Mechanical Booster Pump PRC-A Series, PMB-B, C (M) Series

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1 (Mechanical Booster Pump) Components Division, ULVAC, Inc. Mechanical Booster Pump PRC-A Series, PMB-B, C (M) Series Booster pumps can be used with roughing pumps, such as oil rotary pumps, dry vacuum pumps, and water sealed pumps, in order to improve the pumping speed in the 1 k-.1 Pa range, where pumping speeds of roughing pumps often deteriorate. PMB-B series pumps are well-suited to the large volume evacuation requirements of vacuum heating furnace, vacuum melting furnace and other equipment. PRC-A & PMB-C series are roots-type vacuum pumps designed primarily for use in processes where a high level of cleanliness is required. In addition to general use, these pumps are well-suited to semiconductor manufacturing processes, CO 2 laser processes, and other processes. Features Oil-free Since no lubricating oil is used in the casing, stable performance is realized even when evacuating water vapor or solvent vapors. Operation at high inlet pressure Since a motor larger than the standard motor can be installed, the pumps are sufficiently applicable to systems having high gas loads, such as CO 2 laser processes. Vertical or horizontal exhaust (PMB-C (M), B, 6B) The vertical or horizontal direction can be selected for the exhaust port on the pump. This feature provides greater system design flexibility and makes very compact designs possible. Shorter evacuation time PMB-CM, PRC-A Since these PRC-A (atmospheric pressure operation type) & PMB-CM series can be started at the same time as the roughing pumps, shorter evacuation times are possible when compared to the standard type mechanical booster pump. Note) SI units are used in this catalog. The following conversion can be used for non-si units. Ultimate pressure: 4. x 1 1 Pa = 3. x 1 3 Torr Pressure:.5/.1/.2/.3 MPa =.5/.1/2/3kgf/cm 2 *1 Measurement value at 13 Pa *2 When the optional large capacity motor is attached, a greater inlet pressure and larger pressure differential is possible. (Only PMB-3C, PMB-C) *3 Measured with a Pirani gauge (standard backing pump and oil were used.) The value would be 4. x 1 2 Pa when measured with a McLeod vacuum gauge. Specifications Item Model PMB-1C, CM PMB-3C, CM PRC-3A PRC-6A PRC-12C PMB-C, CM PMB-B PMB-6B Actual pumping speed* 1 5 Hz 95 (158) 28 (467) 28 (467) 5 (833) 1 (167) 2 (333) m 3 /h (L/min) 6 Hz 115 (192) 33 (55) 33 (55) 6 (1) 12 (2) 2 () 38 (633) 62 (133) Maximum suction pressure* 2 5 Hz 9.3 x x x x x 1 3 (within 5 min. at startup) Pa 6 Hz 6.2 x x x x x 1 2 Maximum allowable differential 5 Hz 8. x x x x 1 3 pressure * 2 Pa 6 Hz 5.6 x x x x 1 3 Ultimate pressure* 3 Pa 4. x x 1-1 Allowable drive pressure* 4 Pa ~1. x 1 5 (PRC-A [atmospheric pressure operation models], PMB-CM) (during continuous operation) Motor* 5 kw (number of poles).4 (2).75 (2) 2.2 (2) 3.7 (2) 7.5 (2) 15 (4) 18.5 (4) Oil* 6 ULVOIL R-4 Oil capacity* 7 L (2.8) Cooling water Cooling method Air cooling Both air and water cooling Water cooling Primary side pressure MPa Inlet/outlet differential pressure MPa Cooling water volume L/min 2 3 Cooling water temperature C 5-3 Suction port diameter JIS B9 Exhaust port diameter JIS B9 Corresponds Corresponds Corresponds Corresponds Corresponds Corresponds to VG5 to VG8 to VG1 to VG2 to VG25 to VG3 Corresponds Corresponds Corresponds Corresponds Corresponds to VF5 to VF8 to VF2 to VF15 to VF2 External dimensions L x W x H mm 271 x 58 x x 656 x x 565 x x 619 x 6 x 756 x 3 5 x 1237 x x 123 x x 147 x 77 Weight* 8 kg 23 () 46 (48) 51 (54) 86 (9) 118 (123) 26 (272) 95, 115, without motor without motor Standard backing pump VD1 VD61 VD91 VS151 PKS-7 PKS-7 x 2 Options 1.5 kw (2) motor atomospheric pressure operation models 1.1 kw (2) motor 11 kw (2) motor Bypass valve, piping Separate exhaust port for lubrication chamber *4 With the PMB-CM, do not allow the repeated pumping operation time from atmospheric pressure to vacuum ( 655Pa) to exceed 5 minutes. Also, allow an interval of at least 5 minutes before starting the next pumping operation. *5 AC2V 5/6 Hz, ACV 6 Hz, 3 phase *6 Other oil types are available, upon request *7 Oil capacities in ( ) are for models with the horizontal exhaust direction specification. *8 Weights in ( ) are for CM and PRC-A atmospheric pressure operation models. 5 VACUUM COMPONENTS

