CF Components. Introduction. Functional principle 1-45
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- Nigel McCormick
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1 Introduction The generation of ultra high vacuum (UHV) makes great demands on the material and on the connections. Therefore the CF standard was created in the UHV technology (ISO 3669; enhancement ISO/TS ). The following figure shows the principle construction: Functional principle CF flanges are manufactured from circular blanks of stainless steel on CNC machines. Rotatable flanges are bipartite and consist of an inner part with the seal face and an outer part with the bolt holes. CF flanges have an annular groove on the vacuum side for the reception of the gasket and a knife-edge. The sealing is realised by means of a flat gasket of oxygen-free (OFHC) copper because of the low leak rate and high bakeout temperature necessary for UHV technology. This gasket can be used generally only one time due to the plastic deformation by the knife-edge. The pressing-on is realised by bolts which must be fastened uniformly crosswise in order to avoid any kind of distortion. The so realised flange connection has a leak rate of <.0E- mbar l/s and is bakeable up to 450 C. -45
2 Introduction imensions VCOM provides CF flanges and components of the dimensions 0 to 250 according to the pre-norm ISO/TS These flanges are fully intermateable with ConFlat and CF flanges of other manufacturers. Micro CF flanges of the dimension 0 are exclusively supplied by VCOM. Please note that apart from this there are individual standards of institutions in the market available. Please add the auxiliary dimensions (25, 50, 75, 25) in case of requests and offers of CF flanges and components. In addition, please add the size and the number of required bolts and the to use copper gasket. imensions of CF Flanges Nominal diameter "imperial" (mm (inch)) 0 25,4 ( ) (2.2 ) x M (3.38 ) x M (4.5 ) x M (4.62 ) x M (.33 ) 70 (2.75 ) 54 (6 ) 25 7 (6.75 ) x M8 203 (8 ) 254 (0 ) 305 (2 ) 305 (2 ) Thickness (mm) CU gasket (mm) Bolt circle (mm) Number of holes 6 x M3 6 x M4 6 x M6 6 x M8 20 x M8 24 x M8 32 x M8 32 x M0 Materials Gaskets Flanges Components FPM OFHC Copper OFHC Copper silver plated OFHC Copper soft annealed Stainless steel 304 Stainless steel 304 Stainless steel 36 Stainless steel 36N ESR Stainless steel 304 Stainless steel 304 Stainless steel 36 Stainless steel 36Ti -46
3 CF Clamps CF Nut, bolt and washer sets, stainless steel Material Packing unit 2 25 pieces GM NBW36 0 M3 6 NBW420 6 M4 20 NBW M6 35 NBW M8 45 NBW M8 50 NBW M8 60 NBW M8 65 CF Nut, bolt and washer sets for double sided flanges, stainless steel Material Packing unit 2 25 pieces GM NBW435 6 M4 35 NBW M6 50 NBW M8 60 NBW M8 70 NBW M8 80 NBW M8 90 CF Nut, bolt and washer sets for tapped flanges, stainless steel Material Packing unit 2 25 pieces GM BW32 0 M3 2 BW46 6 M4 6 BW M6 25 BW M8 30 BW M8 35 BW M
4 CF Clamps CF llen head bolt and washer sets for tapped flanges, stainless steel Material Packing unit 2 25 pieces GM CW46 6 M4 6 CW M6 25 CW M8 30 CW M8 35 CW M8 45 For high and ultra high vacuum applications we also offer different screws, nuts and washers with and without vent hole. Further information in chapter 3. CF Plate nuts, stainless steel Packing unit 25 pieces Order cod 2 3 GM Gravure PN M4 M PN M PN M8 4 PN M8 50 PN M8 200 PN M8 250 CF Horse shoe plate nuts, stainless steel Scope of delivery with screws and washers 2 PN6HS PN35HS PN63HS PN00HS PN50HS CF Thread lubricant pplication T00 loosening of screws after bakeout Material MoS -48
