NSK LINEAR GUIDES Miniature PU Series/PE Series. NSK Miniature Linear Guides, ideal for semiconductor manufacturing and medical equipment.

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1 NS INAR UIDS Miniature PU Series/P Series NS Miniature inear uides, ideal for semiconductor manufacturing and medical equipment.

2 Smooth motion and unprecedented lightness he advanced NS Miniature inear uides he new generation PU series/p series inherit the outstanding lineage of the NS miniature linear guides U series/ series. Improves dynamic friction characteristics and creates smoother motion with reduced noise intensity. he new design supports a wide variety of applications. eatures Miniature PU (Interchangeable with U Series) 1. Motion performance ighly smooth operation is achieved by smooth ball recirculation. 2. ightweight he ball slide is designed to be approximately 20% lighter than conventional models* by using resin. *Miniature U series/ series 3. Reduced noise intensity Resin components applied in the ball circulating system reduce collision noise between steel balls and the inner wall of circulating circuits. 4. ow particle generation he new design generates less particles compared to conventional models. 5. xcellent particle resistance ide Miniature P Compact space between the side of the rails and the inner walls of the ball slide prevents the entrance of foreign matter. (Interchangeable with Series) 6. igh corrosion resistance Stainless steel is a standard feature that provides excellent corrosion resistance. 7. asy handling Design prevents steel balls from dropping out of the ball slide even when the slide is removed from the rail. 8. ong-term maintenance-free quipped with NS 1 ubrication unit to extend product life. 9. ast delivery ide selection of interchangeable rails and ball slides for PU/P Series. 2

3 Smoother motion he resin ball recirculation component creates an optimal configuration, resulting in smoother motion. riction force, N est conditions: Oil lubrication (V68) Operating speed: mm/min oad cell rated capacity: 5N PU09R Movement distance, mm ig. 1-1 luctuations in Dynamic riction ow particle generation he PU series/p series, with resin ball recirculation components, generates less particles than a conventional ball recirculation system. Particle generation rate (particles/ m3), Particle diameter of 0.1 μm or more est conditions: rease lubrication (2) Operating speed: 600 mm/min Stroke: 200 mm P09R U PU ime, hr ig. 1-2 Particle eneration Rate all slide body PU Cutaway View Molded resin ball recirculation component Minimum clearance is maintained ig. 2 Cross Sectional ront View 3

4 Developed for precision positioning tables, supporting cutting-edge equipment, including semiconductor manufacturing and medical devices Reference Number Reference numbers will be used as reference before finalizing all specifications. Please specify the reference number, except design serial number, to identify the product when ordering, requesting estimates, or inquiring about specifications from NS. Preloaded Assembly ype PU 0470 A 2 -** P5 1 SRIS NAM SIZ RAI N (MM) A SID SAP COD MARIA/SURAC RAMN COD : Stainless Steel : Stainless Steel + surface treatment NUMR O A SIDS PR RAI DSIN SRIA NUMR ACCURACY COD P4: Super Precision P5: igh Precision P6: Precision PN: Normal 4: Super Precision with 1 5: igh Precision with 1 6: Precision with 1 N: Normal with 1 PROAD COD 0: ine Clearance - Z0 1: Slight Preload - Z1 Interchangeable ype Reference number for rail and ball slide assembly PU 0470 A 2 -** PC SRIS NAM SIZ RAI N (MM) A SID SAP COD MARIA/SURAC RAMN COD : Stainless Steel : Stainless Steel + surface treatment NUMR O A SIDS PR RAI DSIN SRIA NUMR ACCURACY COD PC: Normal C: Normal with 1 PROAD COD : ine Clearance - Z Reference number for ball slide of interchangeable type PAU A S - SRIS COD PAU: PU Series Interchangeable all Slide PA: P Series Interchangeable all Slide SIZ A SID SAP COD MARIA COD S: Stainless Steel OPION COD : quipped with 1 4

