Gas regulating valve EVR 116, motorized, DN 16 ISO-KF

Size: px
Start display at page:

Download "Gas regulating valve EVR 116, motorized, DN 16 ISO-KF"

Transcription

1 Gas regulating valve EVR 116, motorized, DN 16 ISO-KF High gas throughput Very broad regulating range With integrated motor control electronics Characteristic Gasflow [mbar l/s] Gas Down-stream control EVR 116 control valve system M gauge IF 200 Gas IF 200 EVR 116 control valve M Up-stream control system pump gauge U STG [V] pump PC PC EVR 116, Gas regulating valve IF 200, Interface for EVR 116 IF 200, Interface for EVR 116 Dimensions EVR 116, Gas regulating valve IF 200, Interface for EVR 116 Page 286 / Part 3.3

2 Technical data EVR 116 IF 200, Interface for EVR 116 Connection Terminals Flange (out) DN 16 ISO-KF Flange (in) DN 16 ISO-KF Control RVC 300 or IF 200 Control 60 C Bakeout temperature: actuator 80 C Bakeout temperature: housing Mounting rail Fixation 2500 hpa (abs.) Operating pressure max hpa Operating pressure min Pa m 3 /s Tightness FKM Seal Fluorplastomer Dosing sleeve 1250 hpa l/s hpa l/s Stainless steel Housing/needle/filter 0.75 kg 40 g Weight 0-10 V DC Control voltage < 3 / 4 s Closing/opening time RS-232-C Interface 5-40 C Ambient temperature 0.5 A Supply 24 V DC 24 V DC Supply: Voltage 12 W Order number Gas regulating valves PF I PF I Accessories RVC-EVR, connection cable, 3 m PT T PT T RVC-EVR, connection cable, 5 m PT T PT T RVC-EVR, connection cable, 10 m PT T PT T RVC-EVR, connection cable, 15 m PT T PT T RVC-EVR, connection cable, 20 m PT T PT T Part 3.3 / Page 287

3 Gas regulating valves, solenoid actuated, RME 005 A, DN 5 Two connections required as accessories Including connector Drive: Solenoid Regulating range from 0.85 to 85 hpa l/s Normally closed (n.c.) Characteristic Gas flow [sccm] Gas flow [sccm] 6000 Control valve open 1200 Control valve open Control valve closed Current (solenoid coil) [ma] Control valve closed Current (solenoid coil) [ma] RME 005 A, Gas regulating valve RME 005 A, Gas regulating valve Dimensions M (17) 8 33 AF 17 Page 288 / Part 3.3

4 Technical data Flange (in) Flange (out) Response time RME 005 A DN 5 mm M14x1 DN 5 mm M14x1 < 30 ms Control RVC 300 Bakeout temperature: actuator, powerless 80 C Operating pressure max. Operating pressure min hpa (abs.) hpa Tightness Pa m 3 /s Seal FKM Mounting orientation Any, preferably perpendicular Duty cycle (ED) 100 % Housing Stainless steel Weight 96 g Control voltage 0-24 V DC Ambient temperature 5-50 C Supply: Power consumption max. 2.5 W RME 005 A 85 hpa l/s 0.85 hpa l/s Order number PF I hpa l/s 0.17 hpa l/s Order number PF I hpa l/s hpa l/s Order number PF I hpa l/s hpa l/s Order number PF I hpa l/s hpa l/s Order number PF I hpa l/s hpa l/s Order number PF I Accessories Connection, for ¼" tube O.D. PT T Connection, for 6 mm tube O.D. PT T Connection, DN 10 ISO-KF PT T RVC RME 005, connection cable, 3 m PT T RVC RME 005, connection cable, 5 m PT T RVC RME 005, connection cable, 10 m PT T RVC RME 005, connection cable, 15 m PT T RVC RME 005, connection cable, 20 m PT T RVC RME 005, connection cable, 25 m PT T Part 3.3 / Page 289

5 Control unit RVG 050 C for UDV 140 and UDV 146 For creating a control section in conjunction with UHV gas dosing valves UDV 140 or UDV 146 Characteristic Dimensions Page 290 / Part 3.3

6 Technical data RVG 050 C Output for valve heater: Voltage 20 V DC Output for valve heater: Current 0.5 A Weight 2.3 kg Actual value input: Analog voltage 10 V DC Actual value input: Impedance 100 kω Power consumption 20 VA Mains requirement: voltage (selectable) 115/230 V AC for 1 bar N 2, inlet side hpa l/s Control characteristic (proportional-integral) PI Set point input: External 10 V DC Set point input: Impedance 100 kω Set point input: Internal (scale division) Ambient temperature 5-50 C Time constant, adjustable 2-30 s Order number Gas regulating valves PF I Accessories UDV 146, All-metal gas regulating valve, PF I DN 16 CF-F RVG-UDV, extension cable, 2 m, 200 C PT T RVG-UDV, connection cable, 3 m, 80 C PT T RVG-UDV, connection cable, 12 m, 80 C PT T Part 3.3 / Page 291

7 Control unit RVC 300 for EVR 116 and RME 005 A For creating a control section in conjunction with EVR 116 or RME 005 A regulating valves Simple operation Self-explanatory LCD display and function keys Analog/digital inputs/outputs and interfaces Settable PID regulating algorithm For system manufacturers, as a supplement to their own control unit Characteristic Up-stream control Down-stream control Gas EVR 116 control valve M system gauge system gauge pump EVR 116 control valve M RVC 300 controller RVC 300 controller acuum pump RVC 300, Control unit gas regulating valves Dimensions RVC 300, Control unit gas regulating valves C Page 292 / Part 3.3

