High Accuracy Eddy Current Type Displacement Sensor GP-A SERIES. Resolution 0.04 % F.S., Linearity ±0.5 % F.S., IP67G environment resistance

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11 High Accuracy ddy Current Type Sensor SRIS Related Information General terms and conditions... F-7 Glossary of terms... P.1493 Sensor selection guide... P.1055~ General precautions... P.1501 PHOTO PHOTO MASUR ITY Resolution 0.

04 % F.S. 5S (For 1 mm 0.039 in sensing type) Resolution: 0.4 µm 0.

1 11 High Accuracy ddy Current Type Sensor SRIS Related Information General terms and conditions... F-7 Glossary of terms... P.1493 Sensor selection guide... P.1055~ General precautions... P.1501 PHOTO PHOTO MASUR ITY Resolution 0.04 % F.S., Linearity ±0.5 % F.S., IP67G environment resistance Accurate measurement of minute displacements Minute displacement of metallic objects can be accurately measured with a resolution of 0.04 % F.S. 5S (For 1 mm in sensing type) Resolution: 0.4 µm mil NVIRONAL RSISTANC The protected as per IP67G With IP67G environment resistance, various measurements are possible under many different conditions. FUNCTIONS quipped with a zero-adjustment function y pressing the zero-adjustment button, you can reset the output voltage to 0 V with one touch. (Resets the current output to 4 ma) This function comes in handy when performing tolerance diagnosis of a masterwork to be used as the standard. asy adjustment for product changes. Remote operation is also possible by way of an external input. MOUNTING s can be mounted in narrow spaces If mounting standard types and different types parallel to each other, they use up one-third the space needed for mounting compared to the same models. In addition, the 14F type can be mounted close together and the s can be set in a narrow range for distortion and other difficult measurements. Linearity ±0.5 % F.S. is accurately output since it incorporates a high accuracy linearity correction circuit. ASIC PRFORMANC Stable temperature characteristics These s boast a 2 mm in sensing range enabling 0.03 % F.S./ C. (xcluding the different type). 8S (For 2 mm in sensing type) Temperature characteristics: 0.6 µm/ C mil/ C OPRAILITY Fine adjustment of output Fine adjustment according to the sensing conditions is possible with shift and span functions. +5 V 0 V 5 V range: ±0.5 V 6.5 V Zero-adjustment settable range 5 V Maximum distance range: ±0.5 V Span adjustment 3.5 V 0 V Maximum distance

2 High Accuracy ddy Current Type Sensor SRIS 1118 APPLICATIONS Measuring gap between rollers Fine gap measurement is possible to control the gap between rollers. ORDR GUID Measuring parallelism of chassis ven a slight tilt can be reliably detected. For 1 mm in sensing For 2 mm in sensing For 5 mm in sensing Type Non-threaded type Non-threaded type Threaded type Threaded type s ø5.4 ø0.213 ø8 ø0.315 M10 M12 Appearance (mm in) Sensing range Set model No. Output 0 to 1 mm 0 to in 0 to 2 mm 0 to in 0 to 2 mm 0 to in 0 to 5 mm 0 to in 5S 5SI 8S 8SI 10M 10MI 12ML 12MLI Analog voltage Output voltage: 0 to 5 V Analog current Output current: 4 to 20 ma ITY For 3 mm in sensing Front sensing type to 3 mm 0 to in 14F 14FI Please ensure to order the and the amplifier as a set. The set is calibrated and delivered. Type Model No. Description mounting bracket MS-SS5 MS-SS8 Mounting bracket for 5S(I) Mounting bracket for 8S(I) mounting bracket MS-SS5 MS-SS8 It enables easy fixing of the.