5 CF Copper gaskets CF Copper gaskets Material OFHC copper Hardness approx. 85 Brinell Bakeout temperature 450 C 2 Pack size CU CU CU CU CU CU CU SPCU Other measures on request CF Copper gaskets, annealed Material OFHC copper Hardness approx. 45 Brinell Bakeout temperature 450 C pplication feedthroughs, viewports, glass-to-metal connection Packing unit 5 pieces 2 CU CU CU CU CU CU SPCU
6 CF Copper gaskets CF Copper gaskets, silver plated Material OFHC copper, silver plated Hardness approx. 85 Brinell Bakeout temperature 450 C Packing unit 5 pieces 2 CU6SP CU38SP CU63SP CU00SP CU50SP CU200SP SPCU250SP CF Copper gaskets, silver plated, annealed Material Hardness Packing unit OFHC copper approx. 85 Brinell 5 pieces 2 CU6SP CU38SP CU63SP CU00SP CU50SP CU200SP SPCU250SP CF Gaskets, FPM Temperature range -0 C to 50 C (intermittent 200 C) pplication multiple use possible -50 VGF VGF VGF VGF VGF VGF VGF VGF250-B
7 CF Fittings CF Blank flanges, fixed, stainless steel Option with tapped holes and (basic dimensions) serve as orientation Stainless steel 304 Stainless steel 36 Stainless steel 36N ESR - F F6-304 F6-36 F6-36NS F F35-36 F35-36NS F F63-36 F63-36NS F F00-36 F00-36NS F F50-36 F50-36NS F F F200-36NS F F F250-36NS CF Blank flanges, rotatable, stainless steel Option with tapped holes and (basic dimensions) serve as orientation Stainless steel 304 Stainless steel 36 Stainless steel 36N ESR F6R-304 F6R-36 F6R-36NS F35R-304 F35R-36 F35R-36NS F63R-304 F63R-36 F63R-36NS F00R-304 F00R-36 F00R-36NS F50R-304 F50R-36 F50R-36NS F200R-304 F200R-36 F200R-36NS F250R-304 F250R-36 F250R-36NS
8 CF Fittings CF Bored flanges, fixed, stainless steel Option with tapped holes Stainless steel 304 Stainless steel 36 Stainless steel 36N ESR - F0B F6B9-304 F6B9-36 F6B9-36NS F35B4-304 F35B4-36 F35B4-36NS F35B F35B42-36 F35B42-36NS F63B F63B F63B70-36 F63B70-36NS F00B F00B F00B04-36 F00B04-36NS F50B F50B52-36NS F50B F50B54-36 F50B54-36NS F200B F200B F200B204-36NS F250B F250B F250B254-36NS and (basic dimensions) serve as orientation R 2-52
9 CF Fittings CF Bored flanges, rotatable, stainless steel Option with tapped holes Stainless steel 304 Stainless steel 36 Stainless steel 36N ESR F6RB9-304 F6RB9-36 F6RB9-36NS F35RB4-304 F35RB4-36 F35RB4-36NS F35RB F35RB42-36 F35RB42-36NS F63RB F63RB F63RB70-36 F63RB70-36NS F00RB F00RB F00RB04-36 F00RB04-36NS F50RB F50RB52-36NS F50RB F50RB54-36 F50RB54-36NS F200RB F200RB F200RB204-36NS F250RB F250RB F250RB254-36NS and (basic dimensions) serve as orientation R 2 CF Tube, m length, stainless steel engthwise welded Outside and inside etched Ra Ra (welding seam area) < 0.8 m <.6 m St. steel 36 St. steel 304 R R36-9x.5- R304-9x R36-4x.5- R304-4x R36-70x2.0- R304-70x R36-04x2.0- R304-04x R36-54x2.0- R304-54x R36-204x2.0- R x RI -53
10 CF Fittings CF Welded flanges, stainless steel F6WF M4 F35WF M6 F63WF M8 F00WF M8 R and (basic dimensions) serve as orientation M CF ouble sided blank flanges, stainless steel F6B F6BNS F35B F35BNS F63B F63BNS F00B F00BNS F50B F50BNS St. steel 304 St. steel 36N ESR and (basic dimensions) serve as orientation CF ouble sided bored flanges, stainless steel Option radial connections F F66NS F3538 F3538NS F F6366NS F0000 F0000NS F5050 F5050NS St. steel 304 St. steel 36N ESR and (basic dimensions) serve as orientation -54
11 CF Fittings CF Zero length flange adapters, stainless steel 2 Z M3 0 Z M4 3 Z M4 3 Z M4 7 Z M6 7 Z M6 20 Z M8 20 Z M6 22 Z M8 22 Z M8 22 Z M8 25 Z M8 25 Other reductions on request and (basic dimensions) serve as orientation M CF Zero length flange adapters, stainless steel 36N ESR 2 Z406NS M4 3 Z636NS M4 7 Z6340NS M6 7 Z040NS M6 20 Z063NS M8 20 Z50NS M8 22 Z540NS M6 22 Z563NS M8 22 Z200NS M8 25 Z206NS M8 25 Other reductions on request and (basic dimensions) serve as orientation M -55
