SECTION 4 EXHAUST AND UTILITY PANEL LOCATOR

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1 SECTION 4 EXHAUST AND UTILITY PANEL LOCATOR 2 Exhaust Panel 1 Utility Panel, 2 Swivel Main Home Page Home Table of Contents

2 4 PL PL PL 96 4 PL 87 4 PL See Detail C OVEN DOOR See Detail A PL SWIVEL CASSETTE SWIVEL CASSETTE PNEUMATIC WINDOW PL PL PL PL 96 4 PL PL See Detail B PL PL See Detail D PL

3 120 UTILITY PANEL DETAIL A PL PL PL 111 UTILITY PANEL DETAIL B PART OF ITEM 129 PART OF ITEM 129 PART OF ITEM

4 UTILITY PANEL DETAIL C 8 PL PL 135 SWIVEL CASSETTE SWIVEL CASSETTE PNEUMATIC WINDOW OVEN DOOR PL PL PL PL 133 UTILITY PANEL DETAIL D PL

5 P/N: Rev: M Description: Assembly, Utility Panel, AG Gray P/N: Rev: C Description: Assembly, Pressure Regulator, 8108 P/N: Rev: C Description: Assembly, Extension, 3-Way Valve P/N: Rev: D Description: Assembly, Solenoid Valves P/N: Rev: B Description: Assembly, Flowmeter Bracket Panel, Utility, Power Feedthru, AG Gray AG Associates Panel, Utility, Front, AG Gray AG Associates Harness, DC Power to 6-Gas Interlock AG Associates Plate, Utility, Side AG Associates Assembly, Cable Com/Utility Panel AG Associates Binding Post, Double ITT Pomona Adapter, 1/2 Swagelock to VCO, Bulkhead SS-8-VCO-A1-810 Cajon Union, Bulkhead, 1/4 Tube, SST SS Swagelok Co Connector, Liquid Tight, 1 1/2 LT150P T &B PCA, Swivel Control Board AG Associates Solenoid Valve Assembly, 4-Valves AG Associates (See Detail C) Bracket, Connector, Molex AG Associates Assembly, Pressure Regulator AG Associates (See Detail A) Valve, Check, Pneumatic, 1/4NPT, 1 PSI SS-4C-1 Nupro Adapter, 1/4T x 1/4NPT, SST SS Swagelok Corp Tubing, Nylon, 1/4 OD x.170 ID NN4-040 Parker Hannifin Corp Valve, Needle, Manual, N.C., 2-Way, M, 1/2 SS-18RS8 Sunnyvale Valve & Fitting Fitting, 1/2 x 1/2, Port Connector SS-811-PC Swagelok Co Valve, Flow Controller, Manual, M-F, 1/2 4FCRN Numatics Inc Fitting, 1/4, Union, Elbow SS Swagelok Co Fitting, 1/2 x 1/4, Port Connector SS-811SPC-4 Swagelok Co Assembly, Extension, 3-Way Valve AG Associates (See Detail B)

6 P/N: Rev: M Description: Assembly, Utility Panel, AG Gray P/N: Rev: C Description: Assembly, Pressure Regulator, 8108 P/N: Rev: C Description: Assembly, Extension, 3-Way Valve P/N: Rev: D Description: Assembly, Solenoid Valves P/N: Rev: B Description: Assembly, Flowmeter Bracket Elbow, Male, 1/2T x 1/2NPT, SST SS Swagelok Co Tube, Water Inlet AG Associates Meter, Water Flow w/ Switch, 3-6 GPM SMW7117-B Kobold Inst. Inc Label, Coolant AG Associates Adapter, 1/2T x 1/2NPT, SST 8AM8-316 Hoke Controls Flowmeter SwitchAssembly FSK-6518 Omega Engineering Fitting, 1/2 NPT to Female VCO SS-8-WVCO-1-8 Cajon Tube, Nitrogen Inlet, Short AG Associates Valve, Relief, Adjustable, 1/4 Swagelock SS-4CA-50 Nupro Tube, Water Outlet AG Associates Fitting, 1/2 NPT to Male VCO SS-8-VCO-1-8 Cajon Fitting, 1/2 Male NPT to 1/2 Male NPT SS-8-HN Cajon Valve, Diaphragm, Solenoid, N.C., 2W, F, 1/2 8210G37 24/60 Asco Fitting, 1/4 Swagelok, Female Branch T SS TTF Swagelok Corp Valve, Check, 1/4 NPT, 1PSI SS-4C2-1 Nupro Tank, Air Volume AVT Clippard Bracket, Air Volume Tank, Left AG Associates Bracket, Air Volume Tank, Right AG Associates Standoff, 1/4 Hex, M/F, 6-32 x 1-1/8 L, Brass B-O RAF Tape, Teflon, Thread Seal, 1/4 Inch S22 Sanders Company Bracket, Kobold Flow Meter AG Associates Bracket, Utility Mounting, Bottom AG Associates Label, Utility Panel, Cooling Air AG Associates Label, Utility Panel, Oven Coolant AG Associates Label, Utility Panel, Purge Valve AG Associates