8 Technical data RVC 300 Output: Analog 4 channels: Pressure sensor signal/ valve signal (0-10 V DC)/ valve position EVR 116/ + 10 V DC reference voltage (10 ma) Output: Digital 8 channels: Valve closed/ valve open/ valve in position/ valve error/ sensor error/ ready/ emission ON/ sensor status Input: Analog 2 channels: Pressure setpoint (nominal value)/ flow setpoint (nominal value) Input: Digital 8 channels: Flow decrease/ flow increase/ external CLOSE/ external OPEN/ flow mode/ pressure mode/ emission ON/ Degas ON Weight 1.65 kg Mains requirement: frequency (range) 50/60 Hz Mains requirement: power consumption 50 VA Mains requirement: voltage (range) V APR 250/260: hpa CMR 361/371: hpa TPR 280/281: hpa PCR 280: hpa CMR 362/372: hpa CMR 363/373: hpa CMR 364/374: hpa CMR 365/375: hpa IKR 251/261: hpa IMR 265: hpa PBR 260: hpa PKR 251/261: hpa Interface: Baud rates 9600 Bd Interface: Type RS-232, RS-485 Temperature: Operating 5 to 50 C Temperature: Storage -40 to 60 C Order number Gas regulating valves PF I Accessories RVC RME 005, connection cable, 3 m PT T RVC RME 005, connection cable, 5 m PT T RVC RME 005, connection cable, 10 m PT T RVC RME 005, connection cable, 15 m PT T RVC RME 005, connection cable, 20 m PT T RVC-EVR, connection cable, 3 m PT T RVC-EVR, connection cable, 5 m PT T RVC-EVR, connection cable, 10 m PT T RVC-EVR, connection cable, 15 m PT T RVC-EVR, connection cable, 20 m PT T PF I regulating range from to 0.17 hpa l/s PF I regulating range from to 0.8 hpa l/s PF I regulating range from to 1.7 hpa l/s PF I regulating range from to 8.5 hpa l/s PF I regulating range from 0.17 to 17 hpa l/s PF I regulating range from 0.85 to 85 hpa l/s EVR 116, Gas regulating valve PF I Part 3.3 / Page 293

Venting valves. Valves. Manually actuated. Venting valves. Installation elements

Venting valves. Valves. Manually actuated. Venting valves. Installation elements Installation elements Venting Manually actuated Venting For manually venting small vacuum chambers Valve opens and closes easily by loosening/ tightening the screw cap FVB = Venting valve HA = Manually

More information

Operating Instructions

Operating Instructions A PASSION FOR PERFECTION RVC 300 Controller Operating Instructions BG 5280 BEN (2011-11) Product Identification In all communications with Pfeiffer Vacuum, please specify the information on the product

More information

Operating Instructions incl. Declaration of Conformity. Controller RVC 300 BG BE / C ( ) 1

Operating Instructions incl. Declaration of Conformity. Controller RVC 300 BG BE / C ( ) 1 Operating Instructions incl. Declaration of Conformity Controller RVC 300 BG 805 280 BE / C (2004-06) 1 Product Identification In all communications with Pfeiffer Vacuum, please specify the information

More information

TPR 281, 80 C, DN 16 ISO-KF

TPR 281, 80 C, DN 16 ISO-KF TPR 281, 80 C, DN 16 ISO-KF Flange size: DN 16 ISO-KF Compact and rugged Maximum pressure refers to inert gases Dimensions Similar Image Technical Data TPR 281, 80 C, DN 16 ISO-KF Accuracy: 1 10-3 100

More information

TPR 280, 80 C, DN 16 ISO-KF

TPR 280, 80 C, DN 16 ISO-KF TPR 280, 80 C, DN 16 ISO-KF Flange size: DN 16 ISO-KF For general vacuum applications Compact and rugged Maximum pressure refers to inert gases Dimensions Similar Image TPR 280, 80 C, DN 16 ISO-KF Accuracy:

More information

Butterfly valve control system Series 61

Butterfly valve control system Series 61 utterfly valve control system Series 61 Series 61.2 Main applications Downstream pressure control valve for SEMI, FPD, PV, SOLAR and industrial processes Optimal for fast and demanding processes, e. g.

More information

Product data sheet. Series 210, DN (2½ - 6 ) Ordering No PE

Product data sheet. Series 210, DN (2½ - 6 ) Ordering No PE Series 210, DN 63 160 (2½ - 6 ) Ordering No. 210..-PE06-000. Manual actuator with hand lever Advantages Three sizes available: DN 63, 100, 160 with ISO-F flanges All vacuum parts made of stainless steel

More information

Butterfly valve control system Series 61

Butterfly valve control system Series 61 utterfly valve control system Series 61 Downstream pressure control valve Very fast operation High-performance, integrated controller ody material aluminum or stainless steel Valve with integrated controller

More information

Pendulum valve control system Series 65

Pendulum valve control system Series 65 Pendulum valve control system Series 65 Series 65.2 Main applications Downstream pressure control and isolation valve for SEMI and FPD processes Optimal for corrosive etching and cleaning processes Ordering

More information

Pendulum valve control system Series 65

Pendulum valve control system Series 65 Pendulum valve control system Series 65 Series 65.0 Main applications Downstream pressure control and isolation valve for SEMI and FPD processes Optimal for corrosive etching and cleaning processes Ordering

More information

PENDULUM CONTROL VALVE, SERIES 65.0

PENDULUM CONTROL VALVE, SERIES 65.0 Downstream pressure control and isolation valve for SEMI and FPD processes. Optimal for corrosive etching and cleaning processes. Virtually particle-free and shock-free operation Excellent pressure control

