CRITICAL MATERIALS HANDLING TORRENTO AT SERIES FILTERS

Transcription

1 CRITICL MTERILS HNDLING TORRENTO T SERIES FILTERS dvanced 15 and 2 nm filters enabling superior particle protection and ultra cleanliness in advanced wet, etch and clean applications

2 TORRENTO T SERIES FILTERS ultimate particle retention with ultra-high flow rate performance Overview Torrento T series filters provide the ultimate particle retention with ultra-high flow rate performance using an advanced nondewetting PTFE membrane. Torrento filters are specially designed to meet the critical customer demands for advanced technology during wet, etch and cleaning processes. These filters provide high-yield, rapid bath cleanup cycles, extended filter life, fast changeouts and cleanliness all in a prewet package for ease of use. dvanced Membrane Technology Torrento filters use an applications-optimized filter membrane that provides an ultra-high flow rate at the specified retention rating. The combination of high flow and retention performance provides an optimal bath cleanup profile to minimize particlerelated wafer defects and reduce process cycle time. The capability to maintain flow rate at an extremely small pore size in outgassing chemistries such as SPM, SC1 and SC2 ensures the stable processing conditions needed for the high CpK results demanded at advanced technology nodes. Cost-minimized Performance Incorporating Entegris advanced device construction technology, Torrento T3 and TE filters provide more surface area in each filter, leading to extended filter lifetime. The membrane also reduces overall maintenance and replacement costs related to wet bench pumps. This is because the low filter resistance design reduces pump strokes, thereby reducing wear and tear. Rapid Changeouts and Safety Torrento filters come in a wide variety of cartridge and disposable formats to maximize installation flexibility and upgrades. Torrento TE and T3 cartridges and disposable filters are designed for recirculation bath applications, while Torrento 15/3 disposables are targeted to single wafer processing. The disposable filters eliminate operator handling of the filter element, thus minimizing contamination risk. The disposable design also reduces the potential for operator exposure to chemicals during installation and disposal. Ultra Cleanliness Torrento 15 nm and 2 nm filters include both standard and ultra-clean metallics (UCM) cleanliness options. The Torrento P15 and P3 small disposables come standard with UCM specifications. Torrento 2 nm TE filters are offered with UCM cleanliness as an option. Use of UCM ultra-low extractable products will ensure bath cleanliness for critical cleaning processes, like SC1. These filters are certified to low cleanliness limits. pplications Semiconductor technologies ulk chemical delivery systems (CDS) Wet etch and clean (WEC) 2 ENTEGRIS, INC.

3 TORRENTO T SERIES FILTERS Features and enefits Features High-performance membrane Nondewetting PTFE membrane filter in a prewet package Minimized cost of ownership Disposable filter options UCM option pplications-optimized chemical compatibility enefits Low membrane resistance design allows high particle retention with high flow Eliminates prewetting and flushing cycle High-purity, clean, ready-to-use filter Excellent performance in outgassing chemistries TE and T3 designs incorporate more membrane for ultra-high flow and extended filter lifetime Nondewetting membrane enables rapid filter changeout to maximize process uptime Reduced wear and tear of wet bench pumps minimizes maintenance and replacement costs Requires less space for changeout llows quick installation and minimizes downtime while limiting the handling and exposure to hazardous chemicals Ensures bath cleanliness for sensitive wet cleaning processes Recommended for aqueous-based chemicals at ambient temperatures (including H 2 SO 4, H 3 PO 4, HNO 3, HCL, NH 4 F, H 2 O 2, TMH, NH 4 OH and ozonated water) and elevated temper ature applications (including SC1, SC2, SPM, nitride etch, metal etch and various other resist stripping chemistries) ENTEGRIS, INC. 3

