IWAKI PNEUMATIC DRIVE BELLOWS PUMPS

Transcription

1 IWAKI PNEUMATIC DRIVE BELLOWS PUMPS F

2 For high purity chemical handling applications in semiconductor processing applications The F-Series includes pneumatic drive bellows pumps that are designed for use in the semiconductor manufacturing processes. Iwaki introduced the first designs over 2 years ago and has continually developed new products to keep up with rapidly changing market needs. With over 2 different models available the quality and performance of our products has made them the preferred solution by device manufactures all over the world. Their quality and performance are recognized and highly rated by device manufacturers all over the world. We offer not only pump solutions, but also accessories including controllers, dampeners, and liquid chemical supply systems that have been developed to compliment a comprehensive portfolio of quality equipment for wet process and surface preparation applications. Guideline for pump selection Max. discharge capacity (L/min) Max. supplied air pressure (MPa) Max. air consumption (NL/min) Temperature range ( C) 1.5 FS-H FS-N FW FW-H FF FF-H FA *Please check the specifications of each pump for liquid temperature and maximum supply air pressure. Main materials PFA Application Usable Usable depend on condition FS-H FS-N FW FW-H FF FF-H FA CFD Wafer wet-bench Cleaning(Batch process) Cleaning(Single wafer) Chemical supply equipment Mixed-liquid circulation/transfer CMP process Cleaning Chemical repleshing equipment 1 *Liquid temperature conditions vary depending on the pump specifications.

3 Pneumatic drive bellows pumps F Example of installation Chemical supply equipment (Constant pressure control) Dampener PDA-H1/PDA-WB PD-H1/PD-H Circuration pump F series Filter PIC Tank PFC unit Compressed air source Electro-pneumatic Regulator Switching valve External ON/OFF External setting signal (DC4-2mA) Supply/circulation switching Power supply: AC1V Pressure signal output (DC4-2mA) Solenoid valve synchronous output (contact) Error output (contact) Leak alarm Filter Regulator CMP slurry supply equipment Filling up various chemical liquids Undiluted solution supply DIW Acid Alkali ph adjustment, Electromagnetic metering pump EHN-R Dampener PDA-H1/PDA-WB PD-H1/PD-H Regulating tank Transfer/circulation pump for diluted solution F series Pump Controller FDC-1 Feeding tank To individual lines Pump controller & Pump driver Proximity switch Pump controller & Pump driver FDC-1 & FD-1/FD-2/FD-3 Alarm output External signal User equipment Filter Dampener Washing tank Circuration pump F series QEV QEV Regulator EXH EXH Switching valve Electro-pneumatic Regulator Compressed air source Wafer wet-bench PLC Chemical replenishing system CFD-1T-B Dampener PD-H Filter Sulfuric acid, hydrochioric acid, hydrofluoric acid, ammonia Supply tank at ambient Washing tank Circuration pump FS,FW Pump Controller FDC-1 2

4 FS-H Series A small, lightweight and cost effective solution FS-3HT Using a higher stroke rate (24 spm maximum) has resulted in a reduction in size, weight and cost as well as reduced pulsation. Note: The maximum stroke rates are dependent on model and application; please refer to the specification table for details. Construction and materials All liquid contact components are constructed of high purity fluoroesin materials. The exterior of the units are also coated in fluoroesin so that no metallic components are exposed. FS-H pumps also utilize our own shaft seal design (patent pending) resulting in a marked reduction in particle generation. Sylinder head(non-wetted) AL+4F coating Pump head (Tube is made of PFA.) The pumps are rated for liquid temperatures ranging from 5-18 C with discharge pressure to.45 MPa. Applications include wet process circulation and CMP processes, as well as chemical distribution feed systems. The FS-H body design eliminates the need for periodic tightening of the stud bolts. External access to the proximity sensors results in reduced maintenance and down time. Valve case Valve Bellows The pump uses a proximity sensor drive system which opens/closes an external air solenoid valve providing easy performance control capabilities that are compatible with a variety of controller options. Pump identification FS - 15 H T1-1 Special specification Series code Without code : Standard specificaion Iwaki pneumatic drive bellows pump 1 : Special specification (1,2...) FS series Sealing structure of pump head/bellows T1 : Tube connection Pump size (suction opening / discharge opening) / Bellows separation type T2 : Tube connection 15 : Max. discharge capacity 15L/min (suction opening / discharge opening) / Welded one-piece structure 3 : Max. discharge capacity 3L/min 6 : Max. discharge capacity 55L/min Liquid temperature H : High-pressure specification(5-18 C) 3

