A diaphragm seal kit includes three diaphragms (one set), one gasket, and installation instructions. Ordering number: SS-3DK-DS. Related Products DL and DS series valves are available with multiport, angle, and elbow bodies. See Multiport, Angle and Elbow Bellows and Diaphragm Valves for details. DL and DS series valves are available on monoblock, double, and triple multivalve manifolds. See Packless Bellows and Diaphragm Multivalve Manifold Selection Guide for details. High- and low-pressure DP series springless diaphragm valves are also available in multi-port, multi-valve, and SEMI PR3.1-compliant surface mount configurations. See Springless Diaphragm Valves for High Performance for details. Safe Product Selection When selecting a product, the total system design must be considered to ensure safe, trouble-free performance. Function, material compatibility, adequate ratings, proper installation, operation, and maintenance are the responsibilities of the system designer and user. Caution: Do not mix or interchange parts with those of other manufacturers. Swagelok, VCR, VCO TM Swagelok Company 17-7 PH TM AK Steel Corp. 2002 Swagelok Company Printed in U.S.A., MI January 2002, R4 MS-01-73

Springless Diaphragm Valve for High Performance Patent Pending DP Series Suitable for ultrahigh-purity applications 316L VIM/VAR stainless steel body High-pressure and low-pressure models 1/4 in. VCR metal gasket face seal fittings and butt weld end connections Manual or pneumatic actuation www.swagelok.com

Springless Diaphragm Valves Contents Features........................................2 Low-Pressure Models Manual Actuators..............................2 Flow Data......................................3 Technical Data.................................3 Process Specifications.........................3 Performance Specifications....................3 Materials of Construction......................4 Features Pressure rating: 145 psig (10 bar) Temperature rating: 10 to 150 F ( 23 to 65 C) Flow coefficient: 0.27 Fully contained PCTFE seat Interchangeable pneumatic and manual actuators Surface-Mounted Valves....................4 Dimensions and Ordering Information..........5 Multiport and Elbow Valves.....................6 Multivalve Manifolds............................8 High-Pressure Models Options.......................................10 Maintenance Kits..............................10 Features Pressure rating: 3045 psig (210 bar) Temperature rating: 10 to 150 F ( 23 to 65 C) Flow coefficient: 0.20 Fully contained PCTFE seat Interchangeable pneumatic and manual actuators Manual Actuators Locking Quick, quarter-turn actuation Lockout safety feature (prevents actuation can be locked in closed position only) Visual indication of valve position Usable with high- and low-pressure models Available in seven colors Directional Quick, quarter-turn actuation Usable with high- and low-pressure models Available in seven colors 2

Springless Diaphragm Valves Flow Data Pressure Drop to Atmosphere psig (bar) Low-Pressure Model C v = 0.27 Water U.S. gal/min (L/min) Air std ft 3 /min (std L/min) High-Pressure Model C v = 0.20 Water U.S. gal/min (L/min) Air std ft 3 /min (std L/min) 10 (0.68) 0.85 (3.2) 3.0 (86) 50 (3.4) 1.9 (7.2) 8.1 (230) 0.63 (2.4) 2.3 (64) 1.4 (5.4) 6.0 (170) 100 (6.8) 2.7 (10.2) 14.3 (410) 2.0 (7.6) 10.6 (300) Technical Data Pressure Rating psig (bar) Temperature Rating F ( C) Flow Coefficient (C v ) Orifice Size Internal Volume Pneumatic Actuator Model Operating Burst Operating Bakeout (valve open) Nominal All Models Body with BW4 Ends in. 3 (cm 3 ) Actuation Pressure psig (bar) Air Displacement in. 3 (cm 3 ) Low- Pressure High- Pressure Vacuum to 145 (10) Vacuum to 3045 (210) 3 200 (220) 12 200 (840) 10 to 150 ( 23 to 65) 302 (150) 0.27 0.20 0.16 in. (4.1 mm) 0.086 (1.4) 60 to 120 (4.1 to 8.2) 70 to 120 (4.8 to 8.2) 0.090 (1.5) 0.47 (7.7) Process Specifications See Swagelok Specifications SC-01 and SC-11 for details on processes, process controls, and process verification. Surface Finish Designator Surface Roughness (R a ) Process Specification Assembly and Packaging Testing Cleaning P P1 Electropolished and finished to an average of 5 µin. (0.13 µm) Swagelok Specification SC-01 Swagelok Specification SC-11 Performed in Class 10 work areas; valves are double bagged and vacuum sealed in cleanroom bags Performed in specially cleaned areas; valves are individually bagged Inboard helium leak tested to a rate of 1 10 9 std cm 3 /s at the seat, envelope, and all seals. Optional: outboard helium leak tested to a rate of 5 10 7 std cm 3 /s at valve s rated pressure up to 2500 psig (172 bar) Ultrahigh-purity cleaning with a continuously monitored, deionized water, ultrasonic cleaning system Special cleaning with non-ozone-depleting chemicals Performance Specifications See DP Series Diaphragm Valve Technical Report NC-600DP for surface finish data, cleanliness data, and lab cycle test data. 3

