UMR Series Precision Double-Row Ball Bearing Linear Stages. Angular Deviation

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1 877 UMR Series Precision ouble-row Ball Bearing Linear Stages Shown with optional M-PBN Base Plate and UTR Series Rotation Stage (Order actuators, rotation stage and base plates separately) Low-profile design Steel construction for high stability and rigidity ouble-row ball bearings for higher load capacity (except UMR12) Angular deviation better than µrad ed micrometer mounting UMR Series Precision ouble-row Ball Bearing Linear Stages feature steel construction for high stability and rigidity. The ball bearings and precision-ground bearing surfaces provide exceptional linear travel, with angular deviation better than µrad. UMR3, UMR5, and URM8 Series Stages have double-row ball bearings making them an excellent choice for carrying high loads. UMR12 Series Stages contain a single row of ball bearings. In all UMR stages, the moving carriage is preloaded by two springs to ensure constant micrometer contact for smooth, backlash-free motion. Multiple drive options cover the range of precision positioning. Standard BM Series Micrometers provide 1 µm sensitivity, while M Series ifferential Micrometers offer 0.1 µm. For coarse motion with position locking, a fixed positioning kit replaces the micrometer with two opposing adjustment screws and lock nuts. An optional carriage locking kit includes a screw that mounts in the stage body opposite the micrometer. Motorized actuators can be added for precision motion control. Two stages can be easily stacked in an XY configuration and mounted to a table or breadboard (M-PBN mounting base required, except UMR8 and UMR12 Series). Multiaxis stage configurations are easily assembled using Q Series angle brackets. UMR stages are compatible with UTR and URM Rotation Stages, BGM Goniometers, and SL Series Mirror Mounts. Specifications Model (Metric) Angular eviation (µrad) Load Capacity [lb (N)] UMR3 (M-UMR3) < UMR5 (M-UMR5) < UMR8 (M-UMR8) < (900) UMR12 (M-UMR12) < (400) kαy Z Cz Q kαz Cx kαx Y X Q Cz a -Cx kαx kαy kαz Off-center load, Q Cz/(1 + /a) Centered normal load capacity Cantilever distance in mm Bearing constant Axial load capacity in the direction toward the actuator Axial load capacity in the direction away from the actuator rive torque for = 10 N Angular stiffness (roll) Longitudinal stiffness (pitch) Transverse stiffness (yaw) M-UMR5.16A M-UMR8.25A M-UMR8.51A M-UMR5.25A M-UMR12.4A UMR stages are available with clear apertures for demanding applications. Actuators sold separately. UMR3.5 (M-UMR3.5) UMR5.16 (M-UMR5.16) UMR5.25 (M-UMR5.25) UMR8.25 (M-UMR8.25) UMR8.51 (M-UMR8.51)

