Transfer Engineering and Manufacturing,

Transcription

1 Precision Magnetic Manipulators HV and UHV TRANSFER SYSTEMS Patented independent linear/rotary motion increases versatility Rugged, reliable with repeatable accuracy High decoupling force Horizontal or vertical operation Customer specified transfer lengths All metal internal construction Customized units available Transfer Engineering and Manufacturing, Inc. offers a family of precise magnetically operated linear, rotary, and linear and/or rotary motion sample manipulation systems for use in high vacuum, ultra-high vacuum or other controlled environments. Precision Magnetic Manipulators (PMMs) are manufactured with all-metal internal construction and bakeable to 250 C. Three main branches of the PMM family are available and each can be easily customized. Styles available are Standard PMMs with increased force and torque beyond typical magneticallycoupled transfer arms. The PMM-Lite is less-complex and of lower cost for situations requiring simple linear and rotary motion. Rotary-Only units provide versatile, reliable and precise rotary motion into a sealed chamber. Customized units are designed for a wide range of custom or special transfer systems. LINEAR OR LINEAR/ROTARY PRECISION MAGNETIC MANIPULATORS Standard, Models DBLOP/DBLOM and DBLRP/DBLRM Westinghouse Dr., Suite 100 Fremont, CA Phone Fax Our manipulators handle more axial force and torque and exhibit better compliance and load carrying capability than typically expected Independent rotation from a magnetically-coupled feedthrough. This increased force and torque results in greater tactile feedback, lower backlash and a greater ability to Standard Model DBLOP/M and DBLRP/M PMMs are manufactured overcome friction. Modern rare earth to requested transfer lengths magnets and a unique design were used to develop manipulators with this Independence of linear and rotary motion unusually high performance. is the key to versatility in these systems.

2 The round rotation shaft is contained within a square linear motion shaft and rotates independently. In the linear direction, both shafts move together. Rotary motion and linear motion can be used in combination or separately, providing numerous potential variations of sample movement. Examples include locking devices for sample transfer, clamping devices, vertical lift mechanisms and rotatable stages. These PMMs are manufactured as linear-only or linear/rotary models. Two are linear-only models, DBLOM XX and DBLOP XX (XX is the stroke length in inches). Two are linear/rotary models, DBLRM XX and DBLRP XX. All models have UHV all-metal internal construction. Models DBLOM XX and DBLRM XX use all metal construction throughout, and as a result, have very low stiction. These models are intended for manipulator applications where very good tactical feedback is desired and for high dutycycle applications. Models DBLOP XX and DBLRP XX use polymeric bearings in the carriage outside the vacuum, and as a result, have a slightly higher stiction than the metal bearing units. They are intended for sample transferring and similar functions where the slight amount of stiction is preferred. This construction is a more economical design than the external metal bearing units. Specifications are listed on page 3. DIAGRAM OF MODELS DBLOP/M AND DBLRP/M No PL LINEAR-ONLY MODELS Magnet Carriage Front Bearing Assembly LINEAR/ROTARY MODELS.250 SS 3.17 for DBLOP/M 3.75 for DBLRP/M 3.0 for DBLOP/M 4.95 for DBLRP 6.45 for DBLRM 1.50 OD 2.75 CFF Double Sided CFF 2.75 CFF Model DBLRP/M Linear/Rotary Model DBLOP/M Linear-Only PMM-Lite, Model MASLR The PMM-Lite TM is a single-shaft precision magnetic manipulator that is ideal for situations that require a less sophisticated range of motion than those offered by the standard PMMs. It is ideal for applications requiring conventional linear and/or rotary motions with high linear force and torque. Examples include uncomplicated translation motion and simple loadlocks. The PMM-Lite, Model MASLR-XX, combines the linear and rotary motions into a single-shaft simplifying the construction and making it a less expensive alternative to the standard PMMs. The PMM-Lite offers very competitive linear force and torque to that of other conventional manipulators. The PMM-Lite has the same solid "feel" of the standard Transfer Engineering precision magnetic manipulators and provides good tactile feedback for accurate sample manipulation. Retaining the UHV characteristics of the standard PMM, the PMM-Lite has only metal parts exposed to vacuum and can be baked to 250 C with the magnet carriage removed. It was designed with low maintenance in mind. Specifications are listed on page 3. DIAGRAM OF PMM-LITE, MODEL MASLR Magnet Carriage Front Bearing Assembly.50 SS Shaft 3.75 Dia OD Tube 2.75 CFF 2.75 CFF Double Sided CFF Model MASLR, PMM-Lite Linear/Rotary 2

3 SPECIFICATIONS AND DESCRIPTION PMM MODEL DBLRP/DBLRM DBLOP/DBLOM MASLR DBROP/DBROM PERFORMANCE High linear force 26 lbs 26 lbs 13 lbs N/A Tight linear compliance in/lb in/lb in/lb N/A Rotary torque 12 in-lb N/A 8 in-lb Std. 15 in-lb Rotary compliance 2 degrees/in-lb N/A 4 degrees/in-lb Std. 2 degrees/in-lb Low droop - spring constant = (XX) 3 /10 6 For a 12" stroke 0.002"/lb 0.002"/lb 0.062"/lb N/A For a 24" stroke 0.014"/lb 0.014"/lb 0.49"/lb N/A For a 36" stroke 0.047"/lb 0.047"/lb 1.67"/lb N/A For a 48" stroke 0.110"/lb 0.110"/lb 3.95"/lb N/A Bake Temperature with magnet removed 250 C 250 C 250 C 250 C DESCRIPTION Material Flange, outer tube and square main shaft 304ss 304ss 304ss 304ss Actuator Housing Anodized Al Anodized Al Anodized Al Anodized Al Rare Earth Magnets NdFeB NdFeB NdFeB NdFeB Number of shafts Std. - 1 Solid or hollow Motions Linear and/or Rotation Linear-Only Linear/Rotation Rotation-Only Length (XX) " (XX) " (XX) " Model dependent (maximum length recommended is 36") Minimum extension.75" square tube 0".75" square tube 0".50" ø shaft 1.0" Std. round shaft 1.0".25" ø shaft 0.5" Mounting 2.75" OD CFF 2.75" OD CFF 2.75" OD CFF 2.75" OD CFF Weight ~15 pounds ~12 pounds ~10 pounds ~10 pounds Options/Accessories Motor drives Motor drives External drive Ceramic bearings Rho-theta stage Linear guide Motorization KLAMP Rotation lock Limit switches VMTEX and ALHCS Motor drives ALDEF Rotary Deviation (deg) Torque vs Rotary Deviation Models DBLRP/M & Standard DBROP/M Torque Applied (in-lbs) Linear Deviation (in) Force vs Linear Deviation Models DBLOP/M & DBLRP/M Force Applied (lbs) DBLOP linear-only external polymeric bearings DBLOM linear-only external metal metal bearings DBLRP linear-rotary polymeric external bearings DBLRM linear-rotary external metal bearings DBROP rotary-only external polymeric bearings DBROM rotary-only external metal bearings XX length of linear travel Precision Magnetic Manipulators are covered by U.S. Patent Number 5,105,932. Specifications subject to change without notice. 3

