Standard Components. KF Components. ISO Components. CF Components. Quick CF Components

Transcription

1 Standard Components KF Components ISO Components CF Components Quick CF Components

2 Contents KF Components Introduction Page - to -4 KF Flanges KF Components Page -5 to -6 Page -6 to -16 KF Flexible hoses Page -17 to -18 KF iquid feedthroughs Page -19 KF Glass-to-metal connectors Page -20 KF Viewports Page -21 KF Seals Page -22 to -27 KF Connecting elements Page -28 to -1 ISO Components Introduction Page -2 to -5 ISO Flanges Page -6 to -9 ISO Components Page -40 to -46 ISO Flexible hoses Page -47 ISO Viewports Page -48 to -49 ISO Seals Page -50 to -55 ISO Connecting elements Page -55 to -58 CF Components Introduction Page -59 to -61 CF Flanges Page -62 to -67 CF Components CF Flexible hoses Page -68 to -77 Page -78 CF Quick access door Page -79 to -80 CF iquid feedthroughs Page -81 CF Glass-to-metal connectors Page -82 CF Viewports Page -8 to -84 CF Gaskets Page -84 to -85 CF Connecting elements Page -86 to -89 Quick CF Components Introduction Page -90 to -91 Quick CF Flanges Page -92 to -9 Quick CF Components Page -9 to -95 Quick CF Viewports Page -95 Optical fiber feedthroughs on Quick CF flanges Page -96 SUB-D Feedthroughs on Quick CF flanges Page -96 Edge welded bellows with Quick CF flanges Page -97 UHV angle valve with Quick CF flanges Page -97 Total pressure measurement with Quick CF flanges Page -98 Quick CF Gaskets Page -99 to -100 Quick CF Clamp chains VaCFix, stainless steel Page -101 Heating jackets for Quick CF clamp chains VaCFix Page

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5 KF Components KF Flanges KF Blank flanges aluminum stainless steel luminum Stainless steel 04 Stainless steel 16 KF16B KF16BS-04 KF16BS KF25B KF25BS-04 KF25BS KF40B KF40BS-04 KF40BS KF50B KF50BS-04 KF50BS Option: clean room products (= CRP) made of stainless steel 16 on request. KF Bored flanges, stainless steel D Stainless steel 04 Stainless steel 16 KF16B19-04 KF16B KF16B KF25B28-04 KF25B KF40B41-04 KF40B KF40B44-04 KF40B KF50B5-04 KF50B KF50B57-04 KF50B Option: clean room products (= CRP) made of stainless steel 16 on request. Welding flanges made of stainless steel 04 on request. D R

6 KF Components KF Flanges KF Flange caps, plastics KF16CP KF25CP KF40CP KF50CP Packing unit 10 pieces KF Components KF Tubulations (half nipples), stainless steel Stainless steel 04 Stainless steel 16 TU16K TU16K TU16K TU16K TU16K TU16K TU16K TU16K TU25K TU25K TU25K TU25K TU25K TU25K TU25K TU25K TU40K TU40K TU40K TU40K TU40K TU40K TU40K TU40K TU50K TU50K TU50K TU50K TU50K TU50K TU50K TU50K Option: clean room products (= CRP) made of stainless steel 16 on request. Other lengths and nominal diameters on request. R -6

7 KF Components KF Components KF Tube, 1 m length, stainless steel Delivery conditions according to DIN EN longitudinally welded weld seam factor 1.0 inside and outside pickled R RI St. steel 04 St. steel 16 R04-19x1.5-1 R16-19x R04-28x1.5-1 R16-28x R04-41x1.5-1 R16-41x R04-5x1.5-1 R16-5x Other lengths on request. Quality according to DIN 11850/11866 on request Surface finish inside Ra < 0.8 μm weld seam area Ra < 1.6 μm KF Hose nozzles Hose ID 10 mm luminum Stainless steel 16 KF16HN KF16HNS KF25HN KF25HNS KF40HN KF40HNS KF50HNS KF Tubulation for PVC hose, stainless steel 16 R KF25TUH KF40TUH KF50TUH Option: clean room products (= CRP) on request. KF Hose clamps for PVC hose KF16HC KF25HC 25 6 KF40HC KF50HC D=max. hose size D -7

8 KF Components KF Components PVC hoses, by the meter Transparent PVC hose with an internal spring steel spiral Temperature range -15 C to 65 C Differential pressure 900 mbar R RI PVC PVC PVC PVC KF Hose connectors, PVC KF16PVC KF16PVC KF16PVC KF25PVC KF25PVC KF25PVC KF40PVC KF40PVC KF40PVC KF50PVC KF50PVC KF50PVC Other lengths on request. KF Straight connectors luminum Stainless steel 04 Stainless steel 16 SC16K SC16K-04 SC16K SC25K SC25K-04 SC25K SC40K SC40K-04 SC40K SC50K-04 SC50K Other lengths on request. Option: clean room products (= CRP) made of stainless steel 16 on request. -8

9 KF Components KF Components KF Tubulated reducing adapters, aluminum 2 2 KF25R KF40R KF40R KF50R KF Tubulated reducing adapters, conical, stainless steel Stainless steel 04 Stainless steel 16 KF25R16/CO-04 KF25R16/CO KF40R16/CO-04 KF40R16/CO KF40R25/CO-04 KF40R25/CO KF50R25/CO-04 KF50R25/CO KF50R40/CO-04 KF50R40/CO Option: clean room products (= CRP) made of stainless steel 16 on request. 2 2 D D2 KF Tubulated reducing adapters, stainless steel Stainless steel 04 Stainless steel 16 KF25R16-04 KF25R KF40R16-04 KF40R KF40R25-04 KF40R KF50R25-04 KF50R KF50R40-04 KF50R Option: clean room products (= CRP) made of stainless steel 16 on request

10 KF Components KF Components KF to ISO-K dapters, stainless steel Stainless steel 04 Stainless steel 16 SK SK SK SK SK SK SK SK Option: clean room products (= CRP) made of stainless steel 16 on request. Other lengths on request. KF to ISO-K dapters, conical, stainless steel KF to CF dapters, stainless steel D D2 SK06040/CO SK06050/CO SK080040/CO SK080050/CO SK100040/CO SK100050/CO Option: clean room products (= CRP) made of stainless steel 16 on request. 2 2 K K K K K K Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other lengths on request

11 KF Components KF Components KF-G dapters, G outside thread, stainless steel 16 GZ D SW KF10G /4" KF16G /2" KF16G /4" KF16G /4" KF16G /8" KF25G " KF25G /2" KF25G /4" KF25G /4" KF25G /4" KF40G /4" KF40G /2" KF50G " Option: clean room products (= CRP) made of stainless steel 16 on request. KF-G dapters, G inside thread, stainless steel 16 GZ SW KF16GI /8" 7 - KF16GI /4" KF16GI /8" KF25GI /4" KF25GI /2" KF25GI /4" 20 - KF40GI /2" KF40GI " KF40GI /4" 22 - KF40GI /4" Option: clean room products (= CRP) made of stainless steel 16 on request. KF Threaded flanges, G outside thread, stainless steel 16 with FKM seal KF Flange adapters for screwing into tubes. GZ D 2 SW KF16EF /2" KF25EF " KF40EF /2"

12 KF Components KF Components KF-R dapters, R outside thread, stainless steel 16 GZ D SW KF16R /4" KF16R /2" KF25R " KF40R /2" KF50R " Option: clean room products (= CRP) made of stainless steel 16 on request. KF to NPT dapters, NPT outside thread, stainless steel 16 GZ D SW KF16NPT /4" KF16NPT /2" KF16NPT /4" KF25NPT /4" KF25NPT /4" KF40NPT /2" Option: clean room products (= CRP) made of stainless steel 16 on request. KF to NPT dapters, NPT inside thread, stainless steel 16 GZ SW KF16NPT18F /8" 10 1 KF16NPT14F /4" 1 19 KF25NPT14F /4" 1 19 KF25NPT18F /8" 10 1 Option: clean room products (= CRP) made of stainless steel 16 on request. KF to Swagelok dapters, imperial, stainless steel 16 D RM KSW KSW KSW KSW KSW KSW KSW KSW KSW Option: clean room products (= CRP) made of stainless steel 16 on request

13 KF Components KF Components KF to Swagelok dapters, imperial, stainless steel 16 D RZ KSW /4" KSW /8" KSW /2" KSW /4" KSW /8" KSW /2" KSW /4" KSW /8" KSW /2" Option: clean room products (= CRP) made of stainless steel 16 on request. KF to VCR dapters, female or male, stainless steel 16 female male D RZ Female Male KVCR166F-16 KVCR166M /4" KVCR161F-16 KVCR161M /2" KVCR256F-16 KVCR256M /4" KVCR251F-16 KVCR251M /2" KVCR406F-16 KVCR406M /4" KVCR401F-16 KVCR401M /2" Option: clean room products (= CRP) made of stainless steel 16 on request. VCR Compatible gaskets, stainless steel 16 Planar gaskets with or without retainer for sealing VCR compatible connections. Design RZ VCR-1/4-SE-16UHP without retainer 1/4" VCR-1/2-SE-16UHP without retainer 1/2" VCR-1/4-SE-RT-16UHP with retainer 1/4" VCR-1/2-SE-RT-16UHP with retainer 1/2" Option: clean room products (= CRP) on request. -1