2 878 Manual Positioning Load Characteristics Model (Metric) UMR3.5 (M-UMR3.5) UMR5.5 (M-UMR5.5) UMR5.16 (M-UMR5.16) UMR5.25 (M-UMR5.25) UMR8.4 (M-UMR8.4) UMR8.25 (M-UMR8.25) UMR8.51 (M-UMR8.51) UMR12.40 (M-UMR12.40) UMR12.63 (M-UMR12.63) UMR12.80 (M-UMR12.80) Cz ( N) ( N) -Cx (BM) (N) -Cx (M) (N) (900) (900) a ( mm) ( Nm) Kαx Kαy Kαz Ordering Information Actuators must be ordered separately, please see below for specific Actuator/Stage combinations. Please see page 920 for detailed information. Model (Metric) Travel [in. (mm)] Actuator Sensitivity 1 µm 0.1 µm Motorized Actuator UMR12.40 (M-UMR12.40) UMR12.63 (M-UMR12.63) UMR12.80 (M-UMR12.80) Fixed Positioning Kit Carriage Lock UMR3 Series UMR3.5 (M-UMR3.5) 0.20 (5) BM11.5 M11-5 FP3-5 CL3-5 M-PBN3 UMR5 Series (UMR5 Series) UMR5.5 (M-UMR5.5) 0.20 (5) BM11.5 M11-5 CL6-5 M-PBN5 UMR5.16 (M-UMR5.16) 0.63 (16) BM11.16 M11-16 CL6-16 M-PBN5 UMR5.16A (M-UMR5.16A) 0.63 (16) UMR5.25 (M-UMR5.25) 0.98 (25) BM11.25 M11-25 CL6-25 M-PBN5 UMR5.25A (M-UMR5.25A) 0.98 (25) UMR8 Series UMR8.4 (M-UMR8.4) 0.16 (4) BM17.04N M17-4 LTA-HL * CL12-4 M-PBN8 UMR8.25 (M-UMR8.25) 0.98 (25) BM17.25 M17-25 LTA-HL * CL12-25 M-PBN8 UMR8.25A (M-UMR8.25A) 0.98 (25) UMR8.51 (M-UMR8.51) 2.01 (51) BM17.51 LTA-HL * CL12-51 M-PBN8 M-UMR8.51A 2.01 (51) BM17.51 LTA-HL* CL12-51 M-PBN8 UMR12 Series (UMR12 Series) UMR12.40 (M-UMR12.40) 1.57 (40) BM25.40 LTA-HL * FP18-40 CL18-40 M-PBN12 UMR12.40A (M-UMR12.40A) 1.57 (40) UMR12.63 (M-UMR12.63) 2.48 (63) BM25.63 LTA-HL * FP18-63 CL18-63 M-PBN12 UMR12.80 (M-UMR12.80) 3.15 (80) BM32.80 FP22-80 CL22-80 M-PBN12 * Newport motorized actuators VP-25AA, LTA-HS, CMA series and PZA12 are compatible as well, but require the following adapters: For UMR8, use AAPT-BM For UMR12, use AAPT-BM Please note that the travel range for some of these actuators is smaller than the actual travel range of the stage. For fixed positioning applications, order 2 each of the corresponding carriage locks. For Vacuum Compatible versions (50% price premium at time of order), append V6 to the part number (e.g. UMR3.5V6). Availability Guaranteed on select newport.com Base Plate Whatever size you need, Newport has a stage for your application. Phone: Fax:

3 879 Model AAPT-BM Model AAPT-BM Related Products.34 (8.6) ø.59 (15.0).82 (20.8) M12 X 0.50 (12.7).31 (7.9) ø.90 (22.9).75 (19.1) M18 X 1.00 (25.4) Model UMR3.5 2 HOLS, C BOR FOR A CLR,.79 (20).31 (7.8) 1.14 (29).61 (15.5) 3/8 40 TH UMR5 Series 1.12 (28.4) 3/8 40 TH.12 (3.0) H 1.97 (50) M Series ifferential Micrometers (see page 927).51 (13) 2 HOLS,,.79 (20) 1.00 (25.5).002 (.05) 2 HOLS, TH A CLR, C BOR FAR SI, (UMR5.5 ONLY) G 1.42 (36).79 (20).51 (13) LTA-HL C Servo Motor Actuator (see page 836).79 (20) 2 HOLS, 1.52 (38.5) UMR5A Series 0.50 M6 x 0.5 TH, BOTH SIS M6 x 0.5 TH, BOTH SIS 1.42 (36) 4 HOLS, TH A CLR,.79 (20) ACCSSIBL AT N OF TRAVL 4 HOLS, x F TH C, 2 HOLS, TH A, (UMR 5.5/5.16 ONLY) Mounting Bridles aid in constructing complex systems (see the Mounting Bridles Section). ø.236 (6.0) M6 each side 2 holes, M3 thd, B spacing. 4 holes, Thd A, M-UMR5.16A B x C spacing (28.4) (36.5).512 (13.0) 2 holes, M3 clr,.787 (20.0) spacing.787 (20.0) spacing 1.26 (32.0).512 (13.0).240 (6.1).787 (20.0) spacing (36.0) spacing Model (Metric) UMR5.5 (M-UMR5.5) UMR5.16 (M-UMR5.16) UMR5.25 (M-UMR5.25) A B C F G H 1.77 (45) 1.26 (32) 1.26 (32) 2.28 (58) 2.28 (58) 2.68 (68) Multi-axis stage configurations are easily assembled using UMR stages and Q Series angle brackets. Model (Metric) A B C UMR5.16A (M-UMR5.16A) UMR5.25A (M-UMR5.25A) (58.0) (68.0) (30.0) (39.0) Two UMR5.25 stages with a UTR rotation stage. Two UMR stages with an SL optical mount.