4 ROTARY-ONLY, MODEL DBROM About Transfer Engineering & Mfg, Inc. The Transfer Engineering Rotary-Only, Model DBROP/M, precision magnetic manipulator has no stroke length. The Rotary-Only PMM provides a versatile, reliable and precise solution to the general problem of introducing rotary motion into a sealed chamber eliminating rotary mechanical feedthroughs with high failure rates. The Rotary-Only PMMs exhibit a high breakaway torque, a tight angular compliance and, as an option, you may request extremely accurate (+0.3 degrees) coupling. Similar to the standard PMMs, Model DBROP has polymeric bearings in the carriage assembly for more economical conventional applications CUSTOMIZED PMM SYSTEMS Each of the Transfer Engineering PMMs can be customized in length, extensions, etc. to meet customer requirements. Examples of special customized units that have been provided are Compact PMMs for HV applications where a smaller, more compact unit is desirable Robust PMMs with reinforced tubing, added bearings, and mounted on a 4.5 CFF for heavy -duty, automated use Very high force PMMs with internal magnets for HV applications Model DHDRH, dual shaft rotary-only Hollow-shafts for electrical feedthrus PMMs can be motorized for computer 4 Various styles of Model DBROM Rotary-Only and DBROM has all metal construction for motorization or high-duty cycles. The innovative design of the Rotary-Only incorporates all welded stainless steel tubing to avoid wear-related leaks, outgassing of residual oils and burping. It provides an extremely reliable, positive vacuum and gas seal. There are no failure modes that result in a rotary-seal leak. The Rotary-Only can withstand a heat load while in operation and can be baked at 250 C. Rotary-Only PMMs are impervious to most liquids and gases and offer a built in clutch. A wide range of user specified options are available. These include the size and number of shafts, choice of shaft material, length of shaft, ceramic bearings, choice of hollow or solid shaft, and end details such as flats, threaded, etc. Common UHV and high-vacuum applications for the Rotary-Onlys include activating shutters, rotating sample carriers, driving gimbal mechanisms, selecting targets, rotating wafers, coupling power into controlled environments (glove box fans), etc. Specifications are listed on page 3. This custom system has motor driven PMMs and was designed to vertically lift then lower and seal an internal 500 pound chamber control and/or with a remote joystick or keypad. If this brochure does not list the exact unit for your requirements, please give us a call as we may have designed something similar. New systems are continually being developed to meet our customers needs. Transfer Engineering and Manufacturing provides innovative products for OEM, Production Facility and R&D/University Lab customers in the Semiconductor, Media, Sputter Deposition and R&D markets. TEAMs core expertise is in the handling, transporting, positioning, and manipulation of samples, semiconductor wafers, substrates, flat panels, and other materials with precision and reliability in HV, UHV, ultra-clean and other challenging controlled environments. Product lines include Linear, Rotary and Linear/Rotary Precision Magnetic Manipulators Sample transfer & loadlock systems including the MASCOT MESCcompatible wafer transport system HV and UHV heating and/or cooling assemblies Motion and placement systems Automated loadlock systems Custom systems At Transfer Engineering we believe the key to providing the best product solution is to work closely with customers to understand their process and objectives and to involve them in the product design to ensure that goals are met. Contact us for technical information or a quotation. i Transfer Engineering & Manufacturing Westinghouse Dr., Suite 100 Fremont, CA TEAM DS-101 8/01

5 TRANSFER ENGINEERING AND MANUFACTURING, INC. UHV TransferStick LINEAR AND ANGULAR MOVEMENT IN HV or UHV Strong magnetic coupling Bakeable to 250 C Hydroformed bellows give reliable seal Constructed of all UHV-compatible material Customizable Typical Applications A wide range of uses include: MBE substrate exchange Any short simple transfer The Model MCTS, Magnetically-Coupled Transfer Sticks are an economical way to perform simple linear-angular motion within a vacuum system. Robust and reliable, these wobble sticks reduce the risk of leaks by eliminating the use of edge welded bellows. Rare earth magnets outside of vacuum provide a strong magnetic coupling. The unit is completely UHV-compatible and with the external magnet carriage assembly removed it is bakeable to 250 C. Standard transfer sticks are available with 4.5 inches of push-pull linear travel and an angular tilt of ± 15. A complete family of UHV Precision Magnetic Manipulators are available to perform more complex linear and/or rotary motions under vacuum. Call us to discuss your requirements and request datasheets with specifications. SPECIFICATIONS Material Flange, outer tube and shaft 304ss Seals Hydroformed ss Bellows Rare earth magnets NdFeB Vacuum range 1 x Torr Bakeout temperature 250 C magnet removed Linear force 4 lbs Angular movement + 15 Standard mounting 2.75 OD CFF Weight Approx. 2 lbs Dimensions See drawing DIAGRAM OF MAGNETICALLY-COUPLED TRANSFER STICK Westinghouse Dr., Suite 100 Fremont, California Phone Fax TE TEAM DS-107 6/02

6 Carousel-200 TM Loadlock System COMPACT, MESC-COMPATIBLE LOADLOCK AND TRANSFER SYSTEM Load wafers or other substrates into a SEMIstandard process chamber without breaking vacuum Cost-effective Cassette loading Integrated magnetic transfer mechanism SEMI-MESC or custom interface Chamber designed to minimize particulates and hydrocarbons SMIF option available Customizable to meet varied applications Transfer Engineering a n d M a n u f a c t u r i n g, I n c Westinghouse Drive, Suite 100 Fremont, California Phone Fax The Carousel-200 TM is a compact, high- vacuum compatible loadlock and wafer transfer system designed to deliver 100 to 200mm wafers or other flat substrates from a SEMI standard cassette into a process module. A unique rotating carousel interacts with dual, magnetically-coupled linear drive mechanisms allowing wafers to be repeatedly pulled from a cassette and delivered to the process chamber, then returned to the cassette, without breaking vacuum. For process chambers without vertical lift, z-lift capability is optional. This small footprint system is a clean, cost effective alternative to other accepted transfer devices. The Carousel-200 consists of a vacuum chamber with a manually operated door with viewport, a magnetically-coupled elevator system, dual linear drive mechanisms and a rotating carousel for wafer exchange. The drives, elevator and rotating arm are all powered by external motors. Cassette-Based Wafer Loading A standard SEMI-compatible wafer cassette can be preloaded and inserted into the load chamber or the Carousel can be adapted for custom cassette use. The load chamber is equipped with an elevator drive assembly. Dual-drives Increase Throughput Increased throughput is achieved with dual, independently controlled drive mechanisms. One drive can be removing a wafer from the cassette while the other drive is delivering a wafer to the process module. Applications Capable of handling 100 to 200mm wafers, reticles, masks or substrates of varying sizes, applications include sample delivery to modules for process development, as a manufacturing tool, or for low-volume production. The Carousel valve interface can be easily modified to mate to a wide variety of vacuum systems. Contact us for more information. Cassette Loading

7 S P E C I F I C A T I O N S A N D D E S C R I P T I O N About Transfer Engineering & Mfg, Inc. MATERIAL Chamber DESCRIPTION Transfer System Machined aluminum blocks H-V compatible - Metal with Viton o-rings All UHV compatible Wafer/substrate sizes Up to 200 mm Wafers/Cassette Typical standard 25 wafer cassette Footprint 24.8 x 26 Chamber load opening 10 x12 load opening Chamber door 10 x 11.5 window Interface - MESC Standard SEMI E21-91 or custom Chamber volume - Main chamber 22 Liters Upper chamber 23 Liters Lower chamber 13 Liters Pump port ISO NW 40 Auxiliary ports Two ISO NW 25 Weight ~ 175 pounds PERFORMANCE Transfer distance Positioning Accuracy Repeatability Wafer Cycle Time MOTORIZATION CONTROLS System I/O Controls Pushbutton Controls Up to 19 inches - User programmable ±0.005 inches ±0.005 inches Typical exchange 15 to 20 sec. Pushbutton, RS232 or digital I/O Set point/extract/retract Specifications subject to change without notice DIAGRAM OF TYPICAL CAROUSEL 200 LOADLOCK SYSTEM Transfer Engineering and Manufacturing provides innovative products for OEM, Production Facility and R&D/University Lab customers in the Semiconductor, Media, Sputter Deposition and R&D markets. TEAMs core expertise is in the handling, transporting, positioning, and manipulation of samples, semiconductor wafers, reticles, substrates, flat panels, and other materials with precision and reliability in HV, UHV, ultra-clean and other challenging controlled environments. Product lines include Sample transfer & loadlock systems including the MASCOT, TEAM-Mate and Carousel MESC-compatible wafer transport system Linear, Rotary and Linear/Rotary Precision Magnetic Manipulators HV and UHV heating and/or cooling assemblies Motion and placement systems Automated loadlock systems Custom systems At Transfer Engineering we believe the key to providing the best product solution is to work closely with customers to understand their process and objectives and to involve them in the product design to ensure that goals are met. Contact us for technical information or a quotation i Transfer Engineering & Manufacturing Westinghouse Drive, Suite 100 Fremont, CA SMALL FOOTPRINT CAROUSEL LOADLOCK CAROUSEL-200 DS-107 2/05

