Venting valves. Valves. Manually actuated. Venting valves. Installation elements

Transcription

1 Installation elements Venting Manually actuated Venting For manually venting small vacuum chambers Valve opens and closes easily by loosening/ tightening the screw cap FVB = Venting valve HA = Manually actuated, aluminum housing HX = Manually actuated, stainless steel housing Dimensions

2 Technical data FVB 010 HA FVB 010 HX Flange (in) DN 10 ISO-KF DN 10 ISO-KF Bakeout temperature 80 C 120 C Venting time for 50 l volume 14 s 14 s Tightness mbar l/s mbar l/s Seal FPM FPM Pressure max. 1 bar 1 bar Pressure min mbar mbar Housing Aluminum Stainless steel Weight 0.1 kg 0.15 kg Screw cap Brass Brass Valve plate Aluminum Stainless steel Order number Venting PF I PF I

3 Installation elements Pressure relief Pressure relief valve Pressure relief Pressure relief valve Housing material: Stainless steel Response pressure: 1.2 to 1.5 bar AVA = Pressure relief valve X = Stainless steel housing Dimensions

4 Technical data AVA 016 X Flange (in) DN 16 ISO-KF Flange (out) G 1/8" Tightness mbar l/s Seal FPM Differential pressure max. 0.5 bar Differential pressure min. 0.2 bar Flow rate max. 6 l/min Material Housing, stainless steel Order number Pressure relief valve PF I

5 Installation elements Gas dosing Coarse gas dosing valve Gas dosing For slow, manual venting Dimensions 32 DN 10 ISO-KF Hub 5.5 DN 10 ISO-KF Characteristic Skalenteile [1 Umdrehung = 12 Skalenteile ] Gasfluss [mbar l/s]

6 Technical data EVD 010 H Flange (in) DN 10 ISO-KF Flange (out) DN 10 ISO-KF Bakeout temperature 100 C Tightness mbar l/s Seal FPM Pressure max. 4 bar Gas flow max. controllable mbar l/s Gas flow min. controllable 40 mbar l/s Housing Aluminum Weight 0.2 kg Order number Gas dosing PF I

7 Installation elements Gas dosing Gas dosing/shut-off valve Gas dosing Very broad regulating range Optimum characteristic Digital position display Excellent reproducibility Extremely small dead volume Integrated shut-off valve Dimensions DN 16 ISO-KF 30 DN 16 ISO-KF 30 Characteristic

8 Technical data EVN 116 Flange (in) DN 16 ISO-KF Flange (out) DN 16 ISO-KF Bakeout temperature: flanges 150 C Tightness mbar l/s Seal FPM Differential pressure 2.5 bar Dosing sleeve Fluorplastomer Gas flow max. controllable mbar l/s Gas flow min. controllable mbar l/s Housing/needle/filter Stainless steel Weight 0.4 kg Temperature: Operating 80 ºC Dead volume cm 3 Order number Gas dosing PF I

9 Overview gas dosing systems upstream regulation downstream regulation for low gas flows Regulation valve Control RME 005 A RVC 300 or EVR 116 RVC 300 or IF 200 PC PLC Example: ActiveLine Gauges process chamber CMR 362 PKR 251 TPR

10 Installation elements Gas dosing Regulating valve EVR 116 Gas dosing High gas throughput Very broad regulating range Resistant to corrosive gases - materials: Stainless steel / FPM With integrated motor control electronics Dimensions DN 16 ISO-KF Characteristic Gasflow [mbar l/s] U STG [V]

11 Technical data EVR 116 Flange (in) DN 16 ISO-KF Flange (out) DN 16 ISO-KF Control RVC 300 or IF 200 Bakeout temperature: actuator 60 C Bakeout temperature: housing 80 C Tightness mbar l/s Seal FPM Dosing sleeve Fluorplastomer Pressure max. 2.5 bar Pressure min mbar Gas flow max. controllable mbar l/s Gas flow min. controllable mbar l/s Housing/needle/filter Stainless steel Weight 0.5 kg Control voltage 0-10 V DC Closing / opening time < 3 / 4 s Ambient temperature 5-40 ºC Supply: Voltage 24 V DC Supply: Power consumption max. 12 VA Order number Gas dosing PF I Accessories RVC-EVR, connection cable, 3 m PT T RVC-EVR, connection cable, 5 m PT T RVC-EVR, connection cable, 10 m PT T RVC-EVR, connection cable, 15 m PT T RVC-EVR, connection cable, 20 m PT T