14 KF Components KF Components KF Pinch screw connection, stainless steel, FKM seal KF flange adapters for detachable connection of glass and stainless steel tubes. R KF16T KF25T KF25T KF40T D KF Elbows 45, stainless steel S E416KF E425KF E440KF E450KF Option: clean room products (= CRP) made of stainless steel 16 on request. KF Elbows, 90 aluminum stainless steel S luminum Stainless steel 04 Stainless steel 16 E16K E16K-04 E16K E25K E25K-04 E25K E40K E40K-04 E40K E50K-04 E50K Option: clean room products (= CRP) made of stainless steel 16 on request

15 KF Components KF Components KF Tees aluminum stainless steel luminum Stainless steel 04 Stainless steel 16 TE16K TE16K-04 TE16K TE25K TE25K-04 TE25K TE40K TE40K-04 TE40K TE50K-04 TE50K Option: clean room products (= CRP) made of stainless steel 16 on request. S KF Unequal tees, stainless steel S UTE025016K UTE040016K UTE040025K UTE050016K UTE050025K UTE050040K Option: clean room products (= CRP) made of stainless steel 16 on request. KF 4-way crosses aluminum stainless steel luminum Stainless steel 04 Stainless steel 16 X16K X16K-04 X16K X25K X25K-04 X25K X40K X40K-04 X40K X50K-04 X50K Option: clean room products (= CRP) made of stainless steel 16 on request

16 KF Components KF Components KF Reducing 4-way crosses, stainless steel S X25K X40K X40K X50K X50K Option: clean room products (= CRP) made of stainless steel 16 on request. KF 6-way crosses, stainless steel 16 XX16K XX25K XX40K XX50K Option: clean room products (= CRP) made of stainless steel 16 on request

17 KF Components KF Flexible hoses KF Flexible hoses, stainless steel Flexible hoses of stainless steel for flexible connection of KF components. KF connecting piece st. steel 04/16 Flexible hose st. steel 16/16Ti Dynamic bending radii acc. to EN ISO 1080 Base load 10,000 cycles Bending Stainless steel 04 Stainless steel 16 Stainless steel 04 annealed radius FX16K25-04 FX16K25-16 FX16K25N FX16K50-04 FX16K50-16 FX16K50N FX16K75-04 FX16K75-16 FX16K75N FX16K FX16K FX16K100N FX25K25-04 FX25K25-16 FX25K25N FX25K50-04 FX25K50-16 FX25K50N FX25K75-04 FX25K75-16 FX25K75N FX25K FX25K FX25K100N FX40K25-04 FX40K25-16 FX40K25N FX40K50-04 FX40K50-16 FX40K50N FX40K75-04 FX40K75-16 FX40K75N FX40K FX40K FX40K100N FX50K25-04 FX50K25-16 FX50K25N FX50K50-04 FX50K50-16 FX50K50N FX50K75-04 FX50K75-16 FX50K75N FX50K FX50K FX50K100N Option: clean room products (= CRP) made of stainless steel 16 on request. Other lengths on request. KF Braided flexible hoses, stainless steel BFX25K BFX25K BFX40K BFX40K BFX50K BFX50K

18 KF Components KF Flexible hoses KF Hydroformed bellows connectors, stainless steel Hydroformed bellows are applied to reduce vibrations and conduct a vertical stroke. KF connecting piece stainless steel 04/16 Hydroformed bellows stainless steel 16Ti connectors Tolerance length ±5 mm Stainless steel 04 Stainless steel 16 KF16FXB KF25FXB-04 KF25FXB KF40FXB-04 KF40FXB KF50FXB-04 KF50FXB KF16FXB KF25FXB KF40FXB KF50FXB Option: clean room products (= CRP) made of stainless steel 16 on request. Other lengths on request. min -18

19 KF Components KF iquid feedthroughs KF 1-way liquid feedthroughs, stainless steel 16 for liquid for liquid nitrogen iquid iquid nitrogen Vacuum side FKF16PP-16 NFKF16PP tube tube FKF40PP-16 NFKF40PP tube tube FKF40PP-16 NFKF40PP tube tube FKF40PS-16 NFKF40PS tube SW 12 mm FKF40SS-16 NFKF40SS SW 12 mm SW 12 mm Option: clean room products (= CRP) made of stainless steel 16 on request. Other lengths and connections on request. SW (Swagelok compatible adapter) R 2 ir side KF 2-way liquid feedthroughs, stainless steel 16 for liquid for liquid nitrogen iquid iquid nitrogen Vacuum side FKF402PP-16 NFKF402PP tube tube FKF402PS-16 NFKF402PS tube SW 6 mm FKF402SP-16 NFKF402SP SW 6 mm tube Option: clean room products (= CRP) made of stainless steel 16 on request. Other lengths and connections on request. SW (Swagelok compatible adapters) 2 4 ir side -19

20 KF Components KF Glass-to-metal connections KF Glass-to-metal connections, Kodial/Pyrex Flange stainless steel 04 Tolerances R ±1 mm, ± mm Bakeout temperature max. 200 C Bakeout rate 2 to K/min Kodial Pyrex GM-KF16-KG-17 GM-KF16-KP-17-TD GM-KF25-KG-17-TD19 GM-KF25-KP-17-TD GM-KF25-KG-17 GM-KF25-KP GM-KF40-KG-17-TD25 GM-KF40-KP-17-TD GM-KF40-KG-17 GM-KF40-KP Other lengths and versions on request. R -20

21 KF Components KF Viewports KF Viewports with removable O-ring seal, borosilicate and quartz glass (fused silica, SiO2) Description viewport with removable O-ring seal (FKM) Connection type KF flange He leak rate < 1.0E-9 mbar l/s Window material borosilicate glass (Borofloat ) or fused silica (Silux ) Flange material stainless steel 04 Frame material FKM, O-ring Transmission range ca. 0.4 m to 2 m (Borofloat ), ca. 0. m to m (Silux ) Temperature range up to 150 C (aluminum frame up to 120 C) Coating anti-reflective coating possible D 2 Borosilicate Quartz VPKF40B-E-Z VPKF40Q-E-Z VPKF50B-E-Z VPKF50Q-E-Z Option: flange, stainless steel 16. KF Viewports with permanent joint, borosilicate glass Description Connection type He leak rate Window material viewport with permanent windowflange-connection KF flange < 1.0E-10 mbar l/s borosilicate glass (Borofloat ) Flange material stainless steel 04 Frame material Kovar Transmission range ca. 0.4 m to 2 m Temperature range up to 150 C Max. heating and cooling K/min rate VPKF16B VPKF25B VPKF40B VPKF50B D

22 KF Components KF Seals KF O-rings, elastomer Temperature range -10 C to 150 C D2 FKM treated FKM vacuum baked* KF10VR-BEH KF10VR-VB KF16VR-BEH KF16VR-VB KF25VR-BEH KF25VR-VB KF40VR-BEH KF40VR-VB KF50VR-BEH KF50VR-VB * Option: low outgassing and clean room products (= CRP) on request. Chemically resistant KF O-rings, treated, FKM The c irrevers have a Vacuum baked KF O-rings, FKM The ratio and the -22

23 KF Components KF Seals KF O-rings, elastomer O-rings for KF centering rings. Temperature range NBR -10 C to 100 C Temperature range FKM -10 C to 150 C Temperature range MVQ -55 C to 200 C D2 NBR FKM MVQ KF10NR KF10VR KF16NR KF16VR KF16SR KF25NR KF25VR KF25SR KF40NR KF40VR KF40SR KF50NR KF50VR Other sealing materials on request KF Centering rings without O-rings, stainless steel KF Centering rings, stainless steel, without O-ring. D D2 St. steel 04 St. steel 16 KF16CRS-04 KF16CRS KF25CRS-04 KF25CRS KF40CRS-04 KF40CRS KF50CRS-04 KF50CRS Option: clean room products (= CRP) made of stainless steel 16 on request. KF Blank centering rings without O-rings, stainless steel 16 Closed KF centering rings made of stainless steel to introduce apertures, without O-ring. D D2 KF16CRBS KF25CRBS KF40CRBS KF50CRBS Option: clean room products (= CRP) made of stainless steel 16 on request. -2

24 KF Components KF Seals KF Edge seals Temperature range up to 150 C aluminum Temperature range PTFE up to 120 C Connecting elements KF clamp chains luminum PTFE KF10/16MS KF10/16TS 16 2 KF20/25MS KF20/25TS KF2/40MS KF2/40TS KF50MS KF50TS D KF Centering rings, NBR Temperature range -10 C to 100 C D D2 luminum Stainless steel KF10NCR KF10SNCR KF16NCR KF16SNCR KF25NCR KF25SNCR KF40NCR KF40SNCR KF50NCR KF50SNCR KF Centering rings, FKM Temperature range -10 C to 150 C D D2 luminum Stainless steel 04 KF10VCR KF10SVCR KF16VCR KF16SVCR KF25VCR KF25SVCR KF40VCR KF40SVCR KF50VCR KF50SVCR

25 KF Components KF Seals KF Centering rings, FKM, stainless steel 16 Temperature range -10 C to 150 C Option low-outgassing or with improved chemical resistance (see page -22) D D2 FKM FKM treated FKM vacuum baked KF10SVCR-16 KF10SVCR-BEH-16 KF10SVCR-VB KF16SVCR-16 KF16SVCR-BEH-16 KF16SVCR-VB KF25SVCR-16 KF25SVCR-BEH-16 KF25SVCR-VB KF40SVCR-16 KF40SVCR-BEH-16 KF40SVCR-VB KF50SVCR-16 KF50SVCR-BEH-16 KF50SVCR-VB * Option: low outgassing and clean room products (= CRP) on request. KF Mesh centering rings, stainless steel 04 Temperature range NBR -10 C to 100 C Temperature range FKM -10 C to 150 C Mesh size 1 mm Wire diameter 0.2 mm KF Centering rings with sintered metal screen, stainless steel 04 D D2 NBR FKM KF16MCR1N-04 KF16MCR1V KF25MCR1N-04 KF25MCR1V KF40MCR1N-04 KF40MCR1V KF50MCR1N-04 KF50MCR1V Filtration of liquids and gases Centering ring stainless steel 0 Sintered metal stainless steel 16 Temperature range 0 C to 40 C Pore width 20 μm Pressure difference 20 mbar at 0 C D2 KF16FMCRV KF25FMCRV KF40FMCRV KF50FMCRV D -25