8 MASCOT TM Loadlock System MESC COMPATIBLE Load wafers or other substrates into a SEMI MESC standard process chamber without breaking vacuum Vertical lift optional to pick up, deliver, then remove a wafer 200 or 300mm chambers custom sizes and valve interfaces Optional MESC height carts for portability and convenience Readily customized meets a wide range of varied applications 2199 Warm Springs Court, Suite 1 Fremont, California Phone Fax The MASCOTTM is a high-vacuum compatible, single-wafer loadlock designed to manually load wafers into a SEMI MESC-standard process module. Using a unique magnetically-coupled transfer arm, wafers can be repeatedly loaded and removed without breaking vacuum. The MASCOT can mimic the motions of complex and costly robots but is more convenient to use and significantly less costly. The MASCOT consists of a chamber and a rugged Transfer Engineering Precision Magnetic Manipulator (PMM) with patented independent motion capability. The PMM performs linear motion with optional vertical lift available. See the separate Precision Magnetic Manipulator data sheet for PMM specifications. Also available in this product line is the TEAM-Mate, a small footprint, highvacuum compatible loadlock system. See the separate data sheet for specifications. Vertical Lift Capability A PMM with a dynamic end effector can pick up and deliver wafers from a MASCOT-LR loadlock chamber into a process module independent of the mechanical motions available in the process module. The vertical motion of the dynamic end effector is orthogonal to the transfer direction. This allows the user to pick up or transfer a wafer in a process chamber that has no vertical lift capabilities. These motions mimic those of a cluster tool s robot. A MASCOT-LO with a linear-only PMM precisely transfers a wafer into a process chamber where the receiving station (susceptor) is capable of vertical lift to remove the wafer from a transfer fork. Clean and Precise The MASCOT loadlock chamber is machined from a single piece of aluminum MASCOT 200 with Heavy Duty Cart

9 to guarantee the highest level of vacuum integrity and cleanliness possible and the dynamic end effector incorporates a novel deflection spring-bearing system. This all-metal internal construction reduces total pump-down time and residual water. The system is designed with a generous supply of auxiliary ports for greater flexibility. All seals for the load door, auxiliary ports, and pumping ports are of Viton to ensure high-quality vacuum performance. There are two sizes of the standard MASCOT chambers one to handle wafers/substrates up to 200mm and another for 300mm. Chambers of custom size and shape are available. Applications The Transfer Engineering MASCOT loadlock system is ideal for several applications where direct access to a single process module is required or desired. In research and development applications, it provides product and process engineers and scientists a single wafer sample delivery system with motions that mimic those of a central robot. As a cost-effective manufacturing tool, the loadlock system can be used to test individual process modules prior to assembling them to a central robot. It also allows a cluster tool module to be tested prior to their installation back on the cluster tool following repair or routine maintenance. In an R&D or university community, a single process module designed for a cluster tool can be turned into a lowvolume standalone system. Finally, it is an excellent support tool during process modification because it can access specific modules for testing without compromising the module s vacuum pressure. DIAGRAM OF TYPICAL 200mm MASCOT-LR SYSTEM PATENTED MANIPULATOR PATENT #5,105, THREADS THRU 2X 2.00 CUSTOMER SPECIFIED DETAIL A UP/DOWN POSITION MODEL ALDEF DYNAMIC END EFFECTOR SEE DETAIL A ISO NW40 (NEAR & FARSIDE) MESC RECTANGULAR GATE VALVE (NOT INCLUDED) DIAGRAM OF TYPICAL 300mm MASCOT-LR SYSTEM PATENTED MANIPULATOR PATENT #5,105, THREADS THRU 2X CUSTOMER SPECIFIED DETAIL A UP/DOWN POSITION MODEL ALDEF.5 - DYNAMIC END EFFECTOR.35 ABOVE CL -.15 BELOW CL DOOR LOCK " VIEWPORT (TOP) ISO NW40 (BOTTOM) ISO NW100 (BOTTOM) SEE DETAIL A ISO NW40 (NEAR & FARSIDE) MESC RECTANGULAR GATE VALVE (NOT INCLUDED) ISO NW40 (BOTTOM) " VIEWPORT (TOP) Viton is a registered trademark of E.I. Dupont denemours and Company, Inc ISO NW100 (BOTTOM)

10 SPECIFICATIONS AND DESCRIPTION MASCOT MODEL MASCOT 200 MASCOT 300 Material Chamber Single machined aluminum block Single machined aluminum block H-V compatible - Metal H-V compatible - Metal with Viton o-rings with Viton o-rings Precision Magnetic Manipulator All UHV compatible All UHV compatible See separate PMM data sheet See separate PMM data sheet Description Chamber Wafer sizes Up to 200 mm Up to 300 mm Exterior dimension 14" x 11.5" x 4" 18.70" x 14.75" x 4" Load door with window 10" load door 14.75" load door Fits MESC-standard valves and chambers SEMI E21-91 SEMI E21 Volume of chamber with typical PMM installed 3.89 Liters 7.51 Liters Pump port ISO NW100 (4" ID) ISO NW100 (4" ID) Auxiliary ports Three ISO NW40 (1.57" ID) Three ISO NW40 (1.57" ID) System Transfer distance Up to 60" Up to 60" Dynamic End Effector vertical travel Standard = 0.276" total Standard = 0.5" total Weight ~45 pounds (includes PMM) ~60 pounds (includes PMM) Specifications subject to change without notice. Model MAHDS, Heavy Duty Cart A Model MAHDS, Heavy Duty Cart, allows portability of a MASCOT Loadlock System. This frame assembly has casters, leveling pads and is equipped with shelves to conveniently move the loadlock, pumps and gauges from one process chamber to another. The standard MAHDS is shown. However, heights and shapes are easily customizable to fit specific applications DIAGRAM OF TYPICAL CART WITH MASCOT-LO MASCOT (Typical) MASCOT (Typical) DBLOP-XX 300mm MASCOT LOADLOCK Customer specified Heavy Duty Cart with 300mm MASCOT and Linear-Only PMM

11 Custom Features and Accessories The MASCOT Loadlock systems can be customized to meet a wide range of specific needs. Following are some of the features that can be modified along with a few examples of customized features or systems. Multiple chambers Cassette elevator systems Computer control All stainless steel construction Dual directional manipulators Custom end effectors and wafer/sample holders Can be adapted to fit special flanges Custom chamber sizes, shapes and valve interfaces available Switches for door closure and/or manipulator location Lexgard door for full sample viewing MESC height carts for portability and convenience About Transfer Engineering & Mfg, Inc. Transfer Engineering and Manufacturing provides innovative products for OEM, Production Facility and R&D/University Lab customers in the Semiconductor, Media, Sputter Deposition and R&D markets. TEAMs core expertise is in the handling, transporting, positioning, and manipulation of samples, semiconductor wafers, substrates, flat panels, and other materials with precision and reliability in HV, UHV, ultra-clean and other challenging controlled environments. Product lines include Linear, Rotary and Linear/Rotary Precision Magnetic Manipulators Sample transfer & loadlock systems including the MASCOT MESCcompatible wafer transport system HV and UHV heating and/or cooling assemblies Motion and placement systems Automated loadlock systems Custom systems At Transfer Engineering we believe the key to providing the best product solution is to work closely with customers to understand their process and objectives and to involve them in the product design to ensure that goals are met. Contact us for technical information or a quotation. i Transfer Engineering & Manufacturing 2199 Warm Springs Court, Suite 1 Fremont, CA TEAM DS /01