Springless Diaphragm Valves Materials of Construction Materials of Construction Part Name Body and integral end connections Welded end connections Material Grade/Specification Low-Pressure High-Pressure 316L SS/A479 Seat PCTFE/AMS 3650 Diaphragm Elgiloy /AMS 5876 Vented diaphragm Washer 17-7PH stainless steel Bonnet Bonnet nut Pneumatic Actuator Parts Cylinder, cap, pistons O-rings Springs Button Manual Actuator Parts Actuator Handle, locking Elgiloy/AMS 5876 17-4PH stainless steel aluminum Buna N 17-7PH stainless steel 316 stainless steel Button 316 stainless steel Handle, directional Wetted parts shown in italics. 316L VIM/VAR SS/A479 316 stainless steel 316 stainless steel nylon with stainless steel insert glass-filled nylon with stainless steel base Lubricants on wetted parts: none High-Pressure Model Bonnet nut Bonnet Button Washer Vented diaphragm Diaphragm Seat Pneumatic actuator Body Welded end connections Surface-Mounted Valves 4 SEMI 2787.1-compliant design Choice of high- or low-pressure manual valves Low-pressure pneumatic actuation Available in two- or three-port valves For more information, see MS-02-103, IGC Integrated Gas Components Ordering Number ➀ Actuation 2 Port 3 Port Directional Handle ➀ 6LVV-MSM-DP-2-P 6LVV-MSM-DP-3-P Locking Handle ➀ 6LVV-MSM-DPL-2-P 6LVV-MSM-DPL-3-P Pneumatic, Normally Closed 6LVV-MSM-DP-2-P-C 6LVV-MSM-DP-3-P-C ➀ Ordering number shown for low-pressure valves. For high-pressure valves, change DP to DPH in the ordering number. Ordering numbers are shown for blue handles. For other colors, see Options Handle Colors, page 10.

Dimensions and Ordering Information Low-Pressure Valves Pneumatic Actuator 1.49 (37.8) Air Inlet 1/8-27 NPT Directional Handle 1.49 (37.8) Locking Handle open position Springless Diaphragm Valves 1.49 (37.8) closed and locked position 1 1/8 in. Hex H 0.44 (11.2) Male Integral VCR End High-Pressure Valves Pneumatic Actuator 2.48 (63.0) 3.38 (85.9) Air Inlet 1/8-27 NPT 1 1/8 in. Hex 0.25 (6.4) 0.30 (7.6) 1.49 (37.8) H Butt Weld Directional Handle 2.84 (72.1) open 0.44 (11.2) 0.33 (8.3) hole, 0.18 (4.6) minimum shank diameter 1 1/8 in. Hex J Hex SWAGELOK H Female VCR End SWAGELOK 3.73 (94.7) open 0.44 (11.2) Locking Handle open position closed and locked position SWAGELOK Female VCR End SWAGELOK 4.07 (103.4) 1.49 (37.8) 0.33 (8.3) hole, 0.18 (4.6) minimum shank diameter 1 1/8 in. Hex 0.25 (6.4) 3.89 (98.8) 1 1/8 in. Hex J Hex SWAGELOK SWAGELOK 2.84 (72.1) open 1 1/8 in. Hex J Hex 3.89 (98.8) open 4.26 (108.2) 0.30 (7.6) H Butt Weld 0.44 (11.2) H Female VCR End 0.44 (11.2) H Male Rotatable VCR End 0.44 (11.2) Male Rotatable VCR End End Connection Inlet and Outlet 1/4 in. butt weld (short) Basic Ordering Number Low-Pressure ➀ High-Pressure ➁ 6 mm butt weld 6LVV-DPBW6M- 6LVV-DPBW4S- 1/4 in. male rotatable VCR 1/4 in. male integral VCR 1/4 in. female VCR 6LVV-DPFR4-6LVV-DPMR4-6LVV-DPVR4-1/4 in. butt weld 6LVV-DPBW4-6LVV-DPHBW4-1.74 (44.2) 6LVV-DPHBW6M- 6LVV-DPHBW4S- 6LVV-DPHFR4-6LVV-DPHMR4-6LVV-DPHVR4- Dimensions are in inches (millimeters), for reference only subject to change. Dimensions, in. (mm) H 1.61 (40.9) 1.74 (44.2) 2.78 (70.6) 2.30 (58.4) ➀ Standard handle color is blue. For other colors, see Handle Colors, page 10. ➁ Standard handle color is white. For other colors, see Handle Colors, page 10. For a complete ordering number, select the Basic Ordering Number, then add the preferred Surface Finish designator, P or P1. (See page 3.) To specify a locking handle, insert an L after the DPH or DP designator. To specify a pneumatic actuator, add -C for normally closed actuation, or -O for normally open actuation. J Hex 3/4 5/8 Bottom View 4 mounting holes, M5 X 0.8-6H thread, 0.25 (6.4) deep, located 45 from centerline, on a 1.00 (25.4) bolt circle 1.06 (26.9) 1.06 (26.9) Examples: 6LVV-DPHBW4-P1-RD High-pressure, 1/4 in. butt weld ends, P1 finish, red directional handle 6LVV-DPFR4-P-C Low-pressure, 1/4 in. female VCR ends, P finish, normally closed actuator 6LVV-DPLVR4-P Low-pressure, 1/4 in. male integral VCR ends, P finish, blue locking handle 5