26 KF Components KF Seals KF Outer centering rings, aluminum Temperature range NBR -10 C to 100 C Temperature range FKM -10 C to 150 C D NBR FKM KF16ZRN KF16ZRV KF25ZRN KF25ZRV KF40ZRN KF40ZRV KF50ZRN KF50ZRV KF Trapped centering rings with retaining ring, NBR Temperature range -10 C to 100 C Outer centering ring aluminum Retaining ring stainless steel 04 D D2 KF16TCRN KF25TCRN KF40TCRN KF50TCRN KF Trapped centering rings with retaining ring, FKM Temperature range -10 C to 150 C Outer centering ring aluminum / PTFE Retaining ring stainless steel / PTFE D D2 lu/stainless steel 04 lu/stainless steel 16 PTFE/PTFE KF16TCRV-04 KF16TCRV-16 KF16TVCR KF25TCRV-04 KF25TCRV-16 KF25TVCR KF40TCRV-04 KF40TCRV-16 KF40TVCR KF50TCRV-04 KF50TCRV-16 KF50TVCR

27 KF Components KF Seals KF Reducing centering rings, aluminum Temperature range NBR -10 C to 100 C Temperature range FKM -10 C to 150 C 2 D D2 D NBR FKM KF10/16NRCR KF10/16VRCR KF20/25NRCR KF20/25VRCR KF2/40NRCR KF2/40VRCR KF dapter centering rings, stainless steel 04 Temperature range NBR -10 C to 100 C Temperature range FKM -10 C to 150 C 2 D D2 D NBR FKM KF10/16SNRCR-04 KF10/16SVRCR KF20/25SNRCR-04 KF20/25SVRCR KF2/40SNRCR-04 KF2/40SVRCR

28 KF Components KF Connecting elements KF Clamp chains, polyamide Temperature up to 100 C Color black Spec. resistance 1,0E15 Ohmcm Dielectric strength 26 kv/mm Chain links polyamide (5% glass fiber content) ock stainless steel and aluminum Bolt stainless steel Suitable gaskets elastomer D D2 R WH WH WH WH KF Clamp chains,aluminum alloy Temperature range up to 150 C Chain links lmgsi1 ock stainless steel Bolt stainless steel Suitable gaskets elastomer, aluminum, copper D D2 R Closing moment [Nm] X X X X Please note the closing torque during over pressure applications

29 KF Components KF Connecting elements Quick CF Clamp chains VaCFix, stainless steel Quick CF Clamp chains for quick and space-saving mounting of KF flange connection Material Suitable flanges Suitable gaskets Mounting stainless steel, non-magnetic QCF flanges KF flanges metal edge gaskets O-ring gaskets with torque wrench D D2 R Number of links SW Tightening torque [Nm] Weight [g] XS XS Other sizes in section Quick-CF components. Option: clean room products (= CRP) on request. Clean room compatible clamp chains require a higher tightening torque. KF Bulkhead clamps, aluminum Incl. screws BHC yes BHC yes BHC yes BHC yes BHC16K no BHC25K no BHC40K no BHC50K no D C 2 Option: clean room compatible products (= CRP) on request. Used screws: ISO4017 M5, length 16 mm (BHC16-40), length 18 mm (BHC50) -29

30 KF Components KF Connecting elements ISO Claw clamps, aluminum KFC C Number of required clamps KF Clamp rings, aluminum Temperature range -10 C to 150 C D D2 KF16C KF25C KF40C KF50C Option: clean room products (= CRP) on request. KF Clamp rings, stainless steel Temperature range -10 C to 125 C D KF16CR KF25CR 25 6 KF40CR KF50CR KF Clamp rings for metal seals, aluminum Temperature range up to 200 C D KF10/16MSC KF20/25MSC KF2/40MSC KF50MSC

31 KF Components KF Connecting elements KF Clamp rings for metal seals, stainless steel 04 D2 KF10/16MSC KF20/25MSC , KF2/40MSC , KF50MSC Option: clean room products (= CRP) on request. D -1

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36 ISO Components ISO Flanges ISO-K Clow clamp blank flanges, stainless steel Stainless steel 04 Stainless steel 16* ISO6BK-04 ISO6BK ISO80BK-04 ISO80BK ISO100BK-04 ISO100BK ISO160BK-04 ISO160BK ISO200BK-04 ISO200BK ISO250BK-04 ISO250BK ISO20BK-04 ISO20BK ISO400BK ISO500BK ISO60BK * Option: clean room products (= CRP) made of stainless steel 16 on request. ISO Blank flanges, conical, stainless steel 04 D KF6BS KF80BS KF100BS With ISO and Quick CF clamp chains mountable D ISO-F Blank flanges, stainless steel D D2 ISO6FBK ISO80FBK ISO100FBK ISO160FBK ISO200FBK ISO250FBK ISO20FBK Option: stainless steel 16. Option: clean room products (= CRP) made of stainless steel 16 on request. -6

37 ISO Components ISO Flanges ISO-F Chamber flanges, stainless steel Flange stainless steel 16 O-ring stainless steel Screws DIN 7964KE, 2 Temperature range -10 C to 150 C pplication wall mounting D M ISOF40KM M6 ISOF6KM M8 ISOF100KM M8 ISOF160KM M10 ISO-K Welding flanges, stainless steel D D2 R 2 Stainless steel 04 Stainless steel 16 ISO6B70-04 ISO6B ISO6B76-04 ISO6B ISO80B85-04 ISO80B ISO80B89-04 ISO80B ISO100B ISO100B ISO100B ISO100B ISO160B ISO160B ISO160B ISO160B ISO200B ISO200B ISO200B ISO200B ISO250B ISO250B ISO250B ISO250B ISO20B24-04 ISO20B ISO400B ISO500B * Option: clean room products (= CRP) made of stainless steel 16 on request. Welding flanges made of stainless steel 04 on request. -7

38 ISO Components ISO Flanges ISO-K Bored flanges with reinforced tubulation, stainless steel 16 Reinforced ISO-K Flanges for welding to components, to reduce welding distortion ISO160S ISO200S ISO250S ISO20S D D2 R 2 Option: clean room products (= CRP) made of stainless steel 16 on request. ISO Bored flanges, conical, stainless steel 04 R KF6B KF80B KF100B With ISO and Quick CF clamp chains mountable D ISO-F Bored flanges, stainless steel 04 D D2 D R ISO6F ISO80F ISO100F ISO160F ISO200F ISO250F ISO20F Option: stainless steel 16. Option: clean room products (= CRP) made of stainless steel 16 on request. -8

39 ISO Components ISO Flanges ISO Rotatable bolt rings with retaining ring, stainless steel 04 D2 D ISO6R ISO80R ISO100R ISO160R ISO200R ISO250R ISO20R Option: clean room products (= CRP) on request. D ISO Replacement retaining rings for rotatable bolt rings, stainless steel 04 ccessories for ISO6RR-04 ISO6R ISO80RR-04 ISO80R ISO100RR-04 ISO100R ISO160RR-04 5 ISO160R ISO200RR-04 5 ISO200R ISO250RR-04 5 ISO250R ISO20RR-04 5 ISO20R Option: clean room products (= CRP) on request. ISO-K-F Flange caps, plastics Pack size ISO6CP 6 10 ISO80CP ISO100CP ISO160CP ISO200CP ISO250CP ISO20CP

40 ISO Components ISO Components ISO Tube, 1m length, stainless steel Delivery conditions according to DIN EN engthwise welded Weld seam factor 1.0 Inside and outside pickled RI R St. steel 04 St. steel 16 R04-70x2.0-1 R16-70x R04-85x2.0-1 R16-85x R04-104x2.0-1 R16-104x R04-154x2.0-1 R16-154x R04-204x2.0-1 R16-204x Other lengths on request. Quality according to DIN 11850/11866 on request Surface finish inside Ra < 0.8 μm weld seam area Ra < 1.6 μm ISO-K Claw clamp tubulations (half nipples), stainless steel ISO-K Straight connectors (full nipples), stainless steel 16 R ISO6TU ISO6TU ISO80TU ISO80TU ISO100TU ISO100TU ISO160TU ISO160TU ISO200TU ISO200TU ISO250TU ISO20TU Option: clean room products (= CRP) made of stainless steel 16 on request. Other lengths and tube sizes on request. Option: stainless steel 04. ISO6SC ISO80SC ISO100SC ISO160SC ISO200SC ISO250SC Option: clean room products (= CRP) on request. Other lengths and stainless steel 04 on request

41 ISO Components ISO Components ISO-K Straight connectors with lateral KF ports, stainless steel 16 S2 S ISO6SC4016K ISO100SC4016K ISO160SC4016K Option: clean room products (= CRP) made of stainless steel 16 on request. ISO-K Tubulated reducing adapters, conical, stainless steel D D2 ISO80R6/CO ISO100R6/CO ISO100R80/CO ISO160R6/CO ISO160R100/CO Option: clean room products (= CRP) made of stainless steel 16 on request. ISO-K Tubulated reducing adapters, stainless steel Stainless steel 04 Stainless steel 16* ISO100R6-04 ISO100R ISO160R6-04 ISO160R ISO160R ISO160R ISO200R ISO200R ISO250R ISO250R * Option: clean room products (= CRP) made of stainless steel 16 on request. Other lengths on request