5 Reference number for rail of interchangeable type P1U SRIS COD P1U: PU Series Interchangeable Rail P1: P Series Interchangeable Rail SIZ 0470 RAI N (MM) R RAI SAP COD RAI S: PU09-12 SAP COD S: R: PU, PU09-12 R: P09, PU05-12 P: P P P: P MARIA/SURAC RAMN MARIA/SURAC COD : RAMN Stainless Steel COD : : Stainless Stainless Steel Steel : + Stainless surface Steel + treatment surface treatment N -** -** PC PC UIN DSIN SRIA ACCURACY COD PROAD COD SPCIICAION UIN SPCIICAION NUMR DSIN SRIA PC: ACCURACY Normal COD : PROAD ine Clearance COD - N: N: Non-butting Non-butting rails rails NUMR PC: Normal : Z ine - Z : : utting utting specification specification * Please consult NS for butting rail specification. Accuracy Standard e offer the following accuracy grades: Super precision grade P4, igh precision grade P5, Precision grade P6, and Normal grade PN for preloaded assembly type, and Normal grade PC for interchangeable type. able 1 olerance of preloaded assembly Characteristics Mounting height Variation of (All ball slides on a set of rails) Mounting width 2 or 3 Variation of 2 or 3 (All ball slides on reference rail) Running parallelism of surface C to surface A Running parallelism of surface D to surface Accuracy grade Super precision P4 ±10 5 ± 7 igh precision P5 ± 7 ±20 10 Precision grade P6 ±20 ±30 20 Shown in able 3, ig. 3, ig. 4 Unit: μm Normal grade PN ±40 25 ±50 30 able 3 Running parallelism of ball slide Accuracy grade Rail length (mm) Preloaded assembly type Unit: μm Interchangeable type over to (incl) P4 P5 P6 PN PC able 2 olerance of interchangeable type: Normal grade PC Accuracy grade Normal grade Unit: μm Characteristics Mounting height ±20 Variation of mounting height 1) Mounting width 2 or 3 ±20 Variation of mounting width 2 or 3 20 Running parallelism of surface C to surface A Running parallelism of surface D to surface 1) Variation on the same rail 2) Variation on multiple rails PC 30 2) Shown in able 3, ig. 3, ig. 4 ig. 3 Assembled Accuracy Mounting width 2 ig. 4 Assembled Accuracy Mounting width 3 5

6 Preload and Rigidity e offer three levels of preload: Slight preload (Z1) and ine clearance (Z0) for preloaded assembly types, along with interchangeable types of ine clearance (Z). Values for preload and rigidity of the preloaded assembly types are shown in ables 4 and 5. able 4 Preload and rigidity of preloaded assembly of PU series Standard type igh-load type Preload (N) Slight preload (Z1) Rigidity (N /μm) Slight preload (Z1) PU05R PU07AR PU09R PU12R PUA PU09UR PU12UR PU Clearance of fine clearance Z0 is 0-3 μm. herefore, preload is zero. Clearance values of the interchangeable types are shown in ables 6 and 7. able 6 Clearance of interchangeable type of PU Series Standard type igh-load type PU09R PU12R PUA PU09UR PU12UR PU ine clearance Z 3 or less 5 or less Unit: μm able 5 Preload and rigidity of preloaded assembly of P series Standard type igh-load type Preload (N) Slight preload (Z1) Rigidity (N /μm) Slight preload (Z1) P05AR P07R P09R P12AR PAR P09UR P12R PR able 7 Clearance of interchangeable type of P Series Standard type igh-load type P09R P12AR PAR P09UR P12R PR ine clearance Z 3 or less 5 or less Unit: μm Shoulder eight of the Mounting Surface and Corner Radius r igs. 5, 6 and ables 8, 9 show the shoulder height and corner radius dimensions. r b Õ r b Ó ra r a ig. 5 Shoulder for the rail datum face able 8 Shoulder height of the mounting surface and corner radius r (PU Series) Unit: mm Corner radius (Maximum) Shoulder height r a r b ( * ) PU PU PU PU PU ( * ) is the minimum recommended value based on the dimension in able 13. ig. 6 Shoulder for the ball slide datum face able 9 Shoulder height of the mounting surface and corner radius r (P Series) Unit: mm Corner radius (Maximum) Shoulder height r a r b ( * ) P P P P P ( * ) is the minimum recommended value based on the dimension in able 14. 6