7 P/N: Rev: M Description: Assembly, Utility Panel, AG Gray P/N: Rev: C Description: Assembly, Pressure Regulator, 8108 P/N: Rev: C Description: Assembly, Extension, 3-Way Valve P/N: Rev: D Description: Assembly, Solenoid Valves P/N: Rev: B Description: Assembly, Flowmeter Bracket Label, Utility Panel, Purge AG Associates Label, Utility Panel, Normal Operation AG Associates Tubing, Nylon, 1/2 OD PN18-10R Panduit Connector, CPC, 14-Pin, Plug Amp, Inc Connector, CPC Strain Relief Amp, Inc Harness, Utility Panel, J1U to N2, H2O AG Associates Harness, Utility Panel, J2U to Ext. Pyro, TC AG Associates Contact, Pin, Gold-Plated, AWG Amp, Inc Housing, Nylon, Cap, 3-Position Amp, Inc Housing, Nylon, Plug, 3-Position Amp, Inc Contact, Socket, Gold-Plated, AWG Amp, Inc Cover, Utility Panel Port, Warm Gray AG Associates Duct, Elbow, Ash/Telecom. 8202A-L 3M Duct, Ash/Telecom., 1.25 x 0.75 x A 3M Tubing, Urethane, Black MP Steven Engineering Inc Red Bushing, 1 x 1/2 NPT SS-16-RB-8 Swagelok Screw, Sockethead, 8-32 x Screw, Sockethead, 4-40 x Screw, Button Head, 6-32 x Screw, Button Head, 6-32 x Screw, Socket Head, 8-32 x Screw, Socket Head, 8-32 x Screw, Socket Head, 8-32 x Screw, Button Head, x Washer, Nylon, Black, Flat #6,.35 OD Washer, Stainless Steel, Flat #6,.31 OD

8 P/N: Rev: M Description: Assembly, Utility Panel, AG Gray P/N: Rev: C Description: Assembly, Pressure Regulator, 8108 P/N: Rev: C Description: Assembly, Extension, 3-Way Valve P/N: Rev: D Description: Assembly, Solenoid Valves P/N: Rev: B Description: Assembly, Flowmeter Bracket Washer, Stainless Steel, Flat #8,.38 OD Washer, Stainless Steel, Flat #10,.31 OD Washer, Stainless Steel, Splitlock #6,.25 OD Washer, Stainless Steel, Splitlock #8,.29 OD Washer, Stainless Steel, Splitlock #10,.34 OD Washer, Stainless Steel, Internal Tooth # Nut, Stainless Steel, KEP 4-40 UNC Nut, Stainless Steel, HEX 6-32 UNC Nut, Bulk Head, 3/4-20 UNEF SS Cajon Y 1/4 Tubing MN2YUBW Parker Hannifin Manifold, Distribution, Air` AG Associates Switch, Pressure, 1/8 NPT, Adjustable 10-D11 United Electric Pressure Reg., Manifold Mount, PSI VM Monnier, Inc Gasket, Pressure Regulator, Manifold Mount AG Associates Gauge, Pressure, PSI, 1/8 NPT, 1.5 In CB-100 Wika Gauge, Pressure, 0-60 PSI, 1/8 NPT CB-160 Wika Gauge, Pressure, PSI, 1/8 NPT Wika Elbow, Male, 1/4T x 1/8NPT, SST SS Swagelok Fitting, 1/4 Tube to Tube Camozzi Pneumatics Fitting, 5/32 Tube x Elbow Camozzi Pneumatics Gasket, Fibre, # Parker Seals Screw, SST, Socket Buttonhead, x Screw, SST, Sockethead, 2-56 x Label, Utility Panel, Pneumatic Valves AG Associates Label, Utility Panel, Oven Door AG Associates

