Piezoresistive Pressure Sensors

Transcription

1 Pressure Piezoresistive Pressure Sensors for utomotive R&, Test pplications Type versatile high performance pressure sensor that will operate in harsh test environments where temperature extremes, high vibration and shock levels are present. Pressure ranges from psi 0.05 % FS accuracy 0.1 % FS stability per year Temperature compensated F 300 % proof pressure Fast response time mv, V and m electrical output options Many voltage output options, 1 5, , 0 10 etc.. (3 and 4-wire) Intrinsically Safe pplications Type 4260/62 series from Kistler is well suited for demanding pressure applications in the R&, engine test, road test, component test and other test applications supporting the automotive, aerospace and industrial markets. Engine and powertrain test Engine oil and coolant pressures Engine fuel Inlet and exhaust pressures arometric pressure Transmission pressures On vehicle test Engine oil and coolant pressures Engine fuel ir conditioning rakes and hydraulics Inlet and exhaust pressures omponent and sub-system testing uxiliary power units ir conditioning systems Fuel, water and oil pumps Suspension systems S test stands High pressure fuel control systems Flight test Leak testing E ompliant Information EM compliant to EN :2001/1/2 industrial locations compliant with Pressure Equipment irective (PE) 97/23/E a ategory 1 Pressure ccessory. Note: Pressure Range is equivalent to max. working pressure (PS) as referred to in the PE. Page 1/12

2 escription Type 4260/62 series sensor is based upon proven Kistler piezoresistive sensing technology that has been continually developed and refined since the early 1970 s. silicon sensing element is mounted within a high integrity seal assembly that is fully isolated from the pressure media by a welded 316L stainless steel or Hastelloy diaphragm. The silicon sensing element exhibits high performance for stability and repeatability, extremely important parameters for the Test Engineer. The pressure sensing assembly features a unique sealing method (US Patent 7, 373, 827) that enables the sensor to withstand multiple cycles without fatigue that is especially useful in cyclic applications. This design also enables flexibility in choice of pressure connections without the use of adaptors or O rings. Surface mount electronics condition the output from the silicon sensing element and provide temperature compensation. dditional electronic circuit boards can then be added to configure the electrical output for a wide choice of voltage and m outputs. s a result, Type 4260/62 series can be quickly configured at the factory to the customer s choice of electrical output to suit a variety of data acquisition systems. dditionally, non-interactive zero and span calibration adjustments can be provided. EM protection, reverse polarity, power supply regulation, over voltage and short circuit protection is provided, ensuring Type 4260/62 series is well suited for the harsh test environments that are commonplace in the automotive and aerospace test markets. Type 4260/62 series is available with options for use in TEX x zoned hazardous area: Zone 0, intrinsically safe 1G and x Zone 2, non-incendive 3G. S certified single seal. 3 3 Type 4260/62 series is stocked in popular types and pressure ranges. Prior to shipping the sensor is adjusted to suit the required pressure range and engineering units, the zero and span checked and the sensor finally completed with a choice of electrical and pressure connections. Finally, every Type 4260/62 series sensor is fully tested over both pressure and temperature to ensure compliance to the specifications. This data is available for each sensor and is traceable to ISO and NIST. onstruction 1 Pressure capsule: high integrity 316L stainless steel glass to metal seal with Hastelloy or 316L stainless steel isolation diaphragm. 2 Sensing element: etched cavity, micro-machined silicon with ion implanted strain gauges. 3 onditioning electronics: surface mount electronics that are fully encapsulated for high vibration and shock environments. 4 Protection: circuit board includes RFI/EMI protection, reverse polarity, over voltage and short circuit protection. 5 Electrical connection: choices can be specified by the customer. 6 Pressure connection: wide choice of welded pressure fittings Page 2/12