More information

G = basic version A = with SPS H = with PFO C = with SPS and PFO. Ordering number example:

G = basic version A = with SPS H = with PFO C = with SPS and PFO. Ordering number example: 1 with extended control range Downstream pressure control and isolation valve Compact design Fast, virtually particlefree and shockfree operation Highperformance, integrated controller Low minimum controllable

More information

Assisted lift operated 2/2-way solenoid valves Type EV250B

Assisted lift operated 2/2-way solenoid valves Type EV250B Data sheet Assisted lift operated 2/2-way solenoid valves Type EV250B EV250B with assisted lift can operate from zero and up to 10 bar differential pressure. This 2/2-way valve program is especially to

More information

Sentronic PLUS 614 Series

Sentronic PLUS 614 Series Sentronic PLUS 64 Series Proportional Technology www.asco.com PRESSURE CONTROL: 64 SERIES SENTRONIC PLUS Sentronic PLUS Sentronic PLUS is a digitally operated pressure regulator valve. This valve accurately

More information

Pilot Operated Directional Control Valves Series D31DW, D41VW - D111VW

Pilot Operated Directional Control Valves Series D31DW, D41VW - D111VW Characteristics The D31, D41, D81, D91 and D111 are electrically controlled 4/3 or 4/ way directional control valves. The valves are pilot operated by an NG6 valve. Pressure and flow of the pilot oil have

More information

2/2 or 3/2 way direct acting rocker solenoid valve

2/2 or 3/2 way direct acting rocker solenoid valve 2/2 or 3/2 way direct acting rocker solenoid valve With isolating diaphragm Ultra low dead volume Type 6126 can be combined with... High back-pressure tightness Normally closed, normally open or universal

More information

ANGLE/INLINE VALVE WITH SOFT-PUMP FUNCTION, SERIES 29.0/29.2

ANGLE/INLINE VALVE WITH SOFT-PUMP FUNCTION, SERIES 29.0/29.2 ANGL/INLIN VALV WITH SOFT-PUMP FUNCTION, SRIS 9.0/9. For pumping and venting of HV systems when few turbulences, particles, substrate movements and condensation are important. Resistant against differential

More information

Servotronic Digital 615 Series

Servotronic Digital 615 Series Servotronic Digital 615 Series Proportional Technology www.asco.com PRESSURE CONTROL: 615 SERIES SERVOTRONIC Digital Servotronic Digital Greater versatility in automated production processes: Due to electronics,

More information

3/2-way Solenoid Valve for pneumatics

3/2-way Solenoid Valve for pneumatics 656 3/-way Solenoid Valve for pneumatics Compact design Single and manifold mounting Low power consumption Rocker pilot in DC Type 656 can be combined with... Fast response times Type 506 Type 510/511

More information

2/2-way assisted lift operated solenoid valve type EV250B

2/2-way assisted lift operated solenoid valve type EV250B MAKING MODERN LIVING POSSIBLE Data sheet 2/2-way assisted lift operated solenoid valve type EV250B EV250B with assisted lift can operate from zero and up to 10 bar differential pressure. This 2/2-way valve

More information

TRIVAC NT 16 and NT 25

TRIVAC NT 16 and NT 25 TRIVAC NT 16 and NT 25 idealvac.com (505)872-0037 idealvac.com TRIVAC NT 16 Type DN a b b1 c h h1 h2 l m n o NT 16 1) mm 25 KF 32 175 137 135 243 227 261 540 280 140 132 in. 25 KF 1.26 6.89 5.39 5.31 9.57

More information

Pilot-Operated Directional Control Valves Series D3 - D11

Pilot-Operated Directional Control Valves Series D3 - D11 Catalogue HY11-500/UK Characteristics The D31, D41, D81, D91 and D111 are electrical controlled 4/3 or 4/ way directional control valves. The valves are pilot-operated by an NG6 valve. Pressure and flow

More information

Electrically operated valves Series BM-01, 3/2-way and 2 x 3/2-way G1/8 550 to 660 Nl/min (0.559 to Cv)

Electrically operated valves Series BM-01, 3/2-way and 2 x 3/2-way G1/8 550 to 660 Nl/min (0.559 to Cv) Electrically operated valves Series BM-01, 3/2-way and 2 x 3/2-way G1/8 550 to 660 Nl/min (0.559 to 0.671 Cv) Order code BM-01-310-HNR-462 Series and function BM = Standard Manual override HNT = non-detented

More information

ACTIVELINE GAUGES. The new ActiveLine PKR and IKR gauges. Compact, durable and maintenance-friendly, minimized stray magnetic field.

ACTIVELINE GAUGES. The new ActiveLine PKR and IKR gauges. Compact, durable and maintenance-friendly, minimized stray magnetic field. ACTIVELINE GAUGES The new ActiveLine PKR and IKR gauges. Compact, durable and maintenance-friendly, minimized stray magnetic field. ACTIVELINE GAUGES The new ActiveLine PKR and IKR gauges. Compact, durable

More information

Pilot Operated Directional Control Valves Series D31DW, D31NW, D*1VW

Pilot Operated Directional Control Valves Series D31DW, D31NW, D*1VW Characteristics The pilot operated valves are available in 4 sizes: D31DW NG10 (standard) D31NW NG10 (high flow) D41VW NG16 D81VW NG5 (for port diameter up to 6 mm) D91VW NG5 (for port diameter up to 3

More information

Directional Control Valve Series D3W (Parker), 4D02 (Denison)

Directional Control Valve Series D3W (Parker), 4D02 (Denison) Characteristics Series D3W (Parker), 4D0 (Denison) The direct operated directional control valve size NG10 is available with both Parker (series D3W) and Denison (series 4D0) model codes. Both series are

More information

3/2-way and 2 x 3/2-way Solenoid Valve for pneumatics

3/2-way and 2 x 3/2-way Solenoid Valve for pneumatics 654 3/-way and x 3/-way Solenoid Valve for pneumatics Compact design Single and manifold mounting Low power consumption Fast response times Space saving ( x 3/-way version) Type 654 can be combined with...