4 TORRENTO T SERIES FILTERS Specifications Torrento TE/T3 Materials: Membrane Prewet, nondewetting PTFE Supports Cartridge o-ring options Disposable shell E-FKM, Chemraz or Kalrez, Viton Extreme ETP PF Torrento 15/3 rating: 15 nm 15 nm PF 2 nm Membrane area: TE 1 : 2 m 2 (21 ft 2 ) 15 type:.19 m 2 (2.5 ft 2 ) Maximum operating conditions: Metallic extractables: Particle shedding cleanliness: Maximum operating pressure Maximum forward differential pressure Maximum reverse pressure Maximum operating temperature Standard UCM * Per 1 cartridge equivalent TE 2 : 4 m 2 (42 ft 2 ) 3 type:.44 m 2 (4.74 ft 2 ) T3 1 : 3 m 2 (32 ft 2 ) T3 2 : m 2 (4 ft 2 ).58 MPa (5.8 bar; C (77 F).97 MPa (.97 bar; C (35 F).44 MPa (4.4 bar; 4 25 C (77 F).5 MPa (.52 bar; C (35 F).34 MPa (3.5 bar; 5 25 C (77 F).44 MPa (4.4 bar; 4 25 C (77 F).19 MPa (1.9 bar; C (23 F).39 MPa (3.9 bar; C (77 F).19 MPa (1.9 bar; C(23 F).29 MPa (2.9 bar; C (77 F) 18 C (35 F) 95 C (23 F) <15 particles/1 ml.2 5 L/min DI water flow Testing conducted for 12 metals Testing conducted for 1 metals <1 particles/1 ml.2 5 L/min DI water flow 4 ENTEGRIS, INC.

5 TORRENTO T SERIES FILTERS Torrento T Series Cartridge Filters (15 nm and 2 nm) Dimensions Ø45.1 mm (1.7 ) Ø95. mm (3.74 ) REF Ø82. mm (3.23 ) Key adds 5. mm (1.97 ) to length C 2. mm (.8 ) REF Length (Overall) (Control) C (Shoulder) mm (9.1 ) 227. mm (8.94 ) 225. mm (8.8 ) mm (18.54 ) 454. mm (17.87 ) 452. mm (17.8 ) Performance Data Torrento TE 1 Cartridge Filters nm nm Torrento TE 2 Cartridge Filters nm nm Torrento T3 1 Cartridge Filters nm TPCW 2 nm TRCX ENTEGRIS, INC. 5

6 TORRENTO T SERIES FILTERS Ordering Information This information serves as a guide. Please contact your local representative to confirm part numbers. Torrento TE Cartridge Filter STNDRD CLEN T K* RCX = 2 nm Torrento TE Cartridge Filter UCM CLEN T K* RCW = 15 nm RCX = 2 nm Length TE = 1 TE2 = 2 Length CE = 1 CE2 = 2 O-ring 1 = E-FKM 1 = E-ETP C1 = Chemraz K1 = Kalrez 479 R1 = Kalrez 375 O-ring 1 = E-FKM 1 = E-ETP R1 = Kalrez 375 Torrento T3 Cartridge Filter STNDRD CLEN T 1 K* PCW = 15 nm RCX = 2 nm Length 3TE = 1 3T2 = 2 O-ring 1 = E-ETP Torrento T3 Cartridge Filter UCM CLEN T 3CE 1 K* PCW = 15 nm RCX = 2 nm Length 3CE = 1 O-ring 1 = E-ETP *Optional Chemlock key attached to cartridge for use with Chemlock housing ONLY. ENTEGRIS, INC.

