ATS150 Series. Mechanical Bearing, Ball-Screw Stage. Long life linear motion guide bearing system. Ultra-fine resolution. Integral bellows waycovers
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1 Linear Stages Mechanical Bearing, Ball-Screw Stage Long life linear motion guide bearing system Ultra-fine resolution Integral bellows waycovers Low profile, compact design Submicron accuracy Optional high-accuracy linear encoder The ATS150 series motor-driven linear stages provide the high resolution and repeatability required for semiconductor wafer testing and fabrication, automated microscope inspection systems, and precision micromachining applications. Construction Features ATS150 series stages are machined from a special cast aluminum alloy to provide a high strength-to-weight ratio, and long-term stability. The base is a box design that provides exceptional stiffness and stability. ATS150 series stages employ a precision-ground ball screw that is pre-loaded to eliminate backlash, and its nut has wipers to prevent contamination and maintain high accuracy throughout the life of the stage. High quality, preloaded duplex bearings are used to eliminate axial play. All ATS150 series stages incorporate Linear Motion Guide (LMG) bearings to provide high load capability and high stiffness. The LMG design provides a compact stage with continuous carriage support over the entire travel and good cantilevered load capability. Integral wipers on the bearing trucks help ensure stage travel life. Highly accurate optical limit switches and end stops are also standard. Integral bellows-type waycovers protect the drive and bearing system from contamination. Metal surfaces are protected with an attractive clear anodized finish. Both metric (standard) and English mounting and bolt-hole patterns are available. Linear Encoder A precision noncontact linear encoder is an option. The encoder is mounted internal to the stage, protecting it from external contaminants and debris. Motors and Drives Included with all ATS150 series stages are Aerotech s BMS series brushless rotary motors. This motor has all of the advantages of a brushless motor high acceleration, no brushes to wear, and lower heating yet has zero cogging for extremely smooth motion and accuracy. Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized motion solution
2 SPECIFICATIONS Basic Model ATS ATS ATS ATS Total Travel 100 mm (4 in) 150 mm (6 in) 200 mm (8 in) 250 mm (10 in) Drive System Super Precision Ground Ball Screw/Brushless Servomotor (BMS60-A-D25-E1000H) Bus Voltage Up to 160 VDC Continuous A pk Up to 2.3 A Current A rms Up to 1.6 A Feedback Noncontact Rotary Encoder (1000 line) Resolution Maximum Travel Speed (1) Maximum Load (2) Accuracy Repeatability (Bidirectional) Straightness and Flatness 2 mm/rev lead 0.5 µm ( steps/rev Motor Resolution 4 mm/rev lead 1.0 µm ( steps/rev Motor Resolution LN Linear Encoder µm µm (0.04 µin µin) NA NA 2 mm/rev lead 115 mm/s (4.5 in/s) 4 mm/rev lead 230 mm/s (9.0 in/s) Horizontal 45.0 kg (99.2 lb) Vertical 25.0 kg (55.1 lb) Side 25.0 kg (55.1 lb) Ball Screw HALAR(3) ±1.0 µm (±40 µin) Standard +2, -4 µm (+80, -160 µin) +2, -5 µm (+80, -200 µin) +2, -8 µm (+80, -320 µin) +2, -10 µm (+80, -400 µin) LN HALAR (3) ±1.0 µm (±40 µin) NA NA Standard ±5.0 µm (±200 µin) NA NA HALAR(3) ±0.5 µm (±20 µin) Ball Screw Standard ±1.0 µm (±40 µin) LN ±0.5 µm (±20 µin) NA NA Differential HALSF Standard 1 µm/25 mm (40 µin/in) 2 µm/25 mm (80 µin/in) Maximum HALSF ±1.0 µm (±40 µin) ±1.5 µm (±60 µin) ±2.0 µm (±80 µin) ±3.0 µm (±120 µin) Deviation Standard ±2.0 µm (±80 µin) ±3.0 µm (±120 µin) ±4.0 µm (±160 µin) ±5.0 µm (±200 µin) Pitch and Yaw 8 arc sec 10 arc sec 12 arc sec 14 arc sec Nominal Stage Weight Construction Less Motor 6.1 kg (13.4 lb) 7.5 kg (16.5 lb) 7.9 kg (17.4 lb) 8.4 kg (18.5 lb) With Motor 7.2 kg (15.9 lb) 8.6 kg (19.0 lb) 9.0 kg (19.8 lb) 9.5 lb (20.9 lb) Aluminum Body/Stage and Table; Clear Anodize Finish Notes: 1. Excessive duty cycle may impact accuracy. 2. Payload specifications are for single axis system and based on ball screw and bearing life of 2500 km (100 million inches) of travel. 3. Available with Aerotech controllers. 4. Specifications are for single-axis systems, measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications. Linear Stages L VC and L SC Cantilevered Load Capability (ATS150) 319
3 DIMENSIONS Linear Stages 320
4 HDZ2 Bracket DIMENSIONS HDZ2 Bracket Linear Stages 321