More information

3/2-, 5/2- and 5/3-way Solenoid Valves for process pneumatics

3/2-, 5/2- and 5/3-way Solenoid Valves for process pneumatics /-, 5/- 5/-way Solenoid Valves for process pneumatics Type 658 stard High flow-rate capacity Reduced power consumption Single or manifold mounting stard Type 658/659 can be combined with... Stard-, EEx

More information

Pilot-Operated Proportional DC Valve Series D*1FH

Pilot-Operated Proportional DC Valve Series D*1FH Characteristics The pilot-operated proportional DC valves series of the D*1FH series are high-performance valves with electronic spool position feedback. These valves are available in sizes NG10 to NG2

More information

UPGRADE PROGRAM. V141 Series Pumps vs Turbo-301 Series Pumps. Technical Memo

UPGRADE PROGRAM. V141 Series Pumps vs Turbo-301 Series Pumps. Technical Memo UPGRADE PROGRAM V141 Series Pumps vs Turbo-301 Series Pumps Technical Memo INDEX Outline drawings ISO63 3 Outline drawings CF4-½ 6 Outline drawings ISO100 10 Outline drawings CF6 12 Technical Specification

More information

Directional Control Valve Series 4D01 (DENISON)

Directional Control Valve Series 4D01 (DENISON) Characteristics The Denison series 4D01 is a solenoid operated directional control valve size NG06 in -chamber design. It is direct operated by wet pin solenoids. The 4D01 is available with a Soft Shift

More information

Modular pneumatic valve island

Modular pneumatic valve island Modular pneumatic valve island Compact design Modular configuration High flexibility Simple exchange of valves (with P shut off, also possible during operation an option) Type 8640 can be combined with

More information

Sentronic D 608 Series and 609 Series

Sentronic D 608 Series and 609 Series Sentronic D 608 Series and 609 Series Proportional Technology www.asco.com PRESSURE CONTROL: 608/609 SERIES SENTRONIC D Sentronic D Sentronic D is a digitally operated pressure regulator valve. Sentronic

More information

Varian, Inc. Vacuum Technologies. TPS Turbo Pumping Systems. Features and Benefits 2-3. Mini-TASK AG TPS-compact 6-7

Varian, Inc. Vacuum Technologies. TPS Turbo Pumping Systems. Features and Benefits 2-3. Mini-TASK AG TPS-compact 6-7 Varian, Inc. Vacuum Technologies TPS Turbo Pumping Systems Features and Benefits 2-3 Mini-TASK AG81 4-5 TPS-compact 6-7 TPS-mobile and TPS-bench 8-10 TPS Turbo Pumping Systems Features and Benefits The

More information

Paddle-wheel flow controller for On/Off control

Paddle-wheel flow controller for On/Off control Paddle-wheel flow controller for On/Off control Type 803 can be combined with... Indication, monitoring, transmitting and On/Off control in one device Programmable s (transistor or relay) Automatic-calibration:

More information

All-metal angle valve Series 57

All-metal angle valve Series 57 ll-metal angle valve Series 57 Main applications For vacuum processes with extreme UHV requirements and / or when using aggressive media Ordering information Valve with manual actuator hexagon head Valve

More information

Electrically operated valves Series BM-01, 3/2-way and 2 x 3/2-way G1/8 550 to 660 Nl/min (0.559 to Cv)

Electrically operated valves Series BM-01, 3/2-way and 2 x 3/2-way G1/8 550 to 660 Nl/min (0.559 to Cv) Electrically operated valves Series BM-01, 3/2-way and 2 x 3/2-way G1/8 550 to 660 Nl/min (0.559 to 0.671 Cv) Order code BM-01-310-HNR-462 Series and function BM = Standard Manual override HNT = non-detented

More information

Type 2511/12. Type Type 2030 Cable plug. ASI cable plug. Dosing control. General technical data Orifice Type 6518

Type 2511/12. Type Type 2030 Cable plug. ASI cable plug. Dosing control. General technical data Orifice Type 6518 3/2-, 5/2- and 5/3-way Solenoid Valves for process pneumatics Type 658 standard standard High flow-rate capacity Reduced power consumption Single or manifold mounting Standard-, EEx m and EEx i versions

More information

Vacuum Valves. Manually Operated Electropneumatically Operated Electromagnetically Operated Special Valves Gate Valves

Vacuum Valves. Manually Operated Electropneumatically Operated Electromagnetically Operated Special Valves Gate Valves Vacuum Valves Manually Operated Electropneumatically Operated Electromagnetically Operated Special Valves Gate Valves 176.01.02 Excerpt from the Product Section Edition December 2011 Contents General The

More information

PROPORTIONAL VALVES Sentronic D - G 1/8 to G 3/8 tapped body or G 1/8 - G 1/4 subbase mounted body with digital pressure control

PROPORTIONAL VALVES Sentronic D - G 1/8 to G 3/8 tapped body or G 1/8 - G 1/4 subbase mounted body with digital pressure control PROPORTIONAL VALVES Sentronic D - G 1/8 to G 3/8 tapped body or G 1/8 - G 1/4 subbase mounted body with digital pressure control 3 ports Series 608 609 FEATURES Sentronic D is a highly dynamical 3-way

More information

Electrically operated valves Series BM-02, 3/2-way and 2 x 3/2-way G1/4 920 to 1090 Nl/min (0.935 to Cv)

