AR Series NEW. High-Efficiency Stepping Motor and Driver Package. High Vacuum Type. RoHS-Compliant PRODUCTS. Features.

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1 NEW PRODUCTS RoHS-Compliant High-Efficiency Stepping and Package AR Series High Vacuum Type New stepping motor and driver package with closed loop controlled positioning for applications in a vacuum environment: The AR Series High Vacuum Type with significant lower heat generation based on highefficiency technology. Versions with DC-input and AC-input power supply are available. Features Applicable to high vacuum environments (-5 Pa) Stepping motor and driver package which can be used in vacuum environments of -5 Pa. High reliability with closed loop control For detection of rotation speed and rotation volume of motors in vacuum chambers and equipped with various alarm output functions. Lower heat generation based on higher efficiency Based on a high-efficiency motor and driver high-torque operation is possible in vacuums with low heat generation. Current Control Mode This is a current control mode in relation to the load. Try this mode for even lower heat and noise generation, especially in case of small loads. Power Supply Voltage /8 VDC Single-Phase -5 VAC Single-Phase - VAC AR6VAK AR66VAK AR69VAK AR6VAA AR66VAA AR69VAA AR6VAC AR66VAC AR69VAC The following items are included in each product.,, I/O Signal Connector, Connector for Main Power Supply Input Terminal, VDC Power Supply Input/Regeneration Unit Thermal Input*, Connector Wiring Lever*, Operation Manual. * Only for AC-Input power supply. For product details and the data setting device please refer to the catalogues below. Applications Recommended for following applications: You want to do positioning operations in a vacuum device You want to make a vacuum device more compact without using a rotary feedthrough You want to increase the reliability of the device with closed loop control AR Series DC-Input AR Series AC-Input

2 DC-Input Power Supply Specifications Frame Size mm 6 mm AR6VAK AR66VAK AR69VAK arc minute (degrees) ± 5 (.8 ) N m.5.8 J: kg m Resolution Setting: P/R.6 /Pulse Stop Position Accuracy Maximum Holding Torque (at atmospheric pressure) Rotor Inertia Resolution Power Source VDC %. A/ 8 VDC 5%.A VDC %. A/ VDC %. A/ 8 VDC 5%.A* 8 VDC 5%.A* Pressure Baking Temperature * Insulation Class Pa C Atmospheric pressure ~ -5 Class H Mass kg.7.9. kg.7 Dimension No. * When running the motor at 8 VDC, the load inertia should be under times of the rotor inertia and allow for a safety factor of or more times the required torque. * Baking: For the emission of the gas adhering to the inner wall of the vacuum chamber external heating has to be applied (no baking procedure done when shipped). Speed Torque Characteristics AR6VAK ( VDC)... AR66VAK ( VDC).5. AR69VAK ( VDC) (Resolution Setting: P/R) (Resolution Setting: P/R) 5 5 [r/min] (Resolution Setting: P/R) AR6VAK (8 VDC). AR66VAK (8 VDC).5 AR69VAK (8 VDC) (Resolution Setting: P/R) (Resolution Setting: P/R) (Resolution Setting: P/R) Notes: Be sure to keep the temperature of the motor case under ºC. The driver's automatic current cutback function at motor standstill reduces maximum holding torque by approximately 5%.

3 AC-Input Power Supply Specifications Frame Size mm 6 mm AR6VAM AR66VAM AR69VAM Stop Position Accuracy arc minute (degrees) ± 5 (.8 ) Maximum Holding Torque (at atmospheric pressure) N m.5.8 Rotor Inertia J: kg m Resolution Resolution Setting: P/R.6 /Pulse Single-Phase -5 VAC -5 ~+% 5/6 Hz Voltage/Frequency Power Source Single-Phase - VAC -5 ~+% 5/6 Hz Maximum Single-Phase -5 VAC Input Current Single-Phase - VAC Control Power Supply VDC ±5%.A Pressure Atmospheric pressure ~ -5 Baking Temperature Insulation Class * Mass Dimension No. Pa * C Class H kg.7.9. kg.75 Baking: For the emission of the gas adhering to the inner wall of the vacuum chamber external heating has to be applied (no baking procedure done when shipped). Enter the power supply voltage A (single-phase -5 VAC) or C (single-phase - VAC) in the box ( ) within the model name. Speed Torque Characteristics AR6VAM. AR66VAM. AR69VAM (Resolution Setting: P/R) (Resolution Setting: P/R) (Resolution Setting: P/R) Notes: Be sure to keep the temperature of the motor case under ºC. The driver's automatic current cutback function at motor standstill reduces maximum holding torque by approximately 5%. Selection The motor selection calculation can be done in the same way like for conventional motors. But the selected motor should have enough torque tolerance and the possibility to adjust the current because of the heating measurement due to the vacuum environment. Precautions for use The specified rated current of the motor is the value under high vacuum. As the tolerance for a heat generation in a vacuum environment is generally lower, the conditions of the operation temperature become more critical than under atmospheric pressure. Please be cautious with the rated current value. Following measurements are effective to keep the motor case temperature under C (including the motor temperature rise value, below the baking temperature): Reduction of the motor operation duty Setting of the motor operation current value below the half of the rated current value Keeping the stepping motor temperature as low as possible is also important for the maintenance of the vacuum environment. For details please contact the nearest Oriental sales office.