7 ubrication Selection of grease: able 10 shows grease that is suitable for the PU series/p series. NS recommends PS2 as the standard grease for our miniature linear guides. able 10 Available reases rease code hickener ase oil ase oil kinematic viscosity mm 2 /s (40ºC) emperature range for use (ºC) Characteristic/Application PS2 ithium type Synthetic oil + Synthetic hydrocarbon oil.9 50 to 110 or low temperature operation Suitable for high speed and light load application 2 ithium type Mineral oil + Synthetic hydrocarbon oil to 70 or clean environment U Diurea type Synthetic hydrocarbon oil to 120 or clean environment ong term maintenance free: NS 1 M ubrication unit enables long term maintenance free operation. V 1 V 2 V 2 V 1 nd seal Protective cover NS 1 able 11 Dimensions when equipped with NS 1 M (PU Series) Standard ball slide length all slide length equipped with two NS 1, hickness of NS 1, V 1 Unit: mm hickness of protective cover, V 2 PU05R able 12 Dimensions when equipped with NS 1 M (P Series) Standard ball slide length all slide length equipped with two NS 1, hickness of NS 1, V 1 Unit: mm hickness of protective cover, V 2 P05AR Standard type PU07AR PU09R PU12R Standard type P07R P09R P12AR PUA PAR igh-load type PU09UR PU12UR PU igh-load type P09UR P12R PR all slide length equipped with NS 1 M = (Standard ball slide length) + (hickness of NS 1 M, V 1 Number of NS 1 M ) + (hickness of the protective cover, V 2 2) Additional NS 1 M units are available depending on the conditions of use. Particle Resistance nd seal: Installed on both sides of the ball slide are a standard feature. ottom seal function: It is designed to minimize the clearance between the side faces of rail and the inner walls of the slide, and prevent foreign matters from entering the ball slide. Applications Smoother motion and low particle generation iquid crystal manufacturing and printed circuit board manufacturing devices ightweight and low particle generation Semiconductor manufacturing devices (mounter, die bonder, and exposure device) entler tone and excellent particle resistant features Medical machinery and various precision devices 7

8 Dimensions Rail and ball slide assembly (preloaded type, interchangeable type) Please refer to able 13 for each dimension. 1 2-M PU φd h 3 2 PU05, 07, 09, 12 φd n 0 () PU07, 09, 12 1 N 1 1 φd h PU φd n 0 () ig. 7 Assembly (PU Series) PU able 13 Dimensions (PU Series) 8 Assembly all slide Rail Model Interchangeable eight Oil hole idth eight Pitch No. type 2 idth ength Mounting hole M Pitch ole diameter 1 N 1 1 PU05R M Ø PU07AR M Ø PU09R M PU09UR PU12R M PU12UR PUA M PU : Interchangeable type is available. able 14 Dimensions (P Series) Ø3 ( * 1) 3.2 (3.6) ( * 1) Drive-In grease fitting for Ø3 is available to PU. ( * 2) asic dynamic load rating is a load that allows for a 50-km rating fatigue life and is a vertical and constant load on the ball slide mounting surface. o convert C to C 100 for a 100-km rating fatigue life, divide C by Assembly all slide Rail Model Interchangeable eight idth ength Mounting hole Oil hole idth eight No. type M Pitch ole diameter 1 N 1 1 P05AR M Ø P07R M Ø P09R M P09UR Ø P12AR M P12R Ø PAR M PR Ø3.0 ( * 3) 3.2 (3.3) : Interchangeable type is available. ( * 3) Drive-In grease fitting for Ø3 is available to P. ( * 4) asic dynamic load rating is a load that allows for a 50-km rating fatigue life and is a vertical and constant load on the ball slide mounting surface. o convert C to C 100 for a 100-km rating fatigue life, divide C by 1.26.