Springless Diaphragm Valves Multiport and Elbow Valves To customize a valve to meet your system requirements, select designators for each of the following items. multiport or elbow flow path end connections for each port surface finish actuator (manual or pneumatic) Flow path Select the desired internal flow path as viewed from the top of the valve from the chart below. Use the Flow Path Designator in the valve ordering number, page 7. a next to the port number indicates a port above the valve seat. b next to the port number indicates a port below the valve seat. Ports 4 port Schematic 4 1 2 3 4 1 2 Flow Path closed open 4a 4a 1b 2b 1b 2b 3a 3a 4a 4a 1b 2b 1b 2b Designator D E End Connections Select an end connection for each port on the body, starting with Port 1 and continuing in numerical sequence with Ports 2, 3, and 4. Use the End Connection Designator in the valve ordering number in the same sequence it is selected. See page 7. End Connection Designator 3 3b 3b 1/4 in. butt weld (1/4 0.035 in.) 1 1 2 1b 2a 1b 2a A 3 4 1 2 1b 3b 4b 2a 1b 3b 4b 2a B 1/4 in. butt weld, short (1/4 0.035 in.) F 6 mm butt weld (6 mm 1 mm) 4 3 port 1 2 3 1b 3a 2b 1b 3a 2b C 1/4 in. female VCR 3 1 2 1a 2a 1a 2a F 3 3b 3b 1/4 in. male rotatable VCR 2 1 2 1b 2a 1b 2a G 3 3a 3a 4 1 1b 4a 1b 4a L 2 port 5 2 5b 2a 5b 2a N bottom port 1 1b 1b R 3 3a 3a 6

Dimensions and Ordering Information Top View 1.06 (26.9) square L Side View 0.44 (11.2) Springless Diaphragm Valves 1 L 3 L L 2 1 2 Not shown: 5 4 bottom mounting holes, same as 2-port body, page 5. Exception: N body, no mounting holes. Surface Finish and Actuator See valve ordering number matrix below for selection details. M End Connection 1/4 in. butt weld (1/4 0.035 in.) 1/4 in. butt weld, short (1/4 0.035 in.) 6 mm butt weld (6 mm 1 mm) 1/4 in. female VCR 1/4 in. male rotatable VCR Dimensions, in. (mm) L M 0.87 (22.1) 0.81 (20.6) 0.70 (17.8) 0.87 (22.1) 1.39 (35.3) 0.76 (19.3) 0.76 (19.3) 1.28 (32.5) 1.63 (41.4) Dimensions are in inches (millimeters), for reference only subject to change. Multiport Valve Ordering Number Build a valve ordering number by combining the designators in the sequence shown below. 6LVV D P C 1 1 3 P C Material Designator 6LVV 316L VIM/VAR stainless steel Series Designator DP Low-Pressure diaphragm valve DPL Low-Pressure diaphragm valve with locking handle DPH High-Pressure diaphragm valve DPHL High-Pressure diaphragm valve with locking handle Flow Path Designator A B C D E F G L N R Select One End Connection Designator Select a designator Port 1 for each port on Port 2 the valve. See Port 3 page 6. Port 4 Port 5 Typical Ordering Numbers Actuation Designator Pneumatic C Normally closed O Normally open CM Normally closed with indicator switch Manual BK Black RD Red BL Blue WH White GR Green YW Yellow OR Orange Surface Finish Designator P Electropolished, average of 5 µin. (0.13 µm) R a, SC-01 processing P1 Electropolished, average of 5 µin. (0.13 µm) R a, SC-11 processing Ordering Number 6LVV-DPR22P-RD 6LVV-DPHD1313P1-O 6LVV-DPLA323P Material Designator 46LVV Series Designator DP DPH DPL Body Flow Path R D A End Connections Port 1 1/4 in. male rotatable VCR 1/4 in. butt weld 1/4 in. female VCR Port 2 1/4 in. female VCR 1/4 in. male rotatable VCR Port 3 1/4 in. butt weld 1/4 in. female VCR Port 4 1/4 in. male rotatable VCR 1/4 in. female VCR Surface Finish P P1 P Actuator Style red directional handle normally open blue locking handle 7