12 TEAM-Mate TM Loadlock System Small Footprint, MESC-Compatible Loadlock and Transfer System Small footprint Chamber designed to minimize particulates and hydrocarbons Integrated magnetic transfer mechanism Low volume chamber reduces pumpdown time Load wafers or other substrates into a SEMIstandard process chamber without breaking vacuum Manual or automated 200mm, 300mm or custom chambers SEMI-MESC or custom interface Customizable to meet varied applications Westinghouse Drive, Suite 100 Fremont, California Phone Fax The TEAM-Mate TM is a compact, highvacuum compatible, single-substrate loadlock system designed to load wafers or other flat substrates into a SEMI-standard or custom process module. A unique magnetically-coupled slide mechanism powered by an exterior stepper motor driven stage allows wafers to be repeatedly loaded and removed without breaking vacuum. This small footprint system can mimic the motions of a complex and costly robot but is more convenient to use, significantly less costly and requires little or no engineering to integrate with a process module. The TEAM-Mate consists of a vacuum chamber with a manually operated door with viewport, a delivery mechanism and an exterior drive system. The motorized system comes with stepper driver and power supply with communications link and end point limit switches. Low Particulate, Low Volume A unique design with care in selection of interfacing materials along with an integrated magnetically-coupled transfer device with moving parts located well below transfer height, minimizes generation of particulates. Machined from a single billet of aluminum eliminating welds, this low volume loadlock chamber has free pump paths to the pump throat entrance and can be backfilled with dry N2 reducing pump down time. Magnetically-Coupled Drive TEAM-Mates exterior linear stage is driven by powerful magnetically-coupled circuits that are attached to the delivery mechanism inside the chamber. Incorporating the magnettransfer into the chamber wall reduces the system s overall footprint. Motion can be operated manually or motorized. Applications Applications include sample delivery to modules for process development, as a manufacturing tool, or for low-volume production. TEAM-Mates valve interface can be easily modified to mate to a wide variety of vacuum systems. TEAM-Mate slot-valve interface

13 MATERIAL Chamber Single machined Single machined aluminum block aluminum block H-V compatible - Metal HV compatible - Metal with Viton o-rings with Viton o-rings Transfer System All HV compatible All HV compatible DESCRIPTION Wafer/substrate sizes Up to 200 mm Up to 300mm Exterior dimension 23.64" x 13.38" x x x 6.41 Chamber load opening 9 load opening x load opening Chamber door 4 window 4 window Interface - MESC Std SEMI E21 SEMI E21.1 or custom Volume of chamber 4.0 Liters 6.5 Liters Pump port ISO NW 40 ID ISO NW 40 ID Auxiliary ports Two ISO NW16 ID Two ISO NW 40 ID Weight ~ 49 pounds ~ 60 pounds PERFORMANCE MODEL TEAM-Mate 200-LO TEAM-Mate 300-LO Transfer distance Up to 12 inches from front Up to 18.3 inches from front flange - User programmable flange - User programmable Positioning Accuracy ±0.002 inches inches Repeatability ±0.002 inches inches MOTORIZATION CONTROLS System I/O Controls Pushbutton, RS232 Pushbutton, RS232 or digital I/O or digital I/O Pushbutton Controls Set point/extract/retract Set point/extract/retract MANUAL CONTROLS Manual Operation Hand Crank Mechanism Hand Crank Mechanism Vertical Lift/Lower Lever Lever Specifications subject to change without notice. SPECIFICATIONS AND DESCRIPTION TEAM-Mate Loadlock Patent Pending. About Transfer Engineering & Mfg, Inc. Transfer Engineering and Manufacturing provides innovative products for OEM, Production Facility and R&D/University Lab customers in the Semiconductor, Media, Sputter Deposition and R&D markets. TEAMs core expertise is in the handling, transporting, positioning, and manipulation of samples, semiconductor wafers, substrates, flat panels, and other materials with precision and reliability in HV, UHV, ultra-clean and other challenging controlled environments. Product lines include Linear, Rotary and Linear/Rotary Precision Magnetic Manipulators Sample transfer & loadlock systems including the TEAM-Mate and MASCOT MESC- compatible wafer transport system HV and UHV heating and/or cooling assemblies Motion and placement systems Automated loadlock systems Custom systems At Transfer Engineering we believe the key to providing the best product solution is to work closely with customers to understand their process and objectives and to involve them in the product design to ensure that goals are met. Contact us for technical information or a quotation. END EFFECTOR with 200mm WAFER DOOR INTERNAL DRIVE ASSEMBLY CHAMBER i Transfer Engineering & Manufacturing Westinghouse Drive, Suite 100 Fremont, CA EXTERNAL DRIVE ASSEMBLY Diagram of Motor Driven TEAM-Mate 200 Photo D - Custom System TEAM DS-105B 3/05

14 TEAM-Mate TM Loadlock System Small Footprint, MESC-Compatible Loadlock and Transfer System Small footprint Chamber designed to minimize particulates and hydrocarbons Integrated magnetic transfer mechanism Low volume chamber reduces pumpdown time Load wafers or other substrates into a SEMIstandard process chamber without breaking vacuum Manual or automated 200mm, 300mm or custom chambers SEMI-MESC or custom interface Customizable to meet varied applications Westinghouse Drive, Suite 100 Fremont, California Phone Fax The TEAM-Mate TM is a compact, highvacuum compatible, single-substrate loadlock system designed to load wafers or other flat substrates into a SEMI-standard or custom process module. A unique magnetically-coupled slide mechanism powered by an exterior stepper motor driven stage allows wafers to be repeatedly loaded and removed without breaking vacuum. This small footprint system can mimic the motions of a complex and costly robot but is more convenient to use, significantly less costly and requires little or no engineering to integrate with a process module. The TEAM-Mate consists of a vacuum chamber with a manually operated door with viewport, a delivery mechanism and an exterior drive system. The motorized system comes with stepper driver and power supply with communications link and end point limit switches. Low Particulate, Low Volume A unique design with care in selection of interfacing materials along with an integrated magnetically-coupled transfer device with moving parts located well below transfer height, minimizes generation of particulates. Machined from a single billet of aluminum eliminating welds, this low volume loadlock chamber has free pump paths to the pump throat entrance and can be backfilled with dry N2 reducing pump down time. Magnetically-Coupled Drive TEAM-Mates exterior linear stage is driven by powerful magnetically-coupled circuits that are attached to the delivery mechanism inside the chamber. Incorporating the magnettransfer into the chamber wall reduces the system s overall footprint. Motion can be operated manually or motorized. Applications Applications include sample delivery to modules for process development, as a manufacturing tool, or for low-volume production. TEAM-Mates valve interface can be easily modified to mate to a wide variety of vacuum systems. TEAM-Mate slot-valve interface