Electrically operated valves Series BM-02, 3/2-way and 2 x 3/2-way G1/4 920 to 1090 Nl/min (0.935 to Cv) Electrically operated valves Series BM-02, 3/2-way and 2 x 3/2-way G1/4 920 to 1090 Nl/min (0.935 to 1.001 Cv) Order code BM-02-310-HNR-462 Series and function BM = Standard Manual override HNT = non-detented

More information

3/2-, 5/2- and 5/3-way Solenoid Valves for process pneumatics

3/2-, 5/2- and 5/3-way Solenoid Valves for process pneumatics /2-, 5/2-5/-way Solenoid Valves for process pneumatics Type 658 stard High flow-rate capacity Reduced power consumption Single or manifold mounting stard Type 658/659 can be combined with... Stard-, EEx

More information

HiPace 30 with TC 110, DN 40 ISO-KF

HiPace 30 with TC 110, DN 40 ISO-KF HiPace 30 with TC 110, DN 40 ISO-KF HiPace 30 with TC 110, DN 40 ISO-KF Similar Image Small yet powerful turbopump with a pumping speed of up to 32 l/s for N 2 Highest compression in this pumping speed

More information

CRNE15-12 A-FGJ-G-V-HQQV 3x HZ

CRNE15-12 A-FGJ-G-V-HQQV 3x HZ GRUNDFOS DATA BOOKLET CRNE15-12 A-FGJ-G-V-HQQV 3x4 6 HZ Grundfos Pump 96514555 Thank you for your interest in our products Please contact us for more information, or visit our website https://www.lenntech.com/grundfos/crne15/96514555/crne-15-12-a-fgj-g-v-hqqv.html

More information

PROPORTIONAL VALVES. G1/4, G3/8 and G1/2 tapped body or subbase mounted body with digital pressure control

PROPORTIONAL VALVES. G1/4, G3/8 and G1/2 tapped body or subbase mounted body with digital pressure control PROPORTIONAL VALVES Sentronic LP G1/4, G3/8 and G1/2 tapped body or subbase mounted body with digital pressure control 3 ports Series 617 FEATURES Sentronic LP stands for: Low power consumption (3,8 W)

More information

2/2-Way Pressure Relief Valve CX DBV (Right-Angle Design)

2/2-Way Pressure Relief Valve CX DBV (Right-Angle Design) 2/2-Way Pressure Relief Valve CX DBV (Right-Angle Design) CX DBV-E Model code (also example order) CX DBV 12 120 G1 F P 24V Type CX DBV = Pressure relief valve Nominal size 10 = DN 10 12 = 15 = 20 = CX

More information

TURBOMOLECULAR PUMPS ATP SERIES

TURBOMOLECULAR PUMPS ATP SERIES TURBOMOLECULAR PUMPS ATP SERIES TURBOMOLECULAR PUMPS ATP SERIES Introduction The ATP conventional turbomolecular pumps have a proven track record of reliability. Rotors made exclusively from carefully

More information

HiPace 80 with TC 110, DN 63 CF- F

HiPace 80 with TC 110, DN 63 CF- F HiPace 80 with TC 110, DN 63 CF- F HiPace 80 with TC 110, DN 63 CF-F Small yet powerful turbopump with a pumping speed of up to 67 l/s for N 2 Integrated TC 110 drive electronics For installation in any

More information

CRNE AN-F-G-E-HQQE 3x HZ

CRNE AN-F-G-E-HQQE 3x HZ GRUNDFOS DATA BOOKLET CRNE32-5-2 AN-F-G-E-HQQE 3x4 6 HZ Grundfos Pump 9612277 Thank you for your interest in our products Please contact us for more information, or visit our website https://www.lenntech.com/grundfos/crne32/9612277/crne-32-5-2-an-f-g-e-hqqe.html

More information

Remote Process Actuation Control System AirLINE - Rockwell 1734 Point I/O System

Remote Process Actuation Control System AirLINE - Rockwell 1734 Point I/O System Remote Process Actuation Control System AirLINE - Rockwell 1734 Type 8644 can be combined with... Fully compatible with Rockwell 1734 Point I/O System Combination of Fieldbus, pilot valves and I/O modules

More information

3/2-way and 2 x 3/2-way Solenoid Valve for pneumatics

3/2-way and 2 x 3/2-way Solenoid Valve for pneumatics 654 3/-way and x 3/-way Solenoid Valve for pneumatics Compact design Single and manifold mounting Low power consumption Fast response times Space saving ( x 3/-way version) Type 654 can be combined with...

More information

PSG5xx ATM to Medium Vacuum Gauge

PSG5xx ATM to Medium Vacuum Gauge The INFICON Standard Gauges,,, PSG510- S and, employ the most advanced digital technology available in themarketplace. The rugged stainless steel sensor cell and compact design qualifythem for use on semiconductor

More information

Gemini MxG50x BENEFITS. Long lifetime in harsh environments

Gemini MxG50x BENEFITS. Long lifetime in harsh environments The INFICON Gemini Inverted Magnetron Vacuum Gauge is the workhorse for all vacuum measurement applications (pending). Gemini combines two sensor systems into one small device to measure from atmosphere

More information

Metal tube variable area flowmeter for gases, liquids and steam

Metal tube variable area flowmeter for gases, liquids and steam Metal tube variable area flowmeter for gases, liquids and steam Metallic or plastic tube with a robust construction Indication by means of magnetic coupling Scales calibrated in l/h, m 3 /h, kg/h, t/h,

