MINIATURE SIZE BENCHMARK STRENGTH PRECISION

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1 Piezo LEGS motors MINIATURE SIZE BENCHMARK STRENGTH PRECISION

2 High Performance in a Compact Space Optics, lasers and photonics An ever expanding high-tech sector is characterized by many new instrument launches, especially in medical technology and biotechnology. Key tasks for Piezo LEGS motors include adjusting optics and moving devices such as linear stages. Their sub-micrometer to nanometer resolution is crucial for success. Factory automation The search for energy efficient solutions that also offer extremely high precision intensifies. Piezo LEGS motors now replace micro-meter screws for fixation (fixturing) and remote adjustment. Far more precise and convenient, they hold steady position without consuming energy. OTHER application areas A number of additional applications exist for Piezo LEGS motors. For example, the telecom sector needs to adjust its operating frequencies with ever higher precision, often remotely. Our motors are ideal for this task. They are also the clear choice when nonmagnetic motors are a must, e.g. magnetic resonance imaging. For universities and research institutes, their size/strength ratio opens up endless opportunities for new uses.

3 Semiconductor manufacturing The precision nanometer-scale motion control and positioning of Piezo LEGS motors is vital as IC line widths and feature sizes continue to decrease to well below the 100 nanometer limit. The motors vacuum compatibility and non-magnetic motor housings are also a requirement in many IC applications.

4 Outstanding resolution, instant reaction, exceptionally compact Piezo LEGS motors require far less space than traditional motors, delivering top performance from locations where electromagnetic motors often won t fit. Resulting products are generally easier and cheaper to assemble, which cuts overall production costs. In addition, their outstanding linear positioning resolution and instant response from zero hold energy make Piezo LEGS motors a clear favorite for high precision systems as well as high volume products such as fixturing and alignment in factory automation. Piezo LEGS motors selected technical and business advantages Very compact and simple the perfect miniature motor Meet the need for smaller devices Often fit where nothing else will Fewer parts cut production costs for customers High precision sub-micron resolution Extends to single nanometer level and below when required Smooth, even motion plus instant response Energy efficient consumes no energy at rest Invaluable for move-and-hold applications Ideal for low power consumption products Manufacturing expertise scalable and flexible Motors range from 0 to 450 Newton Vast manufacturing expertise Full control over the ceramic actuator core process

5 Presenting the best LEGS in the business Direct, backlash-free drives with sub-micro/nanometer resolution and full force, power-off locking Piezo LEGS motors Unique features common to all motors: Single-digit nanometer resolution if required Predictable sub-micron, direct-drive motion Zero backlash Combine with any driver Use with encoders from Renishaw or MicroE and others Drivers and controllers Every Piezo LEGS motor linear or rotating can be driven by any of the drivers and controllers supplied by PiezoMotor. LL10 Our most compact linear motor. Builds in for many applications. Stall force 6 N Stroke 0 80 mm Non-magnetic version Vacuum version LT 20/40/80 Similar to our LTC series (or line) but without the cover to allow build in for OEM applications. Three sizes Stall force 20, 40 or 80 N Stroke 0 80 mm Vacuum and nonmagnetic versions Easy, economical OEM customization Because Piezo LEGS motors are so simple, it s easy to adapt their properties and performance to extract the most from your next new product application. At PiezoMotor, we make the piezo ceramic building blocks in-house. Motor elements can easily be made longer or shorter, thicker or thinner. Furthermore, this simplicity enables large volume, high precision custom manufacture with very favorable production economics. Our standard blocks of ceramic meet most requirements. CONFIGURE your motor! Visit and build the Piezo LEGS motors for your next new product. CAD drawings and data sheets are available for download. All Piezo LEGS motors are supported by a comprehensive range of accessories. Customer-specific solutions can be developed. NEW! LR17 Rotary motor with magnetic absolute encoder. The first in a new series of motors. Diameter 17 mm Stall torque 30 mnm 0.2 milli-radian resolution with integrated encoder LR50/80 Rotary motor with microradian precision. For appli - cations such as turning mirrors or moving optics. Diameter 23 mm Stall torque 80 mnm (stainless steel) Stall torque 50 mnm (vacuum and nonmagnetic versions)

6 LTC 20/40 Contains no ball-bearings or other lubricated parts that might need maintenance. Two sizes Various mounting options Stall force 20 or 40 N Stroke 0 13 mm LTC 300/450 A robust, direct drive motor for heavy loads. Stall force 300 or 450 N Stroke 0 25 mm LC20 Mainly for build in for linear and gonio stages. Gives a smaller envelope with easier mounting. Result is the same size as the bare stage to allow excellent integration in tight spaces. Stall force 20 N Stroke 0 29 mm LS15 When longer strokes are required. Can be mounted on the side with the drive rod fastened to the moving part. Stall force 15 N Stroke mm NEW! lw20 For laser applications like turning a wave-plate or keeping a lens in place. Wave-plate motor ø ½ inch Driver controlled and manual override PMDM31 Singel axis analog driver for generating suitable drive signals to the Piezo LEGS motors. 1-axis driver Input signal 0 to ± 10 V Fine positioning in bending mode Building block in a controller system pmd101 Single-axis microstepping driver/controller makes start-up as simple as possible. Forms a closed loop system with motor and encoder. 1-axis driver/controller Serial USB communication Quadrature/SSI encoders PC software included Multiple I/Os pmd206/236 Full featured top-of-therange driver for 2013 launch. A 6U rack-mount cabinet option with up to 6x6 axes is based on the same driver. 6-axis driver/controller Sub-nanometer/microradian TCP/IP or RS485 communication Quadrature/SSI encoders Multiple I/Os

7 Imagine an ant but with legs nearly 1,000 times stronger How a Piezo LEGS motor works A Piezo LEGS motor is a direct acting, one piece walking machine whose legs can be elongated and bent sideways. By synchronizing the movement of two pairs of legs, it moves in small but distinct increments just as an ant does. Except that it s much faster and far stronger. By taking thousands of steps per second even in the sub-micrometer or nanometer range it can cruise over several centimeters during this time. Pulling forces extend up to several hundred Newton. There s no need for gears or mechanical transmissions, rotors, stators or ball-bearings. What s more, the material in a Piezo LEGS motor is virtually impossible to wear out. How it moves step-by-step Orange arrows show the direction of motion of each leg tip. They move as alternate pairs. White arrows show the movement of the rod. 1 All four legs are electrically activated. All are elongated. 2 The first pair of legs maintains contact with the rod and moves right. The second pair retracts. Their tips bend left. 3 The second pair now extends and repositions on the rod. Their tips move right. The first pair retracts and their tips bend left. 4 The second pair of legs moves right. The first pair begins to elongate and move up towards the rod.

8 About PiezoMotor PiezoMotor is a world-leading developer and manufacturer of direct drive, micro motors based on piezoelectric materials. Simple, precise and very small, piezoelectric motors are replacing traditional electromagnetic motors when these fail to meet exacting space and performance demands. Piezo LEGS motors minimize total product size and deliver much greater precision. Many leading multi-national companies are among our clients. PHOTO cover: Alex&Martin PiezoMotor Uppsala AB Stålgatan 14 SE Uppsala, Sweden Telephone: Fax: info@piezomotor.se

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