Bellows- and Diaphragm-Sealed Multiport and Elbow Valves and Monoblock Manifolds

Transcription

1 ellows- and Diaphragm-Sealed Multiport and Elbow Valves and Monoblock Manifolds 1 ellows- and Diaphragm-Sealed Multiport and Elbow Valves and Monoblock Manifolds Selection Guide EOW VVES MONOOCKS D, N, DF, D/DS, DP, and H Choose a valve type from individual product catalogs. Follow the instructions to build a valve ordering number for the multiport or elbow valve or monoblock manifold that meets your system requirements. See product catalogs for materials of construction, pressure-temperature ratings, options, and accessories.

2 2 ellows- and Diaphragm-Sealed Valves Multiport and Elbow Valves and Monoblock Manifolds Swagelok multiport and elbow valves and monoblock manifolds are available in a wide variety of configurations to meet your system requirements. See these Swagelok catalogs for materials of construction, technical data, and pressure-temperature ratings: ellows-sealed Valves N (MS-01-94) High-Pressure, Pneumatically ctuated ellows-sealed Valves H (MS-01-76) Springless Diaphragm Valves for High Performance DP (MS ) High-Flow Springless Diaphragm Valves DF (MS 02-24) Diaphragm Valves for tomic ayer Deposition tomic ayer Deposition (D) Diaphragm Valves (MS ) Diaphragm Valves D and DS (MS-01-73). Specifications See Swagelok Ultrahigh-Purity Specification (SC-01) (MS-06-61); Swagelok Photovoltaic Specification (SC 06) (MS 06 64); and Swagelok Special Cleaning and Packaging (SC 11) (MS-06-63), for details on processes, process controls, and process ver i fi ca tion. See Ordering Information, pages 6, 10, and 11 for process availability with each valve series and configuration. Wetted Surface Roughness (R a ) Testing EOW VVES MONOOCKS Cleaning Special cleaning with non ozonedepleting chemicals High-purity cleaning with a continuously monitored, deionized water, ultrasonic cleaning system 8 µin. (0.20 µm) average, machine finished and electropolished Ultrahighpurity cleaning with a continuously monitored, deionized water, ultrasonic cleaning system ssembly and Packaging Performed in specially cleaned areas; valves are individually bagged Performed in specially cleaned areas; valves are individually bagged Performed in ISO Class 4 work areas; valves are double bagged and vacuum sealed in cleanroom bags Specification Special Cleaning and Packaging (SC 11) Photovoltaic Specification (SC-06) Ultrahigh- Purity Specification (SC-01) Designator D, DF, DP None P6 P Electropolished and finished to an average of 5 µin. (0.13 µm) Electropolished and finished to an average of 5 µin. (0.13 µm) Electropolished and finished to an average of 5 µin. (0.13 µm) D / DS 20 µin. (0.51 µm) average, machine finished N, H 20 µin. (0.51 µm) average, machine finished 8 µin. (0.20 µm) average, machine finished and electropolished 8 µin. (0.20 µm) average, machine finished and electropolished D, DF, D / DS, DP D3 normally closed, DF, DP series: Inboard helium leak tested to a rate of std cm 3 /s at the seat, envelope, and all seals D3 and D6 normally open and D6 normally closed: Inboard helium leak tested to a rate of std cm 3 /s at the seat and to a rate of std cm 3 /s at the envelope and all other seals D / DS series: Inboard helium leak tested to a rate of std cm 3 /s at the seat, envelope, and all seals N, H Inboard helium leak tested to a rate of std cm 3 /s at the seat, envelope, and all seals H series: Pneumatic actuator leak tested to a maximum leak rate of 1 std cm 3 /min High-purity cleaning with a continuously monitored, deionized water, ultrasonic cleaning system Performed in specially cleaned areas; valves are individually bagged Photovoltaic Specification (SC-06) SC06 20 µin. (0.51 µm) average, machine finished