5 ORDERING INFORMATION Linear Stages Ordering Example ATS M -20P -BMS -NC Series Travel (mm) Stage Construction Options /VAC3 /VAC6 /STEEL High Accuracy Linear Encoder -LN10AS -LN15AS Mounting and Grid Pattern Linear Ball-Screw Stage ATS mm (4 in) travel stage with limits ATS mm (6 in) travel stage with limits ATS mm (8 in) travel stage with limits ATS mm (10 in) travel stage with limits -M -U Drive Screw -20P -40P Motor Limits Coupling Options -BMS -SM -NM -NC -NO -9DU -FLY -NO COUPLING -STD COUPLING -LGR MTR COUPLING -COFB -COFBBRK -BRK23 -FB150 -FB-BRK1 Stage Construction Options /VAC3 /VAC6 /STEEL Vacuum preparation of stage to 10-3 torr Vacuum preparation of stage to 10-6 torr All steel construction High-Accuracy Linear Encoders -LN10AS High-accuracy linear encoder for ATS ; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier -LN15AS High-accuracy linear encoder for ATS ; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier Note: Internal signal multipliers available with A3200 amplifier products. Mounting and Grid Pattern -M Metric dimension mounting pattern and holes -U English dimension mounting pattern and holes Drive Screw -20P 2 mm/rev precision-ground ball screw -40P 4 mm/rev precision-ground ball screw Motor -BMS -SM -NM Limits -NC -NO -9DU -FLY Brushless servomotor with connectors and 1000-line encoder; requires cable (BMS60-A-D25-E1000H/) Stepping motor with connector and home marker pulse (one per rev); requires cable (101SMB2-HM/) No motor or encoder Normally-closed end of travel limit switches (standard) Normally-open end of travel limit switches With 9-pin limit connector With flying leads 322
6 ORDERING INFORMATION Coupling -NO COUPLING No coupling -STD COUPLING 0.25 in coupling -LGR MTR COUPLING in coupling -COFB Rigid coupling required for fold-back -FB150 option -COFBBRK Rigid coupling required for fold-back with stage brake -FB-BRK1 option Options -BRK23 24 VDC spring-set motor brake for NEMA 23 motor -FB150 Fold-back motor configuration -FB-BRK1 Fold-back motor configuration with 24 VDC spring-set motor brake for NEMA 23 motor Accessories (to be ordered as separate line item) ALIGNMENT-NPA Non-precision XY assembly ALIGNMENT-NPAZ Non-precision XZ or YZ assembly ALIGNMENT-PA10 XY assembly; 10 arc sec orthogonal ALIGNMENT-PA10Z XZ or YZ assembly with L-bracket; 10 arc second orthogonal ALIGNMENT-PA5 XY assembly; 5 arc sec orthogonal ALIGNMENT-PA5Z XZ or YZ assembly with L-bracket; 5 arc second orthogonal HALAR High-accuracy system linear error correction for accuracy and repeatability HALSF High-accuracy system improved straightness and flatness HDZ2 English right-angle L-bracket; for ATS and ATS stages only HDZ2M Metric right-angle L-bracket; for ATS and ATS stages only HDZ2/VAC6 VAC6 prepared English right-angle L-bracket; for ATS and ATS stages only HDZ2M/VAC6 VAC6 prepared metric right-angle L-bracket; for ATS and ATS stages only Note: Please consult factory for other travel lengths. Linear Stages 323
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stage from resolution accuracies is 400 peak) and the from an to outpu positioning (as shown N] continuous continuous needs
![stage from resolution accuracies is 400 peak) and the from an to outpu positioning (as shown N] continuous continuous needs](/thumbs/80/81553844.jpg "stage from resolution accuracies is 400 peak) and the from an to outpu positioning (as shown N] continuous continuous needs")
Earthquake Simulation Using Single or Dual-Axis Linear Motion Stages With the goal of safer buildings and saving lives, scientists and engineers, through the simulation of many recent earthquakes, need
Positioning Systems. Linear Motor Stages Product Overview. LMX1E-C Page 14. LMX1L-S Page 19.
8 inear Motor Stages 2.1 Product Overview MX1E-C Page 14 Complete linear stage with coreless motor, type MC Excellent for applications with a high degree of synchronous operation requirements Also for
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Cartesian Robots Maximize your Application s Throughput
Cartesian Robots Maximize your Application s Throughput Minimal Tracking Error Flexible Design Lowest Cost of Ownership Configurable www.aerotech.com United States France Germany United Kingdom Japan China
1291BL Series Technical Specification Single Axis Position and Rate Table System
Datasheet 1291BL Series Technical Specification Single Axis Position and Rate Table System DESCRIPTION The Model 1291BL Single Axis Position and Rate Table System is designed to provide precise position,
Model No. Travel Runout Return Force Weight (extension-compression)
Specifications: motioncontrol catalog manualstages MM-1 Standard Manual MicroMini TM Stages Constructible into over 16 different configurations (request 3 D Basic Construction Diagrams) Wobble (max): 10
Precision Motion Control
Precision Motion Control Military Rotary Actuator MRA 60 Product Overview This actuator is used to control the fins of a Missile. The affordable actuator robust design and use of special material in gearing,
Mini-MAG (MMG) Positioning Products Ultra Compact Linear Motor Stages
Mini-MAG (MMG) Positioning Products Ultra Compact Linear Motor Stages The Mini-MAG (MMG) line of positioning stages blends the ultimate in performance, reliability, and value, delivering nearly twice the
Rotary Positioning Stages Introduction
Introduction Features Aluminum/steel construction Protective black anodize finish Low-friction rotary adjustment Precise/accurate movement Trouble-free operation aedal precision rotary stages are utilized
SM Series. Hybrid, Permanent Magnet Motors. Industry-standard NEMA 23, 34, and 42 frame sizes for ease of installation
SM Series Hybrid, Permanent Magnet Motors Industry-standard NEMA 2, 4, and 42 frame sizes for ease of installation Torque of 0.27 to 7.42 N-m (8 to 1050 oz-in) covers virtually any application requirement