PUSH PULL DEVICES. Section 03. Introduction to Push Pull Devices 044. Magnetically-coupled devices. MPPRL - Rotary and Linear Motion 046

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MPPL - Linear Guided Motion 048 MPP - Linear Unguided Motion 050

1 Section PUSH PULL DEVICES Introduction to Push Pull Devices 044 Magnetically-coupled devices MPPRL - Rotary and Linear Motion 046 MPPL - Linear Guided Motion 048 MPP - Linear Unguided Motion 050 Edge-welded bellows-sealed devices LBD - Linear Bellows Drives

Magnetically-coupled Push Pulls Linear Bellows Drives High duty, high torque, linear & linear/rotary motion High precision, multi-position, linear only motion For high duty process applications the

tolerances Push Pull (MPP) devices are ideally suited with high torque, such as production lines where uptime is critical.

2 Magnetically-coupled Push Pulls Linear Bellows Drives High duty, high torque, linear & linear/rotary motion High precision, multi-position, linear only motion For high duty process applications the magnetically-coupled The MPP range is ideally suited to high duty cycle applications For applications where precise multi-positioning is required, our The LBD is manufactured and assembled to high tolerances Push Pull (MPP) devices are ideally suited with high torque, such as production lines where uptime is critical. Linear Bellows Drives provide exceptional resolution (2 times using quality materials throughout, including 316L bellows, high axial stiffness and zero thrust due to vacuum. The magnetically-coupled Push Pull range provides linear and The range provides smooth motion in both directions with zero thrust due to vacuum unlike bellows-sealed devices. better than conventional units), a guaranteed minimum lifetime of 10,000 cycles and the ability to easily motorise in the field. which offer a guaranteed minimum lifetime of 10,000 cycles. A simple user-friendly retrospective motor upgrade is available, linear/rotary motion solutions with up to 300mm (12") stroke. Strong magnetic coupling eliminates the use of bellows and dynamic seals which are vulnerable to failure, providing a Ranges provide linear motion (with free rotation of the shaft), guided linear motion (no rotation of the shaft) and linear and rotary motion (shaft rotation controlled by the thimble). The Linear Bellows Drives (LBDs) are a range of cost-effective UHV bellows-sealed devices that provide smooth and precise linear motion solutions for low load applications with 0.01mm which includes home and limit switches for positional accuracy that can easily be removed for bake-out. The Linear Bellows Drive range offers four interchangable actuation methods; robust long life design. Manual actuation is provided as standard with motorised and linear resolution. They are available on a 34mm (1.33") OD CF simple push pull rod, micrometer style actuation, high precision pneumatic options available. Pneumatic actuation is ideal for flange as standard or 70mm (2.75") OD CF flange option with a motorisation and pneumatic. high duty, two position applications such as source or beam range of strokes up to 150mm. They are ideal for simple linear shutters. motion applications through to precise positioning such as required for beamline diagnostics. MPPRL Series MPPL Series MPP Series LBD-R Series LBD-H Series LBD-IS Series LBD-P Series Linear & rotary motion Guided linear motion Unguided linear motion Simple push pull rod Precise, micrometer scale High precision motorisation Pneumatic Actuation Page 44 Page 46 Page 48 Push Pull Devices 43

Linear & Rotary Motion Rotary Source MPPRL Shutters Series MPPRL KEY ADVANTAGES Example Dimensions (mm) For the complete range of 2D drawings & 3D models contact us or visit Magnetically-coupled Push

Provided on a CF16 flange as standard with a choice of stroke lengths from 50mm to 300mm.

29 lbf ft) Entire unit bakeable to 250 C 34 CF16 FLANGE 8.0 ±0.1 50 RETRACTED 10.0 2 x M3 THRU STROKE + 108 (e.g.