More information

Agilent Aluminum Block Valves - Series 26 NW 16 - NW 40 ISO-KF Flange

Agilent Aluminum Block Valves - Series 26 NW 16 - NW 40 ISO-KF Flange gilent lock Valves - Series 26 - ISO-KF Flange ata sheet gilent Valves by Thank you for choosing gilent Valves by VT. With the combination of these two well-known names in the Vacuum industry, we are confident

More information

FlowCon SM mm. Dynamic Self Balancing Control Valve SPECIFICATIONS

FlowCon SM mm. Dynamic Self Balancing Control Valve SPECIFICATIONS FlowCon SM 50-150mm Dynamic Self Balancing Control Valve SPECIFICATIONS Pressure rating: 4000 kpa / 580 psi Temperature rating, media: -20 C to +120 C / -4 F to +248 F Temperature rating, ambient: -10

More information

Turbomolecular Pump Systems TURBOLAB 80, 350, 450

Turbomolecular Pump Systems TURBOLAB 80, 350, 450 Turbomolecular Pump Systems TURBOLAB 80, 350, 450 This new smart TURBOLAB generation is built on one basic design platform with the opportunity to create three different variants. Each version can be customized

More information

83000 All Aluminum Gate Valves

83000 All Aluminum Gate Valves All Aluminum Gate Valves Table of Contents Introduction... Page 120... Page 121 Model Key Guide... Page 122 1.5" ID (DN40mm)... Page 123 2.0" ID (DN50mm)... Page 124 2.5" ID (DN63mm)... Page 125 3.0" ID

More information

822 NOVAMIX GAS FLOW RATE ADJUSTMENT AS A FUNCTION OF THE AIR FLOW GAS/AIR RATIO 1:1 DOUBLE AUTOMATIC SOLENOID SHUT-OFF VALVE

822 NOVAMIX GAS FLOW RATE ADJUSTMENT AS A FUNCTION OF THE AIR FLOW GAS/AIR RATIO 1:1 DOUBLE AUTOMATIC SOLENOID SHUT-OFF VALVE SIT Group 822 NOVAMIX MULTIFUNCTIONAL GAS CONTROL GAS FLOW RATE ADJUSTMENT AS A FUNCTION OF THE AIR FLOW GAS/AIR RATIO 1:1 DOUBLE AUTOMATIC SOLENOID SHUT-OFF VALVE SERVO-CONTROLLED PRESSURE REGULATOR PIN

More information

HYDRUS ULTRASONIC METER

HYDRUS ULTRASONIC METER APPLICATION Static ultrasonic water meter for accurate measuring and recording for all applications of water supply. FEATURES 4 Real data communication, open metering telegram 4 Long-term stability under

More information

AGILENT VACUUM VALVEs

AGILENT VACUUM VALVEs GILENT VCUUM valves 2-3 gilent Vacuum Valve Solutions 4-17 gilent High Performance Valves 18-21 Stainless Steel Tube Valves 22-23 Electromagnetic Block Valves 24 Variable Leak Valves gilent Vacuum Valve

More information

Vacuum Valves. Manually Operated Electropneumatically Operated Electromagnetically Operated Special Valves Gate Valves

Vacuum Valves. Manually Operated Electropneumatically Operated Electromagnetically Operated Special Valves Gate Valves Vacuum Valves Manually Operated Electropneumatically Operated Electromagnetically Operated Special Valves Gate Valves 176.01.02 Excerpt from the Product Section C14 Edition July 2007 Contents General The

More information

Gate valve control system Series 64

Gate valve control system Series 64 ate valve control system Series ontrol and isolation valve eneral purpose stainless steel valve daptive pressure control with stepper motor or throttling by adjustable 3-position pneumatic actuator ody

More information

Remote Process Actuation Control System AirLINE WAGO Remote I/Os and Fieldbusses

Remote Process Actuation Control System AirLINE WAGO Remote I/Os and Fieldbusses Remote Process Actuation Control System AirLINE WAGO Remote I/Os and Fieldbusses Type 8644 can be combined with... Fully compatible with WAGO I/O Combination of Fieldbus, pilot valves and I/O modules High

More information

Digital Pressure Regulator Sentronic PLUS Series 614

Digital Pressure Regulator Sentronic PLUS Series 614 Digital Pressure Regulator Sentronic PLUS Series 14 Installation manual IM149-/R01 CONTENTS 1. Description... 1.1 Catalogue number... 1. Operating elements...4 1. Operating modes...4. Electrical connection...5.

More information

Paddle-wheel flow controller for On/Off control

Paddle-wheel flow controller for On/Off control Paddle-wheel flow controller for On/Off control Type 8032 can be combined with... Indication, monitoring, transmitting and On/Off control in one device Programmable outputs (transistor or relay) Automatic-calibration:

More information

Directional Control Valve Series D3W Soft Shift

Directional Control Valve Series D3W Soft Shift Characteristics The D3W is a 3-chamber, electrically controlled 4/3 or 4/ way directional control valve. It is activated directly by solenoids with screwed in wet pin armature. The soft shifting of this

More information

3/2-way Rocker Solenoid Valve for pneumatic systems

3/2-way Rocker Solenoid Valve for pneumatic systems 3/-way Rocker Solenoid Valve for pneumatic systems EEx ia versions Direct-acting High cycling rate Reduced power consumption Type 6104 can be combined with... Sub-base connection Approvals: Type 654 Servo-assisted

More information

Servo-operated 2/2-way solenoid valves with isolating diaphragm Type EV222B

Servo-operated 2/2-way solenoid valves with isolating diaphragm Type EV222B Data sheet Servo-operated 2/2-way solenoid valves with isolating diaphragm Type EV222B EV222B is an indirect servo-operated solenoid valve programme for use in connection with contaminated or aggressive

