HYBRID TURBOMOLECULAR PUMPS ATH SERIES

Transcription

1 HYBRID TURBOMOLECULAR PUMPS ATH SERIES

2 HYBRID TURBOMOLECULAR PUMPS ATH SERIES Introduction Adixen offers the ATH series of hybrid turbomolecular pumps with pumping speeds at 200 and 300 l/s. These models have been optimized for instrumentation or R&D applications while others for heavy cycling applications. Adixen s knowledge of hybrid turbomolecular pumps has resulted in the design of the ATH series, optimizing vacuum performance, electronics functionality and reliability. The ATH series also offers added value through features such as: Intermediate vacuum ports Efficient integration To cover a wide range of application requirements, multiple pump monitoring options are available. ATH series 02

3 ATH 200 I TECHNOLOGY The ATH series hybrid turbomolecular pump incorporates turbomolecular stages with molecular drag stages, resulting in the following benefits: High pumping speed, High compression ratio, resulting in high exhaust pressure tolerance. ROBUSTNESS The low rotational speed and the machined rotors of the ATH series make these pumps very robust against: Unexpected air inrushes, Shocks, Gyroscopic effects, Bearing failures. OTHER ADVANTAGES The patented design of the allow integration of the pumps closer to the application, saving space and money. Additionally, the ATH pumps can be equipped with intermediate vacuum ports to offer application flexibility such as: Additional pumping capacity, Management of a pressure set point, Venting. 03

4 HYBRID TURBOMOLECULAR PUMPS ATH SERIES ATH 200 Optimized for low pressure applications Pumping speed ATH 200 (I) DN 100 Nitrogen Helium An ultimate pressure of mbar Pumping speed (l/s) 100 Loss of nominal speed The ATH 200 can be backed with dry or rotary vane pumps. 50 The pump may be equipped with nitrile seals for better resistance in a radiative environment Inlet pressure (mbar) The ATH 200 is available with an intermediate pumping port - ATH 200 I The pumping speed for Nitrogen at the intermediate port is 10 l/s. Flow rate (sccm) Nitrogen Helium Flow rate versus inlet pressure Loss of the rotational speed Inlet pressure (mbar) 10-2 Cooling requirements at (20 C ambient temperature) Water or Forced Air Cooling Inlet pressure (mbar) Natural Convection Cooling Exhaust pressure (mbar)

5 Optimized for heavy duty applications and analytical instruments Wide operating pressure range from mbar (torr) up to 0.1 mbar (torr) with a wet or dry fore pump A chemical version equipped with a gas purge is available for pumping corrosive gases - CI. Pumping speed (l/s) Pumping speed (CI) 350 N2 DN N2 DN He DN 160 He DN Inlet pressure (mbar) Flow rate versus inlet pressure To increase the pump flow capability, The is available with a DN160 flange or a nude configuration. Flow (sccm) N2 DN 160 He DN 100 N2 DN 100 He DN Inlet pressure (mbar) 10-1 Cooling requirements at (20 C ambient temperature) Water Cooling 10-2 Inlet pressure (mbar) Forced Air Cooling Natural Convection Exhaust pressure (mbar) 05

6 HYBRID TURBOMOLECULAR PUMPS ATH SERIES ATH : Technical data (measured specifications per PNEUROP standards) Characteristics ATH 200 (I) (CI) Inlet flange DN 100 DN 100 DN 160 N2 l/s Pumping speed He l/s N2 > 10 9 > 10 9 Compression ratio He Ultimate pressure (*) mbar < < Maximum inlet pressure mbar Maximum exhaust pressure mbar 4 10 Intermediate port flange DN 25 (I version) DN 16 Intermediate port N2 l/s 10 (I) 2-5 (CI) pumping speed He l/s 8 (I) 3-5 (CI) Recommended fore pump RVP, ACP, AMD RVP, ACP, AMD Exhaust port flange DN 16 DN 25 Mounting orientation Any Any Rotational speed RPM Noise level db(a) < 53 < 53 Vibration level mm/s Starting power VA Nominal power W Start-up time mn < 6 < 3.5 Pump weight ISO-K/CF-F kg (lb) 5.5 / 9.7 (12.2 / 21.4) 6.5 / 10.5 (14.4 / 23.2) Controllers ACT 202 TH ACT 600 TH Cooling Natural, air, water Natural, air, water (*) Measured following Pneurop Standards (CFF flange, after 48 hours of baking with a RVP primary pump). Applications ATH 200 (I) (CI) Inlet Mass spectometry, leak detectors, electron microscopes, R&D, general low inlet pressure requirements, deposition. Motor Holweck molecular stage Pump Inlet Turbomolecular stage Intermediate Port Inlet (I version) Turbomolecular stage Holweck molecular stage Motor Pump Exhaust Exhaust Purge (CI) Intermediate part (CI) 06