4 Dimensions (Unit = mm) mm Mass (kg) AR6VAK ARM6VAK.7 AR6VA ARM6VAC Enter the power supply voltage A (single-phase -5 VAC) or C (single-phase - VAC) in the box ( ) within the model name. 67. ± 5±.5 x M x.5 Deep ±.. Sensor Cable mm Ø 7 Cable mm Ø ±.5 5 Leads PTFE, AWG Sensor Leads PTFE, AWG6 Ø6.(h7) Ø.(h7) 8 6 mm L Mass (kg) AR66VAK ARM66VAK AR66VA ARM66VAC AR69VAK ARM69VAK AR69VA ARM69VAC 89.. Enter the power supply voltage A (single-phase -5 VAC) or C (single-phase - VAC) in the box ( ) within the model name. L ± 7 ±.5 x Ø.5 Thru 6 5 ±.5 ± ± 7.8 Cable mm Ø ±.5 Ø ±.5(h7) Ø6 ±.5(h7) 8 Sensor Cable mm Ø 5 Leads PTFE, AWG Sensor Leads PTFE, AWG6

5 : ARDV-K, ARD6AV-K, ARD6BV-K Mass:.7 kg Slits 5 max max. Included Control I/O Connector (CN5) Cover Assembly: 5-6 (MOLEX) Connector: (MOLEX) Connector for Power Supply Input/Frame Ground Terminal (CN) Connector: MC.5/-STF-.5 (PHOENIX CONTACT) : ARD7V-A ARDV-A ARDV-A ARD7V-C ARDV-C ARDV-C Mass:.75 kg 5 max M Included Control I/O Connector (CN5) Cover Assembly: 5-6 (MOLEX) Connector: (MOLEX) Connector for Regeneration Unit Input/ Main Power Supply Input Terminal (CN) Connector: (MOLEX) Connector for VDC Power Supply Input/ Regeneration Unit Thermal Input (CN) Connector: MC.5/6-STF-.5 (PHOENIX CONTACT) List of and Combinations names for motor and driver combinations are shown below. Power Supply Voltage /8 VDC Single-Phase -5 VAC Single-Phase - VAC AR6VAK ARM6VAK ARDV-K AR66VAK ARM66VAK ARD6AV-K AR69VAK ARM69VAK ARD6BV-K AR6VAA ARM6VAC ARD7V-A AR66VAA ARM66VAC ARDV-A AR69VAA ARM69VAC ARDV-A AR6VAC ARM6VAC ARD7V-C AR66VAC ARM66VAC ARDV-C AR69VAC ARM69VAC ARDV-C 5

6 Accessories (Sold separately) Cables Cables for the connection between motor and driver. Notice: Cannot be used in a vacuum. Product Line For DC-Input Power Supply Length L (m) CCVAVF CCVAVF CCVAVF CC5VAVF 5 CC7VAVF 7 CCVAVF For AC-Input Power Supply Length L (m) CCVAVF CCVAVF CCVAVF CC5VAVF 5 CC7VAVF 7 CCVAVF For DC-Input Power Supply 5 5 Dimensions (Unit = mm) Side 5- (MOLEX) 5.9 Ø8 8. L.9 For AC-Input Power Supply Side L 5557-R- (MOLEX) Ø8 Side Side Extension Cables Cables for the extension of motor cable and sensor cable in the vacuum. Product Line For Cable For Sensor Cable For Cable Length (m) CC5ARV 5 CCARV Conductor configuration: 5 Conductor size: AWG (. mm²) For Sensor Cable Length (m) CC5ARVE 5 CCARVE Conductor configuration: Conductor size: AWG6 (. mm²) This product is manufactured at a plant certified with the international standards ISO 9 (for quality assurance) and ISO (for systems of environmental management). Specifications are subject to change without notice. This catalogue was published in Januar,. ORIENTAL MOTOR (EUROPA) GmbH European Headquarters and Düsseldorf Office Schiessstraße 7 59 Düsseldorf, Germany Tel: -567 Fax: ORIENTAL MOTOR (FRANCE) SARL France Headquarters, Avenue de I'ile Saint Martin 977 Nanterre Cedex, France Tel: Fax: ORIENTAL MOTOR (UK) LTD. Unit 5, Faraday Office Park, Rankine Road, Basingstoke, Hampshire RG 8AH U.K. Tel: Fax: ORIENTAL MOTOR CO., LTD. Headquarters 6-7, Ueno 6-chome Taito-ku, Tokyo -856, Japan Tel: ()85-68 Fax: ()85-89 ORIENTAL MOTOR ITALIA s.r.l. Italy Headquarters Via A. De Gasperi, 85 7 Mazzo di Rho (Ml), Italy Tel: Fax: For more information please contact: Copyright Oriental (Europa) GmbH 9 UK//VERS Printed in Germany