More information

nickel-plated brass - PBT technopolymer HNBR, FKM stainless steel

nickel-plated brass - PBT technopolymer HNBR, FKM stainless steel CATALOGUE > Release 8.8 > Series A solenoid valves Series A directly operated solenoid valves /-way - Normally Closed (NC) and Normally Open (NO) 3/-way - Normally Closed (NC) and Normally Open (NO)»»

More information

PF6 Stainless Steel Piston Actuated On/Off Valves

PF6 Stainless Steel Piston Actuated On/Off Valves Local regulations may restrict the use of this product to below the conditions quoted. In the interests of development and improvement of the product, we reserve the right to change the specification without

More information

2/2-way Globe Valve for media up to +180 C, DN

2/2-way Globe Valve for media up to +180 C, DN 2/2-way Globe Valve for media up to +180 C, DN 10-100 Compact globe valve version Flange, threaded and welded ports as standard Stainless steel 316L valve body Available with flow direction below and above

More information

Features PNEUMAT IC VALVES. Pneumatic valves Vip - Pneumatic coaxial valve GENERAL FEATURES CONTROL MEDIA OPERATING MEDIA

Features PNEUMAT IC VALVES. Pneumatic valves Vip - Pneumatic coaxial valve GENERAL FEATURES CONTROL MEDIA OPERATING MEDIA OMAL S.p.a. Via Ponte Nuovo, 11-25050 Rodengo Saiano (BS) ITALY Phone +39 0308900145 - Fax +39 0308900423 Booked in the Enterprise Register of: Brescia number 1661640175 Share capital completely deposited:

More information

Agilent Turbo-V 750 and Turbo-V 850 TwisTorr. The new molecular-drag Technology

Agilent Turbo-V 750 and Turbo-V 850 TwisTorr. The new molecular-drag Technology Agilent Turbo-V 75 and Turbo-V 85 TwisTorr The new molecular-drag Technology The new molecular-drag technology What is TwisTorr 2 Agilent Technologies, presents the new TwisTorr molecular drag technology

More information

Servo solenoid valves with on-board electronics (OBE)

Servo solenoid valves with on-board electronics (OBE) Servo solenoid valves with on-board electronics (OBE) RE 29037/10.05 Replaces: 01.05 1/12 Type 4WRPEH 10 Size 10 Unit series 2X Maximum working pressure P, A, B 315 bar, T 250 bar Nominal flow rate 50...100

More information

Metal tube flowmeters. Series SC250. Metal Tube Flow Meters. Series SC250. Variable area flowmeter for liquids, gases and steam

Metal tube flowmeters. Series SC250. Metal Tube Flow Meters. Series SC250. Variable area flowmeter for liquids, gases and steam Metal tube flowmeters Variable area flowmeter for liquids, gases and steam Metallic or plastic tube with a robust construction Indication by means of magnetic coupling Scales calibrated in l/h, m 3 /h,

More information

MAKING MODERN LIVING POSSIBLE. Solenoid valves, 2/2-way assisted lift operated type EV251B Technical brochure

MAKING MODERN LIVING POSSIBLE. Solenoid valves, 2/2-way assisted lift operated type EV251B Technical brochure MAKING MODERN LIVING POSSIBLE Solenoid valves, 2/2-way assisted lift operated type EV251B 10-22 Technical brochure Technical brochure Solenoid valves 2/2 way assisted lift operated, type EV251B 10-22 Contents

More information

PL1 VALVE WITH UM ELECTRIC ACTUATOR

PL1 VALVE WITH UM ELECTRIC ACTUATOR PL1 VALVE WITH UM ELECTRIC ACTUATOR FEATURES The PL1 butterfly-valves are wafer-style valves intended for current valve applications. This PN10 butterfly-valve of reinforced polypropylene is used to isolate

More information

HiPace 80 with TC 110, DN 40 ISO-KF

HiPace 80 with TC 110, DN 40 ISO-KF HiPace 80 with TC 110, DN 40 ISO-KF HiPace 80 with TC 110, DN 40 ISO-KF Small yet powerful turbopump with a pumping speed of up to 35 l/s for N 2 Integrated TC 110 drive electronics For installation in

More information

Remote Process Actuation Control System AirLINE - Siemens ET 200S

Remote Process Actuation Control System AirLINE - Siemens ET 200S Remote Process Actuation Control System AirLINE - Siemens ET 200S Type 8644 can be combined with... Fully compatible with Siemens ET 200S Combination of Fieldbus, pilot valves and I/O modules High flexibility

More information

System 13. ü ( System 13

System 13. ü  ( System 13 System ü www.nassmagnet.com ( +9 676-0 System The name System stands for a modular system of solenoid coils, armature systems, solenoid operators and solenoid valves. The diameter of the armatures of all

More information

nickel-plated brass - PBT technopolymer HNBR, FKM stainless steel

nickel-plated brass - PBT technopolymer HNBR, FKM stainless steel CATALOGUE > Release 8.7 > Series A solenoid valves Series A directly operated solenoid valves /-way, 3/-way NC and NO. Monostable - bistable (with magnetic memory) Ports M5 - G1/8 - R1/8 - cartridge ø4

More information

Directional Control Valve Series D1VW

Directional Control Valve Series D1VW Characteristics The NG6 directional control valve series D1VW provides high functional limits up to 8 l/min in combination with a very low, energy-saving pressure drop. A wide variety of spool options

More information

HYBRID TURBOMOLECULAR PUMPS ATH SERIES

HYBRID TURBOMOLECULAR PUMPS ATH SERIES HYBRID TURBOMOLECULAR PUMPS ATH SERIES HYBRID TURBOMOLECULAR PUMPS ATH SERIES Introduction Adixen offers the ATH series of hybrid turbomolecular pumps with pumping speeds at 200 and 300 l/s. These models

