ISMI 450mm Program Interoperability Test Bed (ITB)

Transcription

1 SEMATECH Symposium Japan September 15, 2010 Accelerating Manufacturing Productivity ISMI 450mm Program Interoperability Test Bed (ITB) Eddy Bass 450mm Factory Integration Readiness Project Manager Copyright 2010 SEMATECH, Inc. SEMATECH, and the SEMATECH logo are registered servicemarks of SEMATECH, Inc. International SEMATECH Manufacturing Initiative, ISMI, Advanced Materials Research Center and AMRC are servicemarks of SEMATECH, Inc. All other servicemarks and trademarks are the property of their respective owners.

2 Outline Factory Integration and Interoperability Test Bed (ITB) Goals Cooperation with ITG-J Impact to standards development Latest ITB results loadport, FOUP and MAC testing AMHS testing plans Summary next steps 2

3 2010 factory integration and ITB goals FI supplier engagement to further facilitate development and immediate assessment of the critical FI components as new prototypes/ upgrades are provided i.e., carriers, load ports, wafer handling robotics and AMHS Accelerate SEMI Standards development by providing the critical and timely data to support/ confirm decision making at the working level Focus on AMHS and Multi-Application Carrier (MAC) testing and interoperability between all standardized components 3

4 Complimentary coordination with Interoperability Testing Group (ITG-J) Pitch Budget, KC Groove, Placement, CG Experiments and AMHS Vibration Robotic Handling FOUP Clamping and Closure Force Experiments MAC Drop Tests ITG Japan Testing Feeding Experimental Data to SEMI SEMI 450 mm Factory Integration Standards Development ISMI 450mm ITB Feeding Prototype Testing Results to SEMI Increasing interoperability testing focus as more components became available Ongoing Data Sharing FOUP Testing Robotic Handling Load port Testing Shipping Box Testing 4

5 300 mm vs 450 mm standards development timeline comparison ISMI s ITB testing helped to enable a 60-65% time reduction in FI standards development vs. 300mm 300mm transition FI standards transition Original standards published Provisional or full standards published Decision to start wafer size transition and standards development Approved FI standards published 450mm transition Ongoing prototype testing

6 ITB lab testing focused on the latest FOUPs, MACs and load ports FOUPs Carriers 12mm Pitch Std FOUPs MAC Carrier 12mm Pitch Std MACs TDK 12 mm pitch load port under continuous cycling Completed >268 k cycles with FOUPs Brooks 12mm pitch load port, compatible with FOUPs and MACs cycling at supplier site Completed >34 k cycles with FOUPs. Ongoing MAC testing in H Sinfonia 12mm pitch load port cycling with latest FOUPs Testing Completed with >318 k cycles with a mixture of standard FOUPs Gudeng 12mm Pitch Latch Key FOUP Entegris 12mm Pitch Latch Key FOUP 6

7 Multi-application carrier (MAC) update >6 successful wafer shipments with MACs with no wafer breakage includes 3 international shipments Critical to IC Makers that MAC provides interoperability with FOUP on standard load ports and robotics same door closure force wafer pitch Began interoperability and cycle testing of MACs on two Hirata load ports No problems with robotic handling in and out of MACs to date Two other suppliers have MAC compatible load ports began joint testing with suppliers in Q

8 12mm pitch load ports cycling status Load Port Cycles (k cycles) Load Ports part of Metro and Wet Clean tool mm Equipment Load Port Cycles 08/20/2010 Entegris MAC Brooks Integrated Load Ports (FOUP only) 12mm FOUPs & MAC Gudeng 12mm FOUP Entegris 12mm FOUP 34 Brooks Load Ports (FOUPs & MAC) TDK Load Port Load Port Type Sinfonia Load Port 0 3 Hirata Integrated Load Ports (FOUP & MAC) > 536 k total load port cycles (i.e., open and close) with 12 mm pitch completed to-date Load Ports part of Hirata EFEM/ Sorter system 8

9 ITB lab testing focused on the latest FOUPs, MACs and load ports (2) New standard load port from Sinfonia Just installed and operating with FOUPs >89k cycles to date Scheduled to be tested with standard MACs beginning in late Q3 10 9

10 ITB robots and load port cycle history 7000 Cumulative Total Robot & LP Cycles 8/20/ Cumulative Robot Moves (x1000) Prelim FOUP & LP Std available for developing prototypes Robot Moves Load Port Cycles 10 to 12 mm Pitch Change Yellow Ballots for FOUP & LP Focus Shifted to Load Ports & MAC FOUP & LP stds approved MAC std & line item ballots approved for FOUP & LP stds May-08 Jun-08 Jul-08 Aug-08 Sep-08 Oct-08 Nov-08 Dec-08 Jan-09 Feb-09 Mar-09 Apr-09 May-09 Jun-09 Jul-09 Aug-09 Sep-09 Oct-09 Nov-09 Dec-09 Jan-10 Feb-10 Mar-10 Apr-10 May-10 Jun-10 Jul-10 Aug-10 Cumulative Load Port Cycles (x1000) Month >5.0 M Robotic handling moves to date. >928 k Load Port cycles with Std Carriers. After SEMICON West 2009, the key focus shifted to Load Port cycling with FOUPs and MACs 10

11 EFEM sorter operating in cleanroom Hirata 450mm EFEM sorter Two 12mm pitch load ports supports both FOUP and MAC opening Graphical user interface VAC grip dual endeffector/arm wafer handling robot Wafer pre-aligner 11

12 Two Person Guided Vehicle (PGV) prototypes evaluated and in use New Gudeng PGV IDC PGV Interoperable with standard carriers from different suppliers Demonstrated interoperability with all 12 mm pitch carriers in Q Pre-cleanroom PGV evaluation phase complete showing PGVs interoperable with all std 12mm pitch carriers. PGVs in use in cleanroom operations and demonstrated ready for industry usage 12

13 AMHS testing planned for H mm OHT 450mm Stocker New 450 mm stockers and transport systems are under advanced development at suppliers sites ISMI will assess systems in H2 10 against ISMI 450mm guidelines and interoperability with 450mm standard carriers and load ports Goal is to demonstrate AMHS will be ready for 450 mm pilot lines 13

14 Summary and next steps for ITB >5.0M robotic moves and >928k load port cycles completed in the ITB with prototype carriers Upgrades to prototype 12mm pitch Std FOUPs, load ports and EFEMs demonstrating good interoperability and reliability H focus is demonstrate MAC compliance and interoperability Sun-setting ITB after completion of MAC, MAC load port (i.e., new standard load ports), and full interoperability testing Once molded carriers are available, the necessary level of testing will be completed to eliminate concerns Working with AMHS suppliers to complete evaluations of stockers and overhead hoist transport before end of