15 MATERIAL Chamber Single machined Single machined aluminum block aluminum block H-V compatible - Metal HV compatible - Metal with Viton o-rings with Viton o-rings Transfer System All HV compatible All HV compatible DESCRIPTION Wafer/substrate sizes Up to 200 mm Up to 300mm Exterior dimension 23.64" x 13.38" x x x 6.41 Chamber load opening 9 load opening x load opening Chamber door 4 window 4 window Interface - MESC Std SEMI E21 SEMI E21.1 or custom Volume of chamber 4.0 Liters 6.5 Liters Pump port ISO NW 40 ID ISO NW 40 ID Auxiliary ports Two ISO NW16 ID Two ISO NW 40 ID Weight ~ 49 pounds ~ 60 pounds PERFORMANCE MODEL TEAM-Mate 200-LO TEAM-Mate 300-LO Transfer distance Up to 12 inches from front Up to 18.3 inches from front flange - User programmable flange - User programmable Positioning Accuracy ±0.002 inches inches Repeatability ±0.002 inches inches MOTORIZATION CONTROLS System I/O Controls Pushbutton, RS232 Pushbutton, RS232 or digital I/O or digital I/O Pushbutton Controls Set point/extract/retract Set point/extract/retract MANUAL CONTROLS Manual Operation Hand Crank Mechanism Hand Crank Mechanism Vertical Lift/Lower Lever Lever Specifications subject to change without notice. SPECIFICATIONS AND DESCRIPTION TEAM-Mate Loadlock Patent Pending. About Transfer Engineering & Mfg, Inc. Transfer Engineering and Manufacturing provides innovative products for OEM, Production Facility and R&D/University Lab customers in the Semiconductor, Media, Sputter Deposition and R&D markets. TEAMs core expertise is in the handling, transporting, positioning, and manipulation of samples, semiconductor wafers, substrates, flat panels, and other materials with precision and reliability in HV, UHV, ultra-clean and other challenging controlled environments. Product lines include Linear, Rotary and Linear/Rotary Precision Magnetic Manipulators Sample transfer & loadlock systems including the TEAM-Mate and MASCOT MESC- compatible wafer transport system HV and UHV heating and/or cooling assemblies Motion and placement systems Automated loadlock systems Custom systems At Transfer Engineering we believe the key to providing the best product solution is to work closely with customers to understand their process and objectives and to involve them in the product design to ensure that goals are met. Contact us for technical information or a quotation. END EFFECTOR with 200mm WAFER DOOR INTERNAL DRIVE ASSEMBLY CHAMBER i Transfer Engineering & Manufacturing Westinghouse Drive, Suite 100 Fremont, CA EXTERNAL DRIVE ASSEMBLY Diagram of Motor Driven TEAM-Mate 200 Photo D - Custom System TEAM DS-105B 3/05

16 MASCOT TM Loadlock System MESC COMPATIBLE Load wafers or other substrates into a SEMI MESC standard process chamber without breaking vacuum Vertical lift optional to pick up, deliver, then remove a wafer 200 or 300mm chambers custom sizes and valve interfaces Optional MESC height carts for portability and convenience Readily customized meets a wide range of varied applications 2199 Warm Springs Court, Suite 1 Fremont, California Phone Fax The MASCOTTM is a high-vacuum compatible, single-wafer loadlock designed to manually load wafers into a SEMI MESC-standard process module. Using a unique magnetically-coupled transfer arm, wafers can be repeatedly loaded and removed without breaking vacuum. The MASCOT can mimic the motions of complex and costly robots but is more convenient to use and significantly less costly. The MASCOT consists of a chamber and a rugged Transfer Engineering Precision Magnetic Manipulator (PMM) with patented independent motion capability. The PMM performs linear motion with optional vertical lift available. See the separate Precision Magnetic Manipulator data sheet for PMM specifications. Also available in this product line is the TEAM-Mate, a small footprint, highvacuum compatible loadlock system. See the separate data sheet for specifications. Vertical Lift Capability A PMM with a dynamic end effector can pick up and deliver wafers from a MASCOT-LR loadlock chamber into a process module independent of the mechanical motions available in the process module. The vertical motion of the dynamic end effector is orthogonal to the transfer direction. This allows the user to pick up or transfer a wafer in a process chamber that has no vertical lift capabilities. These motions mimic those of a cluster tool s robot. A MASCOT-LO with a linear-only PMM precisely transfers a wafer into a process chamber where the receiving station (susceptor) is capable of vertical lift to remove the wafer from a transfer fork. Clean and Precise The MASCOT loadlock chamber is machined from a single piece of aluminum MASCOT 200 with Heavy Duty Cart

17 to guarantee the highest level of vacuum integrity and cleanliness possible and the dynamic end effector incorporates a novel deflection spring-bearing system. This all-metal internal construction reduces total pump-down time and residual water. The system is designed with a generous supply of auxiliary ports for greater flexibility. All seals for the load door, auxiliary ports, and pumping ports are of Viton to ensure high-quality vacuum performance. There are two sizes of the standard MASCOT chambers one to handle wafers/substrates up to 200mm and another for 300mm. Chambers of custom size and shape are available. Applications The Transfer Engineering MASCOT loadlock system is ideal for several applications where direct access to a single process module is required or desired. In research and development applications, it provides product and process engineers and scientists a single wafer sample delivery system with motions that mimic those of a central robot. As a cost-effective manufacturing tool, the loadlock system can be used to test individual process modules prior to assembling them to a central robot. It also allows a cluster tool module to be tested prior to their installation back on the cluster tool following repair or routine maintenance. In an R&D or university community, a single process module designed for a cluster tool can be turned into a lowvolume standalone system. Finally, it is an excellent support tool during process modification because it can access specific modules for testing without compromising the module s vacuum pressure. DIAGRAM OF TYPICAL 200mm MASCOT-LR SYSTEM PATENTED MANIPULATOR PATENT #5,105, THREADS THRU 2X 2.00 CUSTOMER SPECIFIED DETAIL A UP/DOWN POSITION MODEL ALDEF DYNAMIC END EFFECTOR SEE DETAIL A ISO NW40 (NEAR & FARSIDE) MESC RECTANGULAR GATE VALVE (NOT INCLUDED) DIAGRAM OF TYPICAL 300mm MASCOT-LR SYSTEM PATENTED MANIPULATOR PATENT #5,105, THREADS THRU 2X CUSTOMER SPECIFIED DETAIL A UP/DOWN POSITION MODEL ALDEF.5 - DYNAMIC END EFFECTOR.35 ABOVE CL -.15 BELOW CL DOOR LOCK " VIEWPORT (TOP) ISO NW40 (BOTTOM) ISO NW100 (BOTTOM) SEE DETAIL A ISO NW40 (NEAR & FARSIDE) MESC RECTANGULAR GATE VALVE (NOT INCLUDED) ISO NW40 (BOTTOM) " VIEWPORT (TOP) Viton is a registered trademark of E.I. Dupont denemours and Company, Inc ISO NW100 (BOTTOM)

18 SPECIFICATIONS AND DESCRIPTION MASCOT MODEL MASCOT 200 MASCOT 300 Material Chamber Single machined aluminum block Single machined aluminum block H-V compatible - Metal H-V compatible - Metal with Viton o-rings with Viton o-rings Precision Magnetic Manipulator All UHV compatible All UHV compatible See separate PMM data sheet See separate PMM data sheet Description Chamber Wafer sizes Up to 200 mm Up to 300 mm Exterior dimension 14" x 11.5" x 4" 18.70" x 14.75" x 4" Load door with window 10" load door 14.75" load door Fits MESC-standard valves and chambers SEMI E21-91 SEMI E21 Volume of chamber with typical PMM installed 3.89 Liters 7.51 Liters Pump port ISO NW100 (4" ID) ISO NW100 (4" ID) Auxiliary ports Three ISO NW40 (1.57" ID) Three ISO NW40 (1.57" ID) System Transfer distance Up to 60" Up to 60" Dynamic End Effector vertical travel Standard = 0.276" total Standard = 0.5" total Weight ~45 pounds (includes PMM) ~60 pounds (includes PMM) Specifications subject to change without notice. Model MAHDS, Heavy Duty Cart A Model MAHDS, Heavy Duty Cart, allows portability of a MASCOT Loadlock System. This frame assembly has casters, leveling pads and is equipped with shelves to conveniently move the loadlock, pumps and gauges from one process chamber to another. The standard MAHDS is shown. However, heights and shapes are easily customizable to fit specific applications DIAGRAM OF TYPICAL CART WITH MASCOT-LO MASCOT (Typical) MASCOT (Typical) DBLOP-XX 300mm MASCOT LOADLOCK Customer specified Heavy Duty Cart with 300mm MASCOT and Linear-Only PMM