5 Pneumatic drive bellows pumps F Specification FS-15HT1/T2 FS-3HT1/T2 FS-6HT1/T2 Max. discharge capacity L/min Air supply pressure range MPa Liquid temperature range C Max. air consumption NL/min Max. stroke speed* spm Pump connection size 1/2" ø19xø16mm ø25xø22mm Supply air connection size Rc1/4 Rc3/8 Ambient temperature C 4 Drive system By proximity switch *18 spm maximum with feed air pressures between.3 and.5 MPa. Note: Max. discharge capacity shows when pumping clear water at 2 C. Perfomance curves FS-15HT1/T MPa MPa.4MPa.15MPa.5MPa.4MPa FS-3HT1/T2.5MPa.5MPa FS-6HT1/2.5MPa.4MPa.15MPa H-Q Air consumption 9.5MPa.4MPa MPa MPa.15MPa MPa c (1).4MPa Dimentions in mm W L H a b c d e f g h FS-15HT1/T H (g) FS-3HT1/T b f h FS-6HT1/T a W (1) d L e 4

6 FS-1HT-2 Flow and temperature capabilities offer improved process efficiencies Maximum flow rate of up to 1 L/min with 18 C liquid. This allows delivery of CARO (SPM) or H3PO4 at a flow rate 1.8 times higher than our existing pumps (55 L/min). Construction and materials Higher flow rates improve cleaning efficiency and removal of containments during wafer processing. Cleaning times are also reduced in systems with multiple processing lines. Bellows Sylinder head(non-wetted) AL+4F coating In addition to the use of fluoroplastic wet ends ( and PFA), a fluorine coating on the pump s outer surfaces offers the best resistance to vapors from acid, alkali and hydrogen peroxide chemistries used in semiconductor manufacturing. Optimization of design has resultind in reduced weight of about 15% of our existing 8-1L models making installation and replacement work easier. The model adopts a sensor drive system that switches the solenoid valve using the proximity switch built into the pump. A leak sensor is also included as standard equipment. Valve Valve case Pump head Pump identification Series code Iwaki pneumatic drive bellows pump FS series Pump size 1 : Max. discharge capacity 1L/min FS - 1 H T2-1 Special specification Without code : Standard specificaion 1 : Special specification (1,2...) Sealing structure of pump head/bellows T2 : Tube connection (suction opening / discharge opening) / Welded one-piece structure Liquid temperature H : High-pressure specification(1-18 C) 5

7 Pneumatic drive bellows pumps F Specification FS-1HT2 Max. discharge capacity L/min 1 Air supply pressure range MPa Liquid temperature range ºC Max. air consumption NL/min 121 Max. stroke speed spm 12 Pump connection size Supply air connection size 1-1/4 fittings (SUPER 3-type PILLAR FITTINGS manufactured by Nippon Pillar Packaging Co., Ltd.) Rc 1/2 Allowable ambient temperature Drive system ºC - 6 By proximity switch Note: Max. discharge capacity shows when pumping clear water at 2 C. Perfomance curves FS-1HT2.5MPa.4MPa.1MPa.1MPa.5MPa.4MPa (81) H-Q Air consumption Dimentions in mm

8 FS-N Series Max 1L/min. High flow design for chemical distribution applications Perfectly suited to high flow & pressure chemical distribution requirements. The high stroke rate (Max 2 SPM:FS-8NT) provides for a compact, lightweight and lower cost option without sacrificing flow and pressure capability. All liquid contact materials are made of high purity fluororesin resulting in contamination-free construction. Our unique patented shaft seal (FS- 8NT...PAT.) also dramatically reduces particle generation. FS-8NT Tube Bellows PFA FS-1NF Construction and materials Sylinder head(non-wetted) AL+4F coating The pump utilizes a built in proximity sensor driven control system to switch an external air solenoid valve. Leak sensors are also included as standard equipment. Seal welded pump head and bellows eliminate leakage. Valve FS-1NF Flange tube Flange SUS34 Pump head Sylinder head(non-wetted) AL+4F coating Bellows Valve Valve case Pump head Pump identification FS - 8 N T Series code Iwaki pneumatic drive bellows pumps FS series Pump size 8 : Max. discharge capacity 8 L/min 1 : Max. discharge capacity 1 L/min Liquid temperature N : 5-6 ºC Special specification Pump connection T : Tube connection (FS-8N standard) F : Flange connection (FS-1N standard)