3 ellows- and Diaphragm-Sealed Multiport and Elbow Valves and Monoblock Manifolds 3 Multiport and Elbow Valves To order a multiport or elbow valve, select designators for: Valve type Flow path End connections for each port. Flow Path Select a flow path as viewed from the top of the valve. Insert the flow path des ig na tor in the valve or der ing number, as shown on page 6. n a next to the port number in the Flow Path column indicates a port above the valve seat. b next to the port number in the Flow Path column indicates a port below the valve seat. End Connections Select an end connection for each port on the body in numerical order. Insert the end connection des ig na tor in the valve ordering number in the same se quence it is selected, as shown on page 6. End Connections D3, N, D / DS, DP, H Designator Ports Schematic Closed Flow Path Open Designator VCR fitting 3 D 2 4 E 0.30 in. (7.6 mm) tube 1 EOW VVES MONOOCKS 0.26 in. (6.6 mm) short tube F 6 mm tube butt weld, 7.6 mm (0.30 in.) tube stub, 1 mm wall D6, DF 4 3 C H type D F H type E 1/2 in. female 8 G 1/2 in. rotatable male 7 3/8 in. tube butt weld, 0.50 in. (12.7 mm) tube 9 2 N R

4 4 ellows- and Diaphragm-Sealed Valves Multiport and Elbow Valves Dimensions Dimensions, in inches (millimeters), are for reference only and are subject to change. ody and ctuators 1.74 (44.2) 3.12 (79.2) ever D Rotary / Round / Directional / ockout N, DF, DP, DS (DS series shown DF and DP series do not contain panel nuts.) Toggle N, DP (N series shown DP series does not contain panel nuts.) EOW VVES MONOOCKS Valve N 4.33 (110) 1.88 (47.8) DF, round 3.18 (80.8) 1.50 (38.1) DF, lockout 4.31 (109) max DP, round and directional, high- and lowpressure DP, lockout, high-pressure DP, lockout, low-pressure 2.84 (72.1) Open 3.89 (98.9); closed, locked 4.26 (108) Open 3.73 (94.7); closed, locked 4.07 (103) DS 3.19 (81.0) 1.87 (47.5) Valve N 3.85 (97.8) 0.94 (23.9) DP, low pressure 4.55 (116) 1.24 (31.5) Pneumatic ctuator D, N, DF, DP, H (H series shown) Valve D3, normally closed D3, normally open D6, normally closed D6, normally open 3.50 (88.9) (standard actuator) 4.50 (114) (thermal actuator) 3.22 (81.8) (standard actuator) 4.22 (107) (thermal actuator) 3.76 (95.5) (standard actuator) 4.76 (121) (thermal actuator) 3.48 (88.4) (standard actuator) 4.48 (114) (thermal actuator) (28.6) (28.6) N 3.67 (93.2) 1.24 (31.5) DF 3.71 (94.2) 1.50 (38.1) DP, high-pressure DP, low-pressure 3.89 (98.8) 2.48 (63.0) 3.38 (85.9) H 3.90 (99.1) 2.12 (53.8)

5 ellows- and Diaphragm-Sealed Multiport and Elbow Valves and Monoblock Manifolds 5 Multiport and Elbow Valves Dimensions Dimensions, in inches (millimeters), are for reference only and are subject to change. ody and End Connections ottom N, D /DS, H Two mounting holes, or M H thread, 0.25 (6.4) deep, 45 from center line, on a 1.00 (25.4) dia bolt circle➀ ➀ odies with or R flow path designators have mounting holes reversed from the pattern shown. odies with N flow path designator have no mounting holes. Valve ottom Four mounting holes, or M H thread, 0.25 (6.4) deep, 45 from center line, on a 1.00 (25.4) dia bolt circle➁ ➁ odies with N flow path designator have no mounting holes. Dimensions in. (mm) D, DF, DP D3, DP 1.06 (26.9) 1.06 (26.9) N, D / DS, H 1.13 (28.7) 1.06 (26.9) D6, DF 1.25 (31.8) 1.25 (31.8) Front Port 4 Port 1 Port 2 Port 1 Port 3 Top Port (11.4) M Port 2 End Connections Dimensions in. (mm) D3, N, D / DS, DP, H 0.30 in. (7.6 mm) tube stub 0.26 in. (6.6 mm) tube stub 6 mm tube butt weld, 0.30 in. (7.6 mm) tube stub D6, DF H type H type 1/2 in. female 1/2 in. rotatable male 3/8 in. tube butt weld, 0.50 in. (12.7 mm) tube stub ➀ D3 and DP series: 1.39 in. (35.3 mm). ➁ N, D / DS, H series: = 0.95 in. (24.1 mm) for ports 1 and 2 if the opposite port has a female or male end connection (35.3) 1.74 (44.2)➀ 0.87 (22.1)➁ 0.81 (20.6) 0.87 (22.1)➁ 1.39 (35.3) 1.48 (37.6) 2.08 (52.8) 2.08 (52.8) 1.12 (28.4) M 1.28 (32.5) 1.63 (41.4) 0.76 (19.3) 0.70 (17.8) 0.76 (19.3) 1.21 (30.7) 1.30 (33.0) 1.90 (48.3) 1.90 (48.3) 0.95 (24.1) EOW VVES MONOOCKS