Multivalve Manifolds 1V and 2V Manifolds Springless Diaphragm Valves Dimensions and Ordering Information 2.63 (66.8) Port 2 1.49 (37.8) 3.17 (80.5) L2 Port 1 Port 3 To customize a manifold to meet your system requirements, select designators for each of the following items: flow path end connections for each port surface finish actuator (manual or pneumatic) L1 Front View 2.46 (62.4) L3 0.45 (11.4) 1.06 (26.9) Flow Path Select the desired internal flow path. Use the Flow Path Designator in the manifold ordering number, page 9. P1, P2, and P3 designate port numbers. 1D Manifold Bottom View 4 bottom mounting holes, M5 0.8-6H thread, 0.25 (6.4) deep, located 45 from centerline, on a 1.00 (25.4) bolt circle V1 and V2 designate valve numbers. Description Schematic Flow Path Designator 1.49 (37.8) 2-valve, 3-port monoblock P1 P1 P2 V1 V2 P2 V1 V2 P3 P3 V1 P1 V1 P1 P2 P2 V2 P3 V2 P3 1V 2V 2.94 (7.47) 5.88 (149.4) 2-valve, 3-port double pattern P1 V1 P3 V2 P2 V2 Front view V2 Side view 1D End Connections Select an end connection for each port on the body starting with P1 and continuing in numerical sequence with P2 and P3. Place the End Connection Designator in the valve ordering number in the same sequence it is selected. End Connection P1 V1 P2 P3 V1 Designator 1/4 in. butt weld (1/4 0.035 in.) 3 1/4 in. female VCR 2 1/4 in. male rotatable VCR 1 L1 L3 Front View End Connection 1/4 in. butt weld (1/4 0.035 in.) 1/4 in. female VCR 1/4 in. male rotatable VCR Side View Bottom View Dimensions, in. (mm) 1V and 2V Manifold 1 D Manifold L1 L2 L3 L1, L2 and L3 1.81 (46.0) 2.03 (51.6) 2.39 (60.7) L2 2.79 (70.9) 2.66 (67.6) 3.35 (85.1) 1.81 (46.0) 2.03 (51.6) 2.39 (60.7) 0.87 (22.1) 1.39 (35.3) Dimensions are for manifolds with low-pressure actuators. Surface Finish and Actuator See manifold ordering number matrix on page 9 for selection details. Dimensions are in inches (millimeters), for reference only subject to change. 8

Springless Diaphragm Valves Multivalve Ordering Number Build a multivalve ordering number by combining the designators in the sequence shown below. 6LVV PH 1V 3 3 3 P1 A B Material Designator 6LVV 316L VIM/VAR stainless steel Series Designator P Low-pressure diaphragm valve PL Low-pressure diaphragm valve with locking handle PH High-pressure diaphragm valve PHL High-pressure diaphragm valve with locking handle Flow Path Designator 1V 2-valve, 3-port body monoblock 2V 2-valve, 3-port body monoblock 1D 2-valve, 3-port body double pattern End Connection Designator Select a designator Port 1 for each port on Port 2 the valve. See Port 3 page 8. Actuation Designator Pneumatic A Normally closed B Normally open C Normally closed with indicator switch Manual T Black W Red U Blue X White S Green Y Yellow V Orange Surface Finish Designator P Electropolished, average of 5 µin. (0.13 µm) R a, SC-01 processing P1 Electropolished, average of 5 µin. (0.13 µm) R a, SC-11 processing Typical Ordering Numbers Ordering Number 6LVV-P2V323P1-AB 6LVV-PL1D212P-SW Material Designator 6LVV Series Designator P PL Body Flow Path 2V 1D End Connections Port 1 1/4 in. butt weld 1/4 in. female VCR Port 2 1/4 in. female VCR 1/4 in. male VCR Port 3 1/4 in. butt weld 1/4 in. female VCR Surface Finish P1 P Actuators Valve 1 Valve 2 normally closed normally open green locking handle red locking handle 9

