High-Precision Linear Stage

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1 High-Prcision Linar Stag High Travl Accuracy L-511 Travl rangs to 155 mm (6") Rpatability to 0.1 µm DC, BLDC, and DC gar motors Stppr motors Optional linar ncodr for dirct position masurmnt Dirction-snsing rfrnc point switch Rfrnc-class linar stag Rcirculating ball barings for high travl accuracy and load capacity. Prcision ball scrw with 2 mm pitch. Strss-rlivd aluminum bas for highst stability. Noncontact limit switchs. Noncontact optical rfrnc point switch with dirction snsing in th middl of th travl rang. Driv typs.xxad variant: ActivDriv DC motor for high vlocity: Control via puls-width-modulatd (PWM) signals, th oprating voltag is attaind via an amplifir intgratd in th motor housing..xxdg variant: DC srvo motor with garhad for high torqus and rsolution at low motor powr.xxsd variant: 2-phas stppr motor for low vlocity and high rsolution.xx3xxx variant: DC motor.xx5xxx variant: Brushlss DC motor Position masurmnt Intgratd rotary ncodr on th motor shaft (xxad10, xxdg10, xxxx32). Incrmntal linar ncodr (xxad00, xasd00, xxxx11). Highly accurat position masuring with incrmntal ncodr Noncontact optical ncodrs masur th position dirctly at th platform with th gratst accuracy. Nonlinarity, mchanical play or lastic dformation hav no influnc on th masurmnt. Minimum incrmntal motion and slow motion In conjunction with th SMC Hydra controllr, vrsions with stppr motor and intgratd linar ncodr (L-511.xASD00) achiv rpatabl minimum incrmntal motion in th rang of th snsor rsolution. Th sam configuration achivs constant low vlocitis of a fw snsor incrmnts pr scond.

2 Application filds Autofocus, Lasr cutting, Rsarch, Biotchnology, Automation, Vacuum, Optical alignmnt Spcifications Motion L-511.xxDG10 L-511.xx3111 / L-511.xx3132 L-511.xx5111 / L-511.xx5132 Unit Tolranc Activ axs X X Travl rang Pitch / yaw Straightnss / flatnss L DG10: 52 L DG10: 102 L DG10: 155 L DG10: ±40 L DG10: ±60 L DG10: ±70 L DG10: ±1.5 L DG10: ±2.5 L DG10: ±3.0 L xxxx: 52 L xxxx: 102 L xxxx: 155 L xxxx: ±40 L xxxx: ±60 L xxxx: ±70 L xxxx: ±1.5 L xxxx: ±2.5 L xxxx: ±3.0 mm µrad typ. µm typ. Vlocity 6 90 mm/s max. Positioning Intgratd snsor Snsor signal Dsign rsolution L-511.xxDG10 Incrmntal rotary ncodr A/B quadratur, TTL L-511.xx3111 / L- 511.xx5111 L-511.xx3111: Incrmntal linar ncodr L-511.xx5111: Incrmntal rotary ncodr, incrmntal rotary ncodr Linar ncodr: Sin/cos, 1 V pak-pak, 20 µm signal priod Rotary ncodr: A/B quadratur, TTL L-511.xx3111: L-511.xx5111: 0.05 L-511.xx3132 / L- 511.xx5132 Incrmntal rotary ncodr A/B quadratur, TTL Unit 0.1 µm Snsor rsolution rotary ncodr Cts./rv. Snsor rsolution linar ncodr L-511.xx3111: L-511.xx5111: µm Minimum incrmntal motion µm typ. Unidirctional rpatability µm typ. Bidirctional rpatability ±2 ±0.1 ±1.25 µm typ. Rfrnc and limit switchs Optical Optical Optical Tolranc