12 Installation elements Gas dosing Regulating valve RME 005 A Gas dosing Regulating range from to 85 mbar l /s Including connector Drive: Solenoid RME = Gas dosing system regulating valve Dimensions M (17) 8 33 AF 17 Characteristic Gas flow [sccm] Control valve open Control valve closed Current (solenoid coil) [ma]

13 Technical data RME 005 A Flange (in) DN 5 mm M14x1 Flange (out) DN 5 mm M14x1 Response time < 30 ms Control RVC 300 Bakeout temperature: actuator, powerless 80 C Tightness mbar l/s Seal FPM Pressure max. 2 bar Pressure min mbar Mounting orientation any, preferably perpendicular Duty cycle (ED) 100 % Housing Stainless steel Weight 96 g Control voltage 0-24 V DC Ambient temperature 5-50 ºC Supply: Power consumption max. 2.5 W RME 005 A Gas flow max. controllable 85 mbar l/s Gas flow min. controllable 0.85 mbar l/s Order number PF I Gas flow max. controllable 17 mbar l/s Gas flow min. controllable 0.17 mbar l/s Order number PF I Gas flow max. controllable 8.5 mbar l/s Gas flow min. controllable mbar l/s Order number PF I Gas flow max. controllable 1.7 mbar l/s Gas flow min. controllable mbar l/s Order number PF I Gas flow max. controllable 0,8 mbar l/s Gas flow min. controllable mbar l/s Order number PF I Gas flow max. controllable 0.17 mbar l/s Gas flow min. controllable mbar l/s Order number PF I Accessories Connection, for ¼" tube O.D. PT T Connection, for 6 mm tube O.D. PT T RVC RME 005, connection cable, 3 m PT T RVC RME 005, connection cable, 5 m PT T RVC RME 005, connection cable, 10 m PT T RVC RME 005, connection cable, 15 m PT T RVC RME 005, connection cable, 20 m PT T RVC RME 005, connection cable, 25 m PT T Connection, DN 10 ISO-KF PT T

14 command edit Installation elements Gas dosing RVC 300, gas dosing system control unit Gas dosing RVC 300 as a complete solution, with EVR 116 or RME 005 A regulating Simple operation Self-explanatory LCD display and function keys Analog/digital inputs/outputs and interfaces Settable PID regulating algorithm For system manufacturers, as a supplement to their own control unit Dimensions RVC Up-stream control Down-stream control Gas EVR 116 control valve M Vacuum system Campact gauge Vacuum system Campact gauge Vacuum pump EVR 116 control valve M RVC 300 controller RVC 300 controller Vacuum pump

15 Technical data RVC 300 Output: Analog 4 channels: Pressure sensor signal/ valve signal (0-10 VDC)/ valve position EVR 116/ + 10 VDC reference voltage (10 ma) Output: Digital 8 channels: Valve closed/ valve open/ valve in position/ valve error/ sensor error/ ready/ emission ON/ sensor status Input: Analog 2 channels: Pressure setpoint (nominal value)/ flow setpoint (nominal value) Input: Digital 8 channels: Flow decrease/ flow increase/ external CLOSE/ external OPEN/ flow mode/ pressure mode/ emission ON/ Degas ON Weight 1.65 kg Mains requirement: frequency (range) 50/60 Hz Mains requirement: power consumption 50 VA Mains requirement: voltage (range) V APR 250/260: mbar CMR 361/271: mbar TPR 280: mbar TPR 281: mbar CMR 362/272: mbar CMR 363/273: mbar CMR 364/274: mbar CMR 275: mbar IKR 251/261: mbar IMR 265: mbar PBR 260: mbar PKR 251/261: mbar Interface: Baud rates 9600 Baud Interface: Type RS-232, RS-485 Temperature: Operating C Temperature: Storage C Order number Gas dosing PF I Accessories RVC RME 005, connection cable, 3 m PT T RVC RME 005, connection cable, 5 m PT T RVC RME 005, connection cable, 10 m PT T RVC RME 005, connection cable, 15 m PT T RVC RME 005, connection cable, 20 m PT T RVC-EVR, connection cable, 3 m PT T RVC-EVR, connection cable, 5 m PT T RVC-EVR, connection cable, 10 m PT T RVC-EVR, connection cable, 15 m PT T RVC-EVR, connection cable, 20 m PT T RME 005 A, regulating range from PF I to 0.17 mbar l/s RME 005 A, regulating range from PF I to 0.8 mbar l/s RME 005 A, regulating range from PF I to 1.7 mbar l/s RME 005 A, regulating range from PF I to 8.5 mbar l/s RME 005 A, regulating range from PF I to 17mbar l/s RME 005 A, regulating range from PF I to 85 mbar l/s EVR 116, regulating valve PF I