12 CF Fittings CF Tubulations (half nipples), fixed, stainless steel Option with tapped holes Stainless steel 304 Stainless steel 36N ESR TU TU6 TU6NS TU38 TU38NS TU TU63-70 TU63NS TU TU00-04 TU00NS TU TU50-54 TU50NS TU TU TU200NS R CF Tubulations, rotatable, stainless steel Option with tapped holes Stainless steel 304 TU6R TU6RNS TU38R TU38RNS TU63R TU63R-70 TU63RNS TU00R TU00R-04 TU00RNS TU50R TU50R-54 TU50RNS TU200R TU200R-204 TU200RNS Stainless steel 36N ESR R
13 CF Fittings CF Straight connectors Fixed flanges Rotatable flange SC6 SC6R SC38 SC38R SC63 SC63R SC00 SC00R SC50 SC50R SC200 SC200R CF Tubulated reducing adapters, fixed 2 Bolt holes T in-line T in-line and straddled T in-line and straddled T in-line and straddled T in-line T in-line and straddled T in-line and straddled 2-57
14 CF Fittings CF Tubulated reducing adapters, small flange rotatable 2 2 T356R T636R T6338R T038R T063R T563R T50R CF-KF dapter 2 2 K K K K K K K K K CF-ISO-K dapter 2 2 S S S S S
15 CF Fittings CF to VCR dapters female male F6VCR6F F6VCR6M /4" F6VCR3F F6VCR3M /2" F35VCR6F F35VCR6M /4" F35VCR9F F35VCR9M /8" F35VCR3F F35VCR3M /2" F35VCR9F F35VCR9M /4" F35VCR25F F35VCR25M " Female VCR compatible Male RZ CF to Swagelok adapters, metric F6SW6M F6SW8M F6SW0M F35SW6M F35SW8M F35SW0M Swagelok compatible RM CF to Swagelok adapters, imperial F6SW /4" F35SW /4" F35SW /8" F35SW /2" Swagelok compatible RZ -59
16 CF Fittings CF Elbows 90 fixed flanges rotatable flanges In-line bolt holes (straddled bolt holes on request) Fixed flanges 2 Rotatable flanges E6 E6R E38 E38R E63 E63R E00 E00R E50 E50R E200 E200R S CF Tees fixed flanges 2 rotatable flanges In-line bolt holes (straddled bolt holes on request) Fixed flanges 2 Rotatable flanges TE6 TE6R TE38 TE38R TE63 TE63R TE00 TE00R TE50 TE50R TE200 TE200R S2-60
17 CF Fittings CF Unequal tees fixed flanges 2 rotatable flanges In-line bolt holes (straddled bolt holes on request) Fixed flanges 2 Rotatable flanges UTE356 UTE356R UTE6335 UTE6335R UTE035 UTE035R UTE063 UTE063R UTE563 UTE563R UTE50 UTE50R S2 CF 4-way crosses fixed flanges 2 rotatable flanges In-line bolt holes (straddled bolt holes on request) Fixed flanges 2 Rotatable flanges X6 X6R X38 X38R X63 X63R X00 X00R X50 X50R X200 X200R
18 CF Fittings CF 4-way reducing crosses fixed flanges 2 rotatable flanges In-line bolt holes (straddled bolt holes on request) Fixed flanges 2 Rotatable flanges UX356 UX356R UX6335 UX6335R UX063 UX063R UX563 UX563R UX200 UX200R CF 6-way crosses fixed flanges 3 rotatable flanges In-line bolt holes (straddled bolt holes on request) Fixed flanges 3 Rotatable flanges XX6 XX6R XX38 XX38R XX63 XX63R XX00 XX00R XX50 XX50R XX200 XX200R
19 CF Fittings CF Cubes CUBE CUBE CUBE CUBE CUBE CUBE CF Cluster flanges 2 No. of ports 2 R R2 CF3P CF4P Other versions on request CF Flange caps, plastics Packing unit 0 pieces CF6CP CF35CP CF63CP CF00CP CF50CP
20 CF Flexible hoses CF Flexible hoses Material flange stainless steel 304 Material hose stainless steel 36 Fixed flanges Rotatable flange FX6CF25 FX6CF25R FX6CF50 FX6CF50R FX6CF75 FX6CF75R FX6CF00 FX6CF00R FX35CF25 FX35CF25R FX35CF50 FX35CF50R FX35CF75 FX35CF75R FX35CF00 FX35CF00R FX63CF25 FX63CF25R FX63CF50 FX63CF50R FX63CF75 FX63CF75R FX63CF00 FX63CF00R FX00CF25 FX00CF25R FX00CF50 FX00CF50R FX00CF75 FX00CF75R FX00CF00 FX00CF00R
21 CF Flexible hoses CF Hydroformed bellows Material flange stainless steel 304 Material bellows stainless steel 36 Fixed flanges Rotatable flange FXB6 FXB6R FXB35 FXB35R FXB63 FXB63R FXB00 FXB00R FXB50 FXB50R min CF Glass-to-metal connections and quick access doors CF Quick access doors with viewport ssembly directly on the chamber, (with allen screw) Sealing FPM Bakeout temperature to 200 C Q Q Q Q