Options Handle Colors Maintenance Kits Diaphragm Replacement Kits Includes two diaphragms and replacement instructions. To order, use kit ordering number E-3DK-DP. Seven handle colors are available for color coding of process lines. Handle colors and designators are as follows: black (-BK), blue (-BL), green (-GR), orange (-OR), red (-RD), white (-WH), or yellow (-YW). To order, add the handle color designator to the valve ordering number. (No designator is required for a blue handle on a lowpressure valve, or a white handle on a high-pressure valve.) Examples: 6LVV-DPBW4-P-RD 6LVV-DPHMR4-P-BL Seat Material Vespel Temperature rating is from 50 to 300 F (10 to 150 C). Option includes fluorocarbon FKM O-rings in pneumatic actuator. All other materials and ratings remain the same. To order, insert V after the series designator in the valve ordering number as shown. Examples: 6LVV-DPVBW4-P-C 6LVV-DPHVVR4-P-C Indicator Switch Actuator Replacement Kits for Low-Pressure Valves Includes upper assembly of valve and service instructions. Upper assembly of valve includes all components except for body and diaphragms. To order, select the preferred ordering number: Directional handle (blue) NY-DP-K1-BL Locking handle (blue) NY-DPL-K1-BL Pneumatic with Buna O-rings, standard Normally closed A-DP-K1-C Normally open A-DP-K1-O Pneumatic with fluorocarbon FKM O-rings, for use with Vespel seat option: Normally closed A-DPV-K1-C Normally open A-DPV-K1-O Actuator Replacement Kit for High-Pressure Valves Includes upper assembly of valve and service instructions. Upper assembly of valve includes all components except for body and diaphragms. To order, select the preferred ordering number: Directional handle (blue) NY-DPH-K1-BL Locking handle (blue) NY-DPHL-K1-BL Pneumatic with Buna O-rings, standard Normally closed A-DPH-K1-C Normally open A-DPH-K1-O Pneumatic with fluorocarbon FKM O-rings, for use with Vespel seat option: Normally closed A-DPHV-K1-C Normally open A-DPHV-K1-O Transmits a signal to an electrical device, indicating the open or closed position of the pneumatically actuated valve. Features a single-pole, single-throw switch rated at 1/2 A for 115 V (ac). Includes a 24 in. (61 cm) wire lead with an in-line clip. Is available assembled on any normally closed, pneumatically actuated DP series valve, or as a kit for field assembly. To order a valve with an indicator switch, add M for a normally open switch or M-2 for a normally closed switch as a suffix to the valve ordering number. Examples: 6LVV-DPFR4-P-CM 6LVV-DPHBW4-P-CM-2 To order a kit for an existing valve, use ordering number MS-ISK-DP-CM for a normally open switch, or MS-ISK-DP-CM-2 for a normally closed switch. 10 Safe Product Selection When selecting products, the total system design must be considered to ensure safe, trouble-free performance. Function, material compatibility, adequate ratings, proper installation, operation, and maintenance are the responsibilities of the system designer and user. Swagelok, IGC, VCR TM Swagelok Company Elgiloy TM Elgiloy Limited Partnership Vespel TM DuPont 17-4PH, 17-7PH TM Armco Inc. 2000 Swagelok Company Printed in U.S.A., GLL May 2000, R0 MS-01-165

www.swagelok.com Diaphragm Valves LD Series Working pressures up to 300 psig (20.6 bar) Shutoff, bulk-gas distribution, and isolation service Cast, forged, and bar stock stainless steel body material 1/4 to 1 in. and 12 to 25 mm end connections

2 LD Series Diaphragm Valves Features No springs or threads in wetted areas enable cleaner operation. Contoured flow passages allow high flow. Tied diaphragm design provides positive stem retraction. Replaceable Diaphragm/Stem Subassembly PCTFE stem tip insert Welded Diaphragm Construction Diaphragms are welded to stem to prevent leakage. Three diaphragms offer optimum combination of strength, flexibility, and cycle life. Design provides all-metal fluid containment. Unique Stem Tip Design PCTFE stem tip insert promotes leaktight shutoff. Compensating stem tip helps prevent damage from overtightening. Body Construction Cast (1/2 and 1 in. Sizes) Machined wetted surfaces in body are finished to an average of 20 µin. (0.51 µm) R a. Optional electropolished body exteriors (ELD series) are available. Optional tube extension interiors electropolished to an average of 10 µin. (0.25 µm) R a are available. Forged (1/2 in. Size) Design results in compact size, lower internal volume. Wetted surfaces are electropolished to an average of 5 µin. (0.13 µm) R a. Bar Stock (1/2 and 1 in. Sizes) Valve and tubular shapes are combined into one integrated, compact component. Block bodies permit compact layout of bulk gas systems. Wetted surfaces are electropolished to an average of 5 µin. (0.13 µm) R a. Open Upper stem position indicates if valve is open or closed Closed Closed Union bonnet design prevents accidental disassembly Unique clamp ring design improves cycle life Tied diaphragm provides positive stem retraction 1/2 in. Size 1 in. Size