6 6 ellows- and Diaphragm-Sealed Valves Multiport and Elbow Valves Ordering Information uild a valve ordering number by combining the designators in the sequence shown below. C D E F G 6 V V D P C P C EOW VVES MONOOCKS Material N, DF, D / DS, H 6V = 316 VR stainless steel D, DP 6VV = 316 VIM/VR stainless steel Valve D3 = D3, standard D3T = D3, thermal D6 = D6, standard D6T = D6, thermal N = N (rotary handle or pneumatic actuator) NT = N (toggle handle) DF = DF (rotary handle or pneumatic actuator) DF = DF (integral lockout handle) D = D (lever handle) DP = ow-pressure DP (directional handle or pneumatic actuator) DP = ow-pressure DP (integral lockout handle) DPR = ow-pressure DP (round handle) DPT = ow-pressure DP (toggle handle) DPH = High-pressure DP (directional handle or pneumatic actuator) DPH = High-pressure DP (integral lockout handle) DPHR = High-pressure DP (round handle) DS = DS (rotary handle) H = H (pneumatic actuator) C Seat Material (DF and DP Only) V= Polyimide Omit designator for standard DF and DP series with PCTFE seat and for all other series. D Flow Path Select a 2-, 3-, or 4-port flow path; see the schematics on page 3. E End Connections Select an end connection for each port on the body in numerical order; see page 3 for port numbering and page 3 for styles and sizes available. F See page 2 for process descriptions including cleaning and packaging, wetted surface finish, and testing. ll P = Swagelok Ultrahigh-Purity Specification (SC 01) (required for D valves) N, D / DS, and H None = Swagelok Special Cleaning and Packaging (SC-11) N and H -SC06 = Swagelok Photovoltaic Specification (SC 06) DF = Swagelok Special Cleaning and Packaging (SC-11) N, DF, DP, and H P6 = Swagelok Photovoltaic Specification (SC 06) G ctuation Pneumatic (D ) C = Normally closed NO = Normally open Pneumatic (N, DF, DP, H ) C = Normally closed O = Normally open CM = Normally closed with indicator switch Manual (DF, DP Handle Color) K = lack = lue➀ GR = Green OR = Orange RD = Red WH = White➀ YW = Yellow ➀ DP series no designator or final dash ( ) is required for a blue handle on a low-pressure valve or a white handle on a high-pressure valve.

7 ellows- and Diaphragm-Sealed Multiport and Elbow Valves and Monoblock Manifolds 7 Monoblock Manifolds To customize a multivalve manifold to meet your system requirements, select designators for: Flow path End connections for each port ctuator (manual or pneumatic). Flow Path Select a flow path. Insert the flow path designator in the manifold ordering number, as shown on pages 10 and 11.,, and designate port numbers. and designate valve numbers. End Connections Select an end connection for each port on the body in numerical order. Place the end connection des ig na tor in the valve ordering number in the same se quence it is selected. Manifold Schematic Flow Path Valve Designator 1-valve, 3-port D6, DF 5V End Connections Designator D3, N, D / DS, H, DP ll Ports D6, DF Port valve, 3-port D3, D6, DF, DP 1V N, D / DS, H M4V D3, DP 2V 0.30 in. (7.6 mm) tube 1 3 EOW VVES MONOOCKS 2-valve, 3-port double pattern Front Side N, D / DS, H M3V D3, DP 1D N, D / DS, H M1D N, D / DS, H M2D 6 mm tube butt weld, 1 mm wall D6, DF Ports 1 and 3 H type H type 4 D E Front Side 3/8 in. tube butt weld, 0.50 in. (12.7 mm) tube 9