9 Pneumatic drive bellows pumps F Specification Max. discharge capacity Air supply pressure range Liquid temperature range Max. air consumption Max. stroke speed Self-priming height limit Pump connection size Wet-end materials Supplied air connection size Ambient temperature Drive system L/min MPa C NL/min spm Note: Max. discharge capacity shows when pumping clear water at 2 C. C FS-8NT FS-1NF m on more 1 m on more 1 25A Flange, PFA,PFA Rc3/8 Rc1/2-4 By proximity switch Perfomance curves FS-8NT.686MPa.588MPa.49MPa.392MPa.294MPa.196MPa.686MPa.588MPa.49MPa.392MPa.294MPa.196MPa FS-1NF.7.686MPa.6.588MPa.5.49MPa.4.392MPa.3.294MPa.2.196MPa.1 H-Q Air consumption MPa.588MPa.49MPa.392MPa.294MPa MPa FS-8NT 27 3 FS-1NF (1) Dimentions in mm (1) (61)

10 FW/FW-H Series Robust bellows design provides for high pressure capability and extended service life The use of a thick bellows increases the pumps discharge pressure rating to as high as.45 MPa maximum. In addition, the bellows have three to four times longer service life than a diaphragm. This results lower case a substantially reduced downtime. This design is commonly used for chemical feed, the FW series can be used in high pressure and medium temperature (1-1 C) cleaning systems as well as for the circulation of CMP slurry liquids. The FW-H with its higher temperature capability ( 1-18 C) is ideal for chemical circulation in wafer cleaning applications. Construction and materials FW-2HT2 Sylinder head(non-wetted) AL+4F coating Valve case Easily adaptable fitting capability, the internally formed PFA suction and discharge tubes prevent the accumulation of particles. When connected to a special controller, the discharge can be monitored and controlled easily. Bellows Valve Pump head (Tube:PFA) The pump utilizes a built in proximity sensor driven control system to switch an external air solenoid valve. Leak sensors are also included as standard equipment. Pump identification FW - 2 H T1-1 Special specification Series code Without code : Standard specificaion Iwaki pneumatic drive bellows pump 1 : Special specification (1,2...) FW series Sealing structure of pump head/bellows T1 : Tube connection Pump size (suction opening / discharge opening) / Bellows separation type 2 : Max. discharge capacity 2L/min T2 : Tube connection 4 : Max. discharge capacity 4L/min (suction opening / discharge opening) / Welded one-piece structure 8 : Max. discharge capacity 8L/min Liquid temperature Without code : Medium-pressure specification(1-1 C) H : High-pressure specification(1-18 C) 9

11 I Pneumatic drive bellows pumps F Specification Max. discharge capacity Air supply pressure range Liquid temperature range Max. air consumption Max. stroke speed Pump connection size Supplied air connection size Ambient temperature Drive system L/min MPa C NL/min spm C FW ø19 φ16mm Rc1/4 Note: Max. discharge capacity shows when pumping clear water at 2 C. FW-4 FW-8 FW-2H FW-4H ø25 ø22mm ø19 ø16mm ø25 ø22mm Rc3/8 Rc1/2 Rc1/4 Rc3/8-4 By proximity switch Perfomance curves FW-2/2H.5MPa.5MPa.4MPa.4MPa FW-4/4H.5MPa.4MPa.5MPa.4MPa FW-8.5MPa.4MPa H-Q Air consumption.5mpa.4mpa G (1) 1 Dimentions in mm A (B) C D E F G H I J FW-2/2H C D J FW-4/4H H FW A (B) E 1 (1) F 6 1

