(12) Patent Application Publication (10) Pub. No.: US 2013/ A1. Choi et al. (43) Pub. Date: Nov. 7, 2013
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1 (19) United States US 2013 O292847A1 (12) Patent Application Publication (10) Pub. No.: US 2013/ A1 Choi et al. (43) Pub. Date: Nov. 7, 2013 (54) SEMICONDUCTOR DEVICES AND (30) Foreign Application Priority Data METHODS OF MANUFACTURING THE SAME May 3, 2012 (KR) (71) Applicants: Byoungdeog Choi, Suwon-si (KR): JungWoo Seo, Hwaseong-si (KR); Sangyeong Han, Suwon-si (KR): Hyun-Woo Chung, Seoul (KR); Hongrae Kim, Seoul (KR); Yoosang Hwang, Suwon-si (KR) (72) Inventors: Byoungdeog Choi, Suwon-si (KR): JungWoo Seo, Hwaseong-si (KR); Sangyeong Han, Suwon-si (KR): Hyun-Woo Chung, Seoul (KR); Hongrae Kim, Seoul (KR); Yoosang Hwang, Suwon-si (KR) (21) Appl. No.: 13/803,935 (22) Filed: Mar 14, 2013 Publication Classification (51) Int. Cl. HOIL 23/2498 ( ) (52) U.S. Cl. CPC... HOIL 23/498 ( ) USPC /774 (57) ABSTRACT A semiconductor device includes a pair of line patterns dis posed on a Substrate. A contact plug is disposed between the pair of line patterns and an air gap is disposed between the contact plug and the line patterns. A landing pad extends from a top end of the contact plug to cover a first part of the air gap and an insulating layer is disposed on a second part of the air gap, which is not covered by the landing pad. 173 LP LP NNRN SS % GE GE
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