7 TORRENTO T SERIES FILTERS Torrento T Series Chem-Line I and Chem-Line II Disposable Filters Dimensions The following drawings in this section represent the broad range of Torrento T Series Chem-Line I and Chem-Line II disposable filters. Refer to the accompanying tables for dimensional information pertaining to each category and type. CHEM-LINE I DISPOSLE FILTERS WITH STNDRD VENT ND ROTTED VENT 14 mm (.55 ) Chem-Line I L-line with Standard Vent (LH) C 37 mm (1.4 ) 9 mm (3.54 ) 4 mm (1.57 ) Chem-Line I T-tube with Standard Vent (T3, TW, TF) 3 mm (1.42 ) C 14 mm (.55 ) mm (2.3 ) mm (2.3 ) 4 mm (1.57 ) 4-M8 P mm DP 25 mm (.98 ) 2 mm (1.2 ) Ø12 mm (4.97 ) Ø18 mm (4.25 ) Ø122 mm (4.8 ) 2 mm (1.2 ) Ø12 mm (4.97 ) Ø18 mm (4.25 ) Ø122 mm (4.8 ) Chem-Line I T-line with Standard Vent (TH, 4H, 3S, 4S) mm (2.3 ) 3 mm (1.42 ) C 14 mm (.55 ) mm (2.3 ) Chem-Line I T-Line with Rotated Vent (3S, 4S) mm (2.3 ) 4 M Depth 2 mm 3 mm (1.42 ) mm (2.3 ) 4-M8 P mm DP 25 mm (.98 ) 58 mm (2.28 ) C 33 mm (1.3 ) 2 mm (1.2 ) Ø12 mm (4.97 ) Ø18 mm (4.25 ) Ø122 mm (4.8 ) 2 mm (1.2 ) Ø12 mm (4.97 ) Ø18 mm (4.25 ) Ø122 mm (4.8 ) Ø127 mm (5.1 ) ENTEGRIS, INC. 7

8 TORRENTO T SERIES FILTERS Nominal Dimensions for Chem-Line I with Standard Vent L-Line Disposable Type LH: 3 4 inlet/outlet; 1 2 vent/drain; Super Type Pillar fittings Configuration TE, T3 1 Length (Overall Height) Length (ottom to Centerline ) Length C (Inlet to Outlet) 395 mm (15.5 ) 334 mm (13.15 ) 9 mm (3.54 ) Nominal Dimensions for Chem-Line I with Standard Vent T-Line Disposable Type TH: 3 4 inlet/outlet; 1 2 vent/drain; 4H: 1 inlet/outlet; 1 2 vent/drain; Configuration TE, T3 1 TE, T3 1 Length (Overall Height) Length (ottom to Centerline ) Length C (Inlet to Outlet) 39 mm (15.58 ) 335 mm (13.19 ) 18 mm (7.9 ) 42 mm (15.82 ) 341 mm (13.43 ) 188 mm (7.4 ) Nominal Dimensions for Chem-Line I with Standard Vent T-Tube Disposable Type TW: 3 4 inlet/outlet; 1 2 vent/drain; Flowell 2 Series fittings T3: 3 4 inlet/outlet; 1 2 vent/drain; TF: 3 4 inlet/outlet; 1 2 vent/drain; FlareLock II fittings Configuration TE, T3 1 TE, T3 1 TE, T3 1 Length (Overall Height) Length (ottom to Centerline ) Length C (Inlet to Outlet) 43 mm (17.17 ) 33 mm (14.29 ) 252 mm (9.92 ) 449 mm (17.9 ) 39 mm (14.53) 28 mm (1.55 ) 43 mm (17.17 ) 33 mm (14.29 ) 252 mm (9.92 ) Nominal Dimensions for Chem-Line I with Rotated Vent T-Line Disposable Type 3S: 3 4 inlet/outlet; 1 2 vent/drain; 4S: 1 inlet/outlet; 1 2 vent/drain; Configuration TE, T3 1 TE, T3 1 Length (Overall Height) Length (ottom to Centerline ) Length C (Inlet to Outlet) 399 mm (15.7 ) 341 mm (13.43 ) 172 mm (.77 ) 399 mm (15.7 ) 341 mm (13.43 ) 182 mm (7.17 ) 8 ENTEGRIS, INC.

