MAG integra. Турбомолекулярный насос на магнитном подшипнике с интегрированным преобразователем частоты

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1 MAG integra Турбомолекулярный насос на магнитном подшипнике с интегрированным преобразователем частоты Part Nos. 4300Vxxxx 4600Vxxxx 4700Vxxxx 42200Vxxxx and pumps modified by Oerlikon Leybold Vacuum

2 MAG W 300 ip MAG W 600 ip Booster MAG W 700 MAG ip W 600 ip MAG W 600 ipl Booster MAG W 700 ipl MAG W 2200 ipl MAG W 2200 ip Fig.. MAG integra models Вакуумные насосы серии MAG integra состоят из: - Турбомолекулярного вакуумного насоса MAG integra - Преобразователя частоты и блока питания MAG.DRIVE _002_A5-08/202 - Oerlikon Leybold Vacuum

3 Технические характеристики MAG W 300 ip(l) 600 ip(l) Booster 700 ip(l) 2200 ip(l) High-vacuum flange DN 200 ISO-F 250 ISO-F 250 ISO-F 250 ISO-F 200 CF 250 CF 250 CF Pumping speed (PNEUROP) I s - N Ar He H Max. Compression N 2 > 8 > 7 > 8 > 8 Ar > 8 > 7 > 8 > 8 He at sccm H 2 at sccm Max. gas throughput mbar I s - N 2 temporary, for pump down N 2 continuous operation Ar temporary, for pump down Ar continuous operation Max. forevacuum pressure mbar N Ar Nominal speed 37,800 min - 33,000 min - 33,000 min - 30,600 min - Stand-by speed to be set between 3,800 min - (230 Hz) and nominal speed Ultimate pressure ISO-F / CF flange Max. bake-out temperature 80 C Run-up time Forevacuum flange Purge gas / venting flange < -8 mbar / < - mbar < 7 min DN 40 KF DN 6 KF (clamp shoe) Cooling connection G /8 Weight, approx. 40 kg 45 kg 45 kg 50 kg Noise level acc. to ISO 3744 < 4 db(a) Vibration level at high-vacuum flange at max. speed < 0.0 µm _002_A5-08/202 - Oerlikon Leybold Vacuum 2

4 Технические характеристики преобразователя частоты MAG.DRIVE im Supply voltage V ±% Mains frequency 50 / 60 Hz Power consumption maximum 750 VA at ultimate pressure 50 VA Max. load capability of the relays (interface X, optional) 32 V, 0.5 A (for SELV or PELV power circuits only) Max. load for each valve output 24 VDC, 0.35 A Temperature during operation - 45 C Storage temperature - 60 C Relative air humidity (non condensing) 5 to 85 % Type of protection IP 54 Overvoltage category II Contamination level acc. to IEC _002_A5-08/202 - Oerlikon Leybold Vacuum

5 l/s 800 MAG W 300 Saugvermögen Pumping speed Helium Hydrogen Wasserstoff mbar - Hochvakuumdruck Inlet pressure 0 MAG W 300 mbar l/s temporary Durchfluss Throughput Continuous operation Forevacuum Vorvakuumdruck pressure mbar Fig..3 Pumping speed curves and operation diagrams for the MAG W _002_A5-08/202 - Oerlikon Leybold Vacuum 4

6 l/s Helium MAG W 600 Saugvermögen Pumping speed Hydrogen Wasserstoff mbar - Hochvakuumdruck Inlet pressure 0 mbar l/s temporary MAG W 600 Durchfluss Throughput Continuous operation Forevacuum Vorvakuumdruck pressure mbar Fig..4 Pumping speed curves and operation diagrams for the MAG W _002_A5-08/202 - Oerlikon Leybold Vacuum