42 ISO Components ISO Components ISO-K to KF dapters, stainless steel Stainless steel 04 Stainless steel 16* SK SK SK SK SK SK SK SK * Option: clean room products (= CRP) made of stainless steel 16 on request. Other lengths on request. ISO-K to KF dapters, conical, stainless steel D D2 SK06040/CO SK06050/CO SK080040/CO SK080050/CO SK100040/CO SK100050/CO Option: clean room products (= CRP) made of stainless steel 16 on request. ISO-K to CF dapters, stainless steel S S S S S Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other lengths on request. Option: stainless steel

43 ISO Components ISO Components ISO-K Elbows 90, stainless steel Stainless steel 04 Stainless steel 16* Design ISO6E-04 ISO6E swept ISO80E-04 ISO80E swept ISO100E-04 ISO100E swept ISO160E-04 ISO160E mitred ISO200E-04 ISO200E mitred * Option: clean room products (= CRP) made of stainless steel 16 on request. S ISO-K Tees, stainless steel Stainless steel 04 Stainless steel 16* ISO6TE-04 ISO6TE ISO80TE-04 ISO80TE ISO100TE-04 ISO100TE ISO160TE-04 ISO160TE ISO200TE-04 ISO200TE ISO250TE-04 ISO250TE * Option: clean room products (= CRP) made of stainless steel 16 on request. S -4

44 ISO Components ISO Components ISO-K Unequal tees, stainless steel Stainless steel 04 Stainless steel 16* ISO100TE6-04 ISO100TE ISO160TE6-04 ISO160TE ISO160TE ISO160TE * Option: clean room products (= CRP) made of stainless steel 16 on request. 2 2 S ISO-K to KF Reducing tees, stainless steel Stainless steel 04 Stainless steel 16* ISO6TE25-04 ISO6TE ISO6TE40-04 ISO6TE ISO100TE40-04 ISO100TE * Option: clean room products (= CRP) made of stainless steel 16 on request. 2 2 S -44

45 ISO Components ISO Components ISO-K 4-way crosses, stainless steel Stainless steel 04 Stainless steel 16* ISO6X-04 ISO6X ISO80X-04 ISO80X ISO100X-04 ISO100X ISO160X-04 ISO160X ISO200X-04 ISO200X ISO250X-04 ISO250X * Option: clean room products (= CRP) made of stainless steel 16 on request. S ISO-K Unequal 4-way crosses, stainless steel Stainless steel 04 Stainless steel 16* ISO100X6-04 ISO100X ISO160X6-04 ISO160X ISO160X ISO160X * Option: clean room products (= CRP) made of stainless steel 16 on request. 2 2 S -45

46 ISO Components ISO Components ISO-K to KF Reducing crosses, stainless steel Stainless steel 04 Stainless steel 16* ISO6X25-04 ISO6X ISO6X40-04 ISO6X ISO100X40-04 ISO100X * Option: clean room products (= CRP) made of stainless steel 16 on request. 2 2 S ISO-K 6-way crosses, stainless steel S ISO6XX ISO80XX ISO100XX ISO160XX ISO200XX ISO250XX Option: clean room products (= CRP) made of stainless steel 16 on request. Option: stainless steel

47 ISO Components ISO Flexible hoses ISO-K Flexible hoses, stainless steel 04 Flexible hoses of stainless steel for flexible connection of ISO-K components. Material stainless steel 04 Dynamic bending radii acc. to EN ISO 1080 Base load 10,000 cycles Bending radius ISO6FX ISO6FX ISO6FX ISO6FX ISO80FX ISO80FX ISO80FX ISO80FX ISO100FX ISO100FX ISO100FX ISO100FX ISO160FX ISO160FX ISO160FX ISO160FX Option: stainless steel 16. Option: clean room products (= CRP) made of stainless steel 16 on request. ISO-K Hydroformed bellows connectors, stainless steel 04 Flange stainless steel 04 Bellow st. steel 16 / 16Ti Tolerances ±5 mm min ISO6FXB ISO80FXB ISO100FXB ISO160FXB ISO200FXB ISO250FXB ISO20FXB Option: stainless steel 16. Option: clean room products (= CRP) made of stainless steel 16 on request

48 ISO Components ISO Viewports Viewports with removable O-ring seal on ISO-K Flange, flange mounting with clamps He leak rate < 1.0E-9 mbar l/s Window material borosilicate glass (Borofloat ) or fused silica (Silux ) Flange material stainless steel 04 Transmission range ca. 0.4 m to 2 m (Borofloat ), ca. 0. m to m (Silux ) Temperature range up to 150 C (aluminum frame up to 120 C) Coating anti-reflective coating possible Borosilicate glass Quartz glass VPISOK6B-E-Z VPISOK6Q-E-Z VPISOK100B-E-Z VPISOK100Q-E-Z VPISOK160B-E-Z VPISOK160Q-E-Z VPISOK200B-E-Z VPISOK200Q-E-Z Option: flange, stainless steel 16. Viewports with removable O-ring seal on ISO-K flange, wall mounting with clamps D 2 He leak rate < 1.0E-9 mbar l/s Window material borosilicate glass (Borofloat ) or fused silica (Silux ) Flange material stainless steel 04 Transmission range ca. 0.4 m to 2 m (Borofloat ), ca. 0. m to m (Silux ) Temperature range up to 150 C (aluminum frame up to 120 C) Coating anti-reflective coating possible Borosilicate glass Quartz glass VPISOK6B-E VPISOK6Q-E VPISOK100B-E VPISOK100Q-E VPISOK160B-E VPISOK160Q-E VPISOK200B-E VPISOK200Q-E Option: flange, stainless steel 16. D

49 ISO Components ISO Viewports Viewports with removable O-ring seal on ISO-F flange, wall mounting with screws He leak rate Window material Flange material Transmission range < 1.0E-9 mbar l/s borosilicate glass (Borofloat ) or fused silica (Silux ) aluminum, anodized ca. 0.4 m to 2 m (Borofloat ), ca. 0. m to m (Silux ) Temperature range up to 150 C (aluminum frame up to 120 C) Coating anti-reflective coating possible D 2 Borosilicate glass Quartz glass VPISOF6B-E VPISOF6Q-E VPISOF100B-E VPISOF100Q-E VPISOF160B-E VPISOF160Q-E VPISOF200B-E VPISOF200Q-E Viewports with permanent joint, borosilicate glass He leak rate < 1.0E-10 mbar l/s Window material borosilicate glass (Corning 7056) Flange material stainless steel 04 Frame material Kovar Transmission range ca. 0.4 m to 2 m Temperature range up to 150 C Max. heating and cooling K/min rate D 2 VPISOK6B VPISOK100B VPISOK160B VPISOK200B VPISOK250B

50 ISO Components ISO Seals ISO O-rings, elastomer Temperature range -10 C to 150 C D FKM treated FKM vac. baked* ISO6VR-BEH ISO6VR-VB ISO80VR-BEH ISO80VR-VB ISO100VR-BEH ISO100VR-VB ISO160VR-BEH ISO160VR-VB ISO200VR-BEH ISO200VR-VB ISO250VR-BEH ISO250VR-VB ISO20VR-BEH ISO20VR-VB * Option: low outgassing and clean room products (= CRP) on request. Chemically resistant ISO O-rings, treated, FKM The c irrevers have a Vacuum baked ISO O-rings, FKM The rat and the order to -50

51 ISO Components ISO Seals ISO O-rings, elastomer O-rings for ISO centering rings. Temperature range NBR -10 C to 100 C Temperature range FKM -10 C to 150 C Temperature range MVQ -55 C to 200 C D NBR FKM MVQ ISO6NR ISO6VR ISO6SR ISO80NR ISO80VR ISO80SR ISO100NR ISO100VR ISO100SR ISO160NR ISO160VR ISO200NR ISO200VR ISO250NR ISO250VR ISO20NR ISO20VR * 7 * Dimensions can vary ISO Centering rings, NBR Temperature range -10 C to 100 C D D2 2 luminum Stainless steel ISO6NCR ISO6SNCR ISO80NCR ISO80SNCR ISO100NCR ISO100SNCR ISO160NCR ISO160SNCR ISO200NCR ISO200SNCR ISO250NCR ISO250SNCR ISO20NCR ISO20SNCR * 15* * Dimensions can vary arger nominal diameters on request

52 ISO Components ISO Seals ISO Outer ring, aluminum Outer ring, aluminum profile, with stainless steel spring to fix O-rings on ISO centering rings. ISO6SCRT/ ISO80SCRT/ ISO100SCRT/ ISO160SCRT/ ISO200SCRT/ ISO250SCRT/ ISO Centering rings, stainless steel 16 ISO Centering rings, stainless steel, without O-ring. D D2 2 ISO6CRS ISO100CRS ISO160CRS ISO200CRS ISO250CRS ISO20CRS * 15* * Dimensions can vary Option: clean room products (= CRP) made of stainless steel 16 on request. ISO Centering rings, stainless steel 16, unslotted ISO Centering rings, stainless steel, unslotted, without O-ring. D D2 2 ISO6CRSU ISO80CRSU ISO100CRSU ISO160CRSU Option: clean room products (= CRP) made of stainless steel 16 on request