More information

Pirani Vacuum Gauges. Digital and Analog Vacuum Gauge Systems. Features and Benefits. HPS Products (800) (303)

Pirani Vacuum Gauges. Digital and Analog Vacuum Gauge Systems. Features and Benefits. HPS Products (800) (303) Pirani Vacuum Gauges Digital and Analog Vacuum Gauge Systems Features and Benefits Ideal vacuum gauge for foreline loadlocks Rugged filament design for high reliability Designed for use in harsh process

More information

SHARKY 775 COMPACT ENERGY METER ULTRASONIC

SHARKY 775 COMPACT ENERGY METER ULTRASONIC APPLICATION The ultrasonic compact energy meter can be used for measuring the energy consumption in heating / cooling application for billing purposes. FEATURES 4 Approval for ultrasonic meter with dynamic

More information

Butterfly control & isolation valve with extended control range with Logic interface

Butterfly control & isolation valve with extended control range with Logic interface Butterfly control & isolation valve with extended control range with Logic interface This manual is valid for the valve ordering number(s): 615.. -.. GC -.... (1 sensor input) 615.. -.. GE -.... (2 sensor

More information

Positive displacement batch controller

Positive displacement batch controller 8075 Batch controller Positive displacement batch controller Type 8075 can be combined with... Compact version for DN15 to DN100 Dosing On site calibration by Teach-In Check of input/output signals Total

More information

Proportional pressure reducing valve, pilot operated, with on-board electronics (OBE) and position feedback

Proportional pressure reducing valve, pilot operated, with on-board electronics (OBE) and position feedback Proportional pressure reducing valve, pilot operated, with on-board electronics (OBE) and position feedback Type DREBE6X Nominal size (NG) 6 Unit series 1X Maximum working pressure P 315 bar, T 250 bar

More information

Pendulum valve Series 16

Pendulum valve Series 16 Pendulum valve Series 1 Series 1.2 Main applications pplications requiring a compact design Especially suited to demanding corrosive processes Ordering information Valve with pneumatic actuator single

More information

Pendulum control & isolation valve with extended control range with Logic interface

Pendulum control & isolation valve with extended control range with Logic interface Pendulum control & isolation valve with extended control range with Logic interface This manual is valid for the valve ordering number(s): 651.. -.. GC -.... (1 sensor input) 651.. -.. GE -.... (2 sensor

More information

All-metal gate valve Series 48

All-metal gate valve Series 48 ll-metal gate valve Series For extreme UHV and/or aggressive media Bakeable to 300 C in open and closed position Radiation resistant Maintenance-free up to 000 cycles Opening possible up to 1 bar differential

More information

HiPace 300 with TC 110 and power supply OPS 100, DN 100 ISO-K

HiPace 300 with TC 110 and power supply OPS 100, DN 100 ISO-K HiPace 300 with TC 110 and power supply OPS 100, DN 100 ISO-K HiPace 300 with TC 110 and power supply OPS 100, DN 100 ISO-K Similar Image Rugged, powerful turbopump with a pumping speed of up to 260 l/s

More information

Low voltage AC drives

Low voltage AC drives General machinery drives Main features and dimensions Unique features Fast and extensive I/O PID control Application macros Many installation possibilities 200 to 480 V, 1-phase or 3-phase More value for

More information

CONTINENTAL HYDRAULICS VED03MX

CONTINENTAL HYDRAULICS VED03MX CONTINENTAL HYDRAULICS VED03MX HIGH PERFORMANCE, SERVO-PROPORTIONAL DIRECTIONAL CONTROL VALVE 5505 WEST 123RD STREET SAVAGE, MN 55378-1299 / PH: 952.895.6400 / WWW.CONTINENTALHYDRAULICS.COM VED03MX HIGH

More information

4/3 proportional directional control valve, without position control, with on-board electronics (OBE)

4/3 proportional directional control valve, without position control, with on-board electronics (OBE) 4/3 proportional directional control valve, without position control, with on-board electronics (OBE) Type 4WRBAE..E.. /..W.. Nominal size (NG) 6, 10 Unit series 2X Maximum working pressure P, A, B 315

More information

4/3 directional control valve, pilot operated, with electric position feedback and integrated electronics (OBE)

4/3 directional control valve, pilot operated, with electric position feedback and integrated electronics (OBE) 4/ directional control valve, pilot operated, with electric position feedback and integrated electronics (OBE) RE 977/.1 Replaces: 1.9 1/16 Type 4WRVE 1...7, symbols V, V1 Sizes 1, 16, 5, 7 Component series

More information

JUMO DELOS SI. Precision pressure transmitter with switching contacts and display. Application. Brief description. Key features.

JUMO DELOS SI. Precision pressure transmitter with switching contacts and display. Application. Brief description. Key features. Data sheet 405052 Page 1/10 JUMO DELOS SI Precision pressure transmitter with switching contacts and display Application Food & pharma CIP/SIP systems Machine and system construction Air conditioning and

More information

Pilot operated proportional directional valves

Pilot operated proportional directional valves /6 Pilot operated proportional directional valves 6. Type WRLE Sizes to 7 Up to 5 bar Up to L/min Contents Function and configuration Symbols Specifications Technical data -5 Electrical connection Technical

More information

Series PD directly operated solenoid valves

Series PD directly operated solenoid valves > Series PD solenoid valves CATALOGUE > Release 8.8 Series PD directly operated solenoid valves /-way - Normally Closed (NC) Please note that all Series PD solenoid valves are supplied with direct current

More information