9 Please refer to able 14 for each dimension. 1 2-M P φd h 3 2 P05, 07, 09, 12 φd n () 0 P07, 09, 12 1 N 1 φd 1 1 h P φd n () 0 ig. 8 Assembly (P Series) P Rail asic oad rating (*2) o fix rails of PU05R, use M2 0.4 cross-recessed pan head machine screw for precision instrument. (CIS No. 0 pan head machine screw No. 1) (CIS: apanese Camera Industrial Standard) eight Unit: mm Maximum Dynamic Static Static moment (N m) all diameter Mounting bolt hole all slide Rail length M 3 C C PO M YO 0 M d D h (Reference) (N) (N) RO 0max one slide two slides in close contact one slide two slides in close contact D (g) (g/100 mm) Pitch Mounting bolt hole Rail asic load rating ( * 4) 3 Maximum length Dynamic Static Static moment (N m) C C 0 M RO M PO M YO all diameter all slide Unit: mm d D h (Reference) 0max (N) (N) one slide two slides in close contact one slide two slides in close contact D (g) (g/100 mm) o fix rails of P05AR, use M cross-recessed pan head machine screw for precision instrument. (CIS No. 0 pan head machine screw No. 3) (CIS: apanese Camera Industrial Standard) eight Rail 9

10 Interchangeable type all slide of interchangeable types Please refer to able 13 for each dimension PU09,12 PU09,12 1 N PU PU ig. 9 all slide of interchangeable types (PU Series) Please refer to able 14 for each dimension P09,12 P09,12 1 N P P ig. 10 all slide of interchangeable types (P Series) 10

11 Rail of interchangeable types Please refer to able 13 for each dimension. φd 1 h 3 φd PU09,12, n 0 () ig. 11 Rail of interchangeable types (PU Series) Please refer to able 14 for each dimension. 3 P09,12 φd 1 h 3 2 φd P n 0 () ig. 12 Rail of interchangeable types (P Series) Interchangeability with U Series/ Series he PU series/p series is designed to be interchangeable* with the U series/ series for its mounting dimensions and load ratings. Refer to igs. 7, 8 and ables 13, 14 for more details. (*) oad ratings for PU05 and P05 are not interchangeable andling Precautions NS inear uides may become damaged when struck or hit. Maximum operating temperature must be 80 C or below. xceeding this limit may damage resin parts. Maximum operating temperature must be 50 C (max. momentary 80 C) when attaching NS 1 M. Also, avoid exposure to organic solvents with a degreasing effect. Do not immerse in kerosene or rust preventative oil (with kerosene ingredients). anding of interchangeable types Interchangeable ball slide will be delivered on a provisional rail (installing fixture). e sure to use the provisional rail when mounting ball slide(s) on to a rail. Do not remove the ball slide from provisional rail until sliding on to a rail. 11

12 NS AMRICAS Argentina NS Argentina SR uenos Aires razil NS rasil tda. Sao Paulo SP Canada NS Canada Inc. Mississauga ON atin America NS atin America Inc. Miami Mexico NS Rodamientos Mexicana, S.A. de C.V. lainepantla de az MX United States NS Corporation Ann Arbor MI ebsite: NS lobal: very care has been taken to ensure the accuracy of the data contained in this brochure, but no liability can be accepted for any loss or damage suffered through errors or omissions. Printed in the USA NS he contents of this publication are the copyright of the publishers. PU/P - RV 5 / AP / 17