3 Mchanical proprtis L-511.xxDG10 L-511.xx3xxx / L-511.xx5xxx Unit Driv scrw typ Ball scrw Ball scrw Tolranc Driv scrw pitch 2 2 mm Gar ratio 2401:81 Guid typ Rcirculating ball baring Rcirculating ball baring Holding forc, powr off 50 L-511.xx3xxx: 30 L-511.xx5xxx: 15 Push/pull forc Fx, powr on N max. Prmissibl latral forc N max. Load capacity N max. Prmissibl torqu Mx in θx N m max. Prmissibl torqu My in θy N m max. Prmissibl torqu Mz in θz N m max. N typ. Driv proprtis L-511.xxDG10 L-511.xx3xxx L-511.xx5xxx Unit Motor typ DC motor (with garhad) DC motor Brushlss DC motor, 3- phas Oprating voltag, nominal V nom. Oprating voltag, max V max. Tolranc Miscllanous L-511.xxDG10 L-511.xx3xxx L-511.xx5xxx Unit Oprating tmpratur rang 5 to 40 5 to 40 5 to 40 C Tolranc Matrial Aluminum, stainlss stl Aluminum, stainlss stl Aluminum, stainlss stl Mass Movd mass, unloadd Connction Rcommndd controllrs/drivrs L DG10: 2.5 L DG10: 2.7 L DG10: 2.9 L DG10: 0.6 L DG10: 0.6 L DG10: HD Sub-D 26 (m) (motor/snsor) C-863 (singl axis) C-884 (up to 6 axs) C-885 with C C885 (to 40 axs) ACS modular controllr L xxx: 2.5 L xxx: 2.6 L xxx: 3.1 L xxx: 0.6 L xxx: 0.6 L xxx: 0.65 L-511.xx3111: 1 HD Sub-D 26 (m) (motor), 1 Sub-D 9 (m) (snsor) L-511.xx3132: 1 HD Sub-D 26 (m) (motor/snsor) C-863 (singl axis) C-884 (up to 6 axs) C-885 with C C885 (to 40 axs) ACS modular controllr L xxx: 2.4 L xxx: 2.7 L xxx: 3.0 L xxx: 0.6 L xxx: 0.6 L xxx: 0.65 L-511.xx5111: 1 HD Sub-D 26 (m) (motor/snsor), 1 Sub-D 9 (m) (snsor) L-511.xx5132: 1 HD Sub-D 26 (m) (motor/snsor) L-511.xx5111: C-891 (singl axis) C-885 with C C885 (up to 20 axs) ACS modular controllr L-511.xx5132 additional: SMC Hydra (doubl axis) kg ±5 % kg ±5 %

4 Motion L-511.xxADxx L-511.xxSD00 / L-511.xASD00 Unit Activ axs X X Travl rang Pitch / yaw Straightnss / flatnss L-511.2xADxx: 52 L-511.4xADxx: 102 L-511.6xADxx: 155 L-511.2xADxx: ±40 L-511.4xADxx: ±60 L-511.6xADxx: ±70 L-511.2xADxx: ±1.5 L-511.4xADxx: ±2.5 L-511.6xADxx: ±3.0 L-511.2xSD00: 52 L-511.4xSD00: 102 L-511.6xSD00: 155 L-511.2xSD00: ±40 L-511.4xSD00: ±60 L-511.6xSD00: ±70 L-511.2xSD00: ±1.5 L-511.4xSD00: ±2.5 L-511.6xSD00: ±3.0 mm µrad Tolranc typ. µm typ. Vlocity mm/s max. Positioning L-511.xxADxx L-511.xxSD00 L-511.xASD00 Unit Intgratd snsor L-511.xxAD10: Incrmntal rotary ncodr L-511xxAD00: Incrmntal linar ncodr Snsor signal A/B quadratur, TTL Dsign rsolution L-511.xxAD10: L-511.xxAD00: 0.05 Incrmntal linar ncodr Sin/cos, 1 V pak-pak, 20 µm signal priod µm Snsor rsolution rotary ncodr L-511.xxAD10: Cts./rv. Tolranc Snsor rsolution linar ncodr L-511.xxAD00: µm Rsolution stppr motor Minimum incrmntal motion Unidirctional rpatability Bidirctional rpatability L-511.xxAD10: L-511.xxAD00: 0.1 L-511.xxAD10: L-511.xxAD00: 0.1 L-511.xxAD10: ±1.250 L-511.xxAD00: ±0.2 Rfrnc and limit switchs Optical Optical Optical Full stps/rv µm typ µm typ. ±2 ±0.2 µm typ. Mchanical proprtis L-511.xxADxx / L-511.xxSD00 / L-511.xASD00 Unit Driv scrw typ Ball scrw Tolranc Driv scrw pitch 2 mm Guid typ Holding forc, powr off Rcirculating ball baring L-511.xxADxx: 30 L-511.xxSD00 / L-511.xASD00: 50 Push/pull forc Fx, powr on 100 N max. Prmissibl latral forc 250 N max. Load capacity 500 N max. Prmissibl torqu Mx in θx 60 N m max. Prmissibl torqu My in θy 30 N m max. Prmissibl torqu Mz in θz 30 N m max. N typ.