53 ISO Components ISO Seals ISO Centering rings, FKM Temperature range -10 C to 150 C D D2 2 luminum Stainless steel 04 ISO6VCR ISO6SVCR ISO80VCR ISO80SVCR ISO100VCR ISO100SVCR ISO160VCR ISO160SVCR ISO200VCR ISO200SVCR ISO250VCR ISO250SVCR ISO20VCR ISO20SVCR * 15* * Dimensions can vary arger nominal diameters on request. ISO Centering rings, FKM, stainless steel 16 Temperature range -10 C to 150 C D D2 2 FKM* FKM treated FKM vacuum baked* ISO6SVCR-16 ISO6SVCR-BEH-16 ISO6SVCR-VB ISO80SVCR-16 ISO80SVCR-BEH-16 ISO80SVCR-VB ISO100SVCR-16 ISO100SVCR-BEH-16 ISO100SVCR-VB ISO160SVCR-16 ISO160SVCR-BEH-16 ISO160SVCR-VB ISO200SVCR-16 ISO200SVCR-BEH-16 ISO200SVCR-VB ISO250SVCR-16 ISO250SVCR-BEH-16 ISO250SVCR-VB ISO20SVCR-16 ISO20SVCR-BEH-16 ISO20SVCR-VB * 15* * Option: low outgassing and clean room products (= CRP) on request. * Dimensions can vary -5

54 ISO Components ISO Seals ISO Centering rings with outer ring, NBR Temperature range -10 C to 100 C D D2 2 lu/lu lu/stainless steel ISO6NCRT ISO6SNCRT ISO80NCRT ISO80SNCRT ISO100NCRT ISO100SNCRT ISO160NCRT ISO160SNCRT ISO200NCRT ISO200SNCRT ISO250NCRT ISO250SNCRT ISO20NCRT ISO20SNCRT * 18* * Dimensions can vary arger nominal diameters on request. ISO Centering rings with outer ring, FKM Temperature range -10 C to 150 C D D2 2 lu/lu lu/stainless steel 04 lu/stainless steel 16 ISO6VCRT ISO6SVCRT-04 ISO6SVCRT ISO80VCRT ISO80SVCRT-04 ISO80SVCRT ISO100VCRT ISO100SVCRT-04 ISO100SVCRT ISO160VCRT ISO160SVCRT-04 ISO160SVCRT ISO200VCRT ISO200SVCRT-04 ISO200SVCRT ISO250VCRT ISO250SVCRT-04 ISO250SVCRT ISO20VCRT ISO20SVCRT-04 ISO20SVCRT ISO400VCRT ISO400SVCRT-04 ISO400SVCRT * Dimensions can vary -54

55 ISO Components ISO Seals ISO Mesh centering rings, stainless steel, FKM Temperature range -10 C to 150 C Mesh size MCRV 4 mm Mesh size MCR1V 1 mm Wire diameter MCRV 0.9 mm Wire diameter MCR1V 0. mm D MCRV MCR1V ISO6MCRV ISO6MCR1V 6 70 ISO100MCRV ISO100MCR1V ISO160MCRV ISO160MCR1V ISO Connecting elements ISO Clamp chains, aluminum Temperature range up to 150 C Chain links lmgsi1 ock stainless steel Bolt stainless steel Suitable flanges conical ISO flanges Suitable gaskets elastomer D D2 R X X X

56 ISO Components ISO Connecting elements QCF Clamp chains VaCFix, stainless steel Material Suitable flanges Suitable gaskets Mounting stainless steel, non-magnetic QCF flanges conical ISO flanges metal edge gaskets O-ring gaskets with torque wrench XS6 XS100V D D2 R Number of links Tightening torque [Nm] Weight [g] XS XS100V SW Other sizes in section Quick-CF components. Option: clean room products (= CRP) on request. Clean room compatible clamp chains require a higher tightening torque. Set of hex head screws, for ISO flanges with through-holes, stainless steel Screw Nut Washer ISO 4014, 4017, 2 ISO 402, 2 ISO 7089, 2 Number of drilling holes Size of screws FK-ISO6 6 4 M8 x 40 mm FK-ISO M8 x 40 mm FK-ISO M8 x 40 mm FK-ISO M10 x 50 mm FK-ISO M10 x 50 mm FK-ISO M10 x 50 mm FK-ISO M12 x 60 mm -56

57 ISO Components ISO Connecting elements ISO Double claw clamps, aluminum Double claw clamps usable with centering ring. max min ISO6/100DC M ISO160/250DC M ISO20/500DC M M ISO Double claw clamps Double claw clamps usable with centering ring. Mild steel, zinc plated Stainless steel* ISO6/250DCMS ISO6/250DCSS M ISO20/500DCMS ISO20/500DCSS M ISO60DCMS - 60 M * Option: clean room products (= CRP) on request. M max min -57

58 ISO Components ISO Connecting elements ISO Claw clamps Claw clamps for tapped holes usable with centering ring. luminum Mild steel, zinc plated Stainless steel* ISO6/100WC ISO6/100WCMS ISO6/100WCSS M ISO160/250WC ISO160/250WCMS ISO160/250WCSS M ISO20/500WC ISO20/500WCMS ISO20/500WCSS M ISO60WCMS ISO60WCSS 60 M * Option: clean room products (= CRP) on request. M 2 ISO Claw clamps, with nuts Claw clamps for through bolt holes usable with centering ring. luminum Mild steel, zinc plated ISO6/100WCN ISO6/100WCN M ISO160/250WCN ISO160/250WCN M ISO20/500WCN ISO20/500WCN M M 2 ISO Claw clamps, mild steel, zinc plated Claw clamps for ground plates usable with O-ring without centering ring. ISO6/100WCO M ISO160/250WCO M ISO20/500WCO M M

59 )

60

61

62 CF Components CF Flanges CF Blank flanges, fixed, stainless steel Stainless steel 04 Stainless steel 16 Stainless steel 16N-ESR - F F16-16 F16-16NS F40-04 F40-16 F40-16NS F6-04 F6-16 F6-16NS F F F100-16NS F F F160-16NS F F F200-16NS F F F250-16NS F00-04 F00-16 F00-16NS F50-04 F50-16 F50-16NS F F F400-16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Flanges according to STM E274/E274M-10 on request. Option: with tapped holes Flanges made of stainless steel 04 on request. Quick CF Blank flanges, conical, stainless steel D Stainless steel 04 Stainless steel 16 Stainless steel 16N-ESR QCF16-04 QCF16-16 QCF16-16NS QCF40-04 QCF40-16 QCF40-16NS QCF6-04 QCF6-16 QCF6-16NS QCF QCF QCF100-16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Flanges made of stainless steel 04 on request

63 CF Components CF Flanges CF Blank flanges, rotatable, stainless steel Stainless steel 04 Stainless steel 16 Stainless steel 16N-ESR - F10R F16R-16 F16R-16NS F40R-04 F40R-16 F40R-16NS F6R-04 F6R-16 F6R-16NS F100R-04 F100R-16 F100R-16NS F160R-04 F160R-16 F160R-16NS F200R-04 F200R-16 F200R-16NS F250R-04 F250R-16 F250R-16NS F00R-04 F00R-16 F00R-16NS F50R-04 F50R-16 F50R-16NS F400R-04 F400R-16 F400R-16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Flanges according to STM E274/E274M-10 on request. Option: with tapped holes Flanges made of stainless steel 04 on request. CF Double sided blank flanges, stainless steel D F16DB-04 F16DB-16NS F40DB-04 F40DB-16NS F6DB-04 F6DB-16NS F100DB-04 F100DB-16NS F160DB-04 F160DB-16NS St. steel 04 St. steel 16N-ESR Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Flanges made of stainless steel 04 on request. -6

64 CF Components CF Flanges CF Bored flanges, fixed, stainless steel Stainless steel 04 Stainless steel 16 Stainless steel 16N-ESR - F10B F16B19-16 F16B19-16NS F40B41-04 F40B41-16 F40B41-16NS F40B42-04 F40B42-16 F40B42-16NS F6B6-04 F6B6-16 F6B6-16NS F6B70-04 F6B70-16 F6B70-16NS F100B F100B F100B101-16NS F100B F100B F100B104-16NS F160B F160B F160B152-16NS F160B F160B F160B154-16NS F200B F200B F200B204-16NS F250B F250B F250B254-16NS F00B06-04 F00B06-16 F00B06-16NS F50B56-04 F50B56-16 F50B56-16NS F400B F400B F400B406-16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Flanges according to STM E274/E274M-10 on request. Option: with tapped holes Flanges made of stainless steel 04 on request. Quick CF Bored flanges, conical, stainless steel R D 2 Stainless steel 04 Stainless steel 16 Stainless steel 16N-ESR QCF16B19-04 QCF16B19-16 QCF16B19-16NS QCF40B8-04 QCF40B8-16 QCF40B8-16NS QCF40B41-04 QCF40B41-16 QCF40B41-16NS QCF6B6-16NS QCF6B70-16NS QCF100B QCF100B QCF100B101-16NS QCF100B QCF100B QCF100B104-16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Flanges made of stainless steel 04 on request. D R