2 Components Division, ULVAC, Inc. 1 PMB-1C PMB-3C PRC-3A PRC-6A PRC-12A PMB-C PMB-B PMB-6B Pumping speed Pumping speed Pumping speed 3 L/min m /h L/min m /h PRC-6A 6Hz PRC-6A 5Hz PMB-3C 6Hz PRC-3A 6Hz PMB-3C 5Hz PRC-3A 5Hz PMB-1C 6Hz PMB-1C 5Hz Pumping Speed(JIS B8316/1985) Type :PMB-1C, 3C PRC-3A, 6A Forepump :PMB-1C VD1 PMB-3C VD61 PRC-6A VD91 Power :AC2V 5/6Hz 3 phase Oil :ULVOIL R-4 Gauge :Pirani :Capasitance Manometer VD1 VD61 VD Pa 5 3 L/min m /h Pumping Speed Curve Pressure Pumping Speed(JIS B8316/1985) PMB-C 6Hz PMB-C 5Hz PRC-12A 6Hz PRC-12A 5Hz PKS-7 VS Pa PMB-6B PMB-B Pressure PKS-7X2 PKS-7 Type :PRC-12A, PMB-C Forepump :PRC-12A VS151 PMB-C PKS-7 Power :AC2V 5/6Hz 3 phase Oil :ULVOIL R-4 Gauge :Pirani :Capasitance Manometer Pumping Speed(JIS B8316/1985) Type :PMB-B, 6B Forepump :PMB-B PKS-7 PMB-6B PKS-7X2 Power :AC2V 5/6Hz 3 phase Oil :ULVOIL R-4 Gauge :Pirani :Capasitance Manometer Pa Pressure VACUUM COMPONENTS 51

3 (Mechanical Booster Pump) Components Division, ULVAC, Inc. Mechanical Booster Pump PRC-A Series, PMB-B, C (M) Series PMB-1C (M) (Separate Exhaust Port for Lubrication Chamber G3/8 Optional) dia M8 Tap, Central diameter dia.1 JIS B 9 VG5 equivalency for Mechanical Seal Totally-Enclosed Fan-Cooled Flange induction Motor 3 Phase.4kW 2P AC2V/5Hz, 6Hz ACV/6Hz Outlet Flange 4-M8 Tap, Central diameter dia.1 JIS B 9 VF5 equivalency W.T. PMB-1C 23kg PMB-1CM kg 25 Flange to Flange 18 PMB-3C (M) (Separate Exhaust Port for Lubrication Chamber G3/8 Optional) dia Totally-Enclosed Fan-Cooled Flange induction Motor 3 Phase.75kW 2P AC2V/5Hz, 6Hz ACV/6Hz M1 Tap, Central diameter dia.135 JIS B 9 VG8 equivalency Cooling water outlet Suction port flange JIS B 9 Corresponds to VG5 Inverter atomospheric pressure operation type (behind side) Flange to Flange for Mechanical Seal Cooling Water Inlet () 77 (296) Cooling Water Outlet G3/8 (PF3/8) () (5) G3/8 (PF3/8) PMB-3C 46kg W.T. PMB-3CM 48kg dia.12 Outlet Flange 4-M1 Tap, Central diameter dia.135 JIS B 9 VF8 equivalency PRC-3A (atmospheric pressure operation type) (86) Exhaust port flange JIS B 9 corresponds to VF8 Oil drain VACUUM COMPONENTS

4 Components Division, ULVAC, Inc. 1 PRC-6A (atmospheric pressure operation type) PRC-6A (atmospheric pressure operation type) 2 3 Inverter atomospheric pressure operation type Cooling water outlet Suction port flange JIS B 9 corresponds to VG (5.6) (121) 9.7 (behind side) Oil drain Exhaust port flange JIS B 9 corresponds to VF8 23 PRC-12A (atmospheric pressure operation type) Inverter atomospheric pressure operation type Rc 3/ Cooling water outlet Rc 3/8 212 Suction port flange JIS B 9 corres ponds to VG (2) dia. 273 (152) 1.5 (behind side) Oil drain Exhaust port flange JIS B 9 correspond to VF8 VACUUM COMPONENTS 53

5 (Mechanical Booster Pump) Components Division, ULVAC, Inc. Mechanical Booster Pump PRC-A Series, PMB-B, C (M) Series PMB- (M) Vertical Exhaust Model Separate exhaust port for lubrication chamber (option) for dia Cooling water outlet Suction port flange, JIS B9 corresponds to VG2 Moter, 7.5kW, 2poles (14) Oil level gauge (5) 215 Moter 7.5kW, 2poles Exhaust port flange JIS B9 corresponds to VF2 Separete exhaust port for lubrication chamber (option) for Suction port flange, JIS B9 corresponds to VG dia Oil drain for dia Oil drain Exhaust port flange JIS B9 corresponds to VF2 PMB- (M) Horizontal Exhaust Model Oil drain for Cooling water outlet 4-dia Oil level gauge Oil drain 54 VACUUM COMPONENTS

6 Components Division, ULVAC, Inc. 1 2 PMB-B 12-M12 Tap, Central diameter dia. JIS B 9 VG25 equivalency Cooling Water Outlet PMB-6B 12-M12 Tap, Central diameter dia.37 JIS B 9 VG3 equivalency Outlet Flange (B) 8-M1 Tap, Central diameter dia.21 JIS B 9 VF15 equivalency Note) Maintenance space; Cooling Water Inlet for Mechanical Seal (5Hz) 9 (6Hz) Belt Cover V-Belts 5V-112 x 2 Motor Pulley 5Hz dia.3 6Hz dia.25 Motor 3 Phase 15kW 4P Outlet Flange (A) 8-M1 Tap, Central diameter dia.21 JIS B 9 VF15 equivalency (5Hz) 9 (6Hz) Belt Cover V-Belts 5V-112 x 2 Motor 3 Phase 18.5kW 4P 31 Cooling Water Outlet Outlet Flange (B) 8-M12 Tap, Central diameter dia.27 JIS B 9 VF2 equivalency Note) Maintenance space; 37 Cooling Water Inlet for Mechanical Seal Outlet Flange (A) Motor Pulley 5Hz dia.3 6Hz dia.25 8-M12 Tap, Central diameter dia.27 JIS B 9 VF2 equivalency VACUUM COMPONENTS 55

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