9 TORRENTO T SERIES FILTERS CHEM-LINE I DISPOSLE FILTERS WITH CORE VENT ND CORE VENT (ROTTED) This drawing represents the Chem-Line I disposable filters with Core Vent and Core Vent (Rotated). Refer to the accompanying tables for specific dimensional information. Chem-Line I L-line with Core Vent (LH) Chem-Line I T-line with Core Vent (TH, 4H) 14 mm (.55 ) C 37 mm (1.4 ) mm (2.3 ) mm (2.3 ) 3 mm (1.42 ) C 14 mm (.55 ) mm (2.3 ) 4-M8 P mm DP mm (2.3 ) 4-M8 P mm DP 25 mm (.98 ) 25 mm (.98 ) 2 mm (1.2 ) Ø12 mm (4.97 ) Ø18 mm (4.25 ) Ø122 mm (4.8 ) 2 mm (1.2 ) Ø12 mm (4.97 ) Ø18 mm (4.25 ) Ø122 mm (4.8 ) 4 mm (1.57 ) 4 mm (1.57 ) Chem-Line I T-tube with Core Vent (TW) 3 mm (1.42 ) C 14 mm (.55 ) Chem-Line I T-Line with Core Vent (Rotated) (3PL, 4PL, 3S, 4S) 3 mm (1.42 ) C mm (2.3 ) 4 mm (1.57 ) 4 mm (1.57 ) 4-M8 P mm DP 25 mm (.98 ) 58 mm (2.28 ) mm (2.3 ) 4 M Depth 2 mm 33 mm (1.3 ) 2 mm (1.2 ) Ø12 mm (4.97 ) Ø18 mm (4.25 ) Ø12 mm (4.97 ) Ø18 mm (4.25 ) Ø122 mm (4.8 ) 2 mm (1.2 ) Ø122 mm (4.8 ) Ø12 mm (4.9 ) 4 mm (1.57 ) 4 mm (1.57 ) ENTEGRIS, INC. 9

10 TORRENTO T SERIES FILTERS Nominal Dimensions for Chem-Line I with Core Vent L-Line Disposable Type LH: 3 4 inlet/outlet; 1 2 vent/drain; Configuration TE, T3 1 Length (Overall Height) Nominal Dimensions for Chem-Line I with Core Vent T-Line Disposable Type TH: 3 4 inlet/outlet; 1 2 vent/drain; 4H: 3 4 inlet/outlet; 1 vent/drain; Configuration TE, T3 1 TE, T3 1 Length (ottom to Centerline ) Length C (Inlet to Outlet) 387 mm (15.24 ) 32 mm (12.83 ) 9 mm (3.54 ) Length (Overall Height) Length (ottom to Centerline ) Length C (Inlet to Outlet) 388 mm (15.2 ) 327 mm (12.87 ) 18 mm (7.9 ) 394 mm (15.49 ) 333 mm (13.11 ) 188 mm (7.4 ) Nominal Dimensions for Chem-Line I with Core Vent T-Tube Disposable Type TW: 3 4 inlet/outlet; 1 2 vent/drain; Flowell 2 Series fittings Configuration TE, T3 1 Length (Overall Height) 43 mm (17.17 ) Length (ottom to Centerline ) 33 mm (14.29 ) Length C (Inlet to Outlet) 252 mm (9.92 ) Nominal Dimensions for Chem-Line I with Core Vent (Rotated) T-Line Disposable Type 3PL: 3 4 inlet/outlet; 1 2 vent/drain; PrimeLock fittings 4PL: 1 inlet/outlet; 1 2 vent/drain; PrimeLock fittings 3S: 3 4 inlet/outlet; 1 2 vent/drain; 4S: 1 inlet/outlet; 1 2 vent/drain; Configuration TE, T3 1 TE, T3 1 TE, T3 1 TE, T3 1 Length (Overall Height) Length (ottom to Centerline ) Length C (Inlet to Outlet) 424 mm (1.8 ) 349 mm (13.74 ) 215 mm (8.48 ) 424 mm (1.8 ) 349 mm (13.74 ) 243 mm (9.58 ) 391 mm (15.37 ) 333 mm (13.11 ) 172 mm (.77 ) 391 mm (15.37 ) 333 mm (13.11 ) 182 mm (7.17 ) 1 ENTEGRIS, INC.