12 FF/FF-H Series Energy efficient design consumes less air The FF series is designed for use with medium temperature liquids (Al cylinder type: 5 to 1 C, PVC cylinder type: 5 to 5 C) and the FF-H series is designed for temperatures ranging from 2 to 18. All liquid contact components are constructed of high purity fluoroesin materials with no metal or elastomers. The bellows are welded to the center eliminating leaks associated with heat cycles. The efficient design minimizes dead air volume surrounding the bellows to minimize air consumption. FF-2HT Construction and materials Shaft packing is easily accessible externally, no need to disassemble the pump for replacement. Valve case Pump head (Tube:PFA) Suction and discharge fluid connections are s and for FF models s with special fittings are available. The pump utilizes a built in proximity sensor driven control system to switch an external air solenoid valve. Leak sensors are also included as standard equipment. Valve Bellows PFA Sylinder head(non-wetted) AL+4F coating Pump identification Series code Iwaki pneumatic drive bellows pump FF : Medium-pressure specification(5-1 C) FF - 2 B T1-1 Special specification Without code : Standard specificaion 1 : Special specification (1,2...) Pump connection method (suction/discharge) T1 : Tube connection Pump size 1 : Max. discharge capacity 1L/min 2 : Max. discharge capacity 2L/min Cylinder material B : AL+4F coating C : PVC Series code Iwaki pneumatic drive bellows pump FF-H: Medium-pressure specification(5-1 C) Pump size 2 : Max. discharge capacity 2L/min 4 : Max. discharge capacity 4L/min FF - 2 H T - 1 Special specification Without code : Standard specificaion 1 : Special specification (1,2...) Pump connection method (suction/discharge) T : Tube connection 11

13 I Pneumatic drive bellows pumps F Specification FF-1BT/CT1 FF-2BT/CT1 FF-2HT FF-4HT1 Max. discharge capacity L/min Air supply pressure range MPa Liquid temperature range C B type : 5-1 C type : 5-5* 2-18 Max. air consumption NL/min Max. stroke speed. spm Pump connection size 1/2" 3/4" 3/4" ø25 x ø22mm Supplied air connection size Rc1/4 Rc1/4 Rc3/8 Ambient temperature C -4 Drive system By proximity switch * The cylinder of the "B" type is made of aluminum and tetrafluororesin and that of the "C" type is of PVC. Note: Max. discharge capacity shows when pumping clear water at 2 C. Perfomance curves FF-1B/C.15MPa.15MPa FF-2H MPa H-Q Air consumption 16.15MPa FF-2B/C MPa.15.15MPa H-Q FF-4H Air consumption MPa.12.15MPa G (1) Dimentions in mm A (B) C D E F G H I J FF C D J FF-2/2H / H FF-4H A (B) E 1 (1) F 6 12

14 FA Series Designs for circulating moderate temperature fluids There are two standard models available In the FA series; the FA-2E, a horizontal type for lower flow requirements and the FA-4VEW, a vertical type for a higher flow rates. A typical application for the FA-2E is in aspray system for single wafer processing while the FA-4VEW is suitable for batch cleaning of 2/3 mm wafers. FA-2 Construction and materials FA-4VEW The FA-4VEW is designed for a long service life and uses a robust bellows design suitable for continuous operation at higher discharge pressures. Discharge rates can be easily monitored and controlled when used with a dedicated controller The pump utilizes a built in proximity sensor driven control system to switch an external air solenoid valve. Leak sensors are also included as standard equipment. FA-2 cover(non-wetted) AL+4F coating Valve case PFA Bellows Pump head FA-4VEW Valve PFA Pump head Valve PFA cover(non-wetted) AL+4F coating Bellows Valve case Pump identification Series code Iwaki pneumatic drive bellows pump FA series Pump size 2 : Max. discharge capacity 2L/min 4 : Max. discharge capacity 4L/min Electrodes : Leak detector FA - 2 E1-1 Special specification Without code : Standard specificaion 1 : Special specification (1,2...) Pump drive system FA-2-1 : Air pulse timer switching valve system+electrodes E-1 : Controller system+electrodes FA-4 VEW : Controller system+electrodes Pump head and bellows welded into one piece 13

15 Pneumatic drive bellows pumps F Specification FA-2E-1 FA-4VEW Max. discharge capacity L/min 2 4 Max. supplied air pressure MPa.4 Liquid temperature range C 5-1 Max. air consumption Max. stroke speed NL/min spm Pump connection size Rc1/8 Rc1 Supplied air connection size Rc1/4 Rc3/8 Ambient temperature C - 4 Drive system By proximity switch Note: Max. discharge capacity shows when pumping clear water at 2 C. Perfomance curves FA-2.4MPa.4MPa 4.45 FA-4VEW.4.4MPa H-Q Air consumption MPa.1MPa.1MPa.15MPa.4MPa φ233 (15) (96) (46) 545 Dimentions in mm FA-2 FA-4VEW (192) 4 M φ