3 General Technical ata Type Unit Pressure range psi 15, 30, 45, 50, 60, 75, 100, 150, 200, 300, 500, 750, 1000, 1500, 1.5, 2.5, 3, 5, 7.5, 15, 10, 30, 50, 75, 100, 150, 200, 300, 500 (psig) 2000, 3000, 5000 (psi) psis N/ 750, 1000, 1500, 2000, 3000, 5000 Proof pressure options psi intermediate ranges available barometric: (psi) >3 x FS pressure compound ranges: , , , , bi-directional ranges ±2.5, ±3, ±10 urst pressure psi >4 x FS pressure Output mv, V or m Operating temperature F (mv or V) F (m) ompensated temperatures F (mv or V) F (m) ccuracy at Tref (non-linearity, hysteresis, repeatability) 1) ± %FSL 0.2 ( 15 psig) 0.1 (>15 psig) Thermal effects (reference 68 F) F %Span F (175 F for m version) %Span 1.5 Pro rate for pressures below 15 psi F for barometric %FS F for barometric %FS 1.0 Long term stability (12 months) %Span ±0.1 Note: For special calibration, please call Kistler 1) Premium accuracy available, contact Kistler General electrical specifications Supply voltage mv versions V 5 15 Voltage versions V refer to table voltage versions; electrical specs m versions V 9 28 output impedance ohms <200 (V output) Minimum load resistance ohms 2500 (V output), 5000 ( 5 5 V output, 4 wire), ( 5 5 V, 3 wire) Supply voltage effects max. (regulated units) %Span/V Warm up time msec <1 (V output) <3 (m output) Output noise typical mvrms <1 (V output), <0.1 (m output) Zero setting mv versions %FS ±3 V and m versions %FS ±1 Span setting mv versions %FS ±3 V and m versions %FS ±1 Frequency response, max. Hz 2000 Options non-interactive zero and span adjust %FS ±5 Shunt calibration (Rcal), ±20 % (V only) %FS 80 Voltage versions; electrical specifications V output (V) Supply Voltage (V) urrent rain (m) / Ratiometric / 3-wire 5 ±0.5 <2 1 6 / / V / 3-wire max. output (low power, limited protection) < < / 4-wire 8 42 < / 4-wire < / 4-wire < / 3-wire active offset < / 3-wire active offset 7 42 < / 3-wire active offset <7 16 Page 3/12

4 General Technical ata Type Unit Pressure range psi 15, 30, 45, 50, 60, 75, 100, 150, 200, 300, 500, 750, 1000, 1500, 2000, 3000, 5000 (psi) 1.5, 2.5, 3, 5, 7.5, 10, 15, 50, 30, 75, 100, 150, 200, 300, 500 (psig) psis N/ 750, 1000, 1500, 2000, 3000, 5000 options intermediate range available barometric: (psi) compound ranges: , , , , bi-directional ranges ±2.5, ±3, ±10 Temperature limits Operating mv and V ºF m ºF Storage mv and V ºF m ºF esign life FS cycles 50 million at 2Hz Vibration, 50 g peak, 10 Hz to 2 khz per %FS/g response <0.05 Shock MIL-ST-202G Method 204, condition E 1000g, 0.5 msec half sine pulse in 3 mutually perpendicular axes will not affect performance MIL-ST-202G, Method 213-1, condition E 100g, 6 msec half sine pulse in 3 mutually perpendicular axes will not affect performance MIL-ST-202G, Method 213-1, condition cceleration sensitivity %FS/g <0.05 (reducing with increasing pressure range) Insulation resistance, at 500 V Mohm 100 pprovals E compliant to EN61326: :2001 (IE 61326:2002) Pressure equipment directive 97/23/E (PE), category 1, pressure accessory Hazardous area certification ls Zone 0 Ex ia T4 ( 40 F Ta 175 F) II 1G x Non-incendive Zone 2Ex nl T4 ( 40 F Ta 175 F) x 3G S certified single seal 3 3 Physical Technical ata Type Unit Pressure range psi 15, 30, 45, 50, 60, 75, 100,150, 200, 300, 500, 750, 1000, 1500, 2000, 3000, 5000 (psi) 1.5, 2.5, 3, 7.5, 10, 15, 30, 50, 75, 100,150, 200, 300, 500 (psig) psis N/ 750, 1000, 1500, 2000, 3000, 5000 options intermediate range available barometric: (psi) compound ranges: , , , , bi-directional ranges ±2.5, ±3, ±10 Electrical connections see ordering information Pressure connections see ordering information Installation torque lbf-ft 11.1 Environmental protection able, IN versions protection IP65 onnector versions protection IP65 Weight oz <8 Media compatibility material Stainless Steel 316L Page 4/12