3 1119 High Accuracy ddy Current Type Sensor SRIS SPCIFICATIONS ITY Type For 1 mm in sensing For 2 mm in sensing For 5 mm in sensing For 3 mm in sensing Non-threaded type Non-threaded type Threaded type Threaded type Front sensing type Item Set model No. 5S 5SI 8S 8SI 10M 10MI 12ML 12MLI 14F 14FI Sensing range 0 to 1 mm 0 to in 0 to 2 mm 0 to in 0 to 5 mm 0 to in 0 to 3 mm 0 to in Standard sensing object Supply voltage Current consumption Analog output Analog voltage output Analog current output Response Resolution Linearity Alarm output Iron sheet 8 8 t 1 mm t in Iron sheet t 1 mm t in Analog voltage Output voltage: 0 to 5 V Output impedance: 100 Ω approx. 24 V DC ±10 % Ripple P-P 10 % 150 ma 1.6 khz ( 3 d) 0.04 % F.S. Within ±0.5 % F.S. Iron sheet t 1 mm t in Analog current Output current: 4 to 20 ma Load resistance: 0 to 350 Ω NPN open-collector transistor Maximum sink current: 100 ma Applied voltage: 30 V DC (between alarm output and 0 V) Residual voltage: 1.6 V (at 100 ma sink current) 0.4 V (at 16 ma sink current) Output operation Turns ON when the connection is improper or the cable is disconnected Short-circuit protection xternal zero-adjustment input Zero-adjustment setting method Power indicator Over indicator Alarm indicator Adjustments Temperature characteristics (Note 2) 0.5 μm/ C mil/ C Input condition: Non-voltage contact or NPN open-collector transistor input Signal condition: Low... 0 to 1 V (duration 30 ms ) High... 5 to 30 V, or open Operation: Low... xternal zero-adjustment setting High... xternal zero-adjustment ineffective Push button setting / xternal input setting Green LD (lights up when the power is ON) Orange LD (lights up when sensing range is exceeded) Yellow LD (lights up when the alarm output is ON) 1 (by push-buttons), 2 Span adjustment (by 14-turn adjuster) 0.6 μm/ C mil/ C 1 μm/ C mil/ C 0.6 μm/ C mil/ C 1 μm/ C mil/ C 1.5 μm/ C mil/ C 2.5 μm/ C mil/ C Iron sheet t 1 mm t in 0.9 μm/ C mil/ C 1.5 μm/ C mil/ C 0.4 μm/ C mil/ C 0.8 μm/ C mil/ C 2.0 μm/ C mil/ C 1.2 μm/ C mil/ C Protection IP67 (IC), IP67G Ambient 10 to +55 C +14 to +131 F, Storage: 20 to +70 C 4 to +158 F temperature 0 to +50 C +32 to +122 F (No dew condensation), Storage: 0 to +50 C +32 to +122 F Ambient humidity 35 to 85 % RH, Storage: 35 to 85 % RH Voltage withstandability 250 V AC for one min. between all supply terminals connected together and enclosure Insulation resistance 20 MΩ,, with 250 V DC megger between all supply terminals connected together and enclosure Vibration resistance 10 to 55 Hz, 1.5 mm in amplitude in X, Y and Z directions for two hours each 10 to 150 Hz, 0.75 mm in amplitude in X, Y and Z directions for two hours each Shock resistance 500 m/s 2 acceleration (50 G approx.) in X, Y and Z directions for five times each 100 m/s 2 acceleration (10 G approx.) in X, Y and Z directions for five times each nclosure: Stainless steel (SUS303) nclosure: Stainless steel (SUS303) nclosure: rass (Nickel plated) nclosure: Stainless steel (SUS303) Material Sensing part: Polyalylate Sensing part: AS Sensing part: Nylon Sensing part: AS nclosure: AS Cable attached high Cable length (Note 3) Total length up to 100 m ft is possible with 0.3mm 2,, cable. Net Weight 40 g approx. 50 g approx. (Note 4) 45 g approx. (Note 4) 50 g approx. 0 g approx. Accessories Nut: 2 pcs., Toothed lock washer: 1 pc. 2 pcs. each of M3 countersunk head screws, spring washers, plain washers and M3 nuts Notes: 1) Where measurement conditions have not been specified precisely, the conditions used were an ambient temperature of +20 C +68 F. 2) These values are for a range which is 20 to 60 % of the maximum sensing distance. 3) Take care that the output voltage is reduced due to the resistance of the wiring cable. 4) The given weight of the threaded type is the value including the weight of the nuts and the toothed lock washer.