16 Option Dampener The Installation of a dampener on the discharge side of the pump will reduce pulsation and prevent particle release through filters as well as from pipe vibration. Pulse dampeners PD-H (for wet use) For the FS-H only A low cost and compact dampener. Liquid inside the bellows can be easily drained. A leak sensor is included as a standard. Pulse dampeners PD-H1 FF FF-H FA No automatic pressure adjustment. The PD-H1 is a medium-pressure design for use with FF, FF-H and FA pumps. * s with leak sensors are available through special order. Specification Applicable pumps Max. supplied air pressure MPa Liquid temperature range C Supply air pressure range MPa Pulsation pressure range* MPa Connection size Supply air connection size Wet-end materials Example of installation PD-15H PD-3H PD-6H FS-15HT1/T2 FS-3HT1/T2 FS-6HT1/T or less 1/2" 3/4" φ25 φ22mm Rc1/8, PFA *Liquid viscosity should be 5mPa s or below. Note : The damper cannot be used at a pressure above the level specified for the pump. Filter Automatic dampeners PDA-H1/WB/W FS-H FW FW-H FF Automatic pressure adjustment minimizes downtime, eliminates manual adjustments. Liquid inside the bellows can be easily drained. (PDA-WB/W model) FF-H The PDA-H1 is a medium pressure design for use with the FF, FF-H, and FA pumps. The PDA-WB is a high-pressure design suitable for use with the FW, FW-H, and FS-H pumps. Typical applications include drug delivery and dispensing. FA Washing tank Dampener Circulation pump FS series Switching valve Regulator Regulator Compressed air source The PDA-WB/W includes a leak sensor as standard. (For the PDA-H1, a leak sensor is available through special order.) For the PDA-WB/W, only the specified liquid pipe joint can fit the model. Please contact us before use to check if your joint is applicable. Automatic dampeners PDA-1WBN For the FS-1NF only Automatic pressure adjustment minimizes downtime, eliminates manual adjustments. Dampener pressure is automatically adjusted to the minimum pulse pressure even if the pump discharge load changes due to a clogged filter. The unit prevents particles being released from the filter and the pimping vibration. A leak sensor is included as a standard. 15

17 Pneumatic drive bellows pumps F Specification Applicable pumps Liquid temperature range Max. supplied air pressure Pulsation pressure range Connection size Supply air connection size Wet-end materials C MPa MPa PDA/PD-1H1 PDA/PD-2H1 PDA/PD-4H1 FF-1B/CT1 1/2".3 FF-2B/CT1 FF-2HT or less 3/4" Rc1/4, PFA FA-4VEW FF-4HT1.4 ø25 ø22mm Applicable pumps Liquid temperature range Max. supplied air pressure Pulsation pressure range Connection size Supply air connection size Wet-end materials C MPa MPa FW-2/FW-2H/ FS-15/FS-3 Note 1: The damper cannot be used at a pressure above the level specified for the pump. Note 2: The range of pulse pressures depends on conditions of usage. For further information, please call us. Note 3: For the PDA-WB, some joints are not applicable. Please contact us for details. PDA-2WB/W PDA-4WB/W PDA-8WB/W FW-8 FW-4/FW-4H/ FS or less ø19 x ø16mm Rc1/4, PFA ø25 x ø22mm PDA-1WBN Applicable pumps Max. supplied air pressure Liquid temperature range MPa C FS-1NF Supply air pressure range MPa Pulsation pressure range* Connection size Supply air connection size MPa.15 or less 25A Rc 1/4 Wet-end materials *Liquid viscosity should be 5mPa s or below. Note 1: The max. liquid pressure is obtained when a discharge line is shut off. Note 2: Contact us for the special damper for the FS-8NT. 16