5 Ordering Key bsolute Pressure Type 4260 Range (Psi) Pressure Units Pressure onnector Electrical onnector (ROMETRI ONLY) PSI R KP TORR INHg (32 F) MMHg (32 F) INH 2 0 (40 F) MH 2 0 (40 F) Output Type See table 1 (pg. 7) E F G H [-Z] [1-8] 7/16-20 UNF female, SE J1926 1/4-18 NPT male 1/4-18 NPT female 1/4 N 7/16-20 UNF male, lass 2, male to SE J514 G1/4 SP female E G1/4 SP male F 1/8-27 NPT male G 7/16-20 UNF male H bulkhead (1/4 pipe) 1/8-27 NPT male I bulkhead G1/4 Integral cable MIL MIL-TL IN LUMERG M12 E able Length None 00 Specify length in feet (integer 1-9 nom.) Wiring Options See table 2 (pg. 9-11) [-W} K K K K K0 See table 3 (pg. 12) for nom. ranges in other units 1/4 N bulkhead J (7/16-20 UNF lass 2, male to SE J514) 7/16-20 UNJF, lass 3, K male to S 4395 (formerly MS ) M10x1 male L 7/16-20 UNF male, M SE J1926 1/8-27 NPT female N G1/4 SP male, 60 P Internal cone ertification (Optional) none 0 alibration certificate 1 (supplied with premium) Premium accuracy with cert 2 IS Zone 0 nl Zone 2 IS Zone 0 Premium nl Zone 2 Premium G 1/2 SP MLE R 1/2-20 UNJF-3, FEMLE S Pressure daptors: Optional ccessories for Type /16-20 UNF male to 1/4 NPT male /16-20 UNF male to 7/16-20 UNF male /16-20 UNF male to 1/8-27 NPT male 6574 bsolute Premium ccuracy Premium accuracy: ±0.05% FS to ±0.125% FS (availability based on selected pressure sensor, contact Kistler). Electrical onnector: Optional ccessories for Type 4260 in Hirschman, mating connector MIL mphenol, mating connector Page 5/12

6 Ordering Key Gauge Pressure Type 4262 Range (PsiG) ±10 01 ±3 02 ± K K5 Pressure Units PSI R KP TORR INHg (32 F) MMHg (32 F) INH 2 0 (40 F) MH 2 0 (40 F) Output Type See table 1 (pg. 7) E F G H [-Z] [1-8] Pressure onnector 7/16-20 UNF female. SE J1926 1/4-18 NPT male 1/4-18 NPT female 1/4 N 7/16-20 UNF male, lass 2, to SE J514 G1/4 SP female E G1/4 SP male F 1/8-27 NPT male G 7/16-20 UNF male H bulkhead (1/4 pipe) 1/8-27 NPT male I bulkhead G1/4 1/4 N bulkhead (7/16- J 20 UNF lass 2, male to SE J514) 7/16-20 UNJF, lass 3, K male to S 4395 (formerly MS ) M10x1 male L 7/16-20 UNF male, M SE J1926 1/8-27 NPT female N G1/4 SP male, 60 P Internal G 1/2 SP MLE R 1/2-20 UNJF-3, S FEMLE Electrical onnector Integral cable MIL MIL-TL IN LUMERG M12 E able Length None 00 Specify length in feet (integer 1-9 nom.) Wiring Options See table 2 (pg. 9-11) [-W} ertification (Optional) none 0 alibration certificate 1 (supplied with premium) Premium accuracy cert 3) 2 IS Zone 0 nl Zone 2 IS Zone 0 Premium 3) nl Zone 2 Premium 3) K K K0 See table 3 (pg. 12) for nom. ranges in other units Gauge Premium ccuracy Premium accuracy: ±0.05% FS to ±0.15% FS (availability based on selected pressure sensor, contact Kistler). Pressure daptors: Optional ccessories for Type /16-20 UNF male to 1/4 NPT male /16-20 UNF male to 7/16-20 UNF male /16-20 UNF male to 1/8-27 NPT male 6574 Electrical onnector: Optional ccessories for Type 4262 in Hirschman, mating connector MIL mphenol, mating connector Page 6/12