19 Custom Features and Accessories The MASCOT Loadlock systems can be customized to meet a wide range of specific needs. Following are some of the features that can be modified along with a few examples of customized features or systems. Multiple chambers Cassette elevator systems Computer control All stainless steel construction Dual directional manipulators Custom end effectors and wafer/sample holders Can be adapted to fit special flanges Custom chamber sizes, shapes and valve interfaces available Switches for door closure and/or manipulator location Lexgard door for full sample viewing MESC height carts for portability and convenience About Transfer Engineering & Mfg, Inc. Transfer Engineering and Manufacturing provides innovative products for OEM, Production Facility and R&D/University Lab customers in the Semiconductor, Media, Sputter Deposition and R&D markets. TEAMs core expertise is in the handling, transporting, positioning, and manipulation of samples, semiconductor wafers, substrates, flat panels, and other materials with precision and reliability in HV, UHV, ultra-clean and other challenging controlled environments. Product lines include Linear, Rotary and Linear/Rotary Precision Magnetic Manipulators Sample transfer & loadlock systems including the MASCOT MESCcompatible wafer transport system HV and UHV heating and/or cooling assemblies Motion and placement systems Automated loadlock systems Custom systems At Transfer Engineering we believe the key to providing the best product solution is to work closely with customers to understand their process and objectives and to involve them in the product design to ensure that goals are met. Contact us for technical information or a quotation. i Transfer Engineering & Manufacturing 2199 Warm Springs Court, Suite 1 Fremont, CA TEAM DS /01

20 Carousel-200 TM Loadlock System COMPACT, MESC-COMPATIBLE LOADLOCK AND TRANSFER SYSTEM Load wafers or other substrates into a SEMIstandard process chamber without breaking vacuum Cost-effective Cassette loading Integrated magnetic transfer mechanism SEMI-MESC or custom interface Chamber designed to minimize particulates and hydrocarbons SMIF option available Customizable to meet varied applications Transfer Engineering a n d M a n u f a c t u r i n g, I n c Westinghouse Drive, Suite 100 Fremont, California Phone Fax The Carousel-200 TM is a compact, high- vacuum compatible loadlock and wafer transfer system designed to deliver 100 to 200mm wafers or other flat substrates from a SEMI standard cassette into a process module. A unique rotating carousel interacts with dual, magnetically-coupled linear drive mechanisms allowing wafers to be repeatedly pulled from a cassette and delivered to the process chamber, then returned to the cassette, without breaking vacuum. For process chambers without vertical lift, z-lift capability is optional. This small footprint system is a clean, cost effective alternative to other accepted transfer devices. The Carousel-200 consists of a vacuum chamber with a manually operated door with viewport, a magnetically-coupled elevator system, dual linear drive mechanisms and a rotating carousel for wafer exchange. The drives, elevator and rotating arm are all powered by external motors. Cassette-Based Wafer Loading A standard SEMI-compatible wafer cassette can be preloaded and inserted into the load chamber or the Carousel can be adapted for custom cassette use. The load chamber is equipped with an elevator drive assembly. Dual-drives Increase Throughput Increased throughput is achieved with dual, independently controlled drive mechanisms. One drive can be removing a wafer from the cassette while the other drive is delivering a wafer to the process module. Applications Capable of handling 100 to 200mm wafers, reticles, masks or substrates of varying sizes, applications include sample delivery to modules for process development, as a manufacturing tool, or for low-volume production. The Carousel valve interface can be easily modified to mate to a wide variety of vacuum systems. Contact us for more information. Cassette Loading

21 S P E C I F I C A T I O N S A N D D E S C R I P T I O N About Transfer Engineering & Mfg, Inc. MATERIAL Chamber DESCRIPTION Transfer System Machined aluminum blocks H-V compatible - Metal with Viton o-rings All UHV compatible Wafer/substrate sizes Up to 200 mm Wafers/Cassette Typical standard 25 wafer cassette Footprint 24.8 x 26 Chamber load opening 10 x12 load opening Chamber door 10 x 11.5 window Interface - MESC Standard SEMI E21-91 or custom Chamber volume - Main chamber 22 Liters Upper chamber 23 Liters Lower chamber 13 Liters Pump port ISO NW 40 Auxiliary ports Two ISO NW 25 Weight ~ 175 pounds PERFORMANCE Transfer distance Positioning Accuracy Repeatability Wafer Cycle Time MOTORIZATION CONTROLS System I/O Controls Pushbutton Controls Up to 19 inches - User programmable ±0.005 inches ±0.005 inches Typical exchange 15 to 20 sec. Pushbutton, RS232 or digital I/O Set point/extract/retract Specifications subject to change without notice DIAGRAM OF TYPICAL CAROUSEL 200 LOADLOCK SYSTEM Transfer Engineering and Manufacturing provides innovative products for OEM, Production Facility and R&D/University Lab customers in the Semiconductor, Media, Sputter Deposition and R&D markets. TEAMs core expertise is in the handling, transporting, positioning, and manipulation of samples, semiconductor wafers, reticles, substrates, flat panels, and other materials with precision and reliability in HV, UHV, ultra-clean and other challenging controlled environments. Product lines include Sample transfer & loadlock systems including the MASCOT, TEAM-Mate and Carousel MESC-compatible wafer transport system Linear, Rotary and Linear/Rotary Precision Magnetic Manipulators HV and UHV heating and/or cooling assemblies Motion and placement systems Automated loadlock systems Custom systems At Transfer Engineering we believe the key to providing the best product solution is to work closely with customers to understand their process and objectives and to involve them in the product design to ensure that goals are met. Contact us for technical information or a quotation i Transfer Engineering & Manufacturing Westinghouse Drive, Suite 100 Fremont, CA SMALL FOOTPRINT CAROUSEL LOADLOCK CAROUSEL-200 DS-107 2/05

22 Transferable Experimental Station WITH UHV-COMPATIBLE BANANA PLUGS Remotely engage and disengage electrical connections Move mounted experiments from chamber to chamber without breaking vacuum Reliable UHV electrical connection UHV-compatible banana plugs Sample mounts directly on heater for high temperature and thermal responsiveness Reliable, positive locking system Readily customized meets a wide range of varied applications 2199 Warm Springs Court, Suite 1 Fremont, CA Phone Fax The Transferable Experimental Station, Model VMTEX, is a versatile sample mounting system with completely UHVcompatible electrical connections. Mount simple samples or build up complex experiments at atmospheric pressure. Then, using the rugged Transfer Engineering Precision Magnetic Manipulator, you can reliably transfer the sample or experiments into a vacuum system, move it from one chamber or station to another, and repeatedly engage and disengage electrical connections. The Transferable Experimental Station can be fitted with heaters ranging from 3/8 to 2.0 in diameter that will reach temperatures up to 1600 C. Various mechanisms, such as screws, clips or retaining cups can be used to hold samples on the puck. A variation of the system even allows for the independent transfer of standard sample stubs to the puck while the puck remains under vacuum. The heart of the station is a generic sample puck equipped with either four (Model VMTEX-4) or seven electrical connectors (Model VMTEX-7-1 or 7-2). The generic design of the puck allows for easy mounting of samples and offers a stable platform for building experiments. The complete system consists of the sample puck with or without a heater, a receiving station mounting (fixed brackets or attachment to any manipulator), and an adapter/modification to a Precision Magnetic Manipulator that allows the puck to be locked to either the PMM or the receiving station. UHV-Compatible Banana Plugs To provide the electrical connection, Transfer Engineering developed the UHV-compatible banana plugs used on the sample puck. These exceptional plugs are manufactured from BeCu, 304 stainless steel, and ceramic and are Au-coated for enhanced electrical performance and reliability. Chromel/Alumel plugs are also available for use with K-type thermocouples. The possibility of Zn outgassing from the brass used in traditional connectors in the vacuum chamber has been completely eliminated. Applications The Transferable Experimental Station can be fitted with a variety of sample treatment and measurement instruments. You can: Heat the sample Provide an electrical bias Measure sample temperature Evaporate materials onto a sample The extra electrical connections can be used for a variety of applications you are limited only by your imagination. Please call us at for information on special applications and requirements or for pricing.