18 Quick Exhaust Valve When installed on the air exhaust lines at the pump the exhaust valve will help to reduce pulsation and prevent particle release from the filter as well as from pipe vibration. QEV Quick exhaust valves should be installed between the pump and the external solenoid valve. This helps to prevent corrosion of the solenoid valve from return air. It also reduces exhaust resistance to allow the bellows to move smoothly through each cycle. Specification QEV-8V QEV-1V Connection size Rc1/4 Rc3/8 Applicable pumps FW-2/2H, FF-1/2/2H, FA-2, FS-15/3 FW-4/4H, FF-4H, FA-4, FS-6/8N *Please contact us for quick exhaust valves for FS-1HT and the FS-1NF. Pump Controller/Driver The external solenoid valve is switched in response to signals from the built-in proximity sensors on each side of the bellows to ensure reliable operation of the pump. Two controller options are available along with one driver option. Pump controller FDC-1 FS-H FS-N FA FW FW-H FF FF-H The pump discharge rate can be monitored and maintained at a constant level by connecting an electric air regulator (optional) to the pump air supply line. This enables stable flow and filtering even when the discharge load varies due to lncreased filter resistance. In addition, the service life of the bellows will be maximized because the difference between its internal and external pressures is kept to a minimum. The controller can monitor the flow rate, the number of strokes, and the total count. The unit operates either in the AUTO mode using external signals or in the MANU mode for manual control. The flow rate can be set at two different values as desired. In addition to the sensor mode using the proximity sensors, the timer mode is included as a standard feature. This enables continued pump operation in the timer mode in case of the failure of a proximity sensor. The unit is equipped with various alarm displays and output functions, including leak alarm and a pump malfunction alarm. Specifications General specification Input specification Output specification (external output) Dimensions in mm Power source Power consumption Ambient temperature Working atmosphere Start, Alarm reset Leak alarm Pump malfunction alarm Life alarm First alarm W158 x D152 x H48 DC24V ±1% 24VA max. 5 C Without corrosive gas in surrounding areas No-voltage contact or open collector Voltage ON: 3V maximum Voltage OFF: 18V maximum Output form: NPN open collector Switching capacity: DC24V.4A 17

19 Pneumatic drive bellows pumps F Chemical replenishing system CFD-1T-B With a resolution of up to 1.mL/ shot fine dispense volumes can be achieved The resolution of the CFD-1T-B has been greatly improved compared to our existing models. The minimum flow of 1mL/shot offers greater accuracy in chemical condensation control that is required in the wafer cleaning process. The CFD-1T-B always feeds the correct quantity of chemical without overshot eliminating excess liquid wastage. In addition, the anti-siphon mechanism prevents unintentional siphoning. The fluoroplastic wet end (, PFA, PCTFE) is capable of handling strong acids, alkalines and hydrogen peroxide, typical chemicals required for semiconductor processing., PFA, PP, PVC external parts and coated screws provide additional protection against chemical attack from harsh environments. Adjustment of the stroke length to give between mL/shot is simple by removal of the bottom cover (Factory default is 1.mL/shot). Every unit is equipped with a leakage sensor to immediately detect a leak. *An 8 ml/shot type is also available. Please contact us for more information. Construction and materials Ball valve Valve seat PCTFE Valve case Tube PFA OUT Fitting Valve gasket Valve guide Pump head Bellows IN Fitting Specifications Dimentions in mm Application Chemical replenishing Pump specification Photosensor specification Discharge capacity ml/shot Max. discharge pressure MPa Liquid temperature range C Max.stroke speed spm Max. supply air pressure MPa Max. air consumption NL/min Wet end materials Liquid port bore Supply air port bore Weight kg Power voltage Output mode Allowable current Cord 1mL/shot.5MPa 2-6 C 3spm NL/min, PFA, PCTFE 1/4 ( ) Rc1/8 1.1kg Transmission type micro photo sensor 5-24V DC±1% NPN transistor open collector 5mA or below 5m PVC four-core cable (Outer dia.5.2mm) with.5 - round teminal (5) (272) (5) (36) 4 *Please request a separate drawing for external dimensions. 18