7 l/s 800 Helium Hydrogen Wasserstoff MAG W Pumping Saugvermögen speed mbar - Hochvakuumdruck Inlet pressure 0 mbar l/s temporary MAG W 700 Throughput Durchfluss Continuous operation Forevacuum Vorvakuumdruck pressure mbar Fig..5 Pumping speed curves and operation diagrams for the MAG W _002_A5-08/202 - Oerlikon Leybold Vacuum 6

8 l/s Helium Hydrogen Wasserstoff MAG W Saugvermögen Pumping speed mbar - Hochvakuumdruck Inlet pressure 0 MAG W 2200 mbar l/s temporary Durchfluss Throughput Continuous operation Forevacuum Vorvakuumdruck pressure mbar Fig..6 Pumping speed curves and operation diagrams for the MAG W _002_A5-08/202 - Oerlikon Leybold Vacuum

9 7 7 b Ø d 98 Ø d s2 260 h s3 I Описание ip ipl Ø d DN 25 s5 4 h h s 4 Forevacuum Vorvakuum connection s Sperrgas Purge gas connection l l 2 MAG W / DN ø d ø d2 h h I l l2 b s s2 s3 s4 s5 200 ISO-F ) 3 ) 332 ) 420 ) CF ISO-F CF ISO-F CF ) 4 mm for cooling coil Fig..7 Dimensional drawing of the pumps, dimensions in mm _002_A5-08/202 - Oerlikon Leybold Vacuum 8

10 Информация для заказа Part No. Pump with integrated converter and purge gas port, Type of protection IP 54 with Profibus 24 V PLC Interface MAG W 300 ip DN 200 ISO-F 4300V V054 MAG W 300 ip DN 200 CF 4300V V056 MAG W 300 ipl DN 200 ISO-F 4300V V074 MAG W 300 ipl DN 200 CF 4300V V076 MAG W 600 ip Booster DN 250 ISO-F 4600V V054 MAG W 600 ipl Booster DN 250 ISO-F 4600V V074 MAG W 700 ip DN 250 ISO-F 4700V V054 MAG W 700 ip DN 250 CF 4700V V056 MAG W 700 ipl DN 250 ISO-F 4700V V074 MAG W 700 ipl DN 250 CF 4700V V076 MAG W 2200 ip DN 250 ISO-F 42200V V054 MAG W 2200 ip DN 250 CF 42200V V056 MAG W 2200 ipl DN 250 ISO-F 42200V V074 MAG W 2200 ipl DN 250 CF 42200V V076 other interfaces on request _002_A5-08/202 - Oerlikon Leybold Vacuum

11 Аксессуары Необходимые Set of bolts, nuts and washers for ISO-F flange (2 each) 40053V002 Bolts M x 50 Bolts M 2 x V00 Bolt quality 2.9 acc. to EN ISO 898- with coating; 0,2 % yield strength > 80 N/mm 2 Centering ring with O-ring DN 200 DN 250 Al/FPM Stainless steel/fpm Set of bolts, nuts and washers for CF flange (8 each) 40053V006 Bolts M 8 x 40 Bolt quality.9 acc. to EN ISO 898- with coating; 0,2 % yield strength > 900 N/mm 2 (for DN sets required, for DN sets) Copper gasket rings for CF flange DN 200 (Set of pieces) DN 250 (Set of 5 pieces) Set of hex. screws with nuts, screws and washers for CF flange DN DN 250 (2 sets required) Дополнительные Mains cable for MAG.DRIVE im, 2.5 m EU 43V03 US 4320V03 Inlet screen DN 200 ISO-F and DN 200 CF E DN 250 ISO-F and DN 250 CF E Seal Kit DN 250 Metal Seal Kit Metal for other flanges on request Purge gas and venting valve 24 V DC 0.6 mbar l/s at.5 to 6 bar mbar l/s at to.5 bar 80052V00 Cable set (2 pieces) for connection to the pump 4300V0 Cooling water valve kit 4300V _002_A5-08/202 - Oerlikon Leybold Vacuum

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