PIglide AT3 Linear Stage with Air Bearings

Transcription

1 PIglid AT3 Linar Stag with Air Barings High Prformanc Nanopositioning Stag A-123 Idal for scanning applications or highprcision positioning Clanroom compatibl Siz of th motion platform 210 mm 210 mm Travl rangs 50 mm to 750 mm Rsolution to 1 nm Product ovrviw Th stags in th PIglid ar quippd with a srvo driv linar motor with prloadd air barings and intgratd linar ncodr. Th combination of ths noncontact componnts rsults in a frictionlss motion platform that offrs th highst prformanc, quality, and liftim. A high-forc linar motor can driv th stag to top spd within a fw millisconds, and th high-capacity barings can support payloads up to 60 kg. Th latrally opposd, activly prloadd air baring dsign in this modl allows mounting in any orintation. Accssoris and options Encodr PIglid filtr and air prparation kits Singl and multi-axis motion controllr XY stups and individual configurations Cabl track variations Options with countrwight for vrtical (Z) orintation Customizations availabl Bas plats mad of granit and systms for rducing vibration Application filds PIglid positioning systms ar idally suitd for many high-prcision applications such as mtrology, photonics, and prcision scanning in smiconductor or flat panl display manufacturing. Thanks to th friction-fr motion, no particls ar formd, which maks PIglid stags idal for clanroom applications.

2 Spcifications Motion A A A A A A A Unit Activ axs X X X X X X X Tolranc Travl rang mm Pitch / yaw (1) µrad max. Straightnss / (1) flatnss µm max. Straightnss / flatnss pr 25 mm travl µm max. rang (1) Vlocity, (2) unloadd m/s max. Acclration, (2) unloadd m/s² max. Mchanical Tolranc A A A A A A A Unit proprtis Load capacity in (3) z N max. Load capacity in (3) y N max. Movd mass kg Ovrall mass kg Guid typ air baring air baring air baring air baring air baring air baring air baring Driv proprtis A-123 Unit Driv typ Intrmdiat circuit voltag, RMS Ironlss 3-phas linar motor 48, nominal 80, max. Pak forc 298 N typ. Nominal forc 87.5 N typ. Forc constant, RMS 19.9 N/A typ. Rsistanc phas-phas 3.6 Ω typ. Inductanc phas-phas 1.2 mh typ. Back EMF phas-phas 16 V s/m max. V DC Tolranc Cabling Extrnal, moving cabl

3 Positioning A-123.xxxA A-123.xxxB Intgratd snsor Incrmntal linar ncodr Absolut ncodr Snsor signal Sin/cos, 1 V pak-pak, 20 µm signal priod Snsor rsolution 1.2 nm (4) 1 nm Bidirctional rpatability Positioning accuracy, uncalibratd (5) Positioning accuracy, calibratd (5) A : ± 0.15 µm (4) A : ± 0.15 µm (4) A : ± 0.15 µm (4) A : ± 0.15 µm (4) A : ± 0.2 µm (4) A : ± 0.2 µm (4) (4) A : ± 1 µm A : ± 1 µm A : ± 1.5 µm A : ± 2 µm A : ± 3 µm A : ± 3.5 µm A : ± 5 µm A : ± 0.3 µm A : ± 0.3 µm A : ± 0.3 µm A : ± 0.3 µm A : ± 0.3 µm A : ± 0.5 µm BiSS-C A : ± 0.15 µm A : ± 0.15 µm A : ± 0.15 µm A : ± 0.15 µm A : ± 0.2 µm A : ± 0.2 µm A : ± 1.5 µm A : ± 1.5 µm A : ± 1.5 µm A : ± 1.5 µm A : ± 1.5 µm A : ± 1.5 µm A : ± 1.5 µm A : ± 0.3 µm A : ± 0.3 µm A : ± 0.3 µm A : ± 0.3 µm A : ± 0.3 µm A : ± 0.5 µm Miscllanous A-123 Oprating prssur (6) Air consumption Air quality Matrials 75 to 85 psi (515 to 585 kpa) < 1.0 SCFM (28 SLPM) Clan (filtrd to 1.0 μm or bttr) - ISO Class 1 Oil fr - ISO Class 1 Dry (-15 C dw point) - ISO Class 3 Hardcoat aluminum, stainlss stl mounting hardwar (1) Dpndnt on th flatnss of th surfac, on which th stag is mountd. (2) Can b limitd by th payload, controllr or driv. (3) Assums payload CG is cntrd no mor than 50 mm abov th motion platform. (4) Assums 16384x intrpolation. Contact PI for th us of othr factors. (5) Improvd accuracy can b obtaind with controllr-basd rror compnsation. Th stag must b ordrd with a controllr from PI to rach ths valus. Accuracy valus assum short-trm duration and do not considr th long-trm ffcts of thrmal drift on th stag. (6) To protct th stag against damag, it is rcommndd to connct an air prssur snsor to th Motion-Stop input of th controllr. Ask about customizd vrsions.

4 Drawings / Imags A-123, dimnsions in mm. * Th mounting hols ar symmtric around th cntr lin locatd at "J".

5 Ordring Information A A1 PIglid AT3 linar stag, air baring, 50 mm travl rang, incrmntal linar ncodr with sin/cos signal transmission, 20 µm A B1 PIglid AT3 linar stag, air baring, 50 mm travl rang, absolut linar ncodr with BiSS-C signal transmission, 1 nm snsor rsolution, ironlss 3-phas linar motor, 48 V A A1 PIglid AT3 linar stag, air baring, 100 mm travl rang, incrmntal linar ncodr with sin/cos signal transmission, 20 µm A B1 PIglid AT3 linar stag, air baring, 100 mm travl rang, absolut linar ncodr with BiSS-C signal transmission, 1 nm A A1 PIglid AT3 linar stag, air baring, 150 mm travl rang, incrmntal linar ncodr with sin/cos signal transmission, 20 µm A B1 PIglid AT3 linar stag, air baring, 150 mm travl rang, absolut linar ncodr with BiSS-C signal transmission, 1 nm A A1 PIglid AT3 linar stag, air baring, 200 mm travl rang, incrmntal linar ncodr with sin/cos signal transmission, 20 µm A B1 PIglid AT3 linar stag, air baring, 200 mm travl rang, absolut linar ncodr with BiSS-C signal transmission, 1 nm A A1 PIglid AT3 linar stag, air baring, 350 mm travl rang, incrmntal linar ncodr with sin/cos signal transmission, 20 µm A B1 PIglid AT3 linar stag, air baring, 350 mm travl rang, absolut linar ncodr with BiSS-C signal transmission, 1 nm A A1 PIglid AT3 linar stag, air baring, 500 mm travl rang, incrmntal linar ncodr with sin/cos signal transmission, 20 µm A B1 PIglid AT3 linar stag, air baring, 500 mm travl rang, absolut linar ncodr with BiSS-C signal transmission, 1 nm A A1 PIglid AT3 linar stag, air baring, 750 mm travl rang, incrmntal linar ncodr with sin/cos signal transmission, 20 µm A B1 PIglid AT3 linar stag, air baring, 750 mm travl rang, absolut linar ncodr with BiSS-C signal transmission, 1 nm