LD Series Diaphragm Valves 3 Materials of Construction Valve Body Cast Forged Bar Stock 1 Component 1 Handle Material Grade/ASTM Specification Polyester with 316 SS insert Handle set screw Alloy steel 2 2 Bonnet nut Silver-plated 316 SS/A479 3 Thrust washer Bronze 3 Actuator bearing (1 in. size) High-carbon chrome steel High-carbon chrome steel 4 4 Actuator 416 SS/A582 5 Spring washer Alloy steel 6 Bonnet 316 SS/A479 5 6 9a Thrust washer Bronze (1 in. size) High-carbon Bonnet bearing chrome (1 in. size) steel 7 Upper stem 316 SS/A479 Bronze High-carbon chrome steel 8 Clamp ring Brass/B16 7 8 9 10 9b 9c 9d 9e 9f 9 Diaphragm/stem subassembly See individual components below 9a Diaphragms (3) 316L SS/A240 9b Stem 316L SS/A479 9c Compression ring Virgin PTFE 9d Inner ring 316L SS/A479 9e Stem tip insert PCTFE/AMS 3650 9f Outer ring 316L SS/A479 10 Gasket PTFE-coated 316L SS/A240 11 11 Body Swagelok tube fitting and pipe end connections CF3M/ A351 316 SS/ A479 316L SS/ A182 316L SS/ A479 VCR fitting end connections 316L SS/A479 Tube extensions 316L SS/A269 Cast-body 1/2 in. size shown. Lubricant Molybdenum disulfide-based paste and dry film, petroleum lubricating grease Wetted components listed in italics. Testing SC-11 Process Every LD series diaphragm valve processed in accordance with Special Cleaning and Packaging (SC-11) is helium leak tested to a maximum leak rate of 4 10 9 std cm 3 /s. SC-01 Process Every LD series diaphragm valve processed in accordance with Ultrahigh-Purity Process Specification (SC-01) is helium leak tested to a maximum leak rate of 1 10 9 std cm 3 /s. Cleaning and Packaging Cast-Body Valves Every LD series cast-body diaphragm valve is cleaned and packaged in accordance with Special Cleaning and Packaging (SC-11). Cleaning and packaging in accordance with Ultrahigh-Purity Process Specification (SC-01) is available as an option for ELD series cast-body valves. Forged-Body and Bar Stock Valves Every LD series forged-body and bar stock diaphragm valve is cleaned and packaged in accordance with Ultrahigh-Purity Process Specification (SC-01). Cleaning in accordance with Special Cleaning and Packaging (SC-11) is available as an option.

4 LD Series Diaphragm Valves Pressure-Temperature Ratings Process Specifications Valve Body Temperature, F ( C) 20 ( 28) to 100 (37) 200 (93) 300 (148) Cast Forged and Bar Stock Working Pressure, psig (bar) 300 (20.6) 265 (18.2) 240 (16.5) 300 (20.6) 255 (17.5) 230 (15.8) Series Wetted Surface Roughness Average (R a ) µin. (µm) avg Swagelok Process Specification LD cast body 20 (0.51) body machined surfaces SC-11 ELD cast body 20 (0.51) body machined surfaces; 10 (0.25) tube extensions SC-11 Forged body 5 (0.13) P process SC-01 Bar stock body 5 (0.13) P process SC-01 Flow Data at 70 F (20 C) 1/2 in. Size 2.8 C v, 0.500 in. (12.7 mm) Orifice 1 in. Size 13 C v, 1.125 in. (28.6 mm) Orifice Pressure Drop to Atmosphere ( p) psi (bar) Air Flow std ft 3 /min (std L/min) Water Flow U.S. gal/min (L/min) Pressure Drop to Atmosphere ( p) psi (bar) Air Flow std ft 3 /min (std L/min) Water Flow U.S. gal/min (L/min) 10 (0.68) 31 (870) 9 (34) 50 (3.4) 84 (2300) 20 (75) 100 (6.8) 148 (4100) 28 (100) 10 (0.68) 140 (3900) 41 (150) 50 (3.4) 390 (11 000) 92 (340) 100 (6.8) 690 (19 500) 130 (490) Flow Coefficient at Turns Open Flow Coefficient at Turns Open 2.8 2.5 13 12 Flow Coefficient (C v ) 2.0 1.5 1.0 0.5 Flow Coefficient (C v ) 10 8 6 4 2 0 0 0.5 1.0 1.5 2.0 Number of Turns Open 2.5 0 0 1 2 3 Number of Turns Open 4 5 6