22 CF Glass-to-metal connections and quick access doors CF Quick access doors without viewport ssembly directly on the chamber, (with allen screw) Sealing FPM Bakeout temperature to 200 C 2 Q35BK Q63BK Q00BK Q50BK CF Glass-to-metal connections, Pyrex Material flange stainless steel 304 Tolerances R ± mm, ±3 mm Bakeout temperature max. 200 C Bakeout rate 2-3 C/min Seal OFHC copper, vacuum annealed R T3P T25P T38P T64P CF Glass-to-metal connections, quartz Material flange stainless steel 304 Tolerances R ± mm, ±3 mm Bakeout temperature max. 200 C Bakeout rate 2-3 C/min Seal OFHC copper, vacuum annealed Construction metal-to-quartz transition using intermediate glass layers R T3Q T25Q T38Q
23 CF iquid feedthroughs CF iquid feedthrough, stainless steel for liquid for liquid nitrogen iquid iquid nitrogen Vacuum side tmosphere side F6PP NF6PP tube 6 mm tube 6 mm F6PS NF6PS tube 6 mm Swagelok 6 mm F35PP NF35PP tube 6 mm tube 6 mm - NF35PS tube 6 mm Swagelok 6 mm - NF35PP tube 2 mm tube 2 mm - NF35PS tube 2 mm Swagelok 2 mm 2 CF iquid feedthrough, double, stainless steel, of NW35CF- flange for liquid for liquid nitrogen iquid iquid nitrogen Vacuum side tmosphere side F352PP NF352PP tube 6 mm tube 6 mm F352PS NF352PS tube 6 mm Swagelok 6 mm F352SP NF352SP Swagelok 6 mm Tube 6 mm 2 F352SS NF352SS Swagelok 6 mm Swagelok 6 mm
24 CF Micro Components CF Micro fittings CF Micro gaskets 2 Material CU OFHC VGF FPM CF Bolts Packing unit 25 pieces Screw type NBW36 0 M3 6 hexagon NBW M6 35 hexagon BW32 0 M3 2 hexagon CW46 6 M4 6 allen M CF Blank flanges, fixed, stainless steel Option with tapped holes 2 F CF Bored flanges, fixed, stainless steel Option with tapped holes R F0B
25 CF Micro Components CF Micro fittings CF Tubulations (half nipples), fixed, stainless steel R TU CF Zero length flange adapters, stainless steel 2 Z Z Z60: applicable with 6 x M4 allen screws and 6 x M3 hexagon screws Mechanical CF micro feedthroughs CF Micro rotary feedthrough M0 Smallest rotary feedthrough Big torque Compact Construction one piece Housing material stainless steel 36 Bellow type blunt, Ø 3.5 mm, with flattening Brake-away torque 0.8 Nm Maximum no load spin 200 U/Min. speed Maximum shaft axial thrust 20 N Bakeout temperature 250 C M0TX000Z escription M0-feedthroughs Other versions in chapter "Mechanical Feedthroughs" -69
26 CF Micro Components Mechanical CF micro feedthroughs CF Micro linear translator SM0 High capability Rugged frame construction Smooth and precise motion along the Z axis ( mm stroke / revolution of the handwheel) ctuation manual handwheel Standard stroke 25 mm Material bellow stainless steel 36 ife cycle 0,000 cycles Bakeout temperature 250 C SM0-25H escription SM0 Micro linear translator -70
27 CF Micro Components Electrical CF micro feedthroughs Micro feedthrough, 4 pin, on a NW0CF flange Very compact Stainless steel housing, ceramic isolator, gold-plated Kovar contacts tmosphere side standard MINI-SNP connector, strain-relieved eakage rate <.0E-9 mbar l / s Temperature range -200 C to 350 C Current (all contacts 5.25 loaded) Magnetic yes CF0-VB-0B-04 Further information concerning connectors see chapter "Electrical Feedthroughs" Micro SM feedthrough, on a NW0CF flange Very compact Stainless steel housing, ceramic isolator, gold-plated Kovar contacts tmosphere and vacuum side standard MINI-SNP con strain-relieved eakage rate <.0E-9 mbar l / s Impedance 50 Ohm Temperature range -200 C to 350 C Current 0 Magnetic yes CF0-VB-SM2 Further information concerning connectors see chapter "Electrical Feedthroughs" CF Micro welded bellows CF Micro welded bellows Material flange stainless steel 36 Material bellows stainless steel 36 Bakeout temperature to 450 C EWB Other lengths on request 2 max min Hub -7
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