65 CF Components CF Flanges CF Bored flanges, rotatable, stainless steel Stainless steel 04 Stainless steel 16 Stainless steel 16N-ESR - F10RB F16RB19-16 F16RB19-16NS F40RB41-04 F40RB41-16 F40RB41-16NS F40RB42-04 F40RB42-16 F40RB42-16NS F6RB6-04 F6RB6-16 F6RB6-16NS F6RB70-04 F6RB70-16 F6RB70-16NS F100RB F100RB F100RB101-16NS F100RB F100RB F100RB104-16NS F160RB F160RB F160RB152-16NS F160RB F160RB F160RB154-16NS F200RB F200RB F200RB204-16NS F250RB F250RB F250RB254-16NS F00RB06-04 F00RB06-16 F00RB06-16NS F50RB56-04 F50RB56-16 F50RB56-16NS F400RB F400RB F400RB406-16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Flanges according to STM E274/E274M-10 on request. Quick CF flanges can you find on page -92 Option: with tapped holes Flanges made of stainless steel 04 on request. CF Double sided bored flanges, stainless steel R D 2 F16D16-04 F16D16-16NS F40D8-04 F40D8-16NS F6D66-04 F6D66-16NS F100D F100D100-16NS F160D F160D150-16NS St. steel 04 St. steel 16N-ESR Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Option: radial connections Flanges made of stainless steel 04 on request. D -65

66 CF Components CF Flanges CF Welded flanges, stainless steel Flanges with tapped holes for flush welding to tubes of the same diameter F16WF F40WF F6WF F100WF F160WF Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Flanges made of stainless steel 04 on request. D CF Reducer flanges, stainless steel Orientation of bolt circle according to ISO 980-2:2008 Stainless steel Stainlees steel 16N-ESR Z M 10 Z M4 1 Z Z NS M4 1 Z Z NS M4 17 Z Z NS M6 17 Z Z NS M6 20 Z Z NS M8 20 Z Z NS M6 22 Z Z NS M8 22 Z Z NS M8 22 Z Z NS M8 25 Z Z NS M8 25 Z Z NS M8 28 Z Z NS M8 28 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. 2 D M -66

67 CF Components CF Flanges Quick CF to CF Reducer flanges, stainless steel Z040016QCF-04 Z040016QCF-16NS M4 Z06040QCF-04 Z06040QCF-16NS M6 Z100016QCF-04 Z100016QCF-16NS M4 Z100040QCF-04 Z100040QCF-16NS M6 Z10006QCF-04 Z10006QCF-16NS M8 Stainless steel 04 Stainlees steel 16N-ESR Option: clean room products (= CRP) made of stainless steel 16/16NS on request. 2 D M CF Flange caps, plastics Pack size CF16CP CF40CP CF6CP 6 10 CF100CP CF160CP CF200CP CF250CP CF00CP 00 1 Quick CF Flange caps, plastics QCF16CP QCF40CP QCF6CP QCF100CP Packing unit 10 pieces

68 CF Components CF Components CF Tubes, 1m length, stainless steel Delivery conditions according to DIN EN longitudinally welded weld seam factor 1.0 inside and outside pickled RI R St. steel 04 St. steel 16 R04-19x1.5-1 R16-19x R04-41x1.5-1 R16-41x R04-70x2.0-1 R16-70x R04-104x2.0-1 R16-104x R04-154x2.0-1 R16-154x R04-204x2.0-1 R16-204x Other lengths on request. Quality according to DIN 11850/11866 on request Surface finish inside Ra < 0.8 μm weld seam area Ra < 1.6 μm CF Tubulations, rotatable, stainless steel Stainless steel Stainlees steel 16N-ESR TU10R TU16R TU16R NS TU40R TU40R NS TU6R TU6R TU6R NS TU100R TU100R NS TU160R TU160R NS TU200R TU200R NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other lengths and nominal diameter on request. Options: with threaded holes, with fixed flanges, stainless steel 16 R -68

69 CF Components CF Components Quick CF Flanges with tubulation, stainless steel R TU16QCF TU40QCF TU6QCF NS TU100QCF Option: stainless steel 16, 16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other lengths on request. CF Straight connectors, stainless steel, 1 flange rotatable SC16R SC40R SC6R SC100R SC160R SC200R Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other lengths on request. Options: with threaded holes, with fixed flanges, stainless steel 16 Quick CF Connection, stainless steel SC16QCF SC40QCF SC6QCF-16NS SC100QCF Option: stainless steel 16, 16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other lengths on request

70 CF Components CF Components CF Tubulated reducing adapters, small flange rotatable, stainless steel T040016R T06016R T06040R T100040R T10006R T16006R T160100R Options: with threaded holes, with fixed flanges, stainless steel 16 Option: clean room products (= CRP) made of stainless steel 16 on request. Other lengths on request. CF to Quick CF dapters, stainless steel 04 2 QCF QCF QCF QCF Option: clean room products (= CRP) made of stainless steel 16/16NS on request. CF to KF dapters, stainless steel K K K K K K Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other lengths on request. Options: stainless steel 04, other variations -70

71 CF Components CF Components CF to ISO-K dapters, stainless steel S S S S S Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Options: stainless steel 04, other variations CF to VCR Compatible adapters, stainless steel female male Flange stainless steel 04 (16 of 16) dapter stainless steel 16 D RZ Female Male F16VCR6F-16 F16VCR6M /4" F16VCR1F-16 F16VCR1M /2" F40VCR6F-04 F40VCR6M /4" F40VCR9F-04 F40VCR9M /8" F40VCR1F-04 F40VCR1M /2" F40VCR19F-04 F40VCR19M /4" F40VCR25F-04 F40VCR25M " Option: clean room products (= CRP) made of stainless steel 16/16NS on request. VCR Compatible gaskets, stainless steel 16 Plane gaskets with or without mounting for sealing of VCR compatible connections Design RZ VCR-1/4-SE-16UHP without retainer 1/4" VCR-1/2-SE-16UHP without retainer 1/2" VCR-1/4-SE-RT-16UHP with retainer 1/4" VCR-1/2-SE-RT-16UHP with retainer 1/2" Option: clean room products (= CRP) made of stainless steel 16/16NS on request

72 CF Components CF Components CF to Swagelok compatibe adapters, metric, stainless steel Flange stainless steel 04 (16 of 16) dapter stainless steel 16 CF to Swagelok compatibe adapters, imperial, stainless steel D RM F16SW6M F16SW8M F16SW10M F40SW6M F40SW8M F40SW10M Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Flange stainless steel 04 (16 of 16) dapter stainless steel 16 CF Elbows 90, 2 flanges rotatable, stainless steel D RZ F16SW /4" F40SW /4" F40SW /8" F40SW /2" Option: clean room products (= CRP) made of stainless steel 16/16NS on request. S St. steel St. steel 16N-ESR E16R-16 E16R-16NS E40R-04 E40R-16NS E6R-04 E6R-16NS E100R-04 E100R-16NS E160R-04 E160R-16NS E200R-04 E200R-16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Components with fixed flanges on request

73 CF Components CF Components Quick CF Elbows 90, stainless steel S E16QCF E40QCF E6QCF-16NS E100QCF Option: stainless steel 16, 16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. CF Tees, 2 flanges rotatable, stainless steel Orientation of bolt holes according to ISO 980- S Stainless steel 04 Stainless steel 16N-ESR TE16RS-16 TE16RS-16NS TE40RS-04 TE40RS-16NS TE6RS-04 TE6RS-16NS TE100RS-04 TE100RS-16NS TE160RS-04 TE160RS-16NS TE200RS-04 TE200RS-16NS TE250RS Options: fixed flanges, stainless steel 16 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Quick CF Tees, stainless steel S TE16QCF TE40QCF TE6QCF-16NS TE100QCF Option: stainless steel 16, 16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. -7

74 CF Components CF Components CF Unequal tees, 2 flanges rotatable, stainless steel 04 Orientation of bolt holes according to ISO 980- UTE040016RS UTE06040RS UTE100040RS UTE10006RS UTE16006RS UTE160100RS S Options: fixed flanges, stainless steel 16 Option: clean room products (= CRP), stainless steel 16 on request. CF 4-way reducing crosses, 2 flanges rotatable, stainless steel 04 Orientation of bolt holes according to ISO 980- UX040016RS UX06040RS UX10006RS UX16006RS UX200100RS Option: fixed flange, stainless steel 16 Option: clean room products (= CRP) made of stainless steel 16/16NS on request

75 CF Components CF Components CF 4-way crosses, 2 flanges rotatable, stainless steel Orientation of bolt holes according to ISO 980- Stainless steel 04 Stainlees steel 16N-ESR X16RS-16 X16RS-16NS X40RS-04 X40RS-16NS X6RS-04 X6RS-16NS X100RS-04 X100RS-16NS X160RS-04 X160RS-16NS X200RS-04 X200RS-16NS X250RS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Options: fixed flanges, stainless steel 16 Quick CF 4-way crosses, stainless steel S X16QCF X40QCF X6QCF-16NS X100QCF Option: stainless steel 16, 16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request

76 CF Components CF Components CF Cluster flanges, stainless steel 04 2 Number of ports CFP CF4P S R Option: stainless steel 16 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other constructions on request. CF 6-way crosses, flanges rotatable, stainless steel Orientation of bolt holes according to ISO 980- Stainless steel 04 Stainless steel 16N-ESR XX16RS XX40RS-04 XX40RS-16NS XX6RS-04 XX6RS-16NS XX100RS-04 XX100RS-16NS XX160RS-04 XX160RS-16NS XX200RS-04 XX200RS-16NS XX250RS Option: fixed flange, stainless steel 16 Option: clean room products (= CRP) made of stainless steel 16/16NS on request

77 CF Components CF Components Quick CF 6-way crosses, stainless steel S XX16QCF XX40QCF XX6QCF-16NS XX100QCF Option: stainless steel 16, 16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. CF Cubes, stainless steel Rectangularity Parallelism 0.1 mm 0.1 mm D St. steel 04 St. steel 16N-ESR CUBE16-04 CUBE16-16NS CUBE40-04 CUBE40-16NS CUBE6-04 CUBE6-16NS CUBE CUBE100-16NS CUBE CUBE160-16NS CUBE CUBE200-16NS Option: stainless steel 16 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other designs on request