Ordering Information and Dimensions Dimensions, in inches (millimeters), are for reference only and are subject to change. Cast-Body Valves Select an ordering number. LD Series Diaphragm Valves 5 LD8 Series LD16 Series 2.25 (57.2) 4.00 (102) SWAGELOK 2.41 (61.2) SWAGELOK 2.95 (74.9) 4.35 (110) 5.12 (130) A End Connections Type Size Swagelok tube fitting Male VCR fitting 1/2 in. 12 mm Ordering Number 6L-LD8-BBXX Dimensions shown with Swagelok tube fitting nuts finger-tight. ➀ See specifications ISO 7/1, BS21, DIN-2999, JIS B0203. A in. (mm) 6L-ELD8-BBXX 5.30 6L-LD8-DDXX (135) 6L-ELD8-DDXX 1/2 in. 6L-ELD8-CCXX Female NPT 1/2 in. 6L-LD8-EEXX Female ISO➀ 1/2 in. 6L-LD8-FFXX Tube extension, 3 in.(76.2 mm) long 1/2 0.049 in. 6L-ELD8-11XX 3/4 0.065 in. 6L-ELD8-22XX 12 1 mm 6L-ELD8-33XX 18 1.5 mm 6L-ELD8-55XX 4.58 (116) 5.61 (142) 8.82 (224) 8.79 (223) 8.82 (224) 8.79 (223) End Connections Type Swagelok tube fitting Tube extension, 3 in.(76.2 mm) long Size 3/4 in. 1 in. A Ordering Number A in. (mm) 6L-LD16-AAXX 8.28 6L-ELD16-AAXX (210) 6L-LD16-BBXX 6L-ELD16-BBXX 25 mm 6L-LD16-EEXX 1 0.065 in. 23 1.5 mm 25 1.5 mm 6L-LD16-55XX 8.46 (215) 8.63 (219) 6L-ELD16-11XX 10.87 6L-ELD16-33XX (276) 6L-LD16-88XX Cast-Body Valves with Purge Ports Replace XX with BB for 1/4 in. integral male VCR fitting purge ports. Example: 6L-ELD8-BBBB Purge Ports Purge Port End Dimensions, in. (mm) Connections A B LD8 series None 0.88 (22.4) 1/4 in. male 1.83 (46.5) VCR fittings 1.69 (42.9) LD16 series None 1.35 (34.3) 1/4 in. male 3.40 (86.4) VCR fittings 2.16 (54.9) No purge ports A B Integral male VCR fittings A B

6 LD Series Diaphragm Valves Ordering Information and Dimensions Dimensions, in inches (millimeters), are for reference only and are subject to change. Forged-Body Valves Select an ordering number. 2.54 (64.5) 3.03 (77.0) 2.25 (57.2) OPEN CLOSE Bar Stock-Body Distribution Valves Valves eliminate need for tee and cross fittings. Branches contain shutoff valves. Main line and branches are in same plane. Purge ports are 1/4 in. rotatable male VCR fittings. Select an ordering number. Double Horizontal Tee Terminates main line in body. A Branch End Connections Type Size Ordering Number A in. (mm) Tube butt weld 3/8 0.049 in. 6L-ELD8-VVX-P 1/2 0.049 in. 6L-ELD8-WWX-P 2.88 (73.2) Main Branch Tube extension, 3 in.(76.3 mm) long Rotatable male VCR fitting Female VCR fitting 3/8 0.049 in. 1/2 0.049 in. 6L-ELD8-33X-P 6L-ELD8-11X-P 1/2 in. 6L-ELD8-66X-P 1/2 in. 6L-ELD8-77X-P 8.86 (225) 5.43 (138) 4.09 (104) 2.25 (57.2) 5.34 (136) 90 3.29 (83.6) Forged-Body Valves with Purge Ports Replace X with M for 1/4 in. rotatable male VCR fitting purge ports. Example: 6L-ELD8-11M-P Rotatable male VCR fitting 0.76 (19.3) OPEN 1.35 (34.3) CLOSE Protective cap 1.98 (50.3) 2.45 (62.2) 3.79 2.00 (96.2) (50.8) 3.42 (86.9) 0.62 (15.7) 1.63 (41.4) 2.63 (66.8) 9.38 (238) Tubing Size Main Branch 3/4 0.065 in. 1/2 0.049 in. 3/4 0.065 in. 1/2 in. rotatable male VCR fitting Series LD8 Ordering Number 6L-LDE-2B1P-A 6L-LDE-2H1P-A Length of main and branch line tubing is 3 in. (76.2 mm).