The range provides a simple and intrinsically safe alternative to bellows-sealed push pull systems and is ideal for high duty cycle/performance critical applications such as synchrotrons and MBE

3 Linear & Rotary Motion Rotary Source MPPRL Shutters Series MPPRL KEY ADVANTAGES Example Dimensions (mm) For the complete range of 2D drawings & 3D models contact us or visit Magnetically-coupled Push Pull devices providing rotary and linear motion solutions for low load applications in both high and ultra-high vacuum. Provided on a CF16 flange as standard with a choice of stroke lengths from 50mm to 300mm. Linear and continuous rotary motion High power-to-size ratio No bellows - smooth operation No thrust due to vacuum Over 90 N (20 lbf) linear thrust Torque in excess of 0.4 Nm (0.29 lbf ft) Entire unit bakeable to 250 C 34 CF16 FLANGE 8.0 ± RETRACTED x M3 THRU STROKE (e.g. 100mm stroke = 208mm) STROKE The MPPRL provides linear and continuous rotary motion of the vacuum shaft. The range provides a simple and intrinsically safe alternative to bellows-sealed push pull systems and is ideal for high duty cycle/performance critical applications such as synchrotrons and MBE systems where downtime is not acceptable. Linear strokes between 50mm and 300mm are offered as standard, with special strokes available upon request. Utilising UHV Design s magnetic coupling technology, the Magnetic Push Pull removes the need for edge-welded bellows stacks, incorporated within traditional push pull designs. Their elimination maximises vacuum integrity, providing a robust, cost-effective solution. Unlike a bellows-sealed device, the MPPRL offers the additional advantage of not being subject to thrust due to vacuum, resulting in smooth free-moving, user-friendly operation. The CF16 flange version of the MPPRL is typically available from stock. CF35 flange versions are available at additional cost FLAT 20.0 MPPRL Part Code Generator Push Pull + CF Flange Size (select one) + Axial Stroke (select one) + Manual Actuation Rotary & Linear MPPRL CF16 34mm (1.33" OD CF) - Standard 16 50mm stroke 50 Manual H CF35 70mm (2.75" OD CF) - Option mm stroke mm stroke mm stroke mm stroke mm stroke 300 MPPRL16-50-H = MPPRL CF16 flange 16, 50mm stroke 50, manual actuation H 44 Push Pull Devices 45

Guided Linear Motion Rotary Source MPPL Series Shutters Standard In-line pneumatically actuated MPPL Magnetically-coupled Push Pull devices providing linear guided motion solutions for low load

Manual, pneumatic and motorised actuation options with additional switches to prevent over-travel and aid system interlocks are available.

C Example Dimensions (mm) 34 CF16 FLANGE 8.0 ±0.1 For the complete range

Furthermore, the high axial thrust coupling produces no torque and so external rotation of the thimble does not apply a rotational force internally, ensuring smooth motion.

4 Guided Linear Motion Rotary Source MPPL Series Shutters Standard In-line pneumatically actuated MPPL Magnetically-coupled Push Pull devices providing linear guided motion solutions for low load applications in high vacuum and ultra-high vacuum provided on CF16 flange as standard with strokes from 50mm to 300mm. Manual, pneumatic and motorised actuation options with additional switches to prevent over-travel and aid system interlocks are available. MPPL KEY ADVANTAGES Internally-guided linear motion Guaranteed rotation-free motion No bellows - smooth operation No thrust due to vacuum Over 90 N (20 lbf) linear thrust Entire unit bakeable to 250 C Example Dimensions (mm) 34 CF16 FLANGE 8.0 ±0.1 For the complete range of 2D drawings & 3D models contact us or visit 50 RETRACTED x M3 THRU STROKE + 82 (e.g. 100mm stroke + 82 = 182mm) STROKE The MPPL provides internally-guided linear motion of the vacuum shaft, guaranteeing rotation-free motion. Furthermore, the high axial thrust coupling produces no torque and so external rotation of the thimble does not apply a rotational force internally, ensuring smooth motion. The range can be actuated manually, pneumatically or motorised with DC or stepper motors. Additionally, switches can be provided to prevent over-travel and to aid system interlocks. The MPPL provides a simple and intrinsically safe alternative to bellows push pull systems. Utilising UHV Design s magnetic coupling technology the Magnetic Push Pull removes the need for edge-welded bellows stacks, incorporated within traditional push pull designs. Their elimination maximises vacuum integrity, providing a robust, cost-effective solution. Also, unlike a bellows-sealed device, the MPPL is not subject to the thrust due to vacuum, resulting in smooth, free-moving operation. The CF16 flange versions of the MPPL are typically available from stock. CF35 flange versions are available at additional cost FLAT 20.0 MPPL Part Code Generator Push Pull + CF Flange Size (select one) + Axial Stroke (select one) + Manual Actuation Linear Only MPPL CF16 34mm (1.33" OD CF) - Standard 16 50mm stroke 50 Manual actuation H CF35 70mm (2.75" OD CF) - Option mm stroke 100 In-line pneumatic actuator P 150mm stroke 150 P + reed switches PR 200mm stroke 200 In-line stepper motor+ pre-wired switches 250mm stroke 250 IS 300mm stroke 300 Special side-mounted pneumatically actuated MPPL MPPL H = MPPL CF16 flange 16, 100mm stroke 100, manual actuation H 46 Push Pull Devices 47