78 CF Components CF Flexible Hoses CF Flexible hoses, 1 flange rotatable, stainless steel 04 Flange stainless steel 04 Hose stainless steel 04 Bending radius FX16CF25R FX16CF50R FX16CF75R FX16CF100R FX40CF25R FX40CF50R FX40CF75R FX40CF100R FX6CF25R FX6CF50R FX6CF75R FX6CF100R FX100CF25R FX100CF50R FX100CF75R FX100CF100R Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other lengths on request. Options: fixed flanges, stainless steel 16 CF Hydroformed bellows, 1 flange rotatable, stainless steel 04 Flange stainless steel 04 Bellow stainless steel 16Ti Tolerances ±5 mm min FXB16R FXB40R FXB6R FXB100R FXB160R Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other lengths on request

79 CF Components CF Quick ccess Doors CF Quick access doors with and without exchangeable viewport, stainless steel/aluminum The quick connection system enables a fast access to ports and chambers with viewport 6CF - 200CF without viewport 40CF - 00CF with viewport 250CF, 00CF Mounting with allen head screws Max. bakeout temperature 120 C Flange stainless steel 04 Door frame aluminum, anodized Door sealing stainless steel Viewport Borofloat eakage rate < 1.0E-9 mbar l/s D D2 D D4 with viewport without viewport - QD40BK QD6VP--04 QD6BK QD100VP--04 QD100BK QD160VP--04 QD160VP QD200VP--04 QD200BK QD250VP--04 QD250BK QD00VP--04 QD00BK Suitable screws see page -80. Please find technical data on viewports in chapter 7 Vacuum Optics

80 CF Components CF Quick ccess Doors llen head bolt sets for CF quick access doors, stainless steel Mounting on CF flange llen head bolts Nut Washer ISO 4762, 2 ISO 402, 2 ISO 7089, 2 Number of drilling holes Size of screws FK-QD M6 x 0 FK-QD6 6 8 M8 x 40 FK-QD M8 x 40 FK-QD M8 x 45 FK-QD M8 x 45 FK-QD M8 x 45 FK-QD M10 x 60 llen head bolt sets for CF quick access doors, stainless steel, silver plated Mounting on chamber wall with tapped holes llen head bolts ISO 4762, 2 Number of drilling holes Size of screws FK-QD40-SG M6 x 12 FK-QD6-SG- 6 8 M8 x 16 FK-QD100-SG M8 x 20 FK-QD160-SG M8 x 20 FK-QD200-SG M8 x 0 FK-QD250-SG M8 x 0 FK-QD00-SG M10 x

81 CF Components CF iquid Feedthroughs CF 1-way liquid feedthroughs, stainless steel for liquid for liquid nitrogen iquid iquid nitrogen Vacuum side F16PP-16 NF16PP tube 6 tube 6 F16PS-16 NF16PS tube 6 SW 6 F40PP-04 NF40PP tube 6 tube 6 F40PS-04 NF40PS tube 6 SW 6 F40PP-04 NF40PP tube 12 tube 12 F40PS-04 NF40PS tube 12 SW 12 SW (Swagelok compatible adapter) Option: clean room products (= CRP) made of stainless steel 16/16NS on request. 1 2 ir side CF 2-way liquid feedthroughs, stainless steel 04 for liquid for liquid nitrogen iquid iquid nitrogen Vacuum side F402PP-04 NF402PP tube 6 tube 6 F402PS-04 NF402PS tube 6 SW 6 F402SP-04 NF402SP SW 6 tube 6 F402SS-04 NF402SS SW 6 SW 6 SW (Swagelok compatible adapter) Option: clean room products (= CRP) made of stainless steel 16/16NS on request ir side -81

82 CF Components CF Glass-to-Metal Connections CF Glass-to-metal connections, Pyrex Flange stainless steel 04 Tolerances R ±1 mm, ± mm Bakeout temperature max. 200 C Bakeout rate 2 to K/min Gasket OFHC copper, vacuum annealed GM-CF16-KP-17-TD GM-CF40-SP GM-CF40-KP-17-TD GM-CF6-KP D -82

83 CF Components CF Viewports CF Viewports with permanent joint, borosilicate glass, Kovar sleeve He leak rate < 1.0E-10 mbar l/s Window material borosilicate glass (Corning 7056) Flange material stainless steel 04 Transmission range ca. 0.4 m to 2 m Max. heating and cooling K/min rate Magn. permeability (r) >> 1.07 Frame material Kovar Max. temperature 50 C VPCF16B VPCF40B VPCF6B VPCF100B VPCF160B D 2 Quick CF Viewports with permanent joint, borosilicate glass VaCFix Clamp chains ensure a very uniform contact pressure on the Quick CF flanges when using a torque wrench. Thus, the Quick CF connection is perfectly suited for the mounting of stress-sensitive flange components (feedthroughs and viewports). He leak rate < 1.0E-10 mbar l/s Window material borosilicate glass (Corning 7056) Flange material stainless steel 04 Kovar Transmission range 400 to 2,500 nm Max. bakeout temperature 50 C Max. heating and cooling K/min rate VPQCF40B ,5 VPQCF6B ,5 VPQCF100B D

84 CF Components CF Viewports CF Viewports with permanent joint, borosilicate glass, tantalum sleeve He leak rate < 1.0E-10 mbar l/s Window material borosilicate glass (Corning 7056) Flange material stainless steel 16N Transmission range ca. 0.4 m to 2 m Max. heating and cooling K/min rate Magn. permeability (r) < Frame material tantalum Max. temperature 120 C VPCF16B-K-NM VPCF40B-K-NM VPCF6B-K-NM VPCF100B-K-NM VPCF160B-K-NM CF Gaskets CF Copper gaskets, OFHC D 2 Material Vickers hardness Bakeout temperature Suitable flanges Packing unit OFHC copper ca. 70 HV10 (vacuum annealed copper gaskets ca. 40 HV10) 450 C CF flange QCF flange 5 pieces * 10 pieces CF copper gaskets CF copper gaskets, vacuum annealed CF copper gaskets, silver plated CU10* - - CU16* CU16 CU16SP CU40* CU40 CU40SP CU6* CU6 CU6SP CU100* CU100 CU100SP CF copper gaskets, silver plated, vacuum annealed - CU16SP CU40SP CU6SP CU100SP CU160 CU160 CU160SP CU160SP 160 CU200 CU200 CU200SP CU200SP 200 CU250 CU250 CU250SP CU250SP 250 Option: clean room products (= CRP) made of stainless steel 16/16NS on request D D

85 CF Components CF Gaskets CF Blank copper gaskets, OFHC Material OFHC copper Vickers hardness ca. 70 HV10 Bakeout temperature 450 C Suitable flanges CF flanges Quick CF flanges D CUB CUB CUB CUB Option: clean room products (= CRP) on request. CF luminum gaskets, EN W-1050 Material EN W 1050 Suitable flanges CF flanges Quick CF flanges D D2 40-D48.2-ID D82.4-ID D120.5-ID D171.-ID CF Gaskets, FKM Mehrmals verwendbar Temperature range -10 C to 150 C Suitable flanges CF flanges Quick CF flanges D D2 D Flat profile profile VGF VGF16 VG VGF40 VG VGF6 VG VGF100 VG VGF160 VG VGF200 VG VGF250 VG Option: low outgassing and clean room products (= CRP) on request

86 CF Components CF Connecting Elements We provid e CF Flange kits, hex-head For the connection of two CF flanges with through bore-hole Flange thickness Number of drilling holes Size of screws FK-CF M4 x 20 FK-CF M6 x 5 FK-CF M8 x 45 FK-CF M8 x 50 FK-CF M8 x 55 FK-CF M8 x 60 CF Flange kits, hex-head, silver plated For the connection of two CF flanges with through bore-hole Flange thickness Number of drilling holes Size of screws FK-CF M6 x 5 FK-CF M8 x 45 FK-CF M8 x 50 FK-CF M8 x 55 FK-CF M8 x

87 CF Components CF Connecting Elements CF Flange kits, hex-head, with plate nuts, stainless steel For the connection of two CF flanges with through bore-hole Flange thickness Number of drilling holes Size of screws FK-CF16-PN M4 x 20 FK-CF40-PN M6 x 5 FK-CF6-PN M8 x 45 FK-CF100-PN M8 x 50 FK-CF160-PN M8 x 55 FK-CF200-PN M8 x 60 CF Flange kits, hex-head, for tapped flanges, silver plated For the connection of a CF-flange with through bore holes and a CF flange with tapped holes Flange thickness Number of drilling holes Size of screws FK-CF16-G M4 x 16 FK-CF40-G M6 x 25 FK-CF6-G M8 x 40 FK-CF100-G M8 x 45 FK-CF160-G M8 x 50 FK-CF200-G M8 x 55 CF Flange kits, hex-head, for tapped flanges, silver plated For the connection of a CF-flange with through bore holes and a CF flange with tapped holes Flange thickness Number of drilling holes Size of screws FK-CF16-SG M4 x 12 FK-CF40-SG M6 x 20 FK-CF6-SG M8 x 0 FK-CF100-SG M8 x 0 FK-CF160-SG M8 x 5 FK-CF200-SG M8 x 5 Flange kits with other connecting elements or of other materials on request. In addition, we provide a range of screws, nuts and washers with and without vent holes for HV and UHV systems