4 880 Manual Positioning UMR8A Series Model UMR8.4/ (58.4) Model UMR8.51 Model (Metric) A B C UMR8.4 (M-UMR8.4) UMR8.25 (M-UMR8.25) UMR8.51 (M-UMR8.51) 4 Holes, Thd A, (34.0) Spacing F (53.0) ø (80.0).709 (18.0) M12 ach Side (63.0).366 (9.3) 4 Holes, Thd A, B x Spacing 4 Holes, M4 Clr, (34.0) Spacing G 4 Holes, Thd A, C x Spacing, M-UMR8.51A 6 Holes, Thd A, B Spacing 4 Holes, M4 Thd, (63.0) Spacing Model (Metric) A B C F G UMR8.25A (M-UMR8.25A) (100.0) (92.0) (25.5) (53.0) M-UMR8.25A M (64) 2.09 (53) Model (Metric) A B C F UMR12.40 (M-UMR12.40) UMR12.63 (M-UMR12.63) UMR12.80 (M-UMR12.80) M18 x 1 M18 x 1 M22 x (142.5) 6.56 (166.5) 8.29 (210.5) 1.38 (35) 2.30 (58.4) 4 ACCSS HOLS, ø.30 (7.5), 1.34 (34) (UMR8.4 ONLY) 2.48 (63) 9 HOLS, C UMR12 Series (UMR12.80 ONLY) 3.62 (92).28 (7) (UMR8.4 ONLY) 4 HOLS, TH A CLR, 1.34 (34) F 3.03 (77) TH C (M8 TH, OPPOSIT SI) 1.34 (34) 3.15 (80) 1.89 (48) 3.62 (92) 2 HOLS, TH B CLR, C.71 (18) 4 HOLS, C x 2 ACCSS HOLS, ø.45 (11.5) C 3.07 (78) 2.48 (63).002 (.05) M12 x 0.5 TH, BOTH SIS 4.72 (120) TH B CLR, 4 HOLS, TH A CLR, 1.89 (48) See our website CAfor CA files 1.02 (26) 17 HOLS, 2 ACCSS HOLS, ø.45 (11.5) Phone: Fax:

5 881 Model UMR12.40A 4 holes, (48.0) spacing.512 (13.0) (142.5) ø1.417 (ø36.0) 14 holes, 1.00 Spacing (76.0) M (77.0) (120.0) M (36.0) 4 holes, (92.0) spacing 4 holes, M5 Thd (48.0) spacing (26.0) SS Series Precision Low-Profile Ball Bearing Linear Stages SS40 SS65 M-SS25 Stainless steel construction for highest rigidity and stability Specialized profiled bearing ways for maximum stiffness and load capacity Side-mounted micrometer for minimum stage envelope Non-influencing locking mechanism Low-profile design The SS Series Linear Translation Stages incorporate maximum performance in the smallest possible footprint. specially designed for industrial OM system integration, the stainless steel construction features higher rigidity, superior clean room acceptability, and better long-term stability than aluminum stages. SS stages are available in three sizes, 25 x 25, 40 x 40, and 65 x 65 mm, and are supplied with a BM Series Micrometer already installed. They can be directly stacked into an XYconfiguration, and an XYZ assembly can be built using the available 90 angle brackets. For mounting M-SS25 and SS40 stages to optical tables with a 1 in. (25 mm) grid or to other larger scale components, use our slotted base plates (see page 723). For rotational movement, these stages are compatible with the RS Series Rotation Stages (see page 911) and GON Series Goniometers (see page 914). Specifications M-SS25 SS40 (M-SS40) SS65 (M-SS65) Maximum Stage Travel [in. (mm)] 0.39 (10) 0.63 (16) 0.98 (25) Pitch (µrad) <200 <200 <200 Yaw (µrad) <100 <100 <100 Resolution (µm) Sensitivity (µm) Max Centered Load [lb (N)] 9.0 (40) 13.5 (60) 36 (160) Load Capacity, Vertical [lb (N)] 2.2 (10) 6.7 (30) 9.0 (40) Weight [lb (kg)] 0.15 (0.07) 0.33 (0.15) 1.01 (0.46) SS stages on slotted base plates (see page 723) SS Angle Brackets M-SS25 stages in XY assembly on M-B-2C base plate

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