16 Installation elements Gas dosing IF 200, gas dosing system interface Gas dosing Simple, cost-effective integration into systems Pressure measurement signal must be prepared by the customer s system control unit For system manufacturers who use their own control unit Dimensions Gas Down-stream control EVR 116 control valve Vacuum system M Campact gauge IF 200 Gas IF 200 EVR 116 control valve M Up-stream control Vacuum system Vacuum pump Campact gauge Vacuum pump PC PC

17 Technical data IF 200 Connection Terminals Fixation Mounting rail Weight 40 g Interface RS-232-C Supply 0.5 A Supply: Voltage 24 V DC Order number Gas dosing PF I Accessories EVR 116, regulating valve PF I

18 Installation elements All-metal gas dosing / -systems All-metal gas dosing valve All-metal gas dosing / -systems Minimum dead volume Operating temperature up to 200 C For mass spectrometer applications Specific routing of gas stream when a capillary (accessory) is used UDV = All-metal regulating valve Dimensions 46 Cajon VCR 1/4" DN 40 CF-F M

19 Technical data UDV 040 UDV 046 Flange (in) VCR 1/4" DN 16 CF-R Flange (out) DN 40 CF-F DN 40 CF-F Actuator manual manual Tightness mbar l/s mbar l/s Pressure max. 30 bar 30 bar Pressure min mbar mbar Gas flow max mbar l/s mbar l/s Flow rate min. for: air mbar l/s mbar l/s Flow rate min. for: pure gases mbar l/s mbar l/s Housing Stainless steel Stainless steel Weight 1.4 kg 1.4 kg Conductance for laminar flow 0.7 l/s 0.7 l/s Temperature: Bakeout 450 C 350 C Temperature: Operating 200 ºC 200 ºC Valve seat Copper Copper Valve plate Sapphire Sapphire Order number All-metal gas dosing valve PF I PF I Accessories Complete capillary, vacuum side, length 1 m PT T PT T Complete capillary, inlet side, length 2 m PT T PT T Heater, 200 C PT T PT T

20 Installation elements All-metal gas dosing / -systems All-metal regulating valve All-metal gas dosing / -systems Minimum dead volume Operating temperature up to 200 C For mass spectrometer applications Specific routing of gas stream when a capillary (accessory) is used Dimensions 46 DN 16 CF-R DN 40 CF-F M

21 Technical data UDV 146 Flange (in) DN 16 CF-R Flange (out) DN 40 CF-F Actuator manual/ thermomechanic Tightness mbar l/s Pressure max. 30 bar Pressure min mbar Gas flow max mbar l/s Flow rate min. for: air mbar l/s Flow rate min. for: pure gases mbar l/s Housing Stainless steel Weight 1.4 kg Conductance for molecular flow 0.7 l/s Temperature: Bakeout 350 C Temperature: Operating 200 ºC Valve seat Copper Valve plate Sapphire Order number All-metal gas dosing valve PF I Accessories Complete capillary, vacuum side, length 1 m PT T Complete capillary, inlet side, length 2 m PT T Heater, 200 C PT T RVG 050 C, control unit all-metal gas dosing system, PF I /230 V

22 A Installation elements All-metal gas dosing / -systems Control unit RVG 050 C for UDV 146 All-metal gas dosing / -systems For creating a control section in conjunction with UHV gas dosing valve UDV 146 Dimensions Characteristic

23 Technical data RVG 050 C Output for valve heater: Voltage 20 V DC Output for valve heater: Current 0.5 A Weight 2.3 kg Actual value input: Analog voltage 10 V DC Actual value input: Impedance 100 kohm Power consumption 20 VA Mains requirement: voltage (selectable) 115/230 V AC for 1 bar N 2, inlet side mbar l/s Control characteristic (proportional-integral) PI Set point input: External 10 V DC Set point input: Impedance 100 kohm Set point input: Internal (scale division) Ambient temperature 5-50 ºC Time contant, adjustable 2-30 s Order number All-metal gas dosing valve PF I Accessories UDV 146, all-metal regulating valve, DN 16 CF-F PF I RVG-UDV, extension cable, 2 m, 200 ºC PT T RVG-UDV, connection cable, 3 m, 80 ºC PT T RVG-UDV, connection cable, 12 m, 80ºC PT T