23 Specifications for Standard VMTEX Systems Specifications Model VMTEX-4 VMTEX-7-1 VMTEX-7-2 Puck Size Width Height Length Weight 0.6 lb. 1.0 lb. 1.5 lb. Minimum Tube ID for Transfer Number of Connectors Maximum Current/Connector 15A 15A 15A Maximum Voltage 5 kv 5 kv 5 kv Stage (receiver) System Width Height Length Weight 0.6 lb. 1 lb. 1 lb. Heater Size Typical Sample Size Specifications subject to change without notice. Diagrams and Dimensions for Standard VMTEX Systems Model VMTEX 4 Model VMTEX 7-1 Model VMTEX 7-2 About Transfer Engineering & Mfg, Inc. Transfer Engineering and Manufacturing provides innovative products for OEM, Production Facility and R&D/University Lab customers in the Semiconductor, Media, Sputter Deposition and R&D markets. TEAMs core expertise is in the handling, transporting, positioning, and manipulation of samples, semiconductor wafers, substrates, flat panels, and other materials with precision and reliability in HV, UHV, ultra-clean and other challenging controlled environments. Product lines include Linear, Rotary and Linear/Rotary Precision Magnetic Manipulators Sample transfer & loadlock systems including the MASCOT MESCcompatible wafer transport system HV and UHV heating and/or cooling assemblies Motion and placement systems Automated loadlock systems Custom systems At Transfer Engineering we believe the key to providing the best product solution is to work closely with customers to understand their process and objectives and to involve them in the product design to ensure that goals are met. Contact us for technical information or a quotation. Example of Transfer of the Model VMTEX-7-1 Experimental Station Model VMTEX-7-1 Transferable Experimental Station is securely locked to the Precision Magnetic Manipulator and transferring to the receiver located within the analysis chamber. The banana plugs are engaged and the puck locked onto the receiving station completing the electrical connection for heating. i Transfer Engineering & Manufacturing 2199 Warm Springs Court, Suite 1 Fremont, CA The Precision Magnetic Manipulator now releases the puck. The sample that would be attached to the puck is now ready for heating and/or processing. Note the positive lock/release mechanism on the PMM. TEAM DS-101 8/01

24 Custom Transfer & Positioning Systems FOR HV, UHV AND CONTROLLED ENVIRONMENT APPLICATIONS Transporters constructed of unusual materials and shapes Dual purpose loadlocks Heating and cooling units for varied applications Goniometers UHV linear guides DRAFT COPY Sample/wafer holders to grip, turn or manipulate substrates Custom chambers for special purposes Modified SMIF pods Multi-directional transfer systems Amajor portion of Transfer Engineering business involves modification to standard products as well as customized systems designed to meet unique customer requirements. With years of experience in UHV, our engineers understand materials and environmental issues and work closely with customers to understand their process and objectives to make sure goals are met. This has led to customer requests for a wide variety of systems for use in high vacuum, ultra-high vacuum or controlled environments. A Transfer Engineering catalog has not been published as the range of products continually increases and catalog listings seem to suggest limits on what products are available. Datasheets with specifications on standard products are available upon request. This brochure gives a few examples of unique customer requirements and the modified and custom systems provided to fill those needs. Let us know what we can provide for you. CUSTOM TRANSFER SYSTEMS Magnetically-Coupled Transfer Trolley Tube Customer Request: Capability to load and move samples between a variety of surface analysis and deposition systems while keeping the sample under ultra-high vacuum. Provided: A UHV magnetically-coupled trolley and delivery system that can position a loaded cassette of five sample holders for insertion into a multitude of different analysis and process chambers. The samples can be loaded onto the trolley following insertion into the loadlock from a glovebox. The loaded trolley can then be manually positioned near any instrument requiring delivery of a sample holder. The individual sections can be isolated with gate valves and additional sections can be added as necessary Warm Springs Court, Suite 1 Fremont, CA Phone Fax Transfer Engineering has provided similar trolley tube transfer systems for MBE applications, but his system was designed around Physical Electronics sample holders (pucks) and surface analysis tools. The system is completely UHV compatible.

25 SPECIAL MAGNETICALLY-COUPLED TRANSPORTERS Even Precision Magnetic Manipulators (PMMs), the key technology in many of our transfer systems, are assembled to requested transfer lengths not just stocked in predetermined sizes. PMMs are modified to meet needs of specific applications, i.e., nonstandard shafts of different sizes, shapes and materials as well as multiple shafts. The patented independent motions of the DBLRP/Ms allows the rotation of the inner shaft to operate a cam for vertical lift, flex a gripper, open/close a pincher, rotate a disk orthogonally or secure a locking mechanism. Customer specified shaft Unique size/shape tube Hollow inner shaft MEMS sample holder Heated evaporation stage Custom small pincher Unique sample fork Allows vertical motion Motorized Transporter with Quartz Rod Customer Request: A transfer mechanism and manipulation system was needed to deliver a wafer into a furnace and rotate continuously at a preset speed. The process required the internal rod to be fabricated of quartz. Provided: This Model DBLRM with a quartz shaft is stepper motor driven via a keypad HMI (Human Machine Interface). The PMM is mounted vertically and a platter will be mounted to the end of the shaft. A wafer is loaded onto this platter and delivered upward into a furnace. While in the furnace the wafer is rotated continuously at a preset speed. The unit is equipped with optical limit switches for home and the HMI that can be programmed by the user to change many different operational parameters (i.e., delivery distance, rotational speed, etc.). Series of Linear Pneumatic Manipulators Customer Request: A series of positioning devices to be used on an optical system in a controlled environment. The system is pumped down and then backfilled with a gas. A laser beam is sent through a viewport on the front end of the system. The positioning devices allow for lens to be moved into the line of the beam and withdrawn as required. Provided: Transfer Engineering provided pneumatically driven Model DBLOM manipulators with lube free, ceramic ball, hybrid bearings.these PMMs replaced existing bellows manipulators from another manufacturer. The user found that material outgassing from the bellows manipulators was contaminating the lens causing problems with experiments. Large Custom System with Heavy-Duty Manipulators Customer Request: The ultimate goal of this project was to allow the users to study materials which had been introduced and frozen onto plates at liquid nitrogen temperatures (77k). In order to do this, gases would be introduced into the vacuum system which would freeze onto the plates. A second chamber within the vacuum system which was also cooled would then be lowered to separate the vacuum system into two distinct volumes. The materials trapped on the plates would then be studied as the temperature of the plates was raised. The material being studied was radioactive, therefore, the customer did not want to use welded bellows (which could rupture), or any other vacuum seals with a potential to leak. Provided: Transfer Engineering developed heavy duty magnetic manipulators to allow us to move the large inner chamber (shown in insert) through the vacuum wall. Six of these manipulators were used, each with a coupling force of 180 lbs.they are driven up and down with a large motor, leadscrew drive mechanism and simple motion control system. 2

