ATS100 Series. Mechanical Bearing, Ball-Screw Stage. Long life linear motion guide bearing system. Ultra-fine resolution. Integral bellows waycovers

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1 Linear Stages TS100 Series TS100 Series Mechanical Bearing, Ball-Screw Stage Long life linear motion guide bearing system Ultra-fine resolution Integral bellows waycovers Low profile, compact design Includes brushless, slotless motor The TS100 series motor-driven linear stages provide the high resolution and repeatability required for semiconductor wafer testing and fabrication, automated microscope inspection systems, and precision micromachining applications. Outstanding Construction Features TS100 series stages are machined from a special cast aluminum alloy to provide a high strength-to-weight ratio, and long-term stability. The base is a box design that provides exceptional stiffness and stability. TS100 series stages employ a precision-ground ball screw pre-loaded to eliminate backlash, and its nut has wipers to prevent contamination and maintain high accuracy throughout the life of the stage. High-quality, pre-loaded duplex bearings are used to eliminate axial play. ll TS100 series stages incorporate Linear Motion Guide (LMG) bearings to provide high load capability and high stiffness. The LMG design provides a compact stage with continuous carriage support over the entire travel and good cantilevered load capability. Integral wipers on the bearing trucks help ensure stage travel life. Highly accurate optical limit switches and end stops are also standard. Integral bellows-type waycovers protect the drive and bearing system from contamination. Metal surfaces are protected with an attractive clear anodized finish. Both metric (standard) and English mounting and bolt-hole patterns are available. High ccuracy The TS100 sets the standard for precision performance in a compact package. With the HL option, the TS100 is capable of submicron accuracy and an impressive repeatability of 0.3 µm. Motors and Drives Included with the TS100 series stages are erotech s BMS series brushless rotary motors. This motor has all of the advantages of a brushless motor high acceleration, no brushes to wear, and lower heating yet has zero cogging for extremely smooth motion and accuracy. erotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized motion solution. Standard options include a precision right-angle bracket for multi-axis assembly, and vacuum preparation to 10-6 torr.

2 TS100 Series SPECIFICTIONS Basic TS TS TS TS T otal Travel 50 mm (2 in) 100 mm (4 in) 150 mm (6 in) 200 mm (8 in) Drive System Resolution 1) M aximum Travel Speed Maximum (2) L oad ccuracy Repeatability (Bidirectional) Straightness and Flatness Pitch and Yaw Nominal Stage Weight Material Finish Precision Ground Ball Screw 2 mm/rev lead 0.5 µm ( steps/rev Motor Resolutio n ( 100 mm/s (4 in/s ) H orizontal 25.0 kg (55.1 lb) V ertical 10.0 kg (22.0 lb) S ide 10.0 kg (22.0 lb) 3) ( 0.5 µm (±20 µin ) ± ± 0.5 µm (±20 µin) ± 0.75 µm (±30 µin) ±1.0 µm (±40 µin) S tandard ± 2.0 µm (±80 µin) ± 3.0 µm (±120 µin) ± 5.0 µm (±200 µin) ±6.0 µm (±240 µin) ±0.3 µm (±12 µin) S tandard ±0.7 µm (±30 µin) Differential Maximum Deviation 1.0 µm/25 mm (40 µin/in) S tandard 2.0 µm/25 mm (80 µin/in) ± 0.5 µm (±20 µin) ± 1.0 µm (±40 µin) ± 1.5 µm (±60 µin) ±1.75 µm (±70 µin) S tandard ± 1.0 µm (±40 µin) ± 2.0 µm (±80 µin) ± 2.0 µm (±80 µin) ±3.0 µm (±120 µin) 5 arc sec 8 arc sec 10 arc sec 12 arc sec L ess Motor 1.6 kg (3.5 lb) 1.7 kg (3.7 lb) 1.8 kg (4.0 lb) 2.0 kg (4.4 lb) W ith Motor 2.7 kg (6.0 lb) 2.8 kg (6.2 lb) 2.9 kg (6.4 lb) 3.1 kg (6.8 lb) luminu m Stage and Table: Clear nodize Notes: 1. Excessive duty cycle may impact stage accuracy. 2. Payload specifications are for single axis systems and based on ball screw and bearing life of 2500 km (100 million inches) of travel. 3. vailable with erotech controllers. Linear Stages Standard Motor Information Code (default) Type Brushless Servo -DC DC Servo -SM Microstepping BMS60--D25-E1000H Bus up to 160 VDC 1035LT-MSOF-E1000L D 40 VDC up to 1.8 up to 7.3 mps Cont rms Peak rms up to 4.1 Cont up to 8.2 Peak 50SMB2-HM 40 VDC up to 1 Cables Motor/Feedback C19801/C18391 C19360/C18391 D river Connector(s) NPaq NDrive C16951/C18391 U511/DR500/DR60 0 C17891/C18391 C18101/C18391 C13805 C13803 BB501/B/BI U100Z NPaq NDrive C13801 U511/DR500/DR60 0 C13802 C15170 C20131 C20251 BB501/B/BI U100S NPaq NDrive C13410 U511/DR500/DR60 0 C15141 U100M