LD Series Diaphragm Valves 7 Single Horizontal Cross Directs main line flow through body. Double Horizontal Cross Directs main line flow through body. Branch Main Main Main Branch Main Branch 3.29 (83.6) 45 5.34 (136) 2.25 (57.2) 2.25 (57.2) 90 3.29 (83.6) 3.29 (83.6) 2.33 (59.2) 0.62 (15.7) 3.42 (86.9) 0.62 (15.7) 1.63 (41.4) 7.58 (193) 7.58 (193) 1.63 (41.4) 2.00 (50.8) 2.00 (50.8) 1.31 (33.3) 4.69 (119) 2.63 (66.8) 9.38 (238) Tubing Size Ordering Main Branch Series Number 1/2 0.049 in. 1/4 0.035 in. 6L-LDA-1A1P-A 1/2 0.049 in. 1/2 0.049 in. 6L-LDA-1B1P-A 1/2 0.049 in. 1/4 in. rotatable male VCR fitting 1/2 0.049 in. 1/2 in. rotatable male VCR fitting 6L-LDA-1H1P-A 3/4 0.065 in. 1/2 0.049 in. LD8 6L-LDA-2B1P-A 3/4 0.065 in. 1 0.065 in. 1 0.065 in. 1/2 in. rotatable male VCR fitting Length of main and branch line tubing is 3 in. (76.2 mm). 6L-LDA-1L1P-A 6L-LDA-2H1P-A 1/2 0.049 in. 6L-LDA-3B1P-A 1/2 in. rotatable male VCR fitting 6L-LDA-3H1P-A Tubing Size Main Branch 1/2 0.049 in. 1/2 0.049 in. 1/2 0.049 in. 1/2 in. rotatable male VCR fitting Series Length of main and branch line tubing is 3 in. (76.2 mm). Ordering Number 6L-LDC-1B1P-A 6L-LDC-1H1P-A 3/4 0.065 in. 1/2 0.049 in. 6L-LDC-2B1P-A 3/4 0.065 in. LD8 1/2 in. rotatable male VCR fitting 6L-LDC-2H1P-A 1 0.065 in. 1/2 0.049 in. 6L-LDC-3B1P-A 1 0.065 in. 1/2 in. rotatable male VCR fitting 6L-LDC-3H1P-A

Ordering Information and Dimensions Bar Stock-Body Isolation Valves Valves provide shutoff service for bulk gas distribution systems. Purge ports are 1/4 in. rotatable male VCR fittings. Select an ordering number. G 45 J E H C D F B A Tubing Size Ordering Dimensions, in. (mm) Inlet Outlet Number Series A B C D E F 1/2 0.049 in. 3/4 0.065 in. 3/4 0.065 in. 1 0.065 in. 1/2 0.049 in. 3/4 0.065 in. 3/4 0.065 in. 1 0.065 in. 6L-LDF-1B1P-A 6L-LDF-2C1P-A 6L-LDS-2C1P-Q 6L-LDS-3D1P-Q LD8 LD16 8.28 (210) 8.42 (214) 9.46 (240) Dimensions, in inches (millimeters), are for reference only and are subject to change. Length of main and branch line tubing is 3 in. (76.2 mm). 2.33 (59.2) 2.45 (61.5) 3.50 (88.9) 2.00 (50.8) 2.69 (68.3) 1.63 (41.4) 3.00 (76.2) 0.62 (15.7) 0.61 (15.5) 1.53 (38.9) 2.63 (66.8) G H 3.30 (3.42) 3.42 (86.9) 5.31 (135) J 2.25 (57.1) 4.00 (102) Accessories Diaphragm/Stem Subassembly Kit Includes replacement diaphragm/stem subassembly, gasket, and instructions. Ordering numbers: 6L-3K-LD8 for LD8 series; 6L-3K-LD16 for LD16 series. Gasket Kit Includes replacement gasket and instructions. Ordering numbers: 6L-8K-LD8 for LD8 series; 6L-8K-LD16 for LD16 series. Colored Handles Green handles are standard. Cast-Body Valves For colored handles, add a hyphen and a handle color designator to the ordering number. Example: 6L-LD8-BBXX-BL Forged-Body Valves For colored handles, insert a handle color designator in the ordering number. Example: 6L-ELD8-VVXBL-P Bar Stock-Body Valves For colored handles, replace A or Q in the ordering number with a handle color designator. Examples: 6L-LDE-2B1P-C 6L-LDS-2C1P-S Designators Handle Cast and Forged Bar Stock Valves Color Valves LD8 LD16 Blue BL C S Black BK B R Brown BW J Y Gold GD G W Orange OG L 1 Pink PN K Z Purple PR F V Red RD D T Silver IV M 2 White WH H X Yellow YW E U Safe Product Selection When selecting a product, the total system design must be considered to ensure safe, trouble-free performance. Function, material compatibility, adequate ratings, proper installation, operation, and maintenance are the responsibilities of the system designer and user. Caution: Do not mix or interchange parts with those of other manufacturers. Swagelok, Nupro, VCR TM Swagelok Company 2002 Swagelok Company Printed in U.S.A., MI August 2002, R2 MS-01-172