11 TORRENTO T SERIES FILTERS Chem-Line II Disposable Filters This drawing represents the Chem-Line II disposable filters. Refer to the accompanying tables for specific dimensional information. Ø11 mm (4.33 ) Ø14 mm (4.1 ) NOMINL DIMENSIONS FOR CHEM-LINE II DISPOSLE FILTERS Flaretek s Male Inlet/ Vent/ 1 Filter Outlet Drain mm (13.5 ) 37 mm (1.4 ) mm (14.3 ) 37 mm (1.4 ) mm (14.13 ) 37 mm (1.4 ) mm (14.47 ) 37 mm (1.4 ) mm (14.3 ) 41 mm (1.3 ) mm (14.82 ) 41 mm (1.3 ) Flowell Series s Male Inlet/ Vent/ 1 Filter Outlet Drain mm (14.2 ) 37 mm (1.4 ) mm (14.1 ) 37 mm (1.4 ) mm (13.94 ) 41 mm (1.3 ) mm (14.41 ) 41 mm (1.3 ) PrimeLock s Male Inlet/ Vent/ 1 Filter Outlet Drain mm (14.2 ) 37 mm (1.4 ) mm (14.8 ) 37 mm (1.4 ) mm (15.24 ) 41 mm (1.3 ) Super 3 Type Pillar s Male Inlet/ Vent/ 1 Filter Outlet Drain mm (13.41 ) 37 mm (1.4 ) mm (13.7 ) 37 mm (1.4 ) mm (15.7 ) 37 mm (1.4 ) mm (13.74 ) 41 mm (1.1 ) mm (14.97 ) 41 mm (1.1 ) Super 3 Type Pillar s Female Inlet/ Vent/ 1 Filter Outlet Drain mm (14.9 ) 37 mm (1.4 ) ENTEGRIS, INC. 11

12 TORRENTO T SERIES FILTERS Performance Data CHEM-LINE I ND CHEM-LINE II DISPOSLE FILTERS Torrento TE 1 Disposable Filters with 3 8 s nm 2 nm Torrento TE 1 Disposable Filters with 1 2 s nm 2 nm Torrento TE 1 Disposable Filters Torrento TE 1 Disposable Filters with 3 4 s with 1 s nm nm nm nm Torrento T3 1 Disposable Filters with 3 4 s nm 15 nm.4 TPCW.4 TPCW nm.3 4 TRCX 2 nm TRCX Torrento T3 1 Disposable Filters with 1 s ENTEGRIS, INC.