Unguided Linear Motion MPP Series Unguided linear motion solutions for low load applications in high/ultra-high vacuum.

Manual, pneumatic and motorised actuation options with additional switches to prevent over-travel.

thrust Entire unit bakeable to 250 C Example Dimensions (mm) 34 CF16 FLANGE 8.0 ±0.1 For the complete range of 2D drawings & 3D models contact us or visit 50 RETRACTED STROKE + 82 (e.g. 100mm stroke + 82 = 182mm) 2 x M3 THRU 10.

5 Unguided Linear Motion MPP Series Unguided linear motion solutions for low load applications in high/ultra-high vacuum. The vacuum shaft is free to rotate, avoiding possible conflict with an internal chamber mechanism. Available in CF16 and CF35 flanges and six stroke lengths from 50mm to 300mm. Manual, pneumatic and motorised actuation options with additional switches to prevent over-travel. MPP KEY ADVANTAGES Unguided linear motion of the vacuum shaft Vacuum shaft free to rotate High power-to-size ratio No bellows - smooth operation No thrust due to vacuum Over 90 N (20 lbf) linear thrust Entire unit bakeable to 250 C Example Dimensions (mm) 34 CF16 FLANGE 8.0 ±0.1 For the complete range of 2D drawings & 3D models contact us or visit 50 RETRACTED STROKE + 82 (e.g. 100mm stroke + 82 = 182mm) 2 x M3 THRU 10.0 STROKE MPPs provide linear motion of an unguided vacuum shaft (free to rotate). This is used to manipulate slides or pivot arms where a guided system may conflict with the mechanism. Please note that although the vacuum shaft is free to rotate, the MPP does not provide rotation. The range can be actuated manually, pneumatically or motorised with DC or stepper motors. Additionally, switches can be provided to prevent over-travel and to aid system interlocks. The MPP range provides a simple and intrinsically safe alternative to bellows push pull systems. Utilising UHV Design s magnetic coupling technology, the Magnetic Push Pull removes the need for edge-welded bellows stacks, incorporated within traditional push pull designs. Their elimination maximises vacuum integrity, providing a robust, cost-effective solution. Also, unlike a bellows-sealed device, the MPP is not subject to the thrust due to vacuum, resulting in smooth, free-moving operation. The CF16 flange versions of the MPPL are typically available from stock. CF35 flange versions are available at an additional cost FLAT 20.0 MPP Part Code Generator Push Pull + CF Flange Size (select one) + Axial Stroke (select one) + Manual Actuation Linear + free rotation MPP CF16 34mm (1.33" OD) - Standard 16 50mm stroke 50 Manual actuation H CF35 70mm (2.75" OD) - Option mm stroke 100 In-line pneumatic actuator P 150mm stroke 150 P + reed switches PR 200mm stroke 200 In-line stepper motor+ pre-wired switches 250mm stroke 250 IS 300mm stroke 300 MPP H = MPPL CF16 flange 16, 100mm stroke 100, manual actuation H 48 Push Pull Devices 49

Linear Bellows Drive Linear Bellows Drive with micrometer scale Linear Bellows Drive with Pull rod actuation Motorised Linear Bellows Drive Bellows-sealed, precise lead-screw driven linear motion

LBD KEY ADVANTAGES 316L high-quality bellows 10,000 cycle guarantee Simple to motorise retrospectively High resolution performance: 10 micron manual, 1 micron motorised 25N (5.