8 8 ellows- and Diaphragm-Sealed Valves Monoblock Manifolds Dimensions Dimensions, in inches (millimeters), are for reference only and are subject to change. 2 Valve, 3 Port ody and End Connections Port 2 C End Connection 1 D3, N, D / DS, DP, H 2 Port 1 Port (51.6) 2.39 (60.7) 0.30 in. (7.6 mm) tube 1.81 (46.0) 2.66 (67.6) 3.91 (99.3)➀ 3.35 (85.1) 4.60 (117)➀ 2.79 (70.9) 4.04 (103)➀ (11.4) D6, DF 2.66 (67.6) Port 1 D Port 3 E 3.35 (85.1) 0.30 in. (7.6 mm) tube 2.79 (70.9) H type 2.03 (51.6) EOW VVES MONOOCKS Four mounting holes, M H thread, 0.25 (6.4) deep, 45 from center line, on a 1.00 (25.4) bolt circle. M H holes are compatible with mounting screws. H type 3/8 in. tube butt weld, 0.50 in. (12.7 mm) tube ➀ DP series high-pressure manifold (60.7) 1.81 (46.0) ody and ctuators Valve, ctuation D3, normally closed D3, normally open D6, normally closed D6, normally open C D E 3.32 (84.3) (standard): 4.18 (106) (thermal) 3.00 (76.2) (standard): 3.87 (98.3) (thermal) 3.67 (93.2) (standard): 4.53 (115) (thermal) 3.37 (85.6) (standard): 4.23 (107) (thermal) 2.73 (69.3) (standard): 3.22 (81.5) (thermal) 2.44 (62.0) (standard): 2.94 (74.7) (thermal) 2.86 (72.6) (standard): 3.36 (85.3) (thermal) 2.58 (65.6) (standard): 3.08 (78.2) (thermal) (28.6) (28.6) N, rotary 4.08 (104) 3.33 (84.6) 1.88 (47.8) N, pneumatic 3.31 (84.1) 2.68 (68.1) 1.24 (31.5) N, toggle 4.15 (105) 3.38 (85.9) DF, round 3.14 (79.8) 2.52 (64.0) DF, pneumatic 3.62 (91.9) 2.84 (72.0) DF, lockout 3.72 (94.5) open; 3.90 (99.1) closed and locked 2.87 (72.9) open; 2.72 (69.1) closed and locked 1.50 (38.1) 2.46 (62.5) 1.06 (26.9) 2.59 (65.8) 1.25 (31.8) 2.41 (61.2) 1.13 (28.7) 2.59 (65.8) 1.25 (31.8) D 2.75 (69.5) 3.31 (84.1) 2.41 (61.2) 1.13 (28.7) DP, directional, high- and low-pressure DP lockout, high-pressure DP lockout, low-pressure 2.62 (66.6) 2.32 (58.9) 3.48 (88.4) open; 3.72 (94.5) closed and locked 3.32 (84.3) open; 3.55 (90.2) closed and locked 2.81 (71.4) open; 2.69 (68.3) closed and locked 2.73 (69.3) open; 2.59 (65.8) closed and locked DP, pneumatic, high-pressure 3.89 (98.8) 3.33 (84.6) 2.48 (63.0) DP, pneumatic, low-pressure 3.21 (81.5) 2.67 (67.8) DP, round, high- and low-pressure 2.68 (68.1) 2.33 (59.2) 2.46 (62.5) 1.06 (26.9) DS 3.03 (77.0) 2.71 (68.8) 1.87 (47.5) 2.41 (61.2) 1.13 (28.7) H 3.73 (94.7) 3.31 (84.1) 2.12 (53.8) 2.41 (61.2) 1.13 (28.7)

