SVG SERIES 8600 SPARE PARTS LIST

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Gloria Pearson
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1 PARTS FOR INDEXER MODULE XX Sensor, optical Switch, boat sensor Switch, indexer pitch select Motor, conveyer, 24VDC, 5.9:1 ratio Motor, lead screw, 15VDC, 5.9:1 ratio Bearing, ball, dbl shield. 1/8 ID X 5/16 OD Bearing, ball, flanged, dbl shield, 1/8 ID X 5/16 OD Ball bushing, 1/2" Seal, ball bushing, 1/2" Bearing, ball, flanged, dbl shield, 1/4 ID X 5/8 OD O-Ring, polyurethane,.362 ID X.103 D O-Ring, EP, ID X.139 D O-Ring, polyurethane, ID X.103 D O-Ring, polyurethane, ID X.103 D Adapter, 1/16 barb to Fitting, valve body Connector, hose, 1/16 ID Spring, compression Spring, compression PCB, Indexer interface PCB, Quad sensor PCB, speed control Capacitive sensor 2 PARTS FOR SPIN PROCESS MODULE M Centering tab, 6", LHS M Centering tab, 6", RHS Optical sensor Optical sensor Resistor S Digital Vacuum Switch, CKD Gearmotor, 24VDC, 10:1 ratio Valve, 3-way, 24VDC Valve, 3-way, 24VDC, Kalrez seal Valve, solenoid, 24VDC, 3-way, manifold Valve, solenoid, 24VDC, 4-way, dual speed control Valve, solenoid, 24VDC, 3-way, single speed control Valve, solenoid, 24VDC, 3-way, single speed control Valve, 2-way, 24VDC Wafer chuck 6" for SVG Coater Rubber cap Ball bearing, dbl shield, 1/8 ID X 5/16 OD Bushing, ball, oil seal Ball bearing, dbl shield, 1/4 ID X 5/8 OD Ball bushing, 3/8 ID X 7/8 OD S Ball bearing, dbl shield, 3/8 ID X 7/8 OD 2 Page 1 of 5

2 PARTS FOR SPIN PROCESS MODULE (CONT.) Pillow block Vacuum seal Bearing, linear rotary, 3/8" O-Ring, polyurethane,.362 ID X.103 D O-Ring, polyurethane, ID X.103 D Timing belt, 0.080" pitch O-Ring, polyurethane, ID X.103 D Air cylinder, developer module Air cylinder, coater module Carriage air cylinder Air cylinder, centering tabs Air cylinder, 3/4" bore X 1" stroke Adapter Adapter, 1/16 barb to Swivel fitting, brass, 1/8 NPTM X 1/16 barb Fitting, valve body Hose connector, 1/16 ID Pipe plug, brass, 1/8 NPTM Adapter, 1/16 ID tube to 1/8 NPTM Fitting, 1/4 OD tube to 1/8 NPTM, brass Needle valve, 1/8 NPTM, SS Tee, 1/4 OD tube to 1/4 OD tube to 1/8 NPTM, brass Elbow, 1/4 OD tube by 1/8 NPTM, brass Needle valve, 1/8 NPTM, SS Timing pulley Cable assembly, nylon coated EMI filter assembly Interruptive sensor harness, LHS Interruptive sensor harness, RHS Moving dispense harness with stepper motor Pivoting dispense harness PCB, single sensor A3-01 PCB, dual interruptive sensor, dual speed control A-01 PCB, vacuum delay PCB, single sensor Bowl seal Valve solenoid, 3 way for top EBR N Sucback vavle for top EBR Cover interlock harness, coater Interlock switch assy., Develpoper Wafer chuck 6", SVG Negative Developer Wafer chuck 6", SVG Positive developer Air ring 6", SVG Positive developer Catch cup, bottom section for coater Catch cup, insert section for coater Catch cup, top section for coater D Catch cup, bottom section for SVG Negative developer D Catch cup, insert section for SVG Nagative Developer High sped motor 1 Page 2 of 5