9 P/N: Rev: M Description: Assembly, Utility Panel, AG Gray P/N: Rev: C Description: Assembly, Pressure Regulator, 8108 P/N: Rev: C Description: Assembly, Extension, 3-Way Valve P/N: Rev: D Description: Assembly, Solenoid Valves P/N: Rev: B Description: Assembly, Flowmeter Bracket Label, Utility Panel, Pneumatic Window AG Associates Label, Swivel Cassette AG Associates Label, Utility Panel, Oven Purge AG Associates Elbow, Double Branch, 5/32 PAX 5/32-U10U Pisco USA, Inc Valve, Ball, Manual, N.C., 3-Way, M, 1/2 SS-45XS8 Sunnyvale Valve & Fitting Handle, 3-Way Valve AG Associates Extension, 3-Way Valve AG Associates Bracket, 3-Way Valve AG Associates Valve, Solenoid, Normally-Closed, 4-Way H110-4E2 12VDC Bay Pneumatic, Inc Manifold, 4-Solenoid, Pneumatic AG Associates Fitting, 1/4 Tube x Camozzi Pneumatics Elbow, 5/32T to Camozzi Pneumatics Screw, SST, Sockethead, 2-56 x Washer, SST, Flat, #2,.25 OD Screw, SST, Socket Buttonhead, x Label, Utility Panel Oven Door AG Associates Label, Utility Panel Pneumatic Window AG Associates Label, Swivel Cassette AG Associates Assembly, Flowmeter Bracket AG Associates Base, Flowmeter Bracket AG Associates Screw, Socket Head, 8-32 x.50

10 ! 44 PART OF ITEM PART OF ITEM PL PL PL PL

11 P/N: Rev: C Description: Exhaust Panel Assembly, AG Gray Panel, Exhaust Weldment, AG Gray AG Associates Switch, 2-Pole, Momentary, 125VAC, 10 A AML 31FBA4AC Microswitch Lens, Push Button Switch, Green AML51-F50G Microswitch Lens, Push Button Switch, White AML51-F50R Microswitch Switch Guard, Rectangular, Clear, Type 76F AML76F10T01P Microswitch Lamp, Wedge-Base, 28V,.04 A 85 GTE Sylvania Switch, 1-Pole, Momentary, 125VAC, 3 A AML 21FBA2AA Microswitch Binding Post, Double ITT Pomona Cover, Exhaust Panel, Lower, AG Gray AG Associates Exhaust Port, AG Gray AG Associates Harness, Exhaust Panel, AG Associates Cap, Exhaust Weldment AG Associates Cap, Reducer, Cooling Exhaust AG Associates Set Screw, SST, Cup Point, 8-32 x Nut, Steel, KEP, 8-32 UNC Switch, Operator, Push Button, Red Mushroom ZB2-BS54 Telemechanique Guard, EMO Switch AG Associates Switch, Contact Black, Push Button, NC Mtg ZB2-BZ102 Telemechanique Housing, Nylon Plug, 2-Position Amp, Inc Contact, Socket, Gold-Plated, AWG Amp, Inc Cable, 2-Conductor, 18AWG 5062C Alpha Heat Shrink, 1/4 inch HIX 1/4 ICO Rally Corporation Terminal Fork, Insulated, 22-18AWG PNF18-6LF-C Panduit Washer, SST, Extension Tooth, 13/ Plug, Nylon, Black, 9/16 Diameter 26 Heyco

SECTION 4 EXHAUST AND UTILITY PANELS

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