88 CF Components CF Connecting Elements CF Plate nuts, stainless steel 04 Plate nuts allow quick and space-saving mounting of CF flanges GM Design PN M4 radius PN M6 radius PN M8 radius PN M8 straight PN M8 straight PN M8 straight PN M8 straight Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Packing unit 25 pieces. 2 CF Horse shoe plate nuts, stainless steel 04 D2 PN16HS PN40HS PN6HS PN100HS PN160HS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Scope of delivery with screws and washers. D CF Thread lubricant For easier loosening of screws after bakeout. T100 Material MoS2-88

89 CF Components CF Connecting Elements Quick CF Clamp chains VaCFix, stainless steel Quick CF Clamp chains for quick and space-saving mounting of UHV flange connections. Material Suitable flanges Suitable gaskets Mounting ccessories stainless steel, non-magnetic QCF flanges KF flanges conical ISO flanges copper gaskets aluminum gaskets FKM gaskets with torque wrench spare parts (eye screw, nut) XS16 - XS6 XS100V D D2 R Number of links Tightening torque [Nm] Weight [g] XS XS XS XS100V SW Option: clean room products (= CRP) on request. Clean room compatible clamp chains require a higher tightening torque

90

91

92 Quick CF Components Quick CF Flanges Quick CF Blank flanges, conical, stainless steel Stainless steel 04 Stainless steel 16 Stainless steel 16N-ESR QCF16-04 QCF16-16 QCF16-16NS QCF40-04 QCF40-16 QCF40-16NS QCF6-04 QCF6-16 QCF6-16NS QCF QCF QCF100-16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Quick CF Bored flanges, conical, stainless steel Stainless steel 04 Stainless steel 16 Stainless steel 16N-ESR QCF16B19-04 QCF16B19-16 QCF16B19-16NS QCF40B8-04 QCF40B8-16 QCF40B8-16NS QCF40B41-04 QCF40B41-16 QCF40B41-16NS QCF6B6-16NS QCF6B70-16NS QCF100B QCF100B QCF100B101-16NS QCF100B QCF100B QCF100B104-16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. D R

93 Quick CF Components Quick CF Flanges Quick CF to CF dapters, stainless steel QCF to CF reducing flange Stainlees steel 04 Stainlees steel 16N-ESR Z040016QCF-04 Z040016QCF-16NS M4 Z06040QCF-04 Z06040QCF-16NS M6 Z100016QCF-04 Z100016QCF-16NS M4 Z100040QCF-04 Z100040QCF-16NS M6 Z10006QCF-04 Z10006QCF-16NS M8 Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Quick CF Flange caps, plastics 2 D M QCF16CP QCF40CP QCF6CP QCF100CP Packing unit 10 pieces Quick CF Components Quick CF Tubulation (half nipples), stainless steel R TU16QCF TU40QCF TU6QCF NS TU100QCF Option: stainless steel 16, 16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other lengths on request. -9

94 Quick CF Components Quick CF Components Quick CF Straight connectors (full nipples), stainless steel SC16QCF SC40QCF SC6QCF-16NS SC100QCF Option: stainless steel 16, 16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other lengths on request. Quick CF to CF dapters, stainless steel 04 2 QCF QCF QCF QCF Option: stainless steel 16, 16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Other lengths on request. Quick CF Elbows 90, stainless steel S E16QCF E40QCF E6QCF-16NS E100QCF Option: stainless steel 16, 16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Quick CF Tees, stainless steel S TE16QCF TE40QCF TE6QCF-16NS TE100QCF Option: stainless steel 16, 16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request

95 Quick CF Components Quick CF Components Quick CF 4-way crosses, stainless steel S X16QCF X40QCF X6QCF-16NS X100QCF Option: stainless steel 16, 16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Quick CF 6-way crosses, stainless steel S XX16QCF XX40QCF XX6QCF-16NS XX100QCF Option: stainless steel 16, 16NS Option: clean room products (= CRP) made of stainless steel 16/16NS on request. Quick CF Viewports QCF Viewports with permanent joint, borosilicate glass VaCFix Clamp chains ensure a very uniform contact pressure on the Quick CF flanges when using a torque wrench. Thus, the Quick CF connection is perfectly suited for the mounting of stress-sensitive flange components (feedthroughs and viewports). He leak rate < 1.0E-10 mbar l/s Window material borosilicate glass (Corning 7056) Flange material stainless steel 04 Frame material Kovar Transmission range ca. 400 to 2,500 nm Max. bakeout temperature 50 C Max. heating and cooling K/min rate D 2 VPQCF40B VPQCF6B VPQCF100B

96 Quick CF Components Optical Fiber Feedthroughs on Quick CF Flanges Optical fiber feedthroughs on Quick CF flanges Please find technical data on optical fiber feedthroughs in chapter 5 Vacuum Optics. Flange Number of couplings QCF16-SM110-FCPC-1 16QCF 1 QCF40-SM110-FCPC-1 40QCF 1 QCF6-SM110-FCPC-2 6QCF 2 QCF100-SM110-FCPC- 100QCF Other combinations of optical fiber feedthroughs on Quick CF flanges on request. SUB-D Feedthroughs on Quick CF Flanges SUB-D feedthroughs on Quick CF flanges VaCFix Clamp chains ensure a very uniform contact pressure on the Quick CF flanges when using a torque wrench. Thus, the Quick CF connection is perfectly suited for the mounting of stress-sensitive flange components (feedthroughs and viewports). Please find technical data on electrical feedthroughs in chapter 4 Electrical Feedthroughs. Flange Number of contacts QCF40-SUBD-9-DE-CE-SSG 40QCF 9 QCF6-SUBD-15-DE-CE-SSG 6QCF 15 QCF6-SUBD-25-DE-CE-SSG 6QCF 25 QCF100-SUBD-50-DE-CE-SSG 100QCF 50 Further feedthroughs on Quick CF flanges on request

97 Quick CF Components Edge Welded Bellows with Quick CF Flanges Edge welded bellows with Quick CF flanges By using Quick CF flanges and VaCFix clamp chains for mounting, the connecting pieces of the edge welded bellows can be designed very short. Please find technical data on edge welded bellows in chapter 6 Edge Welded Bellows. Flange Stroke EWB16QCF-10 16QCF 10 EWB40QCF-10 40QCF 10 EWB6QCF-10 6QCF 10 EWB100QCF QCF 10 arger strokes for edge welded bellows with Quick CF flanges on request

98 Quick CF Components Total Pressure Measurement with Quick CF Flanges BRION pro/extended Bayard-lpert gauge with X-ray compensation Passive hot cathode ionisation gauge, fine vacuum to XHV, BTXQ-40Q Description BRION pro/extended Vacuum connection 40QCF -98

99 Quick CF Components Quick CF Gaskets Quick CF Copper gaskets, OFHC The below-mentioned gaskets (copper, aluminium and FKM flat gaskets) are identical with those for CF components. The use of standard copper gaskets according to ISO 669 for CF flanges is an important advantage for Quick-CF flange connections. Material Vickers hardness Bakeout temperature Suitable flanges Packing unit OFHC copper ca. 70 HV10 (vacuum annealed copper gaskets ca. 40 HV10) 450 C CF flanges QCF flanges 5 pieces * 10 pieces CF copper gaskets CF copper gaskets, vacuum annealed CF copper gaskets, silver plated CU10* - - CU16* CU16 CU16SP CU40* CU40 CU40SP CU6* CU6 CU6SP CU100* CU100 CU100SP CF copper gaskets, silver plated, vacuum annealed - CU16SP CU40SP CU6SP CU100SP CU160 CU160 CU160SP CU160SP 160 CU200 CU200 CU200SP CU200SP 200 CU250 CU250 CU250SP CU250SP 250 Option: clean room compatible products (= CRP) made of stainless steel 16/16NS on request D D Quick CF Blank copper gaskets, OFHC Material OFHC copper Vickers hardness ca. 70 HV10 Bakeout temperature 450 C Suitable flanges CF flanges Quick CF flanges D CUB CUB CUB CUB Option: clean room products (= CRP) on request

100 Quick CF Components Quick CF Gaskets Quick CF luminum gasket, EN W-1050 Material EN W 1050 Suitable flanges CF flanges Quick CF flanges D D2 40-D48.2-ID D82.4-ID D120.5-ID Quick CF Flat gaskets, FKM For multiple use Temperature range -10 C to 150 C Suitable flanges CF flanges Quick CF flanges D D2 VGF VGF VGF VGF Option: low outgassing and clean room products (= CRP) on request

101 Quick CF Components Quick CF Clamp chains VaCFix, stainless Steel Quick CF Clamp chains VaCFix, stainless steel Quick CF Clamp chains for quick and space-saving mounting of UHV flange connections. Material Suitable flanges Suitable gaskets Mounting ccessories stainless steel, non-magnetic QCF flanges KF flanges conical ISO flanges copper gaskets aluminum gaskets FKM gaskets with torque wrench spare parts (eye screw, nut) XS16 - XS6 XS100V D D2 R Number of links Tightening torque [Nm] Weight [g] XS XS XS XS100V SW Option: clean room products (= CRP) on request. Clean room compatible clamp chains require a higher tightening torque. Heating jackets for Quick CF clamp chains VaCFix Heating jackets for Quick CF clamp chains VaCFix Fiberglass sleeve with perfect fit and heat transfer for Quick CF connections. to 250 C to 450 C ccessories for Power [W] BKE-PTFE-QCF16 BKE-GS-QCF16 XS16 50 BKE-PTFE-QCF40 BKE-GS-QCF40 XS40 90 BKE-PTFE-QCF6 BKE-GS-QCF6 XS6 10 BKE-PTFE-QCF100 BKE-GS-QCF100 XS100V 200 Option: clean room products (= CRP) made of PTFE on request