13 TORRENTO T SERIES FILTERS Ordering Information This information serves as a guide. Please contact your local representative to confirm part numbers. Torrento TE Chem-Line I Disposable Filters with Standard Vent STNDRD CLEN TRD TE X = 2 nm LH = 3 4 inlet/outlet, L-line, 1 2 vent/drain, TH = 3 4 inlet/outlet, T-line, 1 2 vent/drain, 4H = 1 inlet/outlet, T-line, 1 2 vent/drain, T3 = 3 4 inlet/outlet, T-tube, 1 2 vent/drain, TW = 3 4 inlet/outlet, T-tube, 1 2 vent/drain, Flowell 2 series fittings TF = 3 4 inlet/outlet, T-tube, 1 2 vent/drain, FlareLock II fittings Torrento TE Chem-Line I Disposable Filters with Standard Vent UCM CLEN TRD CE W = 15 nm X = 2 nm LH = 3 4 inlet/outlet, L-line, 1 2 vent/drain, TH = 3 4 inlet/outlet, T-line, 1 2 vent/drain, 4H = 1 inlet/outlet, T-line, 1 2 vent/drain, TF = 3 4 inlet/outlet, T-tube, 1 2 vent/drain, FlareLock II fittings Torrento TE Chem-Line I Disposable Filters with Modified Vent STNDRD CLEN TRM TE 3S = 3 4 inlet/outlet, T-line, 1 2 vent/drain, 4S = 1 inlet/outlet, T-line, 1 2 vent/drain, X = 2 nm Torrento TE Chem-Line I Disposable Filters with Modified Vent UCM CLEN TRM CE 3S = 3 4 inlet/outlet, T-line, 1 2 vent/drain, 4S = 1 inlet/outlet, T-line, 1 2 vent/drain, W = 15 nm X = 2 nm Torrento T3 Chem-Line I Disposable Filters with Standard Vent STNDRD CLEN T 3TE TH = 3 4 inlet/outlet, T-line, 1 2 vent/drain, RDX = 2 nm Torrento T3 Chem-Line I Disposable Filters with Standard Vent UCM CLEN T 3CE TH = 3 4 inlet/outlet, T-line, 1 2 vent/drain, RDX = 2 nm ENTEGRIS, INC. 13

14 TORRENTO T SERIES FILTERS Ordering Information (continued) This information serves as a guide. Please contact your local representative to confirm part numbers. Torrento TE Chem-Line I Disposable Filters with Core Vent STNDRD CLEN T TE RVX = 2 nm LH = 3 4 inlet/outlet, L-line, 1 2 vent/drain, TH = 3 4 inlet/outlet, T-line, 1 2 vent/drain, 4H = 3 4 inlet/outlet, T-line, 1 vent/drain, TW = 3 4 inlet/outlet, T-tube, 1 2 vent/drain, Flowell 2 series fittings 3S = 3 4 inlet/outlet, T-line, 1 2 vent/drain, 4S = 1 inlet/outlet, T-line, 1 2 vent/drain, Torrento TE Chem-Line I Disposable Filters with Core Vent UCM CLEN T CE RVW = 15 nm RVX = 2 nm TH = 3 4 inlet/outlet, T-line, 1 2 vent/drain, 4H = 1 inlet/outlet, T-line, 1 2 vent/drain, 3S = 3 4 inlet/outlet, T-line, 1 2 vent/drain, 4S = 1 inlet/outlet, T-line, 1 2 vent/drain, 3PL = 3 4 inlet/outlet, T-line, 1 2 vent/drain, PrimeLock fittings 4PL = 1 inlet/outlet, T-line, 1 2 vent/drain, PrimeLock fittings Torrento T3 Chem-Line I Disposable Filters with Core Vent STNDRD CLEN T 3TE PVW = 15 nm RVX = 2 nm TH = 3 4 inlet/outlet, T-line, 1 2 vent/drain, 4H = 1 inlet/outlet, T-line, 1 2 vent/drain, 3S = 3 4 inlet/outlet, T-line, 1 2 vent/drain, 4S = 1 inlet/outlet, T-line, 1 2 vent/drain, Torrento T3 Chem-Line I Disposable Filters with Core Vent UCM CLEN T 3CE PVW = 15 nm RVX = 2 nm TH = 3 4 inlet/outlet, T-line, 1 2 vent/drain, 4H = 1 inlet/outlet, T-line, 1 2 vent/drain, 3S = 3 4 inlet/outlet, T-line, 1 2 vent/drain, 4S = 1 inlet/outlet, T-line, 1 2 vent/drain, 3PL = 3 4 inlet/outlet, T-line, 1 2 vent/drain, PrimeLock fittings 4PL = 1 inlet/outlet, T-line, 1 2 vent/drain, PrimeLock fittings 4PL = 1 inlet/outlet, T-line, 1 2 vent/drain, PrimeLock fittings 14 ENTEGRIS, INC.