2 For the complete range of 2D drawings & 3D models contact us or visit 90 RETRACTED 7.6 30 8.00 31.6 130 67 35 5.

applications. LBDs utilise a common drive body actuated by four interchangable mechanisms; pull rod, micrometer style actuation, pneumatic actuation and stepper motorisation.

6 Linear Bellows Drive Linear Bellows Drive with micrometer scale Linear Bellows Drive with Pull rod actuation Motorised Linear Bellows Drive Bellows-sealed, precise lead-screw driven linear motion solutions for low load applications in ultra-high vacuum. Available in CF16 and CF35 flange sizes with stroke length options from 25mm to 150mm. Manual or stepper motor actuation options. LBD KEY ADVANTAGES 316L high-quality bellows 10,000 cycle guarantee Simple to motorise retrospectively High resolution performance: 10 micron manual, 1 micron motorised 25N (5.6 lbf) axial thrust Bakeable to 250 C with motor removed Base Drive Dimensions (mm) LBD16-25-H 33 CF16 FLANGE M4 TAPPED HOLE For the complete range of 2D drawings & 3D models contact us or visit 90 RETRACTED FLAT TAPPED M3 THRU The Linear Bellows Drives (LBDs) are a range of ultra-high vacuum compatible, bellows-sealed devices that provide smooth and reliable linear motion solutions for low load applications. LBDs utilise a common drive body actuated by four interchangable mechanisms; pull rod, micrometer style actuation, pneumatic actuation and stepper motorisation. Simple motorisation upgrade process: The CF16 flange versions of the LBD are typically available from stock, and are ideal for simple linear motion applications through to precise positioning such as beamline diagnostics. CF35 flange versions are available at an additional cost. The LBD is manufactured and assembled to high tolerances using quality materials throughout, including 316L bellows, which offer a guaranteed minimum lifetime of 10,000 cycles. Specification Table LINEAR BELLOWS DRIVE The driving mechanism, which incorporates a precision cut lead-screw that is supported internally via a ceramic linear bush for greater rigidity, can either be manually actuated via a micrometer scale or stepper motor driven, both of which offer a factor twice the resolution of conventional units. Actuation via a simple pull rod and is also available. As actuation mechanisms are interchangeable a user-friendly retrospective motor upgrade is possible at any time (see below). This upgrade includes pre-wired home and limit switches for 1. Thimble and brake screw removed 2. Install simple two-piece motorisation kit 3. Motorised LBD is ready to use LBD Part Code Generator positional accuracy that can easily be removed for bake-out. Linear Bellows Drive + CF Flange Size (select one) + Axial Stroke (select one) + Actuation Linear Bellows Drive LBD CF16 34mm (1.33" OD) - Standard 16 25mm stroke 25 Micrometer scale H CF35 70mm (2.75" OD) - Option 35 50mm stroke 50 Pull rod assembly with brake R Mounting flange Calibrated drive resolution Motorised drive resolution Maximum cantilevered load Maximum axial load Lateral float of shaft in retracted position CF16 (1.33" OD CF) 10 microns 1 micron 0.5 Nm 25 N (5.6 lbf) 0.3mm max 100mm stroke 100 In-line stepper motor+ pre-wired switches 150mm stroke 150 Pneumatic PR LBD16-50-R = LBD CF16 flange 16, 50mm stroke 50, pull rod actuation R IS 50 Push Pull Devices 51

LINEAR MOTION AND ALIGNMENT

LINEAR MOTION AND ALIGNMENT LINAR MOTION AN ALIGNMNT Section Introduction to Linear Shift Mechanisms 094 Linear Shift Mechanism Actuation Options 096 Standard Linear Shift Mechanism (LSM ) 098 Long Travel Linear Shift Mechanism (LSML