4 1121 High Accuracy ddy Current Type Sensor SRIS ITY PRCAUTIONS FOR PROPR Make sure to use in combination the and amplifier which have the same production serial number (5 digits). Since adjustment is done before shipment, if items with different production serial numbers are combined, the sensing characteristics will deteriorate even if they have the same model number. The length of the cable cannot be changed. Linearity in case of disc-shaped or cylindrical objects In case the sensing object is disc-shaped or cylindrical, the linearity of the analog output varies with the sensing object size. In such a case, conduct zero adjustment when close mounting and, by adjusting to the maximum sensing distance and to 5 V as the voltage output (current output 20 ma), linearity (±0.5 % F.S.) can be attained on a full-scale if the sensing object s size is larger than those described in the table below. Model No. Iron disc diameter ø (mm in) Iron cylinder diameter ø (mm in) 5S(I) S(I) M(I) ML(I) F(I) <In case of disc> Iron disc ø (mm in) t: 3 mm in Mounting t <In case of cylinder> Iron cylinder l ø (mm in) l: 50 mm in Mounting with set screw The tightening torque should be under the value given below. Make sure to use an M3 or smaller set screw having a cup-point. <Non-threaded type > Mounting with nut The tightening torque should be under the value given below. <Threaded type > 10M(I) Attached toothed lock washer Mounting plate Never use this product as a sensing device for personnel protection. In case of using sensing devices for personnel protection, use products which meet laws and standards, such as OSHA, ANSI or IC etc., for personnel protection applicable in each region or country. Set screw (M3 ) (Cup-point) Model No. A (mm in) Tightening torque A 5S(I) N m 8S(I) 0.58 N m Note: Do not apply excess torque. 12ML(I) Attached toothed lock washer Mounting plate Model No. (mm in) Tightening torque 10M(I) N m 12ML(I) N m Note: Install in such as way so that the nut does not protrude from the screw. Mounting 14(l) Distance from surrounding metal Refer to p.1501 for general precautions. As metal around the sensor may affect the sensing performance, pay attention to the following points. <mbedding of the sensor in metal> Since the analog output may change if the sensor is completely embedded in metal, keep the minimum distance specified in the table below. Non-threaded type threaded type Model No. C (mm in) D (mm in) 5S(I) ø S(I) C ø0.709 D Metal 10M(I) ML(I) ø50 ø <Front sensing type > 14F(I) can be used by being completely embedded in metal. However, the surrounding metal should not protrude beyond the Metal sensing face. Mutual interference When two sensor heads are installed in parallel or face to face, since the specifications may not be met, keep the minimum separation distance specified in the table below. Model No. Non-threaded type threaded type etween I type and non- I type (mm in) Front sensing type etween two I types or two non- I types 5S(I) S(I) 10M(I) ML(I) F(I) Notes: 1) I type is different type. 2) If the required resolution is lower than the specification (0.04 % F.S.), it is possible to bring the s nearer than the separation distances given in the table above. For further details, please contact our office. Dimensions of suitable crimp terminals (Unit: mm in) Y type Round type (After crimping) ø3.2 ø Note: Please use crimp terminals which have insulation sleeves. Recommended crimp terminal: Type Others M3 countersunk head screw 8 mm in 2-M3 tapped or thru-holes M3 nut Spring washers Plain washers (After crimping) Do not use during the initial transient time (0.5 sec.) after the power supply is switched on. Do not use the sensor at places having intense vibrations, as this can cause malfunction.

5 High Accuracy ddy Current Type Sensor SRIS 1122 DIMNSIONS (Unit: mm in) 5S(I) 8S(I) 10M(I) M ML(I) 14F(I) ø2.5 ø0.098 high ø5.4 ø0.213 ø2.5 ø0.098 high ø8 ø0.315 ø18 ø0.709 ø10.1 ø0.398 ø21 ø Center of sensing MS-SS5 MS-SS8 ø2.5 ø0.098 high 25.7 Toothed lock washer (internal tooth) M Toothed lock washer (internal tooth) ø0.252 ø2.5 ø0.098 high ø2.5 ø0.098 high 2-countersunk mounting holes for M3 ø0.252 The CAD data in the dimensions can be downloaded from our website. All models Cover removed condition 2-ø5 ø0.197 mounting holes 2-ø8.2 ø Suitable for 35 mm in width DIN rail for connection (119) (4.685) Shift-down button Shift-up button Zero-adjustment button Span adjuster utton operation effective / ineffective selection switch (100) (3.937) Power indicator (Green) Over indicator (Orange) Alarm indicator (Yellow) Mounting bracket for 5S(I) (Optional), mounting bracket for 8S(I) (Optional) ITY A Material: Nylon ø3.5 ø0.138 mounting holes C D Model No. Item MS-SS5 MS-SS8 A C D Applicable model 5S(I) 8S(I)

Micro-differential Pressure High-precision Digital Pressure Sensor For Gas DP-M SERIES

MODE 751 Micro-differential Pressure High-precision Digital Pressure Sensor For Gas SERIES Related Information General terms and conditions... F-7 Glossary of terms... P.1469 ~ Sensor selection guide...