20 IWAKI World-wide Network EUROPE NORTH AMERICA ASIA OCEANIA SOUTH AMERICA IWAKI Saitama plant IWAKI Miharu plant 6-6 Kanda-Sudacho 2-chome Chiyoda-ku Tokyo Japan TEL : (81) FAX : ( )Country codes IWAKI has global net work. Please find your distributor location at European office : IWAKI Europe GmbH TEL: (49) FAX: U.S.A. : IWAKI America Inc. TEL: (1) Germany : IWAKI Europe GmbH TEL: (49) FAX: Argentina : IWAKI America Inc. (Argentina Branch) TEL: (54) Holland : IWAKI Europe GmbH (Netherlands Branch) TEL: (31) FAX: (49) Singapore : IWAKI Singapore Pte Ltd. TEL: (65) Italy Spain : IWAKI Europe GmbH (Italy Branch) : IWAKI Europe GmbH (Spain Branch) TEL: (39) TEL: (34) FAX: FAX: Indonesia Malaysia : IWAKI Singapore (Indonesia Branch) : IWAKIm Sdn. Bhd. TEL: (62) TEL: (6) Belgium : IWAKI Belgium N.V. TEL: (32) FAX: Australia : IWAKI Pumps Australia Pty Ltd. TEL: (61) IWAKI has global net work. Denmark : IWAKI Nordic 6-6 Kanda-Sudacho A/S 2-chome Chiyoda-ku TEL: (45)48 Tokyo FAX: Japan 48 TEL : (81) Hong FAX Kong : : IWAKI 8892 Pumps Please Co., Ltd. find your distributor TEL: location (852)267 at 1168 Finland : IWAKI Suomi Oy TEL: (358) FAX: China : GFTZ IWAKI Engineering & Trading Co., Ltd. TEL: (86) France European office : IWAKI IWAKI France Europe S.A. GmbH TEL: TEL: (49)2154 (33) FAX: IWAKI Pumps (Shanghai) Co., Ltd. FAX: U.S.A. : IWAKI America Inc. TEL: TEL: (1)58 (86) Norway Germany : IWAKI IWAKI Norge Europe AS GmbH TEL: TEL: (49)2154 (47) FAX: FAX: Argentina Korea : IWAKI IWAKI America Korea Co.,Ltd. Inc. TEL: (82) (Argentina Branch) TEL: (54) Sweden Holland : IWAKI IWAKI Sverige Europe GmbH AB TEL: (46) FAX: Taiwan IWAKI Pumps Taiwan Co., Ltd. TEL: (886) (Netherlands Branch) TEL: (31) FAX: (49) Singapore : IWAKI Singapore Pte Ltd. TEL: (65) U.K. Italy : IWAKI IWAKI Pumps Europe (UK) GmbH Ltd. TEL: (44) FAX: Thailand IWAKI (Thailand) Co.,Ltd. TEL: (66) (Italy Branch) TEL: (39) FAX: Indonesia : IWAKI Singapore (Indonesia Office) TEL: (62) Spain : IWAKI Europe GmbH TEL: (34) Vietnam IWAKI Pumps Vietnam Co., Ltd. TEL: (84) (Spain Branch) FAX: Malaysia : IWAKIm Sdn. Bhd. TEL: (6) Belgium : IWAKI Belgium N.V. TEL: (32) FAX: Australia : IWAKI Pumps Australia Pty Ltd. TEL: (61) Caution for safety use: Actual pumps may differ from the photos. Denmark : IWAKI Nordic A/S TEL: (45) FAX: Hong Specifications Kong : IWAKI and Pumps dimensions Co., Ltd. are subject to change TEL: without (852)267 prior notice Finland Before : IWAKI use Suomi of pump, Oy read instruction manual TEL: (358)9 carefully to use FAX: the 9 product correctly. China For further : GFTZ details IWAKI please Engineering contact & us. Trading Co., Ltd. TEL: (86) France : IWAKI France S.A. TEL: (33) FAX: : IWAKI Pumps (Shanghai) Co., Ltd. TEL: (86) Norway : IWAKI Norge AS Our TEL: products (47)23 and/or parts of products FAX: 23 fall 38 in 49 the 1 category of goods Korea contained : IWAKI in control Korea list Co.,Ltd. of international regime for export TEL: (82)2 control Legal attention related to export. Please be reminded that export license could be required when products are exported due to export control regulations of countries. Sweden : IWAKI Sverige AB TEL: (46) FAX: Taiwan : IWAKI Pumps Taiwan Co., Ltd. TEL: (886) The U.K. posting and : IWAKI copying Pumps from (UK) this catalogue Ltd. without permission TEL: is (44)1743 not accepted firmly. FAX: Thailand : IWAKI (Thailand) Co.,Ltd. TEL: (66) ( )Country codes Vietnam : IWAKI Pumps Vietnam Co., Ltd. TEL: (84) Caution for safety use: Before use of pump, read instruction manual carefully to use the product correctly. Legal attention related to export. CAT-W 51-6 FAX: FAX: FAX: FAX: FAX: Actual pumps may differ from the photos. Specifications and dimensions are subject to change without prior notice. For further details please contact us. Our products and/or parts of products fall in the category of goods contained in control list of international regime for export control. Please be reminded that export license could be required when products are exported due to export control regulations of countries. FAX: FAX: FAX: FAX: FAX: FAX: FAX: FAX: FAX: FAX: FAX: FAX: FAX: FAX: FAX: FAX: FAX: FAX: FAX: The posting and copying from this catalogue without permission is not accepted firmly PDF