5 Driv proprtis L-511.xxADxx L-511.xxSD00 / L-511.xASD00 Unit Motor typ ActivDriv DC motor (PWM) Stppr motor, 2-phas Tolranc Oprating voltag, nominal V nom. Oprating voltag, max V max. Miscllanous L-511.xxADxx L-511.xxSD00 L-511.xASD00 Unit Oprating tmpratur rang 5 to 40 5 to 40 5 to 40 C Tolranc Matrial Aluminum, stainlss stl Aluminum, stainlss stl Aluminum, stainlss stl Mass Movd mass, unloadd Connction Rcommndd controllrs/drivrs L-511.2xADxx: 2.5 L AD10: 2.8 L AD10: 3.3 L AD00: 2.7 L AD00: 3.5 L-511.2xADxx: 0.6 L-511.4xADxx: 0.6 L-511.6xADxx: Sub-D 15 (m) (motor/snsor) C-863 (singl axis) C-884 (up to 6 axs) C-885 with C C885 (to 40 axs) ACS modular controllr L SDxx: 2.4 L SDxx: 2.6 L SDxx: 3.1 L SDxx: 0.6 L SDxx: 0.6 L SDxx: HD Sub-D 26 (m) (motor) C (singl axis) SMC Hydra (doubl axis) C-885 with C C885 (up to 20 axs) ACS modular controllr L-511.2ASDxx: 2.4 L-511.4ASDxx: 2.6 L-511.6ASDxx: 3.1 L-511.2ASDxx: 0.6 L-511.4ASDxx: 0.6 L-511.6ASDxx: HD Sub-D 26 (m) (motor) 1 Sub-D 9 (m) (snsor) C (singl axis) SMC Hydra (doubl axis) C-885 with C C885 (up to 20 axs) ACS modular controllr kg ±5 % kg ±5 % All cabls rquird for opration with th rcommndd controllr ar includd in th scop of dlivry. Th cabl lngth is 3 m. Cabl for conncting to othr controllrs can b ordrd as accssory. Ask about customizd vrsions.

6 Drawings / Imags L-511 vrsions with DC and BLDC motor, and rotary ncodr, dimnsions in mm

7 L-511 vrsions with DC and BLDC motor, and linar ncodr, dimnsions in mm

8 L-511 vrsions with DC gar motor, dimnsions in mm

9 L-511 vrsions with stppr motor, dimnsions in mm

10 L-511 vrsions with ActivDriv DC motor, dimnsions in mm

11 Dtail drawing of th L-511 motion platform, dimnsions in mm

12 L-511 and L-509 prcision stags can b combind without adaptr plat for multi-axis positioning in svral axs

13 Multi-axis stup with L-511 (horizontal) and L-509 (vrtical) prcision stags

14 Th L-511 rliably prforms rpatabl 20-nm stps with th linar ncodr and SMC Hydra motion controllr Dirction of th axs and torqus for linar stags