9 Monoblock Manifolds Dimensions Dimensions, in inches (millimeters), are for reference only and are subject to change. ellows- and Diaphragm-Sealed Multiport and Elbow Valves and Monoblock Manifolds 9 1 Valve, 3 Port C, dia Port 2 Double Pattern Front Side ack N, D / DS, H 2.54 (64.5) 1.13 (28.7) 0.44 (11.1) Port 1 Port (50.5)➀ Port 1 Port 3 Port 2 Two mounting holes, or M H thread, 0.25 (6.4) deep, 45 from center line, on a 1.00 (25.4) dia bolt circle Port (31.8) 1.58 (40.1) Port 3 D3, DP 1.18 (30.0) Four mounting holes, M H thread, 0.25 (6.4) deep, 45 from center line, on a 1.00 (25.4) bolt circle. M H holes are compatible with mounting screws. ➀ N series normally closed pneumatic actuator only. Four mounting holes, M H thread, 0.25 (6.4) deep, 45 from center line, on a 1.00 (25.4) bolt circle. M H holes are compatible with mounting screws. EOW VVES MONOOCKS ody and ctuators ody and ctuators ody and End Connections Valve, ctuation D6, normally closed D6, normally open DF, round DF, pneumatic DF, lockout ody and End Connections End Connection H type H type 3/8 in. tube butt weld, 0.50 in. (12.7 mm) tube stub, in. wall C 3.67 (93.2) (standard); 4.53 (115) (thermal) 3.37 (85.6) (standard); 4.23 (107) (thermal) 2.86 (72.6) (standard); 3.36 (85.3) (thermal) 2.58 (65.6) (standard); 3.08 (78.2) (thermal) 3.59 (91.2) 2.52 (64.0) 4.07 (103) 2.84 (72.0) 3.72 (94.5) open; 3.90 (99.1) closed and locked 2.87 (72.9) open; 2.72 (69.1) closed and locked Dimensions in. (mm) (55.4) 2.18 (55.4) 1.81 (46.0) 1.49 (37.8) (28.6) 1.50 (38.1) 1.49 (37.8) (30.0) 1.18 (30.0) 0.90 (22.9) Valve, ctuation D3, normally closed D3, normally open 3.16 (80.3) (standard); 4.16 (106) (thermal) (28.6) N, pneumatic 3.35 (85.1) 1.24 (31.5) N, rotary 4.01 (102) 1.88 (47.8) N, toggle 4.46 (103) D 2.80 (71.2) DP, directional, high- and lowpressure DP, lockout, high-pressure DP, lockout, low-pressure DP, pneumatic, high-pressure DP, pneumatic, low-pressure DP, round high- and lowpressure 2.49 (63.2) open 3.55 (90.1) open; 3.91 (99.3) closed and locked 3.38 (85.9) open; 3.72 (94.5) closed and locked 3.55 (90.1) 2.48 (63.0) 3.04 (77.2) 2.49 (63.3) open DS 2.87 (72.9) 1.87 (47.5) H 3.90 (99.1) 2.12 (53.8) End Connection D3, DP 0.30 in. (7.6 mm) tube 6 mm tube butt weld, 0.30 in. (7.6 mm) tube N, D / DS, H 0.30 in. (7.6 mm) tube 6 mm tube butt weld, 0.30 in. (7.6 mm) tube in. (mm) 1.39 (35.3) 1.39 (35.3) 0.87 (22.1) 0.87 (22.1) 1.41 (35.8) 1.77 (45.0) 0.87 (22.1)➀ 0.87 (22.1)➀ ➀ = 0.95 in. (24.1 mm) for ports 1 and 2 if the opposite port has a female or male end connection.

10 10 ellows- and Diaphragm-Sealed Valves Monoblock Manifolds Ordering Information D, DF, and DP uild a valve ordering number by combining the designators in the sequence shown below. C D E F G 6 V F 1 V D 2 D P Material DF 6V = 316 VR stainless steel D, DP 6VV = 316 VIM/VR stainless steel C Flow Path F EOW VVES MONOOCKS Valve 3 = D3, standard 3T = D3, thermal 6 = D6, standard 6T = D6, thermal F = DF (rotary handle or pneumatic actuator) F = DF (integral lockout handle) P = ow-pressure DP (directional handle or pneumatic actuator) P = ow-pressure DP (integral lockout handle) PR = ow-pressure DP (round handle) PT = ow-pressure DP (toggle handle) PH = High-pressure DP (directional handle or pneumatic actuator) PH = High-pressure DP (integral lockout handle) PHR = High-pressure DP (round handle) See page 7 for flow path schematics. D3, D6, DF, DP 1V = 2-valve, 3-port monoblock D3, DP 1D = 2-valve, 3-port double pattern 2V = 2-valve, 3-port monoblock D6, DF 5V = 1-valve, 3-port monoblock D Seat Material (DF and DP Only) V= Polyimide Omit designator for standard DF and DP series with PCTFE seat and for all other series. E End Connections Select an end connection for each port on the body in numerical order; see page 7 for port numbering and styles and sizes available. See page 2 for process descriptions including cleaning and packaging, wetted surface finish, and testing. ll P = Swagelok Ultrahigh-Purity Specification (SC 01) (required for D valves) DF, DP = Swagelok Special Cleaning and Packaging (SC-11) P6 = Swagelok Photovoltaic Specification (SC-06) G ctuation dd a designator for each valve. Pneumatic (D ) = Normally closed NO = Normally open Pneumatic (DF, DP ) = Normally closed = Normally open C = Normally closed with indicator switch Manual (DF, DP Handle Color) T = lack U = lue S = Green V = Orange W= Red X = White Y = Yellow