3 TS100 Series SPECIFICTIONS and DIMENSIONS Linear Stages TS100 Series Load (kg) Lsc Lvc mm 0 Load (lb) in Distance of Load C.G. from Tabletop L VC and L SC Cantilevered Load Capability (TS100) TS100s shown in common XYZ orientation. n optional failsafe brake is available for heavy vertical loads. [#8-32 Thd x 0.31 Dp] 4 Holes 75.0 [3.00] Ø12.7 [Ø0.50] Thru (2) Holes ccess to Ø6.6 or [Ø0.28] Stage Mounting Holes [4.00] 41.3 [1.63] 75.0 [3.00] Motor Mounting NEM 23 Frame M6-1.0 Thd x 7.9 Dp [1/4-20 Thd x 0.31 Dp] 11 Holes 7.1 [0.28] 4.1 [0.16] 41.3 [1.63] C [4.00] 36.8 [1.45] 38.9 [1.53] 28.4 [1.12] Motor Length 16.0 [0.63] E D B 82.5 [3.25] 2.8 [0.11] Ø6.6 [Ø0.28] Thru Stage Mounting Holes (4) Holes (TS100-50, 75, 100) (8) Holes (TS , 150, 200) M5-0.8 Thd x 6.3 Dp [#10-32 Thd x 0.25 Dp] Dimensions - Millimeters [Inches] Motor Length Base Total Travel BMS (BMS60) [5.21] B C D E DC (1035LT-MSOF) [6.23] TS [8.60] 88.5 [3.48] 72.3 [2.84] SM (50SMB2-HM) 84.3 [3.32] TS [4.00] [10.60] [4.48] 97.7 [3.84] *See Motor Section for lternate TS [6.00] [6.00] [12.60] [5.48] [4.84] Motors and More Details. TS [8.00] [6.00] [14.60] [6.48] [5.84]

4 TS100 Series HDZ1 Bracket and MP100 DIMENSIONS HDZ1 Bracket Basic HDZ1 HDZ1L Dimensions - Millimeters [Inches] Recommended For TS thru TS TS thru TS [9.50] [11.94] B Weight kg [lb] 3.05 [1.39] 3.28 [1.49] 25.0 [0.97] M6 x 1 Thd Thru 1/4-20 Thd Thru (B) Holes 12.5 [0.47] 25.0 [0.97] 25.0 [0.97] 75.0 [3.00] 31.8 [1.25] 18.8 [0.74] Ø3.0 [Ø0.15] Thru 2 Holes 36.5 [1.44] 75.0 [3.00] 12.5 [0.47] Linear Stages TS100 Series 1.5 [0.06] 23.9 [0.94] 12.5 [0.50] Typ Ø6.6 [Ø0.28] Thru 8 Mounting Holes [3.94] 12.5 [0.47] 58.7 [2.31] 14.2 [0.56] 1.5 [0.06] [3.94] 7.3 [0.28] [3.94] MP [6.00] [4.00] 82.6 [3.25] [5.00] 88.9 [3.50] Ø6.6 Ø Dp [Ø0.28] Thru [Ø0.41] C'Bore X [0.28] Dp (4) Mounting Holes Ø5.6 Thru [Ø0.22] 19.0 [0.75] 11.9 [0.47] Ø9.9 C'Bore X [Ø0.34] 7.8 Dp [0.31] Dp (4) Holes [7.00] M6 X 1 Thd [1/4-20 Thd] Thru 8 Holes Dimensions - Millimeters [Inches] Basic Recommended For MP100 TS100-50, -100, -150 Mtg Plate & TS

5 TS100 Series ORDERING INFORMTION Linear Stages TS100 Series Ordering Example TS M -20P -NC S eries Travel (mm) Stage Construction /VC3 /VC6 /STEEL TS100 Series Linear Ball-Screw Stage TS mm (2 in) travel stage with limits TS mm (4 in) travel stage with limits TS mm (6 in) travel stage with limits TS mm (8 in) travel stage with limits Mounting and Grid Pattern Notes: 1. Servomotors require encoder (resolution) option. 2. Resolutions 11, 41 and 42 specify line-driver-type encoders; option 42 includes Hall effect sensors. -M -U Drive Screw Limits -20P -NC -NO Motor -DC -SM -NM -BRK23 -HL Stage Construction /VC3 Vacuum preparation of stage to 10-3 torr /VC6 Vacuum preparation of stage to 10-6 torr /STEEL ll steel construction Mounting and Grid Pattern -M Metric dimension mounting pattern and holes -U English dimension mounting pattern and holes Drive Screw -20P 2 mm/rev precision-ground ball screw Limits -NC -NO Motor -DC -SM -NM Normally-closed end of travel limit switches (standard) Normally-open end of travel limit switches Brushless servomotor with connectors and 1000-line encoder; requires cable (BMS60--D25-E1000H/) DC servo motor with connector and 1000-line encoder; requires cable (1035LT-MSOF-E1000LD/) Stepping motor with connector and home marker pulse (one per rev); requires cable (50SMB2-HM/) No motor or encoder

6 TS100 Series ORDERING INFORMTION -BRK23 -HL 24 VDC spring-set motor brake for NEM 23 motor High-accuracy system for accuracy, repeatability, straightness, and flatness Linear Stages TS100 Series ccessories (to be ordered as separate line item) LIGNMENT-NP Non-precision XY assembly LIGNMENT-NPZ Non-precision XZ or YZ assembly LIGNMENT-P10 XY assembly; 10 arc sec orthogonal LIGNMENT-P10Z XZ or YZ assembly with L-bracket; 10 arc second orthogonal LIGNMENT-P5 XY assembly; 5 arc sec orthogonal LIGNMENT-P5Z XZ or YZ assembly with L-bracket; 5 arc second orthogonal HDZ1 English right angle L-bracket HDZ1/VC6 VC6 prepared English right angle L-bracket HDZ1M Metric right angle L-bracket HDZ1M/VC6 VC6 prepared metric right angle L-bracket HDZ1L English right angle L-bracket HDZ1L/VC6 VC6 prepared English right angle L-bracket HDZ1LM Metric right angle L-bracket HDZ1LM/VC6 VC6 prepared metric right angle L-bracket MP100U English base mounting plate MP100U/VC6 VC6 prepared English base mounting plate MP100M Metric base mounting plate MP100M/VC6 VC6 prepared metric base mounting plate

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