3 Low speed motor for 86 Positive developer S AIO high speed motor Catch cup, top section for SVG Negative Developer Electric clutch for 86 Positive Developer S Cybor teflon solenoid, Hi-purity 1 PARTS FOR OVEN MODULE Temperature switch Gearmotor, 24VDC, 10:1 ratio Solenoid valve, 4-way Temperature probe, RTD Watlow RM Heater element, 115V, 450 W Ball bearing, dbl shield, 1/8 ID X 5/16 OD Bushing, ball, oil seal Ball bearing, dbl shield, 1/4 ID X 5/8 OD Ball bushing, 3/8 ID X 5/8 OD O-Ring, polyurethane, ID X.103 D O-Ring, silicone, ID X.103 D O-Ring, silicone, X.103 D Air cylinder, carriage Adapter, 1/16 barb to Fitting, valve body Hose connector, 1/16 ID Cable assembly, nylon coated EMI filter assembly Sensor harness assembly, optical interruptive, LHS Sensor harness assembly, optical interruptive, RHS A2-01 PCB assembly, dual interruptive sensor, dual speed control Stepper motor for HPO Vacuum solenoid S Digital vacuum switch, CKD Watlow PARTS FOR MAIN CONTROL ENCLOSURE Relay, 30A, 4PST, 24VAC coil Transformer, 115/230, 25.2 VAC Power switch Lens cap, white Contact block, NO Lamp, 28V Lamp, 28V, 1.12W Fuse, 2A, slo-blo Fuse, 1/2A, slo-blo Fuse, 1/4A Circuit breaker, 3 pole, 15A 1 PARTS FOR POWER JUNCTION BOX Page 3 of 5

4 LED, red, panel mount Relay, 3PDT, 24VDC Relay, 25A, 230V Relay, 2PDT, 24VDC, 15A Fuse, 3AG, 1A Circuit breaker, 3A Circuit breaker, 7A 1 PARTS FOR POWER JUNCTION BOX (CONT.) PCB, Heater Controller Interface 1 PARTS FOR CARD CAGE Overlay, card cage, 8626/ Overlay, card cage, 8632/ Transistor, MJ Transistor, 2N Transistor, 2N Switch, key lock Lens cap, white Spray cover Switch, light button Lamp, 28 VDC Voltage regulator, 5VDC Cable, communication Flat cable, 81 version Flat cable, 81, 86, and 88 versions Control Panel Power Harness, 81 version Control Panel Power Harness, 81, 86, and 88 versions Flat cable, 86 and 88 versions E CPU PCB Track Interface PCB Display PCB Keyboard PCB B Motherboard PCB Connector Interface PCB Power Transistor PCB NETTRACK NET TRACK CPU B Motherboard PCB C Track Interface PCB 1 PARTS FOR CHILL PLATE MODULE S Didital vacuum switch, CKD Gearmotor Vacuum solenoid Solenoid, 2-way, liquid Ball bearing, dbl shield, 1/8 ID X 5/16 OD 4 Page 4 of 5

5 Ball bearing, flanged, dbl shield, 1/8 ID X 5/16 OD Ball bearing, 5/ O-Ring, silicone, ID X.103 D Flowmeter O-Ring seal Chill Plate PCB Banner Sensor Assembly 1 PARTS FOR POWER SUPPLY MODULE Relay, 24VDC, 3PDT Fuse Panel Assembly 1 Page 5 of 5

MTI SPARE PARTS LIST FOR 86XX

MTI SPARE PARTS LIST FOR 86XX 1/12 INDEXER MODULE 03215 LEAD SCREW 03225 PULLEY DRIVE CONVEYOR 03231 NUT, LEAD 100-032 CAPACITIVE SENSOR 109-001 CASSETTE SWITCH 112-012 GEAR MOTOR, LEADSCREW 112-019 GEAR