15 TORRENTO T SERIES FILTERS Ordering Information (continued) This information serves as a guide. Please contact your local representative to confirm part numbers. Torrento TE Chem-Line II Disposable Filter STNDRD CLEN T TE RDX = 2 nm OF = 3 4 inlet/outlet, 1 4 vent/drain, 1F = 3 8 inlet/outlet, 1 4 vent/drain, 2F = 1 2 inlet/outlet, 1 4 vent/drain, 4F = 1 inlet/outlet, 1 4 vent/drain, OW = 3 4 inlet/outlet, 1 4 vent/drain, Flowell series fittings 4W = 1 inlet/outlet, 1 4 vent/drain, Flowell series fittings OF2F = 3 4 inlet/outlet, 1 2 vent/drain, 4F2F = 1 inlet/outlet, 1 2 vent/drain, OW2W = 3 4 inlet/outlet, 1 2 vent/drain, Flowell series fittings 4W2W = 1 inlet/outlet, 1 2 vent/drain, Flowell series fittings P2PM = 3 4 inlet/outlet, 1 2 vent/drain, P3PM = 3 4 inlet/outlet, 1 4 vent/drain, 4P2PM = 1 inlet/outlet, 1 2 vent/drain, 4P3PM = 1 inlet/outlet, 1 4 vent/drain, Torrento TE Chem-Line II Disposable Filter UCM CLEN T CE RDW = 15 nm RDX = 2 nm OF = 3 4 inlet/outlet, 1 4 vent/drain, OL = 3 4 inlet/outlet, 1 4 vent/drain, PrimeLock fittings 2F = 1 2 inlet/outlet, 1 4 vent/drain, 2L = 1 2 inlet/outlet, 1 4 vent/drain, PrimeLock fittings 4F = 1 inlet/outlet, 1 4 vent/drain, W = 3 4 inlet/outlet, 1 4 vent/drain, Flowell series fittings 4W = 1 inlet/outlet, 1 4 vent/drain, Flowell series fittings P2PM = 3 4 inlet/outlet, 1 2 vent/drain, P3PM = 3 4 inlet/outlet, 1 4 vent/drain, 2P3PM = 1 2 inlet/outlet, 1 4 vent/drain, 4L3LM = 1 inlet/outlet, 1 4 vent/drain, PrimeLock fittings 4P2PM = 1 inlet/outlet, 1 2 vent/drain, 4P3PM = 1 inlet/outlet, 1 4 vent/drain, Torrento T3 Chem-Line II Disposable Filter STNDRD CLEN T 3TE PDW = 15 nm RDX = 2 nm OF = 3 4 inlet/outlet, 1 4 vent/drain, 1F = 3 8 inlet/outlet, 1 4 vent/drain, 2F = 1 2 inlet/outlet, 1 4 vent/drain, 4F = 1 inlet/outlet, 1 4 vent/drain, W = 3 4 inlet/outlet, 1 4 vent/drain, Flowell series fittings 4W = 1 inlet/outlet, 1 4 vent/drain, Flowell series fittings Torrento T3 Chem-Line II Disposable Filter UCM CLEN T 3CE PDW = 15 nm RDX = 2 nm OF = 3 4 inlet/outlet, 1 4 vent/drain, 1F = 3 8 inlet/outlet, 1 4 vent/drain, 2F = 1 2 inlet/outlet, 1 4 vent/drain, 4F = 1 inlet/outlet, 1 4 vent/drain, W = 3 4 inlet/outlet, 1 4 vent/drain, Flowell series fittings 4W = 1 inlet/outlet, 1 4 vent/drain, Flowell series fittings P3PM = 3 4 inlet/outlet, 1 4 vent/drain, 4P3PM = 1 inlet/outlet, 1 4 vent/drain, ENTEGRIS, INC. 15