11 ellows- and Diaphragm-Sealed Multiport and Elbow Valves and Monoblock Manifolds 11 Monoblock Manifolds Ordering Information N, D / DS, and H uild a valve ordering number by combining the designators in the sequence shown below. C D E 6 M 3 V P G G Material 6 = 316 stainless steel Flow Path See page 7 for flow path schematics. M3V = 2-valve, 3-port monoblock M4V = 2-valve, 3-port monoblock M1D = 2-valve, 3-port double pattern M2D = 2-valve, 3-port double pattern C End Connections Select an end connection for each port on the body in numerical order; see page 7 for port numbering and styles and sizes available. D See page 2 for process descriptions including cleaning and packaging, wetted surface finish, and testing. ll None = Swagelok Special Cleaning and Packaging (SC-11) P = Swagelok Ultrahigh-Purity Specification (SC 01) N and H P6 = Swagelok Photovoltaic Specification (SC 06) -SC06 = Swagelok Photovoltaic Specification (SC 06) E ctuation dd a designator for each valve. N G = Toggle handle H = Rotary handle I = Normally closed pneumatic J = Normally open pneumatic D / DS P = DS series, rotary handle V = D series, lever handle H = Normally closed = Normally open EOW VVES MONOOCKS Oxygen Service Hazards For more information about hazards and risks of oxygenenriched systems, see the Swagelok Oxygen System Safety technical report (MS-06-13). To increase service life, ensure proper valve performance, and prevent leakage, apply only as much torque as is required to achieve positive shutoff in manually actuated N series and DS series valves. Caution: Do not mix or interchange parts with those of other manufacturers. MS , Rev, October 2017

12 bout this document Thank you for downloading this electronic catalog, which is part of General Product catalog Swagelok published in print. This type of electronic catalog is updated as new information arises or revisions, which may be more current than the printed version. Swagelok Company is a major developer and provider of fluid system solutions, including products, integration solutions and services for industry research, instrumentation, pharmaceutical, oil and gas, power, petrochemical, alternative fuels, and semiconductor. Our manufacturing facilities, research, service and distribution facilities support a global network of more than 200 authorized sales and service centers in 57 countries. Visit to locate your Swagelok representative and obtain any information on features, technical information and product references, or to learn about the variety of services available only through authorized sales centers and service Swagelok. Safe Product Selection When selecting a product, the total system design must be considered to ensure safe, trouble-free performance. Function, material compatibility, adequate ratings, proper installation, operation, and maintenance are the responsibilities of the system designer and user. Warranty Information Swagelok products are backed by The Swagelok imited ifetime Warranty. For a copy, visit your Swagelok Web site or contact your authorized Swagelok representative. Swagelok, Ferrule-Pak, Goop, Hinging-Colleting, IGC, Kenmac, Micro-Fit, Nupro, Snoop, Sno-Trik, SWK, VCO, VCR, Ultra- Torr, Whitey TM Swagelok Company flas TM sahi Glass Co. td. -6XN TM llegheny udlum Corporation utocd TM utodesk, Inc. CS TM Canadian Standards ssociation DeviceNet TM ODV Kalrez, Krytox TM DuPont Elgiloy TM Elgiloy Specialty Metals FM TM FM Global Grafoil TM GrafTech International Holdings, Inc. MC TM MC Valves Inc. Microsoft, Windows TM Microsoft Corp. NCE TM NCE International Nitronic TM K Steel Corporation picofast TM HansTurck KG Pillar TM Nippon Pillar Packing Company, td. Rapid Tap TM Relton Corporation 15-7 PH, 17-7 PH TM K Steel Corp. Sandvik TM Sandvik Silconert TM Silcotek Corporation Simriz TM Freudenberg-NOK SolidWorks TM SolidWorks Corporation 2017 Swagelok Company