7 Controller, ACT 202 TH, ACT 600 TH designed with a high level communication interface Controller ACT 202 TH ACT 600 TH Pump ATH 200 Convenient interface Automatic power supply detection from 100 to 240 Volts 50/60 Hz single phase Menu operation Sophisticated pump monitoring Display of: Rotational speed Pump current consumption Pump and controller temperature Total running time Pump fault detection Diagnostic mode with last ten alarm codes Control of: Rotational speed Venting Auto start Start delay Maintenance schedule Multiple interfaces PC/PLC controlled processes RS 232/R5485 (configurable) Remote control Inputs: - Remote start/stop - Remote stand-by - External safety Outputs: - Pump starting - Pump at speed - Stand-by on - Vent valve on/off - Power supply for air cooling kit - Selectable 0-10 Volts output (speed/pump current/temperatures) ACT 202 TH ACT 600 TH Dimensions mm (inches) ACT 202 TH (for ATH 200) ACT 600 TH (for ) (4.19) 91.4 (3.60) 245 (9.65) 12.5 (0.49) 213 (8.39) (7.81) 245 (9.65) (5.06) (4.82) (5.06) (4.82) ACT ACT 600T 07

8 HYBRID TURBOMOLECULAR PUMPS ATH SERIES OEM controller electronics Adixen has developed electronics and pumps designed specifically for integration into OEM equipment. For further information, please contact us. Dimensions mm (inches) ATH 200 ATH 200 natural convection natural convection ø180 (7.09) ø 198 (7.80) DN 100 ISO - K Ø 156 (6.14) DN 100 CF - F ø130 (5.11) ø (5.85) (6.77) Electrical power supply (7.36) (8.20) DN 100/160ISO-K (8.20) DN 160CF-F (8.60) DN 100CF-F Inlet intermediate port DN 25 ISO - KF (ATH200 i only) Exhaust DN 16 ISO - KF ø 158 (6.22) ATH 200 with radial air cooling kit with radial air cooling kit Ø 156 (6.14) 87 (3.42) (6.77) (4.98) 6 (0.24) ATH 200 water cooled water cooled Ø 156 (6.14) 8.5 (0.33) (6.77) 87 (3.42) (4.98) 18.7 (0.74) 08 2 holes 1 / 8 NPT 26 (1.02) 17 (0.67) 26 (1.02)

9 Ordering information ATH 200 pump (order controller, inlet screen and interconnecting cable separately) S 1 00 ATH 200 I DN100 ISO-K DN100 CF-F 3C 3D 31 ATH 200 DN100 ISO-K DN100 CF-F DN63 ISO-K Natural 0 Cooling Air Water 1 2 Seals material FPM Nitrile 1 2 pump (order controller, inlet screen and interconnecting cable separately) C 00 SD 1 CI 2 DN100 ISO-K 31 Housing DN100 CF-F DN160 ISO-K DN160 CF-F nude Natural 0 Cooling Air Water 1 2 Seals material FPM Nitrile

10 HYBRID TURBOMOLECULAR PUMPS ATH SERIES Controllers and Cables Controllers Model ACT 202 TH ACT 600 TH Pump ATH 200 PART NUMBER Interconnecting cables (pump to controller) For pump Associated controller ATH200 ACT202TH ATH300 ACT600TH Cable lengths PART NUMBER 1 m 1.5 m 3.5 m 5 m 10 m 20 m A A A A A A A A A A A A Cables comes with straight connector. For other lengths and connector configurations, please contact us. Power cords for controller (for ACT202TH and ACT600TH*) Designation USA low voltage USA high voltage Europe Japan low voltage Japan high voltage United Kingdom Switzerland PART NUMBER A * The ACT600TH controllers are supplied with one European power cord and one US low voltage power cord. The ACT202TH controllers are not supplied with power cord. 10

11 Accessories Inlet screens and dense mesh dust filters For pumps Inlet flange 2.5 mm Mesh size 20 µm PART NUMBER ATH 200, DN 100 ISO-K DN 100 CF-F DN 160 ISO-K Dense mesh filters DN 160 CF-F Inlet screen Electrical venting valves Voltage For ATH 200, For DN 16 DN 25 ISO-K 24 VDC V - 50/60 Hz V - 50/60 Hz V - 50/60 Hz 220V - 50/60 Hz Electrical venting valve 240V - 50/60 Hz Cooling kit Water cooling For pumps ATH 200 Type Air Water Air Water PART NUMBER Air cooling 11

12 China Technology Shanghai Tel: (8621) Fax: (8621) India Technology India Tel: (91) Fax: (91) Netherlands Technology Netherlands Tel: (31) Fax: (31) Taiwan Technology Taiwan Tel: (886) Fax: (886) France (Headquarters) Technology France Tel: 33 (0) Fax: 33 (0) Japan Alcatel-Lucent Japan Ltd Tel: (81) Fax: (81) Singapore Alcatel-Lucent Singapore Tel: (65) Fax: (65) United Kingdom Technology (U.K.) Ltd Tel: (44) Fax: (44) Germany Alcatel Hochvakuum Technik GmbH Tel: (49) Fax: (49) Korea Technology Korea Tel: (82) Fax: (82) Sweden Adixen Scandinavia Tel: (46) Fax: (46) USA Products Tel: (1) Fax: (1) Italy Systems S.p.A. Tel: (39) Fax: (39) Technology France 98, avenue de Brogny - BP ANNECY CEDEX - FRANCE - Tel.: 33 (0) Fax: 33 (0) Publication : Technology France - Reference / All information can be modified without prior notice - Conception: Adéhène