7 Table 1 Output ccuracy and Electrical Output onfiguration ode Output mv (10 mv/v) 4-20 m E 4-20 m, adjustable cal-adjust F 1 6 V (3-wire) H 1 6 V (3-wire) cal-adjust I V (3-wire) K V (3-wire) cal-adjust L V (3-wire) N V (3-wire), cal-adjust O V (3-wire) low power, 5 V supply Q V (3-wire) low power, 5 V supply, cal-adjust R 0 10 V (4-wire) T 0 10 V (4-wire), cal-adjust U 5 5 V (4-wire) W 5 5 V (4-wire), cal-adjust X 0 5 V (4-wire) Z 0 5 V (4-wire), cal-adjust V (3-wire) active offset, cal. adjust V (3-wire) active offset, cal. adjust V (3-wire) low power ratiometric V (3-wire) active offset, cal. adjust V (3-wire) low power ratiometric, cal-adjust V (3-wire) active offset V (3-wire) active offset V (3-wire) active offset alibration ata alibration data is available for all Type 4260/62 series sensors and is supplied as standard with all premium accuracy sensors. The following information is provided on the calibration sheet and provides a comprehensive summary of the actual performance of the sensor compared to specification: Non-linearity, hysteresis & repeatability at room temperature Zero setting and span setting at room temperature Thermal zero shift and thermal span shift through the compensated temperature range Pass/fail summary Electrical connection details ll data is traceable to the National Institute of Standards and Technology (NIST) and is ISO17025 certified. Type 4260/62 series can be provided with custom calibrations for specific applications. Piezoresistive Pressure Sensor alibration NLHR limits are based on % span Temperature Performance limits are based on % span Span & Offset limits are based on % span Type Span X00W1 V Serial Number Offset V Pressure Range 0 to 150 PSI V Supply Voltage Reference alibrated y Gauge an Wolf Test ondition ate/time New 6/28/2007 8:08:00 M Non-Linearity, Hysteresis, and Repeatability (NLHR) Summary: Passed Pressure (PSI) Output (V) FSL Error (%) Limits (%) Limits (%) Pass/Fail Passed ± 0.1 ccuracy (NLHR) ± 0.1 Temp -10 To 50 ± 1.0 Passed ± 0.1 Temp -40 To 125 ± 1.5 Passed ± 0.1 Span (5 V nom.) ± 1.0 Passed ± 0.1 Offset (0 V nom.) ± 1.0 Passed ± * ± * ± 0.1 * ecreasing Pressure Temperature Performance Temperature ( ) Span Error (%) Offset Error (%) Error alculation Unit Reference Equipment Type S/N gilent MY Mensor Series Electrical Interface (MIL ) Pin/Wire Function (-) Supply (+) Output (-) Output E N/ F N/ ase N/ This Sensor was calibrated per Kistler Test Procedure using comparison technique against a Kistler Working Standard. Kistler Working Standards are periodically calibrated against a Kistler Reference Standard System which in turn is periodically recertified and traceable to the National Institute of Standards and Technology (NIST). It is derived from accepted values of natural physical constants according to the International System of Units (SI). Kistler s calibration system meets or exceeds the requirements of MIL-ST-45662, NSI/NSL Z540, ISO 9001:2000 and ISO/IE Kistler is accredited to ISO/IE by LSS, ssured alibration and Laboratory ccreditation Select Services. ertificate numbers are on file at Kistler and may be requested in writing. Estimated uncertainity of this calibration is ±0.05 % of pressure range for voltage output sensors or ±0.12% of pressure range for current output sensors with respect to reference standard. This certificate shall not be reproduced, except in full, without written approval of Kistler Instrument orporation. Kistler Instrument orp. Tel KISTLER ISO 9001 ERTIFIE QULITY SYSTEM John Glenn rive Fax ISO ccredited alibration Laboratory Page 2 of 2 mherst, NY info.us@kistler.com Special alibration ustom calibrations include improved Static Error and, improved temperature effects over custom temperature limits and improved zero and span setting tolerances. Examples of improved temperature errors (thermal zero and thermal span shift) include: 0.5 % FS over F 1.0 % FS over F 1.0 % FS over F ontact Kistler to discuss special calibration requirements. Page 7/12

8 imensional Information 0.72 Ø LUMERG M mv core 1/8-NPT male\male adapter 7/16-20 UNF 2.35 MIL voltage or m core 0.66 MIL-TL /4-NPT voltage or m core integral cable /4-N voltage or m core /4-N ulkhead voltage or m cal adjust core IN Note: ommon pressure and electrical connections shown, other options are available Page 8/12