26 MODIFIED AND CUSTOM LOADLOCKS AND VACUUM SYSTEMS Dual Purpose Customized MASCOT-LR with Ellipsometer Mount Customer Request: A loadlock or intermediate chamber to provide a mount for and allow film thickness measuring using ellipsometry while maintaining vacuum. Provided: A dual purpose loadlock was configured using the 300mm MASCOT chamber body with the with the lid (door) modified to allow the mounting of an ellipsometer for measuring film thickness, and sealing details for a 200mm door. On the floor of the loadlock chamber is a stage that can be adjusted so the ellipsometer angle requirement (laser on one side, detector on the other) can be met. (The wafer needs to be flat with respect to the laser and detector). The Dynamic End Effector of the MASCOT- LR allows the wafer to be set onto this stage. Brief process description: A 200mm wafer is inserted into the loadlock and the loadlock brought under vacuum. The wafer is taken from the process module and returned to the stage in the loadlock. A film thickness is measured. The process is repeated as necessary. Custom Chamber with XY and Rotational Stage Customer Request: Addition to an existing deposition system for raster and rotation of a sample holder that holds 4 wafers and allow mounting of an existing heater. Provided: The sample faces downward in this sputter up geometry system that was added to the top of an existing vacuum deposition system. The chamber contains a very robust XY and rotational stage which rasters and rotates a sample holder for 4 wafers. The stages are all motor driven through the wall with magnetically coupled manipulators. The system was designed to allow the mounting of an existing heater and power and thermocouple feedthroughs and lines were provided for power and to monitor the temperature during heating. Modified 300MM TEAM-Mate Loadlock with Pre-Treatment Customer Request: Customer wanted to de-gas wafers by radiation energy onto the wafer prior to insertion into a process chamber to assist in the removal of water vapor. Provided: This manually operated 300mm TEAM-Mate Loadlock has a large quartz viewport. The loadlock system delivers 300mm wafers into a process chamber. The quartz window allows a lamp array to be mounted above the wafer within the loadlock to radiate energy onto the wafer prior to transfer. This assists in the removal of water vapor (pre-cleaning) to maintain a lower vacuum within the process chamber and obtain more consistent process results. The system is easily upgradeable for motorization. HEATING/COOLING SYSTEMS A wide range of custom heating and heating and cooling units have been provided to perform to meet customer specifications. Shown at the left, the resistive heater has a rotational shutter. Variations of custom Model VMTEX, Transferable Experimental Station heaters are shown above. The VMTEX utilizes Transfer Engineerings UHV-compatible Banana Plugs for reliable electrical connections under ultra-high vacuum conditions. 3

27 UNIQUE CUSTOM SYSTEMS About Transfer Engineering & Mfg, Inc. UHV Linear Guide Designed as a part of our TEAM-Mate Loadlock system, this is a truly UHV linear guide, bakeable, and clean. It can be used as a guide for stages or any other linear motion in a vacuum system. Other high vacuum, linear guides are available but this is a guide that is UHV compatible. Modified SMIF Pod Openers Customer Request: A small systems company developed and sold lower cost wafer etch systems for wafer fabs where SMIF pod capability was not required. Our customer needed to outfit these etchinstruments with SMIF pod openers that would work with the existing wafer transfer and loadlock system. Provided: The existing Versaport SMIF pod opening system provided by Asyst Technologies was modified by Transfer Engineering to allow the pod to be opened using the existing control system. To accomplish this, a rotational table and lift and protection arms were added to match the operation of non-smif compatible system. All motions are pneumatically driven and cleanliness of operation is key. These modified openers were installed on high duty cycle production tools delivered to a wafer fab in the Far East. High Precision, Five-Axis Goniometer with Heating and Cooling Capability Customer Request: A five-axis, fully motorized, high precision goniometer with heating and cooling. Provided: This system was designed for very high precision motion in all five axes (X,Y,Z, azimuthal rotation, and polar rotation) and has a wide temperature range. The unique part about this goniometer in comparison to the typical manufacturers unit is that most systems handle little chips of materials. This unit handles an entire 2" substrate. CONTACT US TO DISCUSS YOUR APPLICATION The systems provided in this brochure are examples of Transfer Engineering capabilities. We do not define our products or services by a catalog of items, but by a process of taking a concept to hardware. Our engineering staff will gladly propose unique configurations of our standard products or invent something new to meet very specific technical requirements. We gladly encourage our potential customers to or fax concepts that we will layout on advanced modelling systems providing useful technical representations to scale that help turn a technical wish list into functional hardware prior to the placement of an order. Continued two-way technical discussions will often uncover unique solutions or potential problems prior to quoting and then providing a finished product. You will find that an experienced engineering/design staff and a close partnership with an on-site machine shop, TE Machining, can offer a unique, cost-effective system designed to fill your needs. Give us a call to discuss your application. Transfer Engineering and Manufacturing provides innovative products for OEM, Production Facility and R&D/University Lab customers in the Semiconductor, Media, Sputter Deposition and R&D markets. TEAMs core expertise is in the handling, transporting, positioning, and manipulation of samples, semiconductor wafers, substrates, flat panels, and other materials with precision and reliability in HV, UHV, ultra-clean and other challenging controlled environments. Product lines include Linear, Rotary and Linear/Rotary Precision Magnetic Manipulators Sample transfer & loadlock systems including the TEAM-Mate and MASCOT MESC- compatible wafer transport systems HV and UHV heating and/or cooling assemblies Motion and placement systems Automated loadlock systems Custom systems At Transfer Engineering we believe the key to providing the best product solution is to work closely with customers to understand their process and objectives and to involve them in the product design to ensure that goals are met. Contact us for technical information or a quotation. i Transfer Engineering & Manufacturing 2199 Warm Springs Court, Suite 1 Fremont, CA TEAM DS-106 2/03 4

28 Motor/Driver/Power Supply Packages FOR UHV and NON-VACUUM MOTORIZATION Motor with integrated controller and power supply Cost-effective Extremely compact Choice of joystick control or computer control Motors in three different sizes Encoders optional Customizable to meet varied applications Transfer Engineering a n d M a n u f a c t u r i n g, I n c Westinghouse Drive, Suite 100 Fremont, California Phone Fax Motorization adds convenience and precise control of motion using a Model MAMDO or MAMDI Motor/Driver/Power Supply Package. Models MAMDO and MAMDI include a NEMA 23 stepper motor with integrated controller, a power supply and cabling. Very compact in size, the entire controller, it s inputs and outputs, mount right to the motor. Each system is preprogrammed with micro-stepping. Mechanical or optical end point limit switches are provided. The motor can be computer controlled or operated by hand with a joystick. Various motor configurations are available such as single or dual shaft. Rotary versions are available in three motor lengths: 18, 22 & 31. Encoders are optional. Model MAMDO, Speed Control Variable speed and direction control on the Model MAMDO is performed using the joystick that is provided. This system cannot be computer driven although a text program (disk, program and cable supplied) is stored within the controller and variables can be changed. Model MAMDI, Motion Control The motor/controller provided with the Model MAMDI is programmable for computer control and is RS232 compatible.the MAMDI includes four I/O s for use with limit switches or to communicate with PLC s, etc., one 10 bit analog input and has microstep resolution up to 51,200 steps per revolution. A text program (disk, program and cable supplied) is stored within the controller and variables can be changed. Applications Compact and cost-effective, MAMDO or MAMDI systems can be used for a wide range of stepping motor applications. They can be coupled with Transfer Engineering magnetic transporters to perform linear and/or rotary motions. Motor driven mechanisms can assist an operator to perform repetitious motions as well as those requiring precise reproducibility. Motors can be used to perform continuous rotation or to add stability to vertically mounted applications. Long or inaccessible transfers can be operated remotely. Contact us for more information. One example of a Model MAMDO in use. Here a MAMDO is installed on a Model KLMDA, Mechanical Drive Assembly adding motorization to a linear-only Precision Magnetic Manipulator.