16 TORRENTO T SERIES FILTERS Torrento T Series 15 and 3 15 nm Small Disposable Filters UCM Clean These drawings represent the small disposable filters (15/3). Refer to the accompanying tables for specific dimensional information. Dimensions TORRENTO T SERIES 15 SMLL DISPOSLE FILTERS 84. mm (3.31 ) 9. mm (3.54 ) NOMINL DIMENSIONS FITTING TYPE 8 mm Super Type Pillar fitting 32. mm (1.2 ) 14. mm (5.5 ) 3 8 Flaretek compatible fitting 32. mm (1.2 ) 15. mm (.5 ) 8 mm Super 3 Type Pillar fitting 31. mm (1.22 ) 135. mm (5.32 ) 3 8 Super 3 Type Pillar fitting 31. mm (1.22 ) 141. mm (5.55 ) TORRENTO T SERIES 3 SMLL DISPOSLE FILTERS 84. mm (3.31 ) 9. mm (3.54 ) NOMINL DIMENSIONS FITTING TYPE 8 mm Super Type Pillar fitting 32. mm (1.2 ) 194 mm (7.4 ) 1 2 Super Type Pillar fitting 32. mm (1.2 ) 24 mm (8.3 ) 3 8 Flaretek compatible fitting 32. mm (1.2 ) 22 mm (8. ) 8 mm Super 3 Type Pillar fitting 31. mm (1.22 ) 189 mm (7.44 ) 3 8 Super 3 Type Pillar fitting 31. mm (1.22 ) 194 mm (7.4 ) 1 2 Super 3 Type Pillar fitting 31. mm (1.22 ) 199 mm (7.84 ) 1 ENTEGRIS, INC.

17 TORRENTO T SERIES FILTERS Performance Data Torrento nm Small Disposable Filters Torrento 3 15 nm Small Disposable Filters Differential Pressure (kpa) nm fittings mm fittings fittings Ordering Information This information serves as a guide. Please contact your local representative to confirm part numbers. Torrento 15 nm Small 15 Disposable Filters UCM CLEN TRP 15C W = 15 nm 8P = 8 mm inlet/outlet, mm vent/drain, 3S = 3 8 inlet/outlet, 1 4 vent/drain, 8S = 8 mm inlet/outlet, mm vent/drain, 3F = 3 8 inlet/outlet, 1 4 vent/drain, Torrento 15 nm Small 3 Disposable Filters UCM CLEN TRP 3C W = 15 nm 2P = 1 2 inlet/outlet, 1 4 vent/drain, 2S = 1 2 inlet/outlet, 1 4 vent/drain, 3S = 3 8 inlet/outlet, 1 4 vent/drain, 3F = 3 8 inlet/outlet, 1 4 vent/drain, 8S = 8 mm inlet/outlet, mm vent/drain, 8P = 8 mm inlet/outlet, mm vent/drain, ENTEGRIS, INC. 17

18 For More Information Please call your Regional Customer Service Center today to learn what Entegris can do for you. Visit and select the Customer Service link for the center nearest you. Terms and Conditions of Sale ll purchases are subject to Entegris Terms and Conditions of Sale. To view and print this information, visit and select the Legal Notices link from the footer. Entegris, the Entegris Rings Design, Creating a Material dvantage, Chemlock, Flaretek, FlareLock, Torrento, PrimeLock and Chem-Line TM are trademarks of Entegris, Inc. Viton, Extreme TM and Kalrez are trademarks of E. I. du Pont de Nemours and Company. Chemraz is a registered trademark of Greene, Tweed and Co. Flowell TM is a trademark of Flowell Corporation. Pillar is a registered trademark of Nippon Pillar Packing Company, Ltd. ENTEGRIS, INC. Corporate Headquarters 129 Concord Road illerica, M 1821 US Customer Service Tel Customer Service Fax In North merica Entegris, Inc. ll rights reserved Printed in US ENT-515