9 Table 2 Wiring Option, Voltage Output Option : able, 4-Wire with Shunt Rcal. Wire olor onnection lue Yellow (+) Output Green rown Shunt lack Not connected Shield Not connected Option : able, 4-Wire Wire olor onnection lue Yellow (+) Output Green lack/rown Not connected Shield & rain Not connected Option : able, 3-Wire with Shunt Rcal. Wire olor onnection lue Yellow (+) Output rown Shunt Green/lack Not connected Shield Not connected Option : able, 3-Wire Wire olor onnection lue Yellow (+) Output Green/lack/rown Not connected Shield Not connected Option E: able, 3-Wire with Shunt Rcal. Wire olor onnection lack/green Yellow (+) Output lue Shunt rown Not connected Shield Not connected Option F: onnector, 4-Wire with Shunt Rcal. 4 2 (+) Output 3 E 5 Shunt F 6 Not connected Option G: onnector, 4-Wire 4 2 (+) Output 3 E/F 5/6 Not connected Option H: onnector, 4-Wire with Shunt Rcal. 2 3 (+) Output 4 E 5 Shunt F 6 Not connected onnections F MIL MIL-TL Page 9/12

10 Table 2 (continued) Wiring Option Voltage Output Option I: onnector, 4-Wire 2 3 (+) Output 4 E/F 5/6 Not connected Option M: onnector, 3-Wire, 4, 3 2 (+) Output E/F 5/6 Not connected Option J: onnector, 4-Wire with Shunt Rcal. 3 4 (+) Output 2 E 5 Shunt F 6 Not connected Option K: onnector, 4-Wire 3 4 (+) Output 2 E/F 5/6 Not connected Option N: onnector, 3-Wire with Shunt Rcal., 2, 3 4 (+) Output E 5 Shunt F 6 Not connected Option U: onnector, 3-Wire, 2, 3 4 (+) Output E, F 5, 6 Not connected Option W: onnector, 4-Wire (+) Output E/F 5/6 Not connected Option L: onnector, 3-Wire with Shunt Rcal., 4, 3 2 (+) Output E 5 Shunt F 6 Not connected Option X: onnector, 3-Wire Pin (connector and E) onnection / Output Option Y: onnector, 3-Wire Pin (connector and E) onnection onnections F MIL MIL-TL IN (+) Output ase ground / Output (+) Output ase ground Page 10/12 Kistler This information Instrument corresponds orporation to reserves the current the right state to of discontinue knowledge. or Kistler change reserves specifications, the right to make designs technical or materials changes. without Liability notice for consequential consistent with damage sound resulting engineering from the use principles of Kistler and products quality is excluded. practices.

11 Table 2 (continued) Wiring Option mv Output Option Q: able Loop Powered urrent 4 20 m: Option O: able, 2-Wire Wire olor lue Green Yellow Shield lack/rown Option S: able Wire olor / rown lue/ lack Green Yellow Shield onnection (+) Output Not connected Not connected onnection (+) Output Not connected Wire olor lue lack Shield Green/Yellow/rown onnection / ase ground Not connected Not connected Option P: onnector, 2-Wire (Electrical onnector Options & Only) 3 E 5 ase ground*,, F 2, 4, 6 Not connected Option T: onnector 4 2 (+) Output 3 F 6 Not connected E 5 ase Option R: in onnector, 2-Wire (Electrical onnector Option Only) Pin onnection 1 3 / 4 ase ground () 2 Not connected Loop Resistance hart R L (Ω) Option V: onnector, Remote Supply Monitoring 950, 1, 2, 3, 4 E 5 (+) Output 475 F 6 Transmitter working range V S (V) onnections F MIL MIL-TL Load hart for 4 20 m (loop powered current output) Key escription V S Voltage at the terminal of transmitter Load resistance R L Min. required working voltage is given by Vs (0.02 x R L ) + 9V Page 11/12 Kistler This information Instrument corresponds orporation to reserves the current the right state to of discontinue knowledge. or Kistler change reserves specifications, the right to make designs technical or materials changes. without Liability notice for consequential consistent with damage sound resulting engineering from the use principles of Kistler and products quality is excluded. practices.

12 Table 3 Pressure Units for Ordering odes E F G H ode Psi ar Kpa Torr 32 F 32 F 40 F K K K K K F Page 12/12 Kistler This information Instrument corresponds orporation to reserves the current the right state to of discontinue knowledge. or Kistler change reserves specifications, the right to make designs technical or materials changes. without Liability notice for consequential consistent with damage sound resulting engineering from the use principles of Kistler and products quality is excluded. practices.