15 Ordring Information L Prcision linar stag, 110 mm width, 52 mm travl rang, DC motor, linar ncodr with sin/cos signal transmission, including 3 m cabl st L Prcision linar stag, 110 mm width, 52 mm travl rang, DC motor, including 3 m cabl st L Prcision linar stag, 110 mm width, 52 mm travl rang, brushlss DC motor, linar ncodr with sin/cos signal transmission, including 3 m cabl st L Prcision linar stag, 110 mm width, 52 mm travl rang, brushlss DC motor, including 3 m cabl st L Prcision linar stag, 110 mm width, 102 mm travl rang, DC motor, linar ncodr with sin/cos signal transmission, including 3 m cabl st L Prcision linar stag, 110 mm width, 102 mm travl rang, DC motor, including 3 m cabl st L Prcision linar stag, 110 mm width, 102 mm travl rang, brushlss DC motor, linar ncodr with sin/cos signal transmission, including 3 m cabl st L Prcision linar stag, 110 mm width, 102 mm travl rang, brushlss DC motor, including 3 m cabl st L Prcision linar stag, 110 mm width, 155 mm travl rang, DC motor, linar ncodr with sin/cos signal transmission, including 3 m cabl st L Prcision linar stag, 110 mm width, 155 mm travl rang, DC motor, including 3 m cabl st L Prcision linar stag, 110 mm width, 155 mm travl rang, brushlss DC motor, linar ncodr with sin/cos signal transmission, including 3 m cabl st L Prcision linar stag, 110 mm width, 155 mm travl rang, brushlss DC motor, including 3 m cabl st L AD10 Prcision linar stag, 110 mm width, 52 mm travl rang, ActivDriv DC motor, including 3 m cabl st L DG10 Prcision linar stag, 110 mm width, 52 mm travl rang, DC gar motor, including 3 m cabl st L SD00 Prcision linar stag, 110 mm width, 52 mm travl rang, stppr motor, including 3 m cabl st L AD00 Prcision linar stag, 110 mm width, 52 mm travl rang, ActivDriv DC motor, linar ncodr with A/B quadratur signal transmission, including 3 m cabl st L-511.2ASD00 Prcision linar stag, 110 mm width, 52 mm travl rang, stppr motor, linar ncodr with sin/cos signal transmission, including 3 m cabl st

16 L AD10 Prcision linar stag, 110 mm width, 102 mm travl rang, ActivDriv DC motor, including 3 m cabl st L DG10 Prcision linar stag, 110 mm width, 102 mm travl rang, DC gar motor, including 3 m cabl st L SD00 Prcision linar stag, 110 mm width, 102 mm travl rang, stppr motor, including 3 m cabl st L AD00 Prcision linar stag, 110 mm width, 102 mm travl rang, ActivDriv DC motor, linar ncodr with A/B quadratur signal transmission, including 3 m cabl st L-511.4ASD00 Prcision linar stag, 110 mm width, 102 mm travl rang, stppr motor, linar ncodr with sin/cos signal transmission, including 3 m cabl st L AD10 Prcision linar stag, 110 mm width, 155 mm travl rang, ActivDriv DC motor, rotary ncodr, including 3 m cabl st L DG10 Prcision linar stag, 110 mm width, 155 mm travl rang, DC gar motor, including 3 m cabl st L SD00 Prcision linar stag, 110 mm width, 155 mm travl rang, stppr motor, including 3 m cabl st L AD00 Prcision linar stag, 110 mm width, 155 mm travl rang, ActivDriv DC motor, linar ncodr with A/B quadratur signal transmission, including 3 m cabl st L-511.6ASD00 Prcision linar stag, 110 mm width, 155 mm travl rang, stppr motor, linar ncodr